CN106989681A - The dimension measurement method and measuring apparatus of a kind of via - Google Patents
The dimension measurement method and measuring apparatus of a kind of via Download PDFInfo
- Publication number
- CN106989681A CN106989681A CN201710224129.4A CN201710224129A CN106989681A CN 106989681 A CN106989681 A CN 106989681A CN 201710224129 A CN201710224129 A CN 201710224129A CN 106989681 A CN106989681 A CN 106989681A
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- Prior art keywords
- reference points
- intermediate reference
- crest
- change curve
- image
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of dimension measurement method of via and measuring apparatus, this method includes：Obtain via and its image of neighboring area；One image-capture frame is set in the picture；Change curve is drawn according to the GTG of the pixel of image along preset direction；Intermediate reference points are set in change curve；Meet the crest of preparatory condition to two-sided search respectively using the intermediate reference points as starting point on change curve；The distance between crest according to the intermediate reference points both sides calculates size of the via along preset direction.By the above-mentioned means, the present invention can find corresponding crest, the diameter of via is accurately measured.
Description
Technical field
The present invention relates to display panel field, the dimension measurement method and measuring apparatus of more particularly to a kind of via.
Background technology
Color-filter on Array (COA) technology is the collection for integrating colored filter and array base palte
Into technology.Chromatic photoresist is coated on completed array base palte and forms chromatic filter layer, conventional color filter can be improved
The problem of mating plate aperture opening ratio is low.The technical requirements monitor via diameter in panel in processing procedure, when measuring via diameter, pole
It is vulnerable to interference, it is difficult to find via edges accurately.
Prior art can only recognize crest order from top to bottom in crawl frame region, using n-th crest as boundary value, by
Easily there are many crests in via edges, cause boundary value crawl not fixed, cause measurement error.
The content of the invention
The present invention solves the technical problem of a kind of dimension measurement method of via is provided, it can accurately measure
The diameter in hole.
In order to solve the above technical problems, one aspect of the present invention is：A kind of dimensional measurement of via is provided
Method, including：Obtain the via and its image of neighboring area；One image-capture frame is set in described image；Edge is default
Direction change curve is drawn according to the GTG of the pixel of described image；Intermediate reference points are set in the change curve；Institute
State the crest for meeting preparatory condition on change curve to two-sided search respectively using the intermediate reference points as starting point；In described
Between the distance between the crests of datum mark both sides calculate size of the via along the preset direction.
In order to solve the above technical problems, another technical solution used in the present invention is：The size for providing a kind of via is surveyed
Equipment is measured, including：Imaging device, the image for shooting the via and its neighboring area；Memory, for storing default journey
Sequence；Processor, for performing following steps by running the pre-set programs：Obtain the via and its figure of neighboring area
Picture；One image-capture frame is set in described image；Change song is drawn according to the GTG of the pixel of described image along preset direction
Line；Intermediate reference points are set in the change curve；Distinguish on the change curve by starting point of the intermediate reference points
The crest of preparatory condition is met to two-sided search；The distance between described crest according to the intermediate reference points both sides calculates institute
State size of the via along the preset direction.
The beneficial effects of the invention are as follows：Be different from prior art often occur boundary value crawl do not fix, cause measurement miss
The situation of difference, the present invention finds two crests nearest from datum mark by setting the datum mark on change curve, and crest
Peak value is greater than threshold value, it is ensured that the border of crawl is the border of via, just can accurately measure the diameter of via.
Brief description of the drawings
Fig. 1 is the flow chart of the dimension measurement method embodiment of via of the present invention；
Fig. 2 is the schematic diagram of the dimension measuring apparatus embodiment of via of the present invention；
Fig. 3 is the schematic diagram for the image procossing that the present invention sets intermediate reference points with the geometric center of image-capture frame；
Fig. 4 is the schematic diagram for the image procossing that the present invention sets intermediate reference points with the geometric center of via.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
Referring to Fig. 1, Fig. 1 is the dimension measuring apparatus of via of the present invention.As shown in Fig. 2 the dimension measuring apparatus of via
Including imaging device 10, processor 20, holder 30.Processor 20 is connected to imaging device 10 and holder 30.Imaging device
10 are used to obtain via to be measured and its image of neighboring area, and processor 20 is used to control imaging device 10 to obtain image, simultaneously
The image that imaging device 10 is obtained is analyzed, the diameter dimension of via is measured by analysis.Holder 30 is used to store
Pre-set programs, the pre-set programs that processor 20 is stored in holder 30 by calling complete whole measurement work.
Fig. 1 and Fig. 2 are please referred to, Fig. 2 is the flow chart of the dimension measurement method embodiment of via of the present invention.
The dimension measurement method of via of the present invention comprises the following steps：
S101：Obtain the via and its image of neighboring area.
Specifically, imaging device 10 is taken pictures under the control of processor 20 to via and its neighboring area, is taken pictures
When should be noted the center for allowing via to be in photo, be required for reserving sufficient space around via, so as to subsequent analysis photo
When have enough sample spaces.
S102：One image-capture frame is set in described image.
Specifically, the image that imaging device 10 is photographed is analyzed by processor 20, sets one in the picture first
Image-capture frame, image-capture frame position is set by tester, should be noted the edge for causing image-capture frame as far as possible by via
Include.
S103：Change curve is drawn according to the GTG of the pixel of described image along preset direction.
Specifically, preset direction is the vertical direction of image, and the foundation for drawing curve is the gray scale on the adjacent both sides of image
Image averaging, in one embodiment, can be divided into some deciles by difference, be drawn according to the difference between two adjacent deciles
Curve.If gray value differences are away from peak of curve height that is big, drawing out between two adjacent deciles；If grey between two adjacent deciles
Angle value gap is small, then the peak of curve drawn out is low.
S104：Intermediate reference points are set in the change curve.
Specifically, in one embodiment, set according to the geometric center of the crawl frame set on the image photographed
The intermediate reference points, the geometric center of crawl frame and the intermediate reference points of curve are in the same horizontal line.
In another embodiment, the location and shape of via are identified in described image, according to the several of the via
What centrally disposed intermediate reference points, the geometric center of via and the intermediate reference points of curve are in the same horizontal line.
S105：On the change curve preparatory condition is met using the intermediate reference points as starting point to two-sided search respectively
Crest.
Specifically, it is starting point respectively to two-sided search up and down near the intermediate reference points using the intermediate reference points
Crest, while in order to ensure the crest that the crest that finds is via both sides of the edge position, the peak value of the crest found is more than
Predetermined threshold value.
Because the thickness around via is inconsistent, cause on the image shot, the color around via is also inconsistent,
And shape is not fixed, therefore the place that these colors differ can be run a curve in processor 20, so in intermediate reference points
Both sides can have several crests, find via both sides of the edge position crest during, can be by these small crests
Influence, it is possible to find the crest of mistake, so as to obtain the result of mistake, causes erroneous judgement.Because color and the face of via area
The color of plate has a long way to go, so the peak value of the crest of via both sides of the edge position also can be very big.The threshold value of one crest is set,
The ELIMINATION OF ITS INTERFERENCE that some shades of via surrounding are caused can be fallen, it is ensured that the accuracy of the crest found.
S106:The distance between described crest according to the intermediate reference points both sides, which is calculated, presets side described in the via
To size.
Specifically, near intermediate reference points both sides and peak value to be more than the distance between crest of threshold value be via
Diameter.Be not in larger crest in the range of via diameter because via intermediate colors are consistent,
And peak value less crest exclusive PCR can be omitted when finding crest, so near intermediate reference points both sides and peak value be more than
The crest of threshold value is located in the both sides summit of via, so the distance between the two crests are exactly the diameter of via.
By foregoing description, the embodiment of the present invention is bent in change by setting intermediate reference points in change curve
Meet the crest of preparatory condition on line to two-sided search respectively using intermediate reference points as starting point, the distance between two crests are
The diameter of via, it is possible to prevente effectively from during crest is found, by via surrounding caused by thickness is different it is many
The interference of individual crest, finds the crest of via both sides of the edge position, draws the right value of via diameter.
Referring to Fig. 3, Fig. 3 is the image procossing that the present invention sets intermediate reference points with the geometric center of image-capture frame
Schematic diagram.As shown in figure 3, via 50 to be measured the via of diameter for this, 51,52,53 be via surrounding respectively due to film
The shade that the color that thickness ununiformity is caused differs, curve 10 is the change curve according to Image Rendering, is had on curve 10 because mistake
Aberration between hole 50 and shade 51,52,53 and the crest 11,12,13,14,15,16,17,18 drawn out.In the present embodiment
In, correspondence position point of the geometric center point 32 of frame 60 on curve 10 will be captured and be used as the center reference point 31 for curve 10.
It is cavity in the middle of via 50, so being not in the straight line in the middle of other colors, therefore crest 14 and 15 in theory
It just correspond to the region of via 50.Therefore nearest two crests 14 and 15 of distance center datum mark 32 correspond to the upper of via 50
Lower edge, can be because the region emptied in via 50 and peripheric surface as the peak value of the crest of the lower edges of correspondence via 50
The aberration of plate is larger and higher, thus during in order to avoid taking pictures the surrounding of via 50 the aberration meeting caused because thickness is different
Some small crests are caused, the peak value of crest 14 and 15 should also exceed threshold value set in advance.When calculating the diameter of via 50,
Calculate the pixel quantity that is spaced of crest 14,15, and further combine the imaging characteristic of imaging device 10, such as focal length, point
The parameters such as resolution, which can convert, obtains the diameter of via 50.
By foregoing description, this hair embodiment on change curve by setting the geometric center point phase with capturing frame
Datum mark centered on corresponding points, the crest of preparatory condition, two ripples are met using center reference point as starting point to two-sided search respectively
The distance between peak is the diameter of via.It is possible to prevente effectively from the interference of the multiple crests of via surrounding, finds correct crest.
Referring to Fig. 4, Fig. 4 is the signal for the image procossing that the present invention sets intermediate reference points with the geometric center of via
Figure.As shown in figure 4, via 50 to be measured the via of diameter for this, 51,52,53 be respectively via surrounding due to thickness not
The shade that the color caused differs, curve 20 is the change curve according to Image Rendering, is had on curve 20 because via 50
Aberration between shade 51,52,53 and the crest 21,22,23,24,25,26,27,28 drawn out, in the present embodiment, will
Correspondence position point of the geometric center point 42 of via 50 on curve 20 is used as the center reference point 41 for curve 20.
Because it is artificial set location to capture frame, it is possible to which the state shown in Fig. 4 occurs, crawl frame 60 position is inclined
Move more, the geometric center point 32 of crawl frame 60 is located at whole image top half, if with geometric center point 32 in curve 20
On correspondence position point 33 as the center reference point of curve 20, thus the crest 23,24 found and incorrect selection calculate
The diameter of via 50 be also improper value.
Therefore the present embodiment directly so may insure the geometry of via 50 using the geometric center point 42 for identifying via 50
I.e. correspondence position point center reference point 41 of the central point 42 on curve 20 must be positioned at the upper following of correspondence via 50
It is in other words that the starting point qualified crest that is searched out to both sides is exactly correspondingly with center reference point 41 between the crest of edge
The crest of the lower edges in hole 50.
By foregoing description, the present invention on change curve by setting point corresponding with the geometric center point of via
It is used as center reference point, it is to avoid due to error caused by crawl frame position deviation, can accurately find correct crest, so that
Calculate the right value of via diameter.
Crest order can only be recognized from top to bottom by being different from prior art, using n-th crest as boundary value, so can be by
The interference of crest caused by the aberration caused to via surrounding because thickness is different, causes measurement error.The present invention passes through
Intermediate reference points are set on change curve, using intermediate reference points as starting point, respectively to two-sided search apart from intermediate reference points most
Near and peak value is more than the crest of threshold value, and the distance between the both sides crest found is the diameter of via.So can be effective
The interference of the crest caused by the aberration that via surrounding thickness difference is caused is avoided, correct crest is found, calculates
The correct diameter of via.
Embodiments of the present invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this
Equivalent structure or equivalent flow conversion that description of the invention and accompanying drawing content are made, or directly or indirectly it is used in other correlations
Technical field, is included within the scope of the present invention.
Claims (10)
1. a kind of dimension measurement method of via, it is characterised in that including：
Obtain the via and its image of neighboring area；
One image-capture frame is set in described image；
Change curve is drawn according to the GTG of the pixel of described image along preset direction；
Intermediate reference points are set in the change curve；
Meet the crest of preparatory condition to two-sided search respectively using the intermediate reference points as starting point on the change curve；
The distance between described crest according to the intermediate reference points both sides calculates chi of the via along the preset direction
It is very little.
2. according to the method described in claim 1, it is characterised in that described that intermediate reference points are set in the change curve
Step includes：
The intermediate reference points are set according to the geometric center that described image captures frame.
3. according to the method described in claim 1, it is characterised in that described that intermediate reference points are set in the change curve
Step includes：
The via is identified in described image；
The intermediate reference points are set according to the geometric center of the via.
4. according to the method described in claim 1, it is characterised in that it is described on the change curve with the intermediate reference points
The step of crest for meeting preparatory condition to two-sided search respectively for starting point, includes：
It is starting point respectively to two-sided search near the crest of the intermediate reference points using the intermediate reference points.
5. method according to claim 4, it is characterised in that the peak value of the crest is more than predetermined threshold value.
6. the method according to claim any one of 1-5, it is characterised in that the via is to be formed on display panel
Via in face.
7. a kind of dimension measuring apparatus of via, it is characterised in that including：
Imaging device, the image for shooting the via and its neighboring area；
Memory, for storing pre-set programs；
Processor, for performing following steps by running the pre-set programs：
Obtain the via and its image of neighboring area；
One image-capture frame is set in described image；
Change curve is drawn according to the GTG of the pixel of described image along preset direction；
Intermediate reference points are set in the change curve；
Meet the crest of preparatory condition to two-sided search respectively using the intermediate reference points as starting point on the change curve；
The distance between described crest according to the intermediate reference points both sides calculates chi of the via along the preset direction
It is very little.
8. equipment according to claim 7, it is characterised in that described that intermediate reference points are set in the change curve
Step includes：
The intermediate reference points are set according to the geometric center that described image captures frame.
9. equipment according to claim 7, it is characterised in that described that intermediate reference points are set in the change curve
Step includes：
The via is identified in described image；
The intermediate reference points are set according to the geometric center of the via.
10. equipment according to claim 7, it is characterised in that it is described on the change curve with the middle benchmark
The step of point meets the crest of preparatory condition to two-sided search respectively for starting point includes：
It is that starting point is more than default threshold to two-sided search near the intermediate reference points and peak value respectively using the intermediate reference points
The crest of value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710224129.4A CN106989681A (en) | 2017-04-07 | 2017-04-07 | The dimension measurement method and measuring apparatus of a kind of via |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710224129.4A CN106989681A (en) | 2017-04-07 | 2017-04-07 | The dimension measurement method and measuring apparatus of a kind of via |
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| CN106989681A true CN106989681A (en) | 2017-07-28 |
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| CN201710224129.4A Pending CN106989681A (en) | 2017-04-07 | 2017-04-07 | The dimension measurement method and measuring apparatus of a kind of via |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108426520A (en) * | 2018-05-15 | 2018-08-21 | 天津大学 | The detection device in pipeline stolen hole and the detection method at stolen hole center, diameter |
| CN108663432A (en) * | 2018-05-15 | 2018-10-16 | 天津大学 | Device for detecting tiny defects of pipeline and method for detecting centers and diameters of defects |
| CN108717246A (en) * | 2018-05-16 | 2018-10-30 | 深圳市华星光电技术有限公司 | COA types array substrate and the method for measuring via size in color blocking layer |
| CN113029014A (en) * | 2019-12-25 | 2021-06-25 | 隆基绿能科技股份有限公司 | Method and device for detecting diameter of single crystal silicon rod |
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| CN104732207A (en) * | 2015-03-12 | 2015-06-24 | 广东工业大学 | High-precision and high anti-interference positioning method and device for Mark point of PCB |
| CN105783712A (en) * | 2014-12-26 | 2016-07-20 | 北京中电科电子装备有限公司 | Method and device used for detecting knife mark |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2006200972A (en) * | 2005-01-19 | 2006-08-03 | Tokyo Seimitsu Co Ltd | Image defect inspection method, image defect inspection device, and external appearance inspection device |
| CN104390895A (en) * | 2014-11-25 | 2015-03-04 | 中国科学技术大学 | Microimaging-based method for measuring particle size by utilizing image gray scale |
| CN105783712A (en) * | 2014-12-26 | 2016-07-20 | 北京中电科电子装备有限公司 | Method and device used for detecting knife mark |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108426520A (en) * | 2018-05-15 | 2018-08-21 | 天津大学 | The detection device in pipeline stolen hole and the detection method at stolen hole center, diameter |
| CN108663432A (en) * | 2018-05-15 | 2018-10-16 | 天津大学 | Device for detecting tiny defects of pipeline and method for detecting centers and diameters of defects |
| CN108717246A (en) * | 2018-05-16 | 2018-10-30 | 深圳市华星光电技术有限公司 | COA types array substrate and the method for measuring via size in color blocking layer |
| CN108717246B (en) * | 2018-05-16 | 2020-09-01 | 深圳市华星光电技术有限公司 | COA type array substrate and method for measuring size of through hole in color resistance layer |
| CN113029014A (en) * | 2019-12-25 | 2021-06-25 | 隆基绿能科技股份有限公司 | Method and device for detecting diameter of single crystal silicon rod |
| CN113029014B (en) * | 2019-12-25 | 2023-03-31 | 隆基绿能科技股份有限公司 | Method and device for detecting diameter of single crystal silicon rod |
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Application publication date: 20170728 |