CN106979954A - A kind of fault detection method of silica crucible green compact - Google Patents
A kind of fault detection method of silica crucible green compact Download PDFInfo
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- CN106979954A CN106979954A CN201610027797.3A CN201610027797A CN106979954A CN 106979954 A CN106979954 A CN 106979954A CN 201610027797 A CN201610027797 A CN 201610027797A CN 106979954 A CN106979954 A CN 106979954A
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- Prior art keywords
- green compact
- silica crucible
- crucible green
- detection method
- fault detection
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 143
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 59
- 238000001514 detection method Methods 0.000 title claims abstract description 45
- 239000007788 liquid Substances 0.000 claims abstract description 20
- 230000007547 defect Effects 0.000 claims abstract description 19
- 238000007689 inspection Methods 0.000 claims abstract description 14
- 230000000007 visual effect Effects 0.000 claims abstract description 6
- 208000037656 Respiratory Sounds Diseases 0.000 claims description 33
- 239000000428 dust Substances 0.000 claims description 31
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 24
- 229910052799 carbon Inorganic materials 0.000 claims description 23
- 239000002002 slurry Substances 0.000 claims description 21
- 239000006004 Quartz sand Substances 0.000 claims description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 238000010276 construction Methods 0.000 claims description 7
- 238000005498 polishing Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 239000010453 quartz Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 16
- 239000000243 solution Substances 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 9
- 238000012360 testing method Methods 0.000 description 7
- 229920005591 polysilicon Polymers 0.000 description 5
- 239000000047 product Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000007711 solidification Methods 0.000 description 3
- 230000008023 solidification Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 206010061619 Deformity Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011505 plaster Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000007569 slipcasting Methods 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/91—Investigating the presence of flaws or contamination using penetration of dyes, e.g. fluorescent ink
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8803—Visual inspection
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention discloses a kind of fault detection method of silica crucible green compact, dried square quartz crucible green compact are positioned on verifying bench, under ordinary light conditions, first pass through visual means and check whether crucible surfaces externally and internally there are the open defects such as bubble, color spot, foreign matter, crack detection liquid is used again, brush in the region for needing to examine, to find out crack defect.Crack detection rate can be improved compared to the routine inspection mode present invention, shortens and examines the activity duration, operating efficiency is improved, production cost is reduced.
Description
Technical field
The present invention relates to a kind of square silica crucible quality detecting method, more particularly to a kind of silica crucible
The fault detection method of green compact.
Background technology
Silica crucible is the container for producing polycrystalline silicon ingot casting, is that polycrystalline is removed in polysilicon production process
The maximum running stores of the outer consumption of silicon raw material.Its production technology difficulty is big, material purity requires high, made
It is harsh with environment, disposable at a high temperature of 1550 DEG C continuously to work more than 50 hours, be polysilicon
Irreplaceable crucial consumable material in production process.In addition, in face of high-purity polycrystalline silicon raw material for not
The situation that should be asked, the melting that many countries have all carried out polycrystalline silicon raw material according to polycrystalline silicon ingot casting principle is carried
Pure work, silica crucible has also played the effect of no less important wherein.Therefore, it is with polysilicon light
Volt industry has the inseparable, relation of interdependence.As the production Technology of silica crucible,
It is general to have injection forming and two kinds of solidification forming of note.Slip-casting shaping process is the traditional forming technique of quartz,
I.e. the high-performance quartz ceramic mud modulated, injection forming obtains product, state granddad in plaster mold
Department typically uses the technique.Casting molding technique be added in quartz-ceramics mud a kind of organic monomer,
Directly solidification obtains product after being molded in non-punch die.Two kinds of technologies respectively have feature, injection forming production
Product density is slightly higher, wearability is good, is adapted to roll, the square solid product of manufacture simple shape, note
Solidification forming product gas porosity is slightly higher, thermal shock resistance more preferable, is adapted to the complex-shaped thin wall shape of manufacture empty
Core product.Square silica crucible is to need to bear 1400 DEG C -1550 DEG C of height in polysilicon melting process
The pressure of temperature and polysilicon solution, therefore have higher requirement to the heat endurance and intensity of crucible.
Square silica crucible generally has an individual green compact inspection process after green compact drying, main purpose be
Segmental defect is timely found under green state, and makes qualified accordingly, repairs and scraps judgement,
Avoid defective crucible from flowing into the processes such as follow-up sintering, cause the waste of resources costs.Due to square
Silica crucible green compact quality is loose, it is impossible to individually detect crackle using strong light.In the inspection party of crackle
In method, row developer commonly used in the trade is Isoparl isoparaffins, while coordinating 500~1000 watts of iodine
It is longer to find to take in crackle, operation that tungsten lamp irradiates crucible Examination region, and strong illumination is to making
The eye health of industry person is also adversely affected.
The content of the invention
, can be general it is an object of the invention to provide a kind of fault detection method of silica crucible green compact
Under the conditions of logical lamp shines, crackle can be accurately found, it is simple and quick, it is more efficient.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of fault detection method of silica crucible green compact, comprises the following steps:
(1) take dried square silica crucible green compact standby;
(2) open defect is detected:The dried square silica crucible green compact of step (1) are placed on inspection
On platform, under the conditions of ordinary lamps photograph, square shaped silica crucible green compact carry out polishing finishing, are blown with air gun
Dirt is clean, checks whether square silica crucible green compact surfaces externally and internally has open defect with visual means;
(3) fault of construction is detected:By carbon dust solution according to 1:10-20 part by weight is obtained after being mixed with pure water
Crack detection liquid, is uniformly brushed crack detection liquid on square silica crucible green compact by hairbrush
Surface, is spontaneously dried after 20-60s, using the inner surface brush of the clean square silica crucible green compact of hairbrush
One time, if occurring the crackle shape pattern of black on the inner surface of square silica crucible green compact, show
There is crackle, it is on the contrary then in the absence of crackle.
The fault detection method of the present invention, the open defect of the first square shaped silica crucible green compact of energy is examined
Survey, then fault of construction can also be detected, detection efficiency is high.The core inventive of the present invention
Point is to use specific crack detection liquid, just can quick and precisely detected under ordinary light conditions
Go out crackle.During detection, crack detection liquid is uniformly brushed in square silica crucible green compact with hairbrush first
On inner surface, spontaneously dry and wait square silica crucible green compact to absorb after 20-60s, using this side
Case, if there is crackle, crack detection liquid energy is infiltrated through in crackle rapidly, and in the absence of the ground of crackle
The composition of square crack detection liquid is simply to be attached to surface, after drying, using clean hairbrush brush
One time, can there will be no the surface of crackle attachment be mainly carbon dust simply brush recovery crucible it is white
Color table face, and there is the region of crackle, because the carbon dust in crack detection liquid is penetrated into crackle, therefore
Will not be brushed, it is swiped through after obvious aterrimus crackle shape figure can be presented relative to the white portion on periphery
Case, testing staff only need to be simple and quick in normal light according to first just can accurately differentiate, more efficient.
Preferably, the moisture content of the dried square silica crucible green compact of step (1) is not higher than 0.1%.
The moisture content of square silica crucible green compact is controlled to be not higher than 0.1% very crucial, such crack detection liquid energy
Rapid infiltration, crack detection of being faster more convenient for improves detection efficiency.
Preferably, carbon dust solution is by ultra-high purity carbon dust, quartz sand slurry and pure water described in step (3)
According to 1:10~20:15~35 weight ratio is mixed.Control carbon dust solution matches somebody with somebody when crack detection
The proportioning of liquid is extremely crucial, and the rapid Liquid penetrant testing crackle of ultra-high purity carbon dust energy, colour developing is obvious, yes
Testing staff can accurately have found crackle.Quartz sand slurry has homogeneity effect with silica crucible, beneficial to super
The infiltration attachment of high-purity carbon dust, and carbon dust solution viscosity can be adjusted, implement beneficial to detection.
Preferably, the granularity D10 of the quartz sand slurry is 1.0-3.5 μm, D50 is 8.0-12.0 μm,
D90 is 18.0-30.0 μm;The density of quartz sand slurry is 1.5-2.0g/ml;The viscosity of quartz sand slurry
For 50-150cps.Quartz sand slurry parameter is controlled, is more convenient for detecting crackle.
Preferably, the purity of the ultra-high purity carbon dust is 99.9999%.Ultra-high purity carbon powder particle size
In 800-1000 mesh.
Preferably, the ordinary lamps described in step (2) are according to condition:The LED that 18 watts of power.
Preferably, the air pressure of step (2) air gun drifting dust is 0.3~0.6Mpa.
Preferably, step (2) described open defect includes stomata, color spot, foreign matter.
The beneficial effects of the invention are as follows:
1st, fault detection method of the invention, the open defect of the first square shaped silica crucible green compact of energy is carried out
Detection, then can also be detected to fault of construction, and detection efficiency is high.
2nd, the present invention crack detection liquid used in crack detection, just can be accurate under ordinary light conditions
Crackle really is detected, compared to conventional isoparaffin effect more preferably, Check-Out Time is short, efficiency high, has
Effect improves yield, reduces production cost.
Brief description of the drawings
Fig. 1 is crack defect testing result of the present invention.
In figure:1st, crackle.
Embodiment
Below by specific embodiment, technical scheme is described in further detail.
In the present invention, if not refering in particular to, raw material and equipment used etc. is commercially available or this
What field was commonly used.Method in following embodiments, is the routine side of this area unless otherwise instructed
Method.
Implement global schema:
A kind of fault detection method of silica crucible green compact, comprises the following steps:
(1) take dried square silica crucible green compact (moisture content is not higher than 0.1%) standby.
(2) open defect is detected:The dried square silica crucible green compact of step (1) are placed on inspection
On platform, under the conditions of ordinary lamps photograph (LED that 18 watts of power), square shaped silica crucible green compact enter
Row polishing finishing, with visual with air gun drifting dust (air pressure of air gun drifting dust be 0.3~0.6Mpa) totally
Method checks whether square silica crucible green compact surfaces externally and internally has the open defects such as stomata, color spot, foreign matter.
(3) fault of construction is detected:By carbon dust solution according to 1:10-20 part by weight is obtained after being mixed with pure water
Crack detection liquid, is uniformly brushed crack detection liquid on square silica crucible green compact by hairbrush
Surface, is spontaneously dried after 20-60s, using the inner surface brush of the clean square silica crucible green compact of hairbrush
One time, if occurring the crackle shape pattern of black on the inner surface of square silica crucible green compact (see accompanying drawing
1,1 in figure at can see obvious black crackle), then show there is crackle, it is on the contrary then in the absence of crackle.
Carbon dust solution is by ultra-high purity carbon dust (commercially available, purity 99.9999%, 800-1000 mesh), stone
Sand slurry is with pure water according to 1:10~20:15~35 weight ratio is mixed.The quartz sand slurry
Granularity D10 be 1.0-3.5 μm, D50 be 8.0-12.0 μm, D90 be 18.0-30.0 μm;Quartz
The density of mortar is 1.5-2.0g/ml;The viscosity of quartz sand slurry is 50-150cps.
After disfigurement discovery, qualification determination is carried out to the defect found in inspection, repairs or scraps place
Reason.
Case 1 is embodied
(1) take dried square silica crucible green compact (moisture content is not higher than 0.1%) standby.
(2) open defect is detected:The dried square silica crucible green compact of step (1) are placed on inspection
On platform, under the conditions of ordinary lamps photograph (LED that 18 watts of power), square shaped silica crucible green compact enter
Row polishing finishing, with visual with air gun drifting dust (air pressure of air gun drifting dust be 0.3~0.6Mpa) totally
Method checks whether square silica crucible green compact surfaces externally and internally has the open defects such as stomata, color spot, foreign matter.
(3) fault of construction is detected:By carbon dust solution according to 1:10 part by weight must split after being mixed with pure water
Line detects liquid, and crack detection liquid is uniformly brushed into the interior table on square silica crucible green compact by hairbrush
Face, is spontaneously dried after 20s, is brushed one times using the inner surface of the clean square silica crucible green compact of hairbrush,
If occurring the crackle shape pattern of black on the inner surface of square silica crucible green compact, show to exist and split
Line, it is on the contrary then in the absence of crackle.
Carbon dust solution is pressed by ultra-high purity carbon dust (commercially available, purity 99.9999%), quartz sand slurry and pure water
According to 1:10:15 weight ratio is mixed.The granularity D10 of the quartz sand slurry is 1.0 μm, D50
For 8.0 μm, D90 is 18.0 μm;The density of quartz sand slurry is 1.5g/ml;Quartz sand slurry it is viscous
Spend for 50cps.
Case 2 is embodied
(1) take dried square silica crucible green compact (moisture content is not higher than 0.1%) standby.
(2) open defect is detected:The dried square silica crucible green compact of step (1) are placed on inspection
On platform, under the conditions of ordinary lamps photograph (LED that 18 watts of power), square shaped silica crucible green compact enter
Row polishing finishing, with visual with air gun drifting dust (air pressure of air gun drifting dust be 0.3~0.6Mpa) totally
Method checks whether square silica crucible green compact surfaces externally and internally has the open defects such as stomata, color spot, foreign matter.
(3) fault of construction is detected:By carbon dust solution according to 1:20 part by weight must split after being mixed with pure water
Line detects liquid, and crack detection liquid is uniformly brushed into the interior table on square silica crucible green compact by hairbrush
Face, is spontaneously dried after 60s, is brushed one times using the inner surface of the clean square silica crucible green compact of hairbrush,
If occurring the crackle shape pattern of black on the inner surface of square silica crucible green compact, show to exist and split
Line, it is on the contrary then in the absence of crackle.
Carbon dust solution is pressed by ultra-high purity carbon dust (commercially available, purity 99.9999%), quartz sand slurry and pure water
According to 1:20:35 weight ratio is mixed.The granularity D10 of the quartz sand slurry is 3.5 μm, D50
For 12 μm, D90 is 30 μm;The density of quartz sand slurry is 2g/ml;The viscosity of quartz sand slurry
For 150cps.
Contrast test:
The test effect of contrast specific implementation case 1,2 is used as the inspection for checking reagent with routine isoparaffin
Effect.
Test method:The square silica crucible green compact of identical are used specific implementation case by same operating personnel
Example 1,2 methods and routine carry out fault detection respectively with isoparaffin as inspection reagent, contrast crackle
Recall rate and activity duration.
Result of the test:The data tested according to the method described above are as follows
Operational method | Crucible amount of inspection | Crack detection rate | Activity duration (minute) |
Case 1 is embodied | 30 | 100% | 10 |
Case 2 is embodied | 30 | 100% | 10 |
Conventional isoparaffin | 30 | 90% | 25 |
From upper table result data, using the method for inspection of specific implementation case 1,2, in crackle inspection
There is certain advantage in extracting rate, shortened on the activity duration a greater part of, operating efficiency is higher.
Embodiment described above is a kind of preferably scheme of the present invention, and not the present invention is appointed
What formal limitation, it is also other on the premise of without departing from the technical scheme described in claim
Variant and remodeling.
Claims (8)
1. a kind of fault detection method of silica crucible green compact, it is characterised in that comprise the following steps:
(1) take dried square silica crucible green compact standby;
(2) open defect is detected:The dried square silica crucible green compact of step (1) are placed on inspection
On platform, under the conditions of ordinary lamps photograph, square shaped silica crucible green compact carry out polishing finishing, are blown with air gun
Dirt is clean, checks whether square silica crucible green compact surfaces externally and internally has open defect with visual means;
(3) fault of construction is detected:By carbon dust solution according to 1:10-20 part by weight is obtained after being mixed with pure water
Crack detection liquid, is uniformly brushed crack detection liquid on square silica crucible green compact by hairbrush
Surface, is spontaneously dried after 20-60s, using the inner surface brush of the clean square silica crucible green compact of hairbrush
One time, if occurring the crackle shape pattern of black on the inner surface of square silica crucible green compact, show
There is crackle, it is on the contrary then in the absence of crackle.
2. fault detection method according to claim 1, it is characterised in that:Step (1) is dried
The moisture content of square silica crucible green compact be not higher than 0.1%.
3. fault detection method according to claim 1 or 2, it is characterised in that:In step (3)
The carbon dust solution is by ultra-high purity carbon dust, quartz sand slurry and pure water according to 1:10~20:15~35
Weight ratio is mixed.
4. fault detection method according to claim 3, it is characterised in that:The quartz sand slurry
Granularity D10 is 1.0-3.5 μm, and D50 is 8.0-12.0 μm, and D90 is 18.0-30.0 μm;Quartz sand
The density of slurry is 1.5-2.0g/ml;The viscosity of quartz sand slurry is 50-150cps.
5. fault detection method according to claim 3, it is characterised in that:The ultra-high purity carbon dust
Purity be 99.9999%.
6. fault detection method according to claim 1 or 2, it is characterised in that:In step (2)
Described ordinary lamps are according to condition:The LED that 18 watts of power.
7. fault detection method according to claim 1 or 2, it is characterised in that:Step (2) gas
The air pressure of rifle drifting dust is 0.3~0.6Mpa.
8. fault detection method according to claim 1 or 2, it is characterised in that:Step (2) institute
Stating open defect includes stomata, color spot, foreign matter.
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CN107941432A (en) * | 2017-12-07 | 2018-04-20 | 安徽应流集团霍山铸造有限公司 | A kind of method of complex-shaped surface mould ceramic shell mould underbead crack leak detection |
CN111308866A (en) * | 2020-04-01 | 2020-06-19 | 烟台核晶陶瓷新材料有限公司 | Developing solution for crucible detection and preparation method and use method thereof |
CN117147438A (en) * | 2023-10-31 | 2023-12-01 | 常州裕能石英科技有限公司 | Quartz crucible port detection device |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107941432A (en) * | 2017-12-07 | 2018-04-20 | 安徽应流集团霍山铸造有限公司 | A kind of method of complex-shaped surface mould ceramic shell mould underbead crack leak detection |
CN111308866A (en) * | 2020-04-01 | 2020-06-19 | 烟台核晶陶瓷新材料有限公司 | Developing solution for crucible detection and preparation method and use method thereof |
CN111308866B (en) * | 2020-04-01 | 2023-08-22 | 烟台核晶陶瓷新材料有限公司 | Developing solution for crucible detection and preparation method and application method thereof |
CN117147438A (en) * | 2023-10-31 | 2023-12-01 | 常州裕能石英科技有限公司 | Quartz crucible port detection device |
CN117147438B (en) * | 2023-10-31 | 2023-12-29 | 常州裕能石英科技有限公司 | Quartz crucible port detection device |
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