CN1069574A - Laser-beam multi-parameter testing instrument - Google Patents

Laser-beam multi-parameter testing instrument Download PDF

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Publication number
CN1069574A
CN1069574A CN 91107468 CN91107468A CN1069574A CN 1069574 A CN1069574 A CN 1069574A CN 91107468 CN91107468 CN 91107468 CN 91107468 A CN91107468 A CN 91107468A CN 1069574 A CN1069574 A CN 1069574A
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laser
light beam
detector
monochromator
catoptron
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CN 91107468
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CN1038447C (en
Inventor
傅恩生
沈桂荣
李颖峰
王兵
陈磊
王玉芝
王之江
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Shanghai Institute of Optics and Fine Mechanics of CAS
Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

The present invention is a kind of laser-beam multi-parameter testing instrument.It is adjusted to suitable dimensions by expanding bundle (or the bundle that contracts) optical system with spot size of laser beams, with micro-processor controlled two-dimentional light beam scanner, beam cross section is scanned on the monochromator entrance slit.Monochromator is adjusted to the laser of this wavelength is penetrated from exit slit, by detector the light distribution pointwise on the beam cross section is presented on the computer screen, presents the 3 D stereo intensity distribution.Through microcomputer data are handled, can be provided laser-beam multi-parameters such as two-dimensional laser beam intensity distribution plan, equal strength distribution planimetric map, optical maser wavelength, beam waist diameter, beam divergence angle, laser power, laser brightness.

Description

Laser-beam multi-parameter testing instrument
The present invention is a kind of laser-beam multi-parameter testing instrument.Its parameter mainly comprises: two-dimensional laser beam intensity distribution stereographic map, equal strength distribution planimetric map, optical maser wavelength, beam waist diameter, beam spot diameter,, laser power, beam divergence angle, the brightness of laser beam etc.
Existing technology adopts measurement respectively to finish to a plurality of parameters of laser beam.(1) power of laser beam power meter independent measurement, for example U.S. EG﹠amp; G company 460 type laser powermeters, the PM-950 type digital laser power meter of U.S. Jodon Laser company; (2) spot size knife-edge method, slit method and pyroelectricity Array System are measured, for example the LMP-32 of U.S. Spiricon company * 32-161 type Pyroelectric Matrix Arrays; (3) optical maser wavelength spectrometer measurement.
The present invention seeks to finish the measurement of multiple laser beam parameter, as Laser Measurement wavelength, beam waist diameter, beam spot diameter,, laser power, beam divergence angle, the brightness of laser beam, two-dimensional laser beam intensity distribution stereographic map, equal strength distribution planimetric map etc. with an instrument.
The parts that constitute tester of the present invention include: the label helium-neon laser 1(accompanying drawing 1)), and the adjustment of the red laser of the 632nm that it sends indication optical system, and as typical standard laser bundle, measurement for reference.Helium neon laser beam by beam splitter 3, chopper 6, shine the location catoptron 10 the center.Then, light beam focuses on and shines two-dimentional light beam scanner 11 by variable aperture light hurdle 9.Through reflection, light beam irradiates is to monochromator 16 entrance slits.By monochromator, light beam is shone detector 8 by beam split, sampling.The electric signal of detector output is sent into lock-in amplifier 14, arrives microcomputer display system 13 again.The synchronizing signal that chopper 6 provides is also delivered to lock-in amplifier.The two-dimentional light beam scanner 11 that has the two-dimensional scan catoptron composition of two micro-step motors, it can be the scanning of bow font at left and right directions and pitch orientation.The stepper motor driver 15 of drive stepping motor by microcomputer by programmed control.The light beam of testing laser device 7 outputs is decayed with attenuator 5.Insertable collimation plane mirror 4 is used to adjust laser beam to be measured and indicates the same light path of adjusting of helium neon laser beam.
Essential characteristic of the present invention is that the two-dimentional light beam scanner 11 with microcomputer 13 controls reflexes to laser beam to be measured on the entrance slit of monochromator 16, and beam cross section is scanned on entrance slit.Monochromator is adjusted to the laser of this wavelength is penetrated from exit slit, and by detector the light distribution on the beam cross section is presented on the computer screen, presents two-dimensional intensity distribution figure as shown in Figure 2.Through microcomputer data are handled, tabulation provides: different kinds of parameters such as optical maser wavelength, beam waist diameter, beam spot diameter,, laser power, beam divergence angle (full-shape) and the brightness of laser beam.As shown in table 1.
The two-dimentional light beam scanner is one of critical component of this instrument, and its two-dimensional scan catoptron has precise ball screw and the differential micromotion mechanism of elasticity, has improved the adjustment precision with the spring lever principle.It is driven by two three-phase stepper motors, about can doing and the rotation of pitch orientation.
Stepper motor driver 15 is made of microcomputer and stepper motor driving circuit.Can external three three-phases or four phase step motor.Manually or remote control mode motor is turned round with ten kinds of friction speeds.But the single stepping also can operation continuously in specified scope.Current location is indicated by digital indicator.
Microcomputer 13 is and the Super type of IBM PC/XT compatibility, sends telecommand by the RS-232C communication interface to stepper motor driver 15, and read the status information of stepper motor driver 15.The process flow diagram that sends and receive as shown in Figure 4.Microcomputer is also born light intensity data storage, two-dimensional illumination intensity distribution graphic presentation and analyzing and processing task except commander's control step motor driver 15.Data and figure are exported on 24 wire dot printers 12.These functions are all finished by software design, and software design block diagram as shown in Figure 5.
Above-mentioned two-dimentional light beam scanner or be divided into two assemblies is done left and right directions scanning, is called slow scanning for one; The beam sampling that another does vertical direction is called short scan.Slow scanning can be carried out with the two-dimensional scan catoptron among Fig. 1.Short scan is carried out with atwirl sampler.In accompanying drawing 6, laser beam is done horizontal scanning (p.s., corner was 2.29 °) through slow scanning catoptron 17, light beam irradiates to the aperture 19 of pivot arm 20, hole diameter 1mm, by little right-angle prism 18, the little right-angle prism 22 in the lens 21 of diameter of phi 7mm and center is formed light-conducting system in pivot arm.At last, sample beam shines on the detector 8 through outgoing aperture 23.Pivot arm 20 is under stepper motor 24 drives fast, with the frequency rotation of per second greater than 100 weeks.The hot spot of slow scanning and short scan scans as shown in Figure 7 mode takes a sample.
Be combined into the two-dimentional light beam scanner with slow scanning and short scan, the frameing time that can improve two-dimensional intensity distribution is to per second one frame.
The present invention adjusts the instrument light path with He-Ne Lasers.Make light beam irradiates about diameter 1cm to the monochromator entrance slit.If just adjust light path with the He-Ne Lasers indication, so secondly, be exactly to insert collimation plane mirror 4, make He-Ne laser autocollimatic, through beam splitter 3 surface reflections to testing laser device output window, adjust testing laser device light path, make testing laser and the same light path of He-Ne laser.When withdrawing from collimation plane mirror 4, testing laser enters monochromator along the He-Ne laser optical path that has mixed up.Adjust monochromator dispersion element corner, signal output is arranged up to the detector indication.If the He-Ne laser beam is done a measuring object, so, does not need to insert collimation plane mirror 4.CO with He-Ne laser aiming 10 μ m 2Laser or other invisible laser can be adjusted the measurement light path rapidly.
Beam splitter 3 is circular eyeglass of wedgelike.Use the wedge shape, the light beam of two surface reflections is separately eliminated and is disturbed before and after making.Beam splitter material is relevant with testing laser wavelength and intensity.
Light intensity decays device 5 is mainly used in the excessive strong testing laser of decay.If testing laser is a linear polarization, can use the Brewster angle analyzer, adjust laser intensity continuously by the angle rotation.
Chopper 6 provides modulation signal for pyroelectric detector.If without pyroelectric detector, also can be without chopper.
Detector 8 can be pyroelectric detector, photomultiplier, silicon photo diode according to the wavelength of testing laser.
Variable aperture light hurdle 9 is to dye black aluminum wheel disc, and the circular hole of different-diameter is arranged on the edge circumference, contains needed Guang Lan aperture.
Location catoptron 10 is the completely reflecting mirrors that are contained on the three-dimensional trim holder.It plays location, fine setting light-beam position.
Monochromator 16 plays three kinds of effects, and the one, be used for measuring optical maser wavelength, the 2nd, continuously change incident intensity by the slit width adjusting, the 3rd, the ground unrest of reduction detector.Sometimes do not need to measure wavelength, only wished the two kinds of effects in back, at this moment on the grating cover plate, paste the lastblock plane mirror, just successfully achieve the goal,, can directly receive yet without monochromator with detector as not measuring optical maser wavelength.
Advantage of the present invention is to finish the measurement of multiple laser beam parameter with an instrument, and these parameters include; Two-dimensional illumination intensity distribution stereographic map, equal strength distribution planimetric map, optical maser wavelength, waist diameter, spot diameter, laser power, beam divergence angle and the brightness of laser beam.Compare with the LMP-32 * 32-161 type pyroelectricity Array System of state-of-the-art U.S. Spiricon company, the present invention also has detector and easily selects except that the acquisition parameter is many, and cost is low, the graphics resolution advantages of higher.Be suitable for the measurement of various wavelength laser bundle parameters, be easy to popularize and promote from 100nm to 1000 μ m.
Description of drawings.Fig. 1. the laser-beam multi-parameter testing instrument component drawings.Fig. 2. helium neon laser beam two-dimensional intensity distribution stereographic map is line type above, is grid type below.Fig. 3. helium neon laser beam equal strength distribution planimetric map.Do not add the scale lattice above, add the scale lattice below.Fig. 4. microcomputer sends the process flow diagram of the instruction and the information of reception to stepper motor driver.Fig. 5. software design block diagram.Fig. 6. the two-dimentional light beam scanner structure figure that constitutes by slow scanning and short scan two assemblies.Fig. 7. the hot spot scanning and the sampling mode of slow scanning and short scan.
Most preferred embodiment: 1 embodiments of the invention are described in conjunction with the accompanying drawings.The He-Ne laser instrument 1 of the long 260mm in chamber, output laser by 1 ° of its wedge angle of BaFz crystal wedge beam splitter 3() and chopping frequency be the chopper 6 of 12.5Hz, gold-plated location catoptron 10 with radius-of-curvature 50cm focuses on, the two-dimentional light beam scanner reflective scan of being made up of plane mirror obtains as shown in Figure 2 laser intensity distribution plan and the planimetric map that distributes of equal strength shown in Figure 3 again, and typical laser beam parameter test result is as shown in table 1.
The two-dimensional scan catoptron, in pitch orientation, stepper motor is whenever further, catoptron corner 8.75 * 10 -6Rad(～1.8 "), maximum scan scope are 17.5mrad; At left and right directions, per step corner 4.5 * 10 -6Rad(～0.93 "), maximum scan scope are 72mrad.The grating monochromator of using in the experiment is the GDS-50-2 type, and its wavelength resolution is 1A, and wavelength coverage is 200nm to 25 μ m.Variable aperture light hurdle is made up of 4 holes, and its diameter is respectively 0.5mm, 1mm, 2mm and 3mm, and the frequency of chopper is adjustable from 10Hz to 3000Hz.Make receiving device with pyroelectric detector in the experiment, its performance is as shown in table 2.Stepper motor driver 15 is GDS-50-2 type grating monochromator accessory MSC scanning monitors.
The test result of table 1. pair helium neon laser beam different kinds of parameters
Laser speed parameter (Laser Beam Parameters) HN74912
Optical maser wavelength (Laser Wavelength) .6328 μ m
Beam waist diameter (Waist Diameter) *3.46586e-2 cm
Spot diameter (Beam Diameter) 1.69647 cm
Laser power (Laser Power) 1.87412e-3 W
Beam divergence angle (full-shape)
(Diverge Angle (FW)) 2.32469 mrad
Brightness (Brightness) 367582. W/cm 2Rad 2
1991/07/04
Table 2. pyroelectric detector performance
Figure 911074686_IMG2

Claims (5)

1, a kind of laser-beam multi-parameter testing instrument, include: as the helium-neon laser 1 of standard and indication light beam, beam splitter 3, chopper 6, location catoptron 10, monochromator 16 and detector 8, after it is characterized in that testing laser bundle 7 is through attenuator 5 decay, make the same light path of helium neon laser beam of its testing laser bundle and standard indication light beam with collimation plane mirror 4, pass through beam splitter, chopper shines the center of a location catoptron 10, light beam is focused the back by a variable aperture light hurdle 9, shine on the micro-processor controlled two-dimentional light beam scanner 11, the two-dimentional light beam scanner with its beam reflection to the entrance slit of monochromator 16, after dividing beam sampler, monochromator shines on the detector 8, the electric signal of detector output is sent into lock-in amplifier 14, arrives microcomputer display control program 13 again.
2, a kind of laser-beam multi-parameter testing instrument according to claim 1 is characterized in that the two-dimentional light beam scanner is made of the two-dimensional scan catoptron that can left and right sides pitching be the scanning of bow font that the stepper motor that two stepper motor drivers drive drives; Or the short scan rotating sampler that the slow scanning catoptron that is driven by a stepper motor and a stepper motor drive is constituted.
3, according to claim 1,2 described a kind of laser-beam multi-parameter testing instruments, the stepper motor driver that it is characterized in that drive stepping motor is made of a microcomputer and generation motor-drive circuit, and control by microcomputor program.
4,, it is characterized in that the two-dimensional scan catoptron that constitutes the two-dimentional light beam scanner has precise ball screw and the differential micromotion mechanism of elasticity according to claim 1,2 described a kind of laser-beam multi-parameter testing instruments.
5, a kind of laser-beam multi-parameter testing instrument according to claim 1 is characterized in that detector selects with the wavelength of its testing laser bundle, can be pyroelectric detector, photomultiplier, silicon photo diode.
CN91107468A 1991-08-15 1991-08-15 Laser-beam multi-parameter testing instrument Expired - Fee Related CN1038447C (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1313864C (en) * 2004-05-18 2007-05-02 中国科学院上海光学精密机械研究所 Reflective phase type focal area light distribution regulating system
CN102243098A (en) * 2011-04-01 2011-11-16 长春理工大学 In-situ test system of strong laser beam quality
CN102539116A (en) * 2011-04-21 2012-07-04 北京国科世纪激光技术有限公司 Method and device for measuring vertical divergence angle of high-power laser diode array
CN102539125A (en) * 2011-04-21 2012-07-04 北京国科世纪激光技术有限公司 Device for measuring vertical divergence angle of high-power laser diode array
CN104316185A (en) * 2014-10-29 2015-01-28 中国科学院光电研究院 Method and device for monitoring laser spectrum and spectral energy distribution simultaneously
CN104614082A (en) * 2014-12-10 2015-05-13 天津大学 TeraHertz wave line width measurement device and method
CN105487410A (en) * 2016-02-18 2016-04-13 江西洪都航空工业集团有限责任公司 Semi-physical simulation target simulating method of semi-active laser seeker
CN107643127A (en) * 2017-09-15 2018-01-30 电子科技大学 A kind of portable heavy caliber real time laser energy gauge and method
CN112710386A (en) * 2020-12-17 2021-04-27 北京空间机电研究所 Vacuum testing device and method for laser divergence angle after beam expansion

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CN85205319U (en) * 1985-11-30 1987-11-07 陕西师范大学 Laser divergance angle measuring meter

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1313864C (en) * 2004-05-18 2007-05-02 中国科学院上海光学精密机械研究所 Reflective phase type focal area light distribution regulating system
CN102243098B (en) * 2011-04-01 2013-02-13 长春理工大学 In-situ test system of strong laser beam quality
CN102243098A (en) * 2011-04-01 2011-11-16 长春理工大学 In-situ test system of strong laser beam quality
CN102539116B (en) * 2011-04-21 2014-03-26 北京国科世纪激光技术有限公司 Method and device for measuring vertical divergence angle of high-power laser diode array
CN102539125A (en) * 2011-04-21 2012-07-04 北京国科世纪激光技术有限公司 Device for measuring vertical divergence angle of high-power laser diode array
CN102539125B (en) * 2011-04-21 2014-01-08 北京国科世纪激光技术有限公司 Device for measuring vertical divergence angle of high-power laser diode array
CN102539116A (en) * 2011-04-21 2012-07-04 北京国科世纪激光技术有限公司 Method and device for measuring vertical divergence angle of high-power laser diode array
CN104316185A (en) * 2014-10-29 2015-01-28 中国科学院光电研究院 Method and device for monitoring laser spectrum and spectral energy distribution simultaneously
CN104614082A (en) * 2014-12-10 2015-05-13 天津大学 TeraHertz wave line width measurement device and method
CN105487410A (en) * 2016-02-18 2016-04-13 江西洪都航空工业集团有限责任公司 Semi-physical simulation target simulating method of semi-active laser seeker
CN107643127A (en) * 2017-09-15 2018-01-30 电子科技大学 A kind of portable heavy caliber real time laser energy gauge and method
CN112710386A (en) * 2020-12-17 2021-04-27 北京空间机电研究所 Vacuum testing device and method for laser divergence angle after beam expansion
CN112710386B (en) * 2020-12-17 2023-08-29 北京空间机电研究所 Vacuum testing device and testing method for laser divergence angle after beam expansion

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