CN106970136B - Intelligence SF6 linear degree analysis appearance - Google Patents
Intelligence SF6 linear degree analysis appearance Download PDFInfo
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- CN106970136B CN106970136B CN201710081077.XA CN201710081077A CN106970136B CN 106970136 B CN106970136 B CN 106970136B CN 201710081077 A CN201710081077 A CN 201710081077A CN 106970136 B CN106970136 B CN 106970136B
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- 238000004458 analytical method Methods 0.000 title claims abstract description 41
- 238000005070 sampling Methods 0.000 claims abstract description 49
- 238000004868 gas analysis Methods 0.000 claims abstract description 25
- 238000011084 recovery Methods 0.000 claims abstract description 14
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 238000005086 pumping Methods 0.000 claims description 7
- 238000000859 sublimation Methods 0.000 claims description 7
- 230000008022 sublimation Effects 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 239000010936 titanium Substances 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 5
- 230000003750 conditioning effect Effects 0.000 claims description 3
- 238000005173 quadrupole mass spectroscopy Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 152
- 229910018503 SF6 Inorganic materials 0.000 description 27
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 27
- 238000010586 diagram Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 231100000252 nontoxic Toxicity 0.000 description 2
- 230000003000 nontoxic effect Effects 0.000 description 2
- 101000856246 Arabidopsis thaliana Cleavage stimulation factor subunit 77 Proteins 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- OBTWBSRJZRCYQV-UHFFFAOYSA-N sulfuryl difluoride Chemical compound FS(F)(=O)=O OBTWBSRJZRCYQV-UHFFFAOYSA-N 0.000 description 1
- DUGWRBKBGKTKOX-UHFFFAOYSA-N tetrafluoro(oxo)-$l^{6}-sulfane Chemical compound FS(F)(F)(F)=O DUGWRBKBGKTKOX-UHFFFAOYSA-N 0.000 description 1
- LSJNBGSOIVSBBR-UHFFFAOYSA-N thionyl fluoride Chemical compound FS(F)=O LSJNBGSOIVSBBR-UHFFFAOYSA-N 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
Abstract
The invention relates to an intelligent SF6 linearity analyzer, which comprises a gas source tank, a gas distribution device, a gas analysis system and a gas analyzer body; the air source tank is connected with the air distribution device through an air source outlet pipe; the gas distribution device comprises a mass flow controller, a single chip microcomputer controller, a gas main pipe, an annular gas box and an inflator pump; one side of the gas analysis system is connected with a gas recovery device, and the gas analysis system comprises a sampling unit, a quadrupole mass spectrometer analysis unit and a data display processing unit; one side of the gas collection container is provided with a micro gas outlet pipe; a sampling container is arranged between the sampling valve and the valve V6; the gas analyzer body includes casing, inlet port, the port of giving vent to anger, annular alarm lamp, display, hangers and circular telegram portion. The gas recovery device is simple to operate, can calibrate and leak the device, is high in calibration speed and accuracy, analyzes the standard gas, can compare the analysis result with the gas to be detected in detail, is provided with the gas recovery device, saves the cost and has no pollution to the environment.
Description
Technical Field
The invention relates to the technical field of gas analysis, in particular to an intelligent SF6 linearity analyzer.
Background
Sulfur hexafluoride gas is an artificial inert gas synthesized by two french chemists in 1900, and was used by the U.S. military around 1940 in the manhattan project (nuclear military). Was provided commercially in 1947. Pure SF6 gas is generally recognized as non-toxic. SF6 has a small amount of accompanying products in the production process, wherein S2F10 is a recognized highly toxic gas, but can be completely removed through purification treatment. Although the pure SF6 gas is non-toxic, the concentration of SF6 gas is prevented from rising to oxygen deficient levels in the field. The density of SF6 gas is about five times that of air, and SF6 gas, if leaked, will tend to deposit in depressions such as cable trenches. Excessive concentrations present a choking hazard and are considered in the design of indoor ventilation units. SF6 gas can be mixed with air by convection, but at a slow rate. Once mixed, the gases form a mixed gas of SF6 and air, which does not separate again. The problem is serious in that the decomposition products of SF6 under the action of electric arc such as SF4, S2F2, SF2, SOF2, SO2F2, SOF4 and HF, etc., are strongly corrosive and toxic.
In the prior art, the gas analyzer has a single function, the device cannot be subjected to leak detection before use, the inside of the analysis device does not contain other impurity gases when the gas to be detected is analyzed, the accuracy of an analysis result can be influenced to a certain extent, standard gases are not compared when the gas is analyzed, the analysis result is unreliable, partial results of the gas analysis can be roughly known only through the gas analysis device, the difference between each index after the gas analysis and the standard gases cannot be known in detail, the improvement processing and the like of relevant aspects of the gas to be detected cannot be realized according to the analysis result, and after the analysis, the gas cannot be recycled or subjected to pollution-free processing, and the environment is polluted to a certain extent.
Disclosure of Invention
Aiming at the problems, the invention provides the intelligent SF6 linear analyzer which is simple to operate, can calibrate and leak the device, is high in calibration speed and accuracy, can analyze standard gas and can compare an analysis result with gas to be detected in detail.
The technical scheme of the invention is as follows:
the intelligent SF6 linear analyzer comprises a gas source tank, a gas distribution device, a gas analysis system and a gas analyzer body; the gas source tank is connected with the gas distribution device through a gas source outlet pipe; the gas distribution device comprises a mass flow controller, a single chip microcomputer controller, a gas main pipe, an annular gas box and an inflator pump; one end of the mass flow controller is connected with the gas main pipe, and the other end of the mass flow controller is connected with the gas source outlet pipe; the single-chip microcomputer controller is arranged on the gas main pipe, and one side of the gas main pipe is connected with the annular gas box; one side of the annular gas tank is connected with the inflator pump, and one side of the inflator pump is connected with the gas analysis system;
one side of the gas analysis system is connected with the gas recovery device, and the gas analysis system comprises a sampling unit, a quadrupole mass spectrometer analysis unit and a data display processing unit; the sampling unit comprises a sampling valve, a circulating pump, a sampling valve, a gas collection container, a first molecular pump, a second molecular pump, a first mechanical pump, a second mechanical pump, an air charging device, a gas recovery device and valves V1, V3, V4, V5 and V6; the quadrupole mass spectrometry unit comprises a quadrupole mass spectrometer, a titanium sublimation pump, a cold trap, a gate valve and valves V2 and V7; the data display processing unit comprises a computer and a printer;
a micro air outlet pipe is arranged on one side of the air collecting container; a sampling container is arranged between the sampling valve and the valve V6; one side of the second molecular pump is connected with the second mechanical pump; the miniature gas outlet pipe is connected with a miniature main pipe, a zero sample connecting pipe, a standard sample connecting pipe and a connecting pipe to be tested are arranged on the miniature main pipe, and a zero sample valve and a standard sample valve are arranged on the zero sample connecting pipe; the to-be-tested connecting pipe is provided with a to-be-tested valve, and one end of the to-be-tested connecting pipe is connected with an analysis connecting air pipe; the analysis connecting air pipe is also connected with an analysis main pipe; one end of the analysis header pipe is connected with the gas collection container, and the lower part of the analysis header pipe is connected with the first molecular pump; the lower part of the first molecular pump is connected with the first mechanical pump through an air pumping pipe; a loop air pipe is arranged on one side of the air pumping pipe; a signal conditioning unit and a microprocessor are arranged in the computer, and the computer is respectively connected with the printer and the gas analyzer body;
the gas analyzer body comprises a shell, an air inlet port, an air outlet port, an annular alarm lamp, a display, a hanging lug and an electrifying part.
The intelligent SF6 linear degree analyzer, wherein: and the gas outlet pipe of the gas source is provided with a gas pressure gauge and a gas valve.
The intelligent SF6 linear degree analyzer, wherein: and the annular gas box is provided with a gas concentration sensor and a gas impurity processor inside.
The intelligent SF6 linear degree analyzer, wherein: the sampling valve comprises a first sampling valve and a second sampling valve, the first sampling valve is arranged on the inflating device, the second sampling valve is arranged on the gas recovery device, and a miniature gas inlet pipe connected with the gas collection container is arranged between the first sampling valve and the second sampling valve.
The intelligent SF6 linear degree analyzer, wherein: the micro air outlet pipe comprises an upper micro air outlet pipe and a lower micro air outlet pipe; the micro main pipe comprises an upper micro main pipe and a lower micro main pipe, and a circulating pump is arranged between the upper micro main pipe and the lower micro main pipe.
The intelligent SF6 linear degree analyzer, wherein: the valve V6 and the sampling valve are arranged on the analysis connecting air pipe; the valve V5 is arranged on the analysis header pipe; the valve V3 and the valve V1 are arranged on the air extracting pipe; the valve V4 is arranged on the loop air pipe.
The intelligent SF6 linear degree analyzer, wherein: the quadrupole mass spectrometer is arranged at the lower part of the titanium sublimation pump, the cold trap is arranged at the lower part of the quadrupole mass spectrometer, the second molecular pump is connected at the lower part of the cold trap, and the gate valve is arranged between the second molecular pump and the lower part of the cold trap; the valve V2 is arranged between the second molecular pump and the second mechanical pump; a thermocouple gas pipe is connected between the second molecular pump and the second mechanical pump, and one end of the thermocouple gas pipe is connected with a thermocouple vacuum gauge; the valve V7 is arranged on the thermocouple gas pipe.
The intelligent SF6 linear degree analyzer, wherein: the hangers are arranged on the outer side of the shell, the display is arranged on the shell, the annular alarm lamp is an LED annular alarm lamp and is arranged on the outer side of the display, the air inlet port and the air outlet port are arranged on the upper portion of the shell, and the electrifying portion is arranged on the lower portion of the shell.
Has the advantages that:
the intelligent SF6 linear analyzer is reasonable in structural design, simple to operate, capable of calibrating and detecting leakage of the device, high in calibration speed and high in accuracy, analyzing standard gas, comparing an analysis result with gas to be detected in detail, and saving cost and causing no pollution to the environment due to the arrangement of the gas recovery device.
Drawings
FIG. 1 is a schematic diagram of the overall structure of an intelligent SF6 linear degree analyzer according to the present invention;
FIG. 2 is a schematic diagram of a gas analysis system of the intelligent SF6 linear analyzer of the present invention;
FIG. 3 is a schematic diagram of the analyzer body of the intelligent SF6 linearity analyzer of the present invention;
fig. 4 is a schematic structural diagram of an analyzer body of the intelligent SF6 linear analyzer of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 4, the intelligent SF6 linear analyzer of the present invention includes a gas source tank 1, a gas distribution device 2, a gas analysis system 3, and a gas analyzer body 4.
The upper part of the gas source tank 1 is provided with a gas source outlet pipe 11 and is connected with the gas distribution device 2 through the gas source outlet pipe 11; wherein, the gas outlet pipe 11 is provided with a gas pressure gauge 12 and a gas valve 13.
The gas distribution device 2 comprises a mass flow controller 21, a singlechip controller 22, a gas main pipe 23, an annular gas box 24 and an inflator pump 25; wherein, one end of the mass flow controller 21 is connected with the gas main pipe 23 through a connecting gas pipe, and the other end is connected with the gas source outlet pipe 11; the single chip microcomputer controller 22 is arranged on a gas main pipe 23, and one side of the gas main pipe 23 is connected with an annular gas box 24 through a connecting gas pipe; be equipped with gas concentration sensor 241 and inside being equipped with gaseous impurity treater 242 on this annular gas tank 24, simultaneously, this annular gas tank 24 one side is through connecting the trachea and connecting pump 25, and this pump 25 one side is through gas intake pipe connection gas analysis system 3.
The gas analysis system 3 is connected to a gas recovery device 5 on one side, and the gas analysis system 3 includes a sampling unit 31, a quadrupole mass spectrometer analysis unit 32, and a data display processing unit 33. The sampling unit 31 includes a sampling valve 310, a circulation pump 311, a sampling valve 312, a gas collection container 313, a first molecular pump 314, a second molecular pump 315, a first mechanical pump 316, a second mechanical pump 317, an inflator 318, a gas recovery device 319, and valves V1, V3, V4, V5, and V6. The sampling valve 310 comprises a first sampling valve and a second sampling valve, the first sampling valve is arranged on the air charging device 318, the second sampling valve is arranged on the gas recovery device 319, a micro air inlet pipe connected with the air collecting container 313 is arranged between the first sampling valve and the second sampling valve, and a micro air outlet pipe 34 is arranged on one side of the air collecting container 313. Meanwhile, a sampling container 37 is arranged on the pipeline between the sampling valve 312 and the valve V6.
The quadrupole mass spectrometry unit 32 comprises a quadrupole mass spectrometer 321, a titanium sublimation pump 322, a cold trap 323, a gate valve 324 and valves V2, V7. The quadrupole mass spectrometer 321 is arranged at the lower part of the titanium sublimation pump 322, the cold trap 323 is arranged at the lower part of the quadrupole mass spectrometer 321, the second molecular pump 315 is connected with the lower part of the cold trap 323 through a connecting pipe, and the gate valve 324 is arranged on the connecting pipe between the second molecular pump 315 and the lower part of the cold trap 323; one side of the second molecular pump 315 is connected to the second mechanical pump 317 through a connecting pipe, the valve V2 is disposed on the connecting pipe between the second molecular pump 315 and the second mechanical pump 317, meanwhile, the connecting pipe between the second molecular pump 315 and the second mechanical pump 317 is further connected to a thermocouple gas pipe, the valve V7 is disposed on the thermocouple gas pipe, and one end of the thermocouple gas pipe is connected to the thermocouple vacuum gauge 36.
The data display processing unit 33 includes a computer 331 (equipped with dedicated quadrupole mass spectrometer 321 operating software) and a printer 332; the computer 331 is provided with a signal conditioning unit and a microprocessor, and the computer 331 is connected to the printer 332 and the gas analyzer body 4, respectively.
The micro air outlet pipe 34 comprises an upper micro air outlet pipe and a lower micro air outlet pipe, and the micro air outlet pipe 34 is connected with a micro main pipe 35.
The micro main pipe 35 comprises an upper micro main pipe and a lower micro main pipe, and a circulating pump is arranged between the upper micro main pipe and the lower micro main pipe; the micro main pipe 35 is provided with a zero sample connection pipe 351, a standard sample connection pipe 352 and a to-be-tested connection pipe 353, and the zero sample connection pipe 351 is provided with a zero sample valve 354 and a standard sample valve 355; the to-be-tested valve 356 is arranged on the to-be-tested connecting pipe 353, one end of the to-be-tested valve is connected with the analysis connecting air pipe, the analysis connecting air pipe is provided with a valve V6, and the sampling valve 312 is arranged on the analysis connecting air pipe; meanwhile, the analysis connecting air pipe is also connected with an analysis header pipe, one end of the analysis header pipe is connected with a gas collection container 313, the lower part of the analysis header pipe is connected with a first molecular pump 314, a valve V5 is arranged on the analysis header pipe, the lower part of the first molecular pump 314 is connected with a first mechanical pump 316 through an air pumping pipe, the air pumping pipe is provided with a valve V3 and a valve V1, one side of the air pumping pipe is provided with a loop air pipe, and the loop air pipe is provided with a valve V4.
This gas analyzer body 4 includes casing 41, inlet port 42, the port 43 of giving vent to anger, annular alarm lamp 44, display 45, hangers 46 and circular telegram portion 47, and the hanger 46 is located the casing 41 outside, and display 45 sets up on casing 41, and annular alarm lamp 44 is LED annular alarm lamp and also locates the display 45 outside, and inlet port 42 and the port 43 of giving vent to anger set up in casing 41 upper portion, and circular telegram portion 47 locates casing 41 lower part.
When the gas source tank is used, firstly, the gas source tank 1 supplies standard gas for calibration, the standard gas passes through the gas source outlet pipe, a gas pressure gauge 12 arranged on the gas source outlet pipe can display the gas pressure in the gas source outlet pipe, and a mass flow controller 21 of a gas distribution device connected with one end of the gas source outlet pipe sends out mass according to the gas condition in the gas source outlet pipe; the single chip microcomputer controller 22 converts the mass flow signal of the mass flow controller 21 into a voltage current signal, the gas in the gas header pipe 23 enters the annular gas box 24 through the connecting gas pipe, the gas concentration sensor 241 on the annular gas box 24 feeds the standard gas concentration information in the annular gas box 24 back to the single chip microcomputer controller 22, and compares the standard gas concentration information with the set concentration, when the gas concentration in the annular gas box 24 is inconsistent with the set concentration, the single chip microcomputer controller 22 controls the mass flow controller 21 to adjust the gas concentration in the annular gas box 24 in real time, so as to ensure the accuracy of the gas concentration required by gas calibration, the gas collection container 313 is pumped with a certain vacuum degree by using the first mechanical pump 316 and the first molecular pump 314, the circulating pump is started, the zero sample valve 354 is opened, and the zero sample gas existing in the gas filling device 318 is conveyed to the front of the valve V6, closing the circulating pump, closing the valve V4 and the valve V5, opening the valve V6, sending the zero-sample gas into the gas collection container 313, closing the valve V6, adjusting the flow of the sampling valve 312, enabling the zero-sample gas to enter the gas analysis system 3 and subsequent devices, detecting whether the devices leak gas or not, after detecting that the devices do not leak gas, closing the valve V3 and the zero-sample valve 354, opening the valve V4 and the valve V6, using the first mechanical pump 316 to pump the zero-sample gas out of the gas collection container 313 and the subsequent devices, closing the valves V4 and V6, opening the valves V3 and V5, using the first molecular pump 314 to pump the gas collection container 313 to a higher vacuum degree, simultaneously starting the circulating pump, enabling the gas to flow out of a connecting gas pipe at one side of the annular gas box 24, sending the gas to the gas analysis system 3 through the gas pump 25, opening the first sampling valve 318 arranged on the gas analysis system, closing the second sampling valve and enabling the gas to enter the gas collection container 313, the micro gas outlet pipe 34 on one side of the gas collection container 313 is connected with a standard sample connecting pipe 352 on the micro main pipe 35, the gas in the standard sample connecting pipe 352 is connected with an analysis connecting pipe through a circulating pump, a valve V4 and a valve V5 are closed, a valve V6 and a sampling valve 312 are opened, the gas enters the gas analysis system 3, the gas enters a quadrupole mass spectrometer 321 under the action of a titanium sublimation pump 322, a computer 331 is arranged on one side of the quadrupole mass spectrometer 321 for analyzing the standard gas, the analysis result is stored in the computer 331, the gas to be detected is filled in an inflating device 318 for carrying out relevant treatment on decomposed substances and the like contained in the gas to be detected, the gas from which impurities are removed under the action of a second mechanical pump 317 and a second molecular pump 315 enters the gas analysis system 3 and is analyzed by the quadrupole mass spectrometer 321, the analysis result is compared with the standard gas stored in the computer 331, and the detailed result can be printed by a printer 332 connected with the computer 331, a part of the important analysis results are displayed on the display 45 of the gas analyzer body 4.
The gas leakage detection device is novel in structure, stable in operation, simple in operation, capable of calibrating and detecting leakage of the device, high in calibration speed and accuracy, capable of analyzing standard gas, capable of comparing an analysis result with gas to be detected in detail, provided with the gas recovery system, cost-saving and free of pollution to the environment.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (6)
1. An intelligent SF6 linear degree analyzer comprises a gas source tank; the method is characterized in that: the analyzer also comprises a gas distribution device, a gas analysis system and a gas analyzer body;
the gas source tank is connected with the gas distribution device through a gas source outlet pipe; the gas distribution device comprises a mass flow controller, a single chip microcomputer controller, a gas main pipe, an annular gas box and an inflator pump; one end of the mass flow controller is connected with the gas main pipe, and the other end of the mass flow controller is connected with the gas source outlet pipe; the single-chip microcomputer controller is arranged on the gas main pipe, and one side of the gas main pipe is connected with the annular gas box; one side of the annular gas tank is connected with the inflator pump, and one side of the inflator pump is connected with the gas analysis system;
one side of the gas analysis system is connected with the gas recovery device, and the gas analysis system comprises a sampling unit, a quadrupole mass spectrometer analysis unit and a data display processing unit; the sampling unit comprises a sampling valve, a circulating pump, a sampling valve, a gas collection container, a first molecular pump, a second molecular pump, a first mechanical pump, a second mechanical pump, an air charging device, a gas recovery device and valves V1, V3, V4, V5 and V6; the quadrupole mass spectrometry unit comprises a quadrupole mass spectrometer, a titanium sublimation pump, a cold trap, a gate valve and valves V2 and V7; the data display processing unit comprises a computer and a printer;
a micro air outlet pipe is arranged on one side of the air collecting container; a sampling container is arranged between the sampling valve and the valve V6; one side of the second molecular pump is connected with the second mechanical pump; the miniature gas outlet pipe is connected with a miniature main pipe, a zero sample connecting pipe, a standard sample connecting pipe and a connecting pipe to be tested are arranged on the miniature main pipe, and a zero sample valve and a standard sample valve are arranged on the zero sample connecting pipe; the to-be-tested connecting pipe is provided with a to-be-tested valve, and one end of the to-be-tested connecting pipe is connected with an analysis connecting air pipe; the analysis connecting air pipe is also connected with an analysis main pipe; one end of the analysis header pipe is connected with the gas collection container, and the lower part of the analysis header pipe is connected with the first molecular pump; the lower part of the first molecular pump is connected with the first mechanical pump through an air pumping pipe; a loop air pipe is arranged on one side of the air pumping pipe; a signal conditioning unit and a microprocessor are arranged in the computer, and the computer is respectively connected with the printer and the gas analyzer body;
the valve V6 and the sampling valve are arranged on the analysis connecting air pipe; the valve V5 is arranged on the analysis header pipe; the valve V3 and the valve V1 are arranged on the air extracting pipe; the valve V4 is arranged on the loop air pipe;
the quadrupole mass spectrometer is arranged at the lower part of the titanium sublimation pump, the cold trap is arranged at the lower part of the quadrupole mass spectrometer, the second molecular pump is connected at the lower part of the cold trap, and the gate valve is arranged between the second molecular pump and the lower part of the cold trap; the valve V2 is arranged between the second molecular pump and the second mechanical pump;
a thermocouple gas pipe is connected between the second molecular pump and the second mechanical pump, and one end of the thermocouple gas pipe is connected with a thermocouple vacuum gauge; the valve V7 is arranged on the thermocouple gas pipe;
the gas analyzer body comprises a shell, an air inlet port, an air outlet port, an annular alarm lamp, a display, a hanging lug and an electrifying part.
2. The intelligent SF6 linearity analyzer of claim 1, wherein: and the gas outlet pipe of the gas source is provided with a gas pressure gauge and a gas valve.
3. The intelligent SF6 linearity analyzer of claim 1, wherein: and the annular gas box is provided with a gas concentration sensor and a gas impurity processor inside.
4. The intelligent SF6 linearity analyzer of claim 1, wherein: the sampling valve comprises a first sampling valve and a second sampling valve, the first sampling valve is arranged on the inflating device, the second sampling valve is arranged on the gas recovery device, and a miniature gas inlet pipe connected with the gas collection container is arranged between the first sampling valve and the second sampling valve.
5. The intelligent SF6 linearity analyzer of claim 1, wherein: the micro air outlet pipe comprises an upper micro air outlet pipe and a lower micro air outlet pipe; the micro main pipe comprises an upper micro main pipe and a lower micro main pipe, and a circulating pump is arranged between the upper micro main pipe and the lower micro main pipe.
6. The intelligent SF6 linearity analyzer of claim 1, wherein: the hangers are arranged on the outer side of the shell, the display is arranged on the shell, the annular alarm lamp is an LED annular alarm lamp and is arranged on the outer side of the display, the air inlet port and the air outlet port are arranged on the upper portion of the shell, and the electrifying portion is arranged on the lower portion of the shell.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710081077.XA CN106970136B (en) | 2017-02-15 | 2017-02-15 | Intelligence SF6 linear degree analysis appearance |
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| CN201710081077.XA CN106970136B (en) | 2017-02-15 | 2017-02-15 | Intelligence SF6 linear degree analysis appearance |
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| CN106970136A CN106970136A (en) | 2017-07-21 |
| CN106970136B true CN106970136B (en) | 2022-02-08 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2757130Y (en) * | 2004-12-08 | 2006-02-08 | 上海永新彩色显像管股份有限公司 | Residual gas analytic device for color display tube |
| CN2828780Y (en) * | 2005-07-19 | 2006-10-18 | 黄文平 | Multi-gas leakage testing analyzing instrument |
| CN102072802B (en) * | 2009-11-23 | 2013-03-13 | 付佳 | Intelligent constant-voltage high-precision leak detector |
| US8272248B2 (en) * | 2010-04-09 | 2012-09-25 | Guenther Mark T | Emissions test system and method |
| JP5637311B2 (en) * | 2011-06-28 | 2014-12-10 | 株式会社島津製作所 | Triple quadrupole mass spectrometer |
| CN104267154B (en) * | 2014-10-17 | 2016-07-13 | 河南省计量科学研究院 | Gas analyser calibrating installation |
| CN205720136U (en) * | 2016-03-23 | 2016-11-23 | 中国科学院光电研究院 | A kind of online process gas sampling and analyzing device |
| CN205826251U (en) * | 2016-07-07 | 2016-12-21 | 中国科学院光电研究院 | A kind of vacuum leakproofness energy measurement apparatus sealing container |
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