CN106964650A - A kind of rolling mill practice of TFT LCD/AMOLED flat-panel screens wide cut molybdenum target material - Google Patents
A kind of rolling mill practice of TFT LCD/AMOLED flat-panel screens wide cut molybdenum target material Download PDFInfo
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- CN106964650A CN106964650A CN201710183820.2A CN201710183820A CN106964650A CN 106964650 A CN106964650 A CN 106964650A CN 201710183820 A CN201710183820 A CN 201710183820A CN 106964650 A CN106964650 A CN 106964650A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
- B21B1/38—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling sheets of limited length, e.g. folded sheets, superimposed sheets, pack rolling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B27/00—Rolls, roll alloys or roll fabrication; Lubricating, cooling or heating rolls while in use
- B21B27/06—Lubricating, cooling or heating rolls
- B21B27/10—Lubricating, cooling or heating rolls externally
- B21B27/106—Heating the rolls
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
- C22F1/18—High-melting or refractory metals or alloys based thereon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B1/00—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations
- B21B1/38—Metal-rolling methods or mills for making semi-finished products of solid or profiled cross-section; Sequence of operations in milling trains; Layout of rolling-mill plant, e.g. grouping of stands; Succession of passes or of sectional pass alternations for rolling sheets of limited length, e.g. folded sheets, superimposed sheets, pack rolling
- B21B2001/386—Plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21B—ROLLING OF METAL
- B21B2201/00—Special rolling modes
- B21B2201/06—Thermomechanical rolling
Abstract
The present invention relates to a kind of rolling mill practice of TFT LCD/AMOLED flat-panel screens wide cut molybdenum target material, it is that the 1300mm molybdenums sintered blank of the 800mm of 70 120mm ~ 500 ~ 900 is raw material including selection size, heating rolling twice is carried out to molybdenum plate blank, the semi-finished product molybdenum plate thickness being rolled into is 12 18mm, the 1800mm of width 1000, the 2300mm of length 1200, is smoothed in advance using waste heat feeding is rolled；The semi-finished product molybdenum plate after pre- smoothing is heat-treated 2 3h for 900 1100 DEG C in hydrogen furnace, and then final smoothing process, obtains wide cut molybdenum target material.The smooth grain structure fine uniform of molybdenum plate that the present invention is obtained, process is simple, high yield rate, zero defect is organized after scanning flaw detection, density is more than 10.18, and crystallite dimension is 70 μm or so, flatness is less than 2mm, fully meets TFT LCD/AMOLED flat-panel screens wide cut molybdenum target materials and uses standard.
Description
Technical field
The invention belongs to sputtering target material preparing technical field, and in particular to a kind of TFT-LCD/AMOLED flat-panel screens is used
The preparation technology of wide cut molybdenum target material.
Background technology
Updated with the iteration of Display Technique, AMOLED is expected to turn into after " Display Technique of future generation " after LCD.AMOLED
The plurality of advantages having includes high brightness, high-contrast, high gamut range and visible angle, low energy consumption, more frivolous and flexibility
Feature.Continuous from maturation with AMOLED technologies, the lifting of yield and production capacity, its application scenarios will be greatly expanded, including
The fields such as smart mobile phone, Intelligent hardware, VR, illumination all will be priority application.AMOLED show with illuminate the market space it is wide,
Full industrial chain is expected to fast development.Incrementally increased as TFT-LCD/AMOLED flat-panel screens with molybdenum target material consumption.
Wide cut molybdenum target material is mainly used in 4.5-6 for line TFT-LCD/AMOLED flat-panel screens, and general thickness is 12-
18mm, width 1000-1800mm, length 1200-2300mm, substance are more than 200kg, and technical requirements are high, and density is more than 10.18g/
cm3, micro- metallographic structure requirement is uniform equi-axed crystal, and average grain size is no more than without exception inside 100 μm, molybdenum plate lack
Fall into, plate face flatness is high.Conventional small size molybdenum plate milling method is that hydrogen furnace protects heating, Direct Rolling.Large scale molybdenum plate weight
Amount and finished size are big, and conventional rolling mill can not be rolled, it is necessary to which the heating in the large-scale hydrogen furnace of customization, is conveyed to by quick roller-way
Wide cut milling train, rolling is completed, and is melted down after annealing using waste heat into the smoothing of nine roller levelling machines, is obtained molybdenum plate flatness less than 2mm,
Average grain size is less than 100 μm, interior tissue defect without exception after scanning flaw detection.
Chinese patent CN102534519A discloses a kind of preparation of LCD panel sputtering target material large scale molybdenum plate
Method, this method is：1）The uniform brushing antioxidant coating in molybdenum plate blank surface suppressed and sintered in conventional method；2）It will apply
The molybdenum plate blank for being brushed with antioxidant coating is coated with steel capsule；3）The rolling of a fire time is carried out to the molybdenum plate blank for being coated with steel capsule,
It is subsequently placed on cold bed and cools down；4）It is 19mm~24mm (containing steel capsule) that molybdenum plate blank after cooling is rolling into thickness；5）Will
The molybdenum plate blank of rolling carries out smoothing process, removes steel capsule, and cutting obtains semi-finished product molybdenum plate；6）Semi-finished product molybdenum plate is carried out true
Sky heat treatment, obtains LCD flat-panel monitor sputtering target material large scale molybdenum plates.This method is disadvantageous in that, brush applied coating
With cladding steel bushing complex procedures, cause cost to waste, other impurities element influences target purity is introduced in high-temperature heating process.
Chinese patent CN104624642A discloses a kind of milling method of sputtering target material with big substance wide cut molybdenum plate band, should
Method produces molybdenum plate tape thickness 4.5mm, belongs to thin molybdenum plate, density only has 10.01 g/cm3Present TFT-LCD/ can not be met
The density of AMOLED flat-panel screens is more than 10.18g/cm3, use requirement of the average grain size no more than 100 μm.
The content of the invention
The invention provides a kind of TFT-LCD/AMOLED flat-panel screens preparation technology of wide cut molybdenum target material, solve
Brush applied coating and cladding steel bushing complex procedures are needed in the preparation method of existing wide cut molybdenum target material, causes cost to waste, is heated at high temperature
During introduce other impurities element influences target purity the problems such as.
In order to solve the above technical problems, the technical solution adopted by the present invention：
A kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material, comprises the following steps：
（1）, selection size be that 70-120mm ~ 500-800mm ~ 900-1300mm molybdenum plate blanks are raw material, the port of molybdenum plate blank is provided with
Nip angle, it is ensured that molybdenum plate blank can smoothly bite wide cut milling train, smoothly complete rolling process；
（2）, molybdenum sintered blank carry out first time heating；
（3）, the molybdenum base after the completion of heating be put into roller-way, carry out a fire time rolling, Reduction by rolling is 50%-60%；
（4）, after the completion of heating once and rolling, carry out an angle of 90 degrees commutation, then carry out second and heat；
（5）, after the completion of heating, carry out two fire rollings, the slab thickness after rolling is 12-18mm, and the Reduction by rolling is
20%-30%；
（6）, by the semi-finished product molybdenum plate thickness being rolled into be 12-18mm, width 1000-1800mm, length 1200-2300mm, profit
Smoothed in advance with rolling waste heat feeding；
（7）, the semi-finished product molybdenum plate after the pre- smoothing 900-1100 DEG C of heat treatment 2-3h in hydrogen furnace, then at final smoothing
Reason, obtains wide cut molybdenum target material.
Preferably：Molybdenum base after the completion of described heating enters roller-way, it is necessary to be preheated to roller-way, and preheating temperature is
200-400 degree.
Preferably：Described roller-way preheating enters milling train shallow pass to preheat wide cut rolling mill roll using the molybdenum plate heated.
Preferably：Described nip angle is 30 degree.Nip angle will confirm that the present invention uses 30 according to different roll mills
Degree, it is ensured that molybdenum plate blank can smoothly bite wide cut milling train, smoothly complete rolling process.
Preferably：The temperature of described first time heating is 1350 DEG C -1450 DEG C, and the time is 3-5h.
Preferably：1350 DEG C -1450 DEG C of second described of heating, the time is 2-4h.
Preferably：The pass reduction of a described fire time rolling is 10%~30%.
Preferably：The pass reduction of two described fire time rollings is 10%~30%.
Beneficial effects of the present invention：
The present invention is intersected after commutation rolling by many fiery multi-pass, feeding hydrogen heating furnace annealing, after the completion of into levelling machine, obtain
To the molybdenum plate of smooth grain structure fine uniform, simply, high yield rate organizes zero defect, density is more than to process after scanning flaw detection
10.18, crystallite dimension is 70 μm or so, and flatness is less than 2mm, fully meets TFT-LCD/AMOLED flat-panel screens wide cut molybdenums
Target uses standard.
The present invention uses same temperature, and different heat time carries out the heating of molybdenum plate blank, and using to roll
The effect to improve rolling of preheating so that rolling can prevent that the uneven of microscopic structure grows up and recrystallized after hot rolling cogging,
Obtain deforming uniform worked structure, the molybdenum plate finally prepared has the equiaxed grain structure of size uniform.
Embodiment
Below in conjunction with the embodiment of the present invention, technical scheme is clearly and completely described, it is clear that institute
The embodiment of description is only a part of embodiment of the invention, rather than whole embodiments.Based on the embodiment in the present invention,
The every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, belongs to this hair
The scope of bright protection.
Embodiment 1
A kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material, comprises the following steps：
（1）, selection size be that the 900mm molybdenum plate blanks of 70mm 500 are raw material, the port of molybdenum plate blank is provided with 30 degree of nip angles, it is ensured that
Molybdenum plate blank can smoothly bite wide cut milling train, smoothly complete rolling process；
（2）, molybdenum sintered blank carry out first time heating, for the first time heating temperature be 1350 DEG C, the time is 5h；
（3）, the molybdenum base after the completion of heating be put into roller-way, carry out a fire time rolling, three passages, respectively 30%, 20%, 10%, rolling
Working modulus is 50%；
（4）, after the completion of heating once and rolling, carry out an angle of 90 degrees commutation, then carry out second and heat, 1450 DEG C of second of heating,
Time is 2h；
（5）, after the completion of heating, carry out two fire rollings, a passage, the slab thickness after rolling is 16mm, and Reduction by rolling is
20%；
（6）, by the semi-finished product molybdenum plate thickness being rolled into be 12mm, width 1000mm, length 2100mm, using roll waste heat feeding
Smoothed in advance；
（7）, the semi-finished product molybdenum plate after pre- smoothing 1100 DEG C of heat treatment 2h in hydrogen furnace, then final smoothing process, is obtained
To wide cut molybdenum target material.
Zero defect, density 10.19 are organized after obtained wide cut molybdenum target material scanning flaw detection, crystallite dimension is 72 μm, flatness
Less than 2mm, fully meet TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target materials and use standard.
Using above-mentioned technique, 50 batches, yield rate 92% are done.
Embodiment 2
A kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material, comprises the following steps：
（1）, selection size be that 120mm 800mm 1300mm molybdenum plate blanks are raw material, the port of molybdenum plate blank provided with 30 degree of nip angles,
Ensure that molybdenum plate blank can smoothly bite wide cut milling train, smoothly complete rolling process；
（2）, molybdenum sintered blank carry out first time heating, for the first time heating temperature be 1450 DEG C, the time is 3h；
（3）, the molybdenum base after the completion of heating be put into roller-way, carry out a fire time rolling, three passages, respectively 30%, 30%, 19%, roll
Working modulus processed is 60%；
（4）, after the completion of heating once and rolling, carry out an angle of 90 degrees commutation, then carry out second and heat, 1400 DEG C of second of heating,
Time is 3h；
（5）, after the completion of heating, carry out two fire rollings, two passages, respectively 20%, 12.5%, Reduction by rolling is 30%；Rolling
Slab thickness afterwards is 18mm,
（6）, by the semi-finished product molybdenum plate thickness being rolled into be 18mm, width 1800mm, length 2300mm, using roll waste heat feeding
Smoothed in advance；
（7）, the semi-finished product molybdenum plate after pre- smoothing 900 DEG C of heat treatment 2h in hydrogen furnace, then final smoothing process, is obtained
Wide cut molybdenum target material.
Zero defect, density 10.20 are organized after obtained wide cut molybdenum target material scanning flaw detection, crystallite dimension is 73 μm, flatness
Less than 2mm, fully meet TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target materials and use standard.
Using above-mentioned technique, 50 batches, yield rate 90% are done.
Embodiment 3
A kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material, comprises the following steps：
（1）, selection size be that 100mm 600mm 1000mm molybdenum plate blanks are raw material, the port of molybdenum plate blank provided with 30 degree of nip angles,
Ensure that molybdenum plate blank can smoothly bite wide cut milling train, smoothly complete rolling process；
（2）, molybdenum sintered blank and molybdenum plate carry out first time heating, the temperature of heating is 1400 DEG C for the first time, and the time is 4h；
（3）, using the molybdenum plate heated enter milling train shallow pass to preheat wide cut rolling mill roll, preheating temperature is 200 degree；
（4）, the molybdenum base after the completion of heating be put into roller-way, carry out a fire time rolling, carry out a fire time rolling, three passages, respectively
30%, 20%, 20%, Reduction by rolling is 55%；
（5、）After the completion of heating once and rolling, an angle of 90 degrees commutation is carried out, second is then carried out and heats, 1450 DEG C of second of heating,
Time is 3h；
（6）, after the completion of heating, carry out two fire rollings, two passages, respectively, 10%, 17%, Reduction by rolling is 25%；After rolling
Slab thickness be 12-18mm,
（7）, by the semi-finished product molybdenum plate thickness being rolled into be 12-18mm, width 1000-1800mm, length 1200-2300mm, profit
Smoothed in advance with rolling waste heat feeding；
（8）, the semi-finished product molybdenum plate after the pre- smoothing 900-1100 DEG C of heat treatment 2-3h in hydrogen furnace, then at final smoothing
Reason, obtains wide cut molybdenum target material.
Zero defect, density 10.20 are organized after obtained wide cut molybdenum target material scanning flaw detection, crystallite dimension is 70 μm, flatness
Less than 2mm, fully meet TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target materials and use standard.
Using above-mentioned technique, 50 batches, yield rate 96% are done.
Embodiment 4
A kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material, comprises the following steps：
（1）, selection size be that the 900mm molybdenum plate blanks of 70mm 500 are raw material, the port of molybdenum plate blank is provided with 30 degree of nip angles, it is ensured that
Molybdenum plate blank can smoothly bite wide cut milling train, smoothly complete rolling process；
（2）, molybdenum sintered blank carry out first time heating, for the first time heating temperature be 1350 DEG C, the time is 5h；
（3）, using the molybdenum plate heated enter milling train shallow pass to preheat wide cut rolling mill roll, preheating temperature is 400 degree；
（4）, three passages, respectively 30%, 20%, 10%, Reduction by rolling is 50%；
（5）, after the completion of heating once and rolling, carry out an angle of 90 degrees commutation, then carry out second and heat, 1450 DEG C of second of heating,
Time is 2h；
（6）, after the completion of heating, carry out two fire rollings, a passage, the slab thickness after rolling is 16mm, and Reduction by rolling is
20%；
（7）, by the semi-finished product molybdenum plate thickness being rolled into be 12mm, width 1000mm, length 2100mm, using roll waste heat feeding
Smoothed in advance；
（8）, the semi-finished product molybdenum plate after pre- smoothing 1100 DEG C of heat treatment 2h in hydrogen furnace, then final smoothing process, is obtained
To wide cut molybdenum target material.
Zero defect, density 10.19 are organized after obtained wide cut molybdenum target material scanning flaw detection, crystallite dimension is 70 μm, flatness
Less than 2mm, fully meet TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target materials and use standard.
Using above-mentioned technique, 50 batches, yield rate 100% are done.
Embodiment 5
A kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material, comprises the following steps：
（1）, selection size be that the 1100mm molybdenum plate blanks of 80mm 600 are raw material, the port of molybdenum plate blank is provided with 30 degree of nip angles, it is ensured that
Molybdenum plate blank can smoothly bite wide cut milling train, smoothly complete rolling process；
（2）, molybdenum sintered blank carry out first time heating, for the first time heating temperature be 1400 DEG C, the time is 4h；
（3）, using the molybdenum plate heated enter milling train shallow pass to preheat wide cut rolling mill roll, preheating temperature is 400 degree；
（4）, three passages, respectively 30%, 20%, 15%, Reduction by rolling is 53%；
（5）, after the completion of heating once and rolling, carry out an angle of 90 degrees commutation, then carry out second and heat, 1450 DEG C of second of heating,
Time is 2h；
（6）, after the completion of heating, carry out two fire rollings, a passage, the slab thickness after rolling is 16mm, and Reduction by rolling is
23%；
（7）, by the semi-finished product molybdenum plate thickness being rolled into be 15mm, width 1600mm, length 2100mm, using roll waste heat feeding
Smoothed in advance；
（8）, the semi-finished product molybdenum plate after pre- smoothing 1100 DEG C of heat treatment 2h in hydrogen furnace, then final smoothing process, is obtained
To wide cut molybdenum target material.
Zero defect, density 10.19 are organized after obtained wide cut molybdenum target material scanning flaw detection, crystallite dimension is 71 μm, flatness
Less than 2mm, fully meet TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target materials and use standard.
Using above-mentioned technique, 50 batches, yield rate 98% are done.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
God is with principle, and any modification, equivalent substitution and improvements made etc. should be included in the scope of the protection.
Claims (8)
1. a kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material, it is characterised in that including following step
Suddenly：
（1）, selection size be that 70-120mm ~ 500-800mm ~ 900-1300mm molybdenums sintered blank is raw material, the port of molybdenum plate blank is set
There is nip angle, it is ensured that molybdenum plate blank can smoothly bite wide cut milling train, smoothly complete rolling process；
（2）, molybdenum sintered blank and preheated nip roll molybdenum plate carry out first time heating；
（3）, the molybdenum plate heated entered into milling train shallow pass preheat wide cut rolling mill roll；
（4）, the molybdenum base after the completion of heating be put into the roller-way after preheating, carry out a fire time rolling, Reduction by rolling is 50%-60%；
（5）, after the completion of heating once and rolling, carry out an angle of 90 degrees commutation, then carry out second and heat；
（6）, after the completion of heating, carry out two fire rollings, the slab thickness after rolling is 12-18mm, and the Reduction by rolling is
20%-30%；
（7）, by the semi-finished product molybdenum plate thickness being rolled into be 12-18mm, width 1000-1800mm, length 1200-2300mm, profit
Smoothed in advance with rolling waste heat feeding；
（8）, the semi-finished product molybdenum plate after the pre- smoothing 900-1100 DEG C of heat treatment 2-3h in hydrogen furnace, then at final smoothing
Reason, obtains wide cut molybdenum target material.
2. a kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material according to claim 1, its
It is characterised by：Molybdenum plate blank after the completion of described heating enters roller-way, it is necessary to be preheated to roller-way, and preheating temperature is 200-
400 degree.
3. a kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material according to claim 2, its
It is characterised by：Described roller-way preheating enters milling train shallow pass to preheat wide cut rolling mill roll using the molybdenum plate heated.
4. a kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material according to claim 1, its
It is characterised by：Described nip angle is 30 degree.
5. a kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material according to claim 1, its
It is characterised by：The temperature of described first time heating is 1350 DEG C -1450 DEG C, and the time is 3-5h.
6. a kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material according to claim 1, its
It is characterised by：1350 DEG C -1450 DEG C of second described of heating, the time is 2-4h.
7. a kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material according to claim 1, its
It is characterised by：The pass reduction of a described fire time rolling is 10%~30%.
8. a kind of rolling mill practice of TFT-LCD/AMOLED flat-panel screens wide cut molybdenum target material according to claim 1, its
It is characterised by：The pass reduction of two described fire time rollings is 10%~30%.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111318570A (en) * | 2020-03-05 | 2020-06-23 | 爱发科电子材料（苏州）有限公司 | Process for manufacturing micronized target material crystal grains |
| CN112609162A (en) * | 2020-12-10 | 2021-04-06 | 宁波江丰钨钼材料有限公司 | LCD molybdenum target material and rolling method and application thereof |
| CN114959596A (en) * | 2021-12-23 | 2022-08-30 | 常州苏晶电子材料有限公司 | Molybdenum alloy cladding thermal forming process |
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| US20100108501A1 (en) * | 2007-01-12 | 2010-05-06 | Nippon Steel Materials Co., Ltd | Mo-based sputtering target plate and method for manufacturing the same |
| JP2010215933A (en) * | 2009-03-13 | 2010-09-30 | Allied Material Corp | Molybdenum plate and method for producing the same |
| CN102534519A (en) * | 2012-02-21 | 2012-07-04 | 西安瑞福莱钨钼有限公司 | Method for preparing large-size molybdenum plates for sputtering targets of liquid crystal display (LCD) flat-panel displays |
| CN103255379A (en) * | 2013-04-16 | 2013-08-21 | 洛阳高新四丰电子材料有限公司 | Molybdenum-tungsten alloy sputtering target material for flat panel display and preparation method thereof |
| CN104624642A (en) * | 2015-01-12 | 2015-05-20 | 郑州通达重型机械制造有限公司 | Method for rolling large unit-weight and wide molybdenum plates for sputtering target material |
| CN105568236A (en) * | 2016-03-14 | 2016-05-11 | 洛阳高新四丰电子材料有限公司 | Preparation method for high-purity high-compactness and large-dimension molybdenum-titanium alloy sputtering target material |
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| CN111318570A (en) * | 2020-03-05 | 2020-06-23 | 爱发科电子材料（苏州）有限公司 | Process for manufacturing micronized target material crystal grains |
| CN112609162A (en) * | 2020-12-10 | 2021-04-06 | 宁波江丰钨钼材料有限公司 | LCD molybdenum target material and rolling method and application thereof |
| CN112609162B (en) * | 2020-12-10 | 2023-04-04 | 宁波江丰钨钼材料有限公司 | LCD molybdenum target material and rolling method and application thereof |
| CN114959596A (en) * | 2021-12-23 | 2022-08-30 | 常州苏晶电子材料有限公司 | Molybdenum alloy cladding thermal forming process |
| CN114959596B (en) * | 2021-12-23 | 2023-12-05 | 常州苏晶电子材料有限公司 | Molybdenum alloy cladding thermoforming process |
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