CN106950198A - A kind of magneto-optic surface plasma resonance sensor - Google Patents
A kind of magneto-optic surface plasma resonance sensor Download PDFInfo
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- CN106950198A CN106950198A CN201710122592.8A CN201710122592A CN106950198A CN 106950198 A CN106950198 A CN 106950198A CN 201710122592 A CN201710122592 A CN 201710122592A CN 106950198 A CN106950198 A CN 106950198A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
- G01N21/554—Attenuated total reflection and using surface plasmons detecting the surface plasmon resonance of nanostructured metals, e.g. localised surface plasmon resonance
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Abstract
The invention belongs to optical sensing field, and in particular to a kind of magneto-optic surface plasma resonance sensor.The magneto-optic surface plasma resonance sensor that the present invention is provided, its magnetic material film is ferrocobalt FexCo1‑xFilm, wherein 0 ＜ x ＜ 1.Characteristic of the present invention using ferrocobalt magneto-optic effect much stronger than cobalt, by ferrocobalt FexCo1‑xFilm is as magnetic material film, to strengthen modulation capability of the magnetic field to device；Relative to existing two layers and the magneto-optic surface plasmon sensor of three-decker, its sensitivity is improved to original 1~2 times；Relative to magnetic oxide Ce YIG magneto-optic surface plasmon sensor, cost is reduced；And the present invention is applied to the magneto-optic surface plasmon sensor of various structures.
Description
Technical field
The invention belongs to optical sensing field, and in particular to a kind of magneto-optic surface plasma resonance sensor.
Background technology
Surface plasma resonance be when light incides metal and dielectric surface under certain condition a kind of caused electronics with
The effect of plasma collective concussion.Due to surface plasma resonance can make electromagnetic field can be by local in metal and medium
Surface simultaneously strengthens so that it is widely used in without mark bio-sensing, chemical sensitisation etc..But it is due to metal level in structure
High loss, limit sensitivity and the resolution ratio of traditional surface plasma sensor, it is impossible to examine applied to unimolecule biology
Survey, it is necessary to be optimized to it.
The magneto-optic surface plasma body resonant vibration of magnetic material layer formation is introduced in conventional surface plasma resonance structure,
Surface plasma bulk effect can be modulated by magnetic field, so as to obtain higher sensing capabilities.Magneto-optic wherein based on gold/cobalt
Surface plasmon sensor, has been widely studied and the sensitivity of conventional surface plasma resonance sensor is improved into three
Times.In addition to gold/cobalt two-layer structure, main magneto-optic surface plasmon sensor also includes gold/cobalt/gold, silver/cobalt/silver etc. at present
Three-decker.In addition to continuous film structure, also including structures such as nano-dot matrix, nanometer antipoints battle arrays.
Optimization to magneto-optic surface plasma resonance sensor is broadly divided into optimization structure and optimization material two ways.
The magneto-optic effect of now widely used magnetic material cobalt is weaker, and other magnetic materials such as iron etc., which exists, is lost higher, magnetic
There is the shortcomings of complicated cost of preparation technology is higher in oxide Ce-YIG etc..
The content of the invention
There is problem or deficiency for above-mentioned, the invention provides a kind of magneto-optic surface plasma resonance sensor.
Its magnetic material film is iron cobalt in the magneto-optic surface plasma resonance sensor that the present invention is provided, device architecture
Alloy FexCo1-xFilm, wherein 0 ＜ x ＜ 1.
Further, the structure of the magneto-optic surface plasma resonance sensor includes substrate base successively from the bottom to top
Piece, lower floor's noble metal film, magnetic material film and upper strata noble metal film；Lower floor's noble metal film thickness is 0~60nm, iron
Cobalt alloy FexCo1-x5~30nm of film thickness, upper strata noble metal film is 20~60nm；Lower floor's noble metal film thickness
Whole device is double-layer structure during for 0nm, is not three-decker for 0nm.
Characteristic of the present invention using ferrocobalt magneto-optic effect much stronger than cobalt, by ferrocobalt FexCo1-xFilm is used as magnetic
Property material film, to strengthen modulation capability of the magnetic field to device；Relative to existing two layers and three-decker magneto-optic surface etc. from
Daughter sensor, its sensitivity is improved to original 1~2 times；Magneto-optic surface plasma relative to magnetic oxide Ce-YIG
Body sensor, reduces cost；And the present invention is applied to the magneto-optic surface plasmon sensor of various structures.
Brief description of the drawings
The structure chart of Fig. 1 embodiments；
The sensing test principle figure of Fig. 2 embodiments；
The optimization circle of equal altitudes of Fig. 3 embodiments；
Fig. 4 embodiments and the TMOKE signal graphs of two kinds of existing sensing arrangements；
The sensing testing figure of Fig. 5 embodiments；
Fig. 6 embodiments are compared figure with the sensing sensitivity of two kinds of existing sensing arrangements.
Embodiment
Embodiment：
The present embodiment is used as magnetic layer material in magneto-optic surface plasma resonance sensor, whole device using ferrocobalt
Part includes ferrocobalt film, gold thin film from the bottom to top.Ferrocobalt thickness is 14nm, during gold thin film is 30nm, ferrocobalt
The content x=0.7 of iron.
Preparation method
From BK7 glass as substrate base, film is deposited by the way of magnetron sputtering.Cavity back end vacuum
Spend for 5.0 × 10-4Pa, operating air pressure is Ar gas, and constant air pressure is 0.5pa during sputtering.All depositions are carried out at normal temperatures.
Step 1, in BK7 deposition on substrate 14nm ferrocobalts.Target is iron target and cobalt target, by the way of cosputtering,
Iron target is placed in direct current target position, sets power as 50w, cobalt target is placed in radio frequency target position, sets power as 50w.Sputter rate 0.15nm/
S, sputtering time is 1min33s.
Step 2, the deposition 30nm gold on ferrocobalt layer, gold target are placed in direct current target position, set power as 50w, sputtering speed
Rate 1nm/s, sputtering time is 30s.
Emulated by 4 × 4 method of transition matrices, can further optimize relevant parameter.The optimum results of the present embodiment such as Fig. 3
It is shown.
In addition to the embodiment, be prepared for two groups of existing sensing arrangements and test as a comparison, respectively each thickness degree all with
Embodiment identical gold/cobalt and gold/iron construction.
Testing process
Gained sample will be prepared to be placed on BK7 glass prisms, by wavelength for 650nm light from sample back surface incident, change
Incident angle, is detected, the angle, θ in reflection angle spectrum corresponding to minimum point to its reflection angle spectrum RSPRIt is referred to as surface
Plasma resonance angle.The reflection angle determined by additional positive negative sense magnetic field composes R (± H), can define horizontal Ke Er magnetic
Luminous effect (TMOKE):
TMOKE=R (+H)-R (- H)
Sensitivity then may be defined as：
Above formula front portion represents TMOKE signals in θSPRThe slope at place, rear portion represents θSPRWith medium refraction index
ndThe amplitude of change.Therefore, sample sensing sensitivity can be expressed as in θSPRLocate sample TMOKE signals on medium refraction index
Rate of change.
When testing device sensing sensitivity, sensing solution is placed in microfluid and is overlying on the surface of gold thin film and tests each folding
Penetrate test TMOKE signals under rate.Sensing solution is the glycerite that mass ratio is 0%, 5%, 10%, 15%, its refractive index point
Yue Wei 1.332,1.338,1.344,1.350.
When refractive index is 1.332, the TMOKE signals of embodiment and two kinds of existing sensing arrangements are as shown in figure 4, embodiment
TMOKE signals are apparently higher than two other sample.The TMOKE signals of embodiment are with the skew of refractive index as shown in figure 5, its doubling
The susceptibility for penetrating rate is about 147。/RIU.Embodiment with two kinds of existing sensing arrangements test gained sensing sensitivities as shown in fig. 6,
Under identical structural parameters, embodiment sensitivity maximum (0.306RIU-1), and be gold/cobalt structure (0.153RIU-1) twice.
To sum up, the present invention is used as magnetic layer material by introducing ferrocobalt, and its preparation technology is simple, with low cost, energy
It is enough to improve the existing magneto-optic surface plasmon sensor sensitivity relative to existing two layers with three-decker to original 1
~2 times, this has very big application value for optical sensing field.And suitable for the magneto-optic surface plasma of various structures
Body sensor.
Claims (2)
1. a kind of magneto-optic surface plasma resonance sensor, it is characterised in that：Magnetic material film is in the device architecture
Ferrocobalt FexCo1-xFilm, wherein 0 ＜ x ＜ 1.
2. magneto-optic surface plasma resonance sensor as claimed in claim 1, it is characterised in that：
The structure includes substrate base, lower floor's noble metal film, magnetic material film and upper strata noble metal successively from the bottom to top
Film；Lower floor's noble metal film thickness is 0~60nm, ferrocobalt FexCo1-x5~30nm of film thickness, upper strata noble metal is thin
Film is 20~60nm；Whole device is double-layer structure when lower floor's noble metal film thickness is 0nm, is not three-layered node for 0nm
Structure.
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| CN201710122592.8A CN106950198A (en) | 2017-03-03 | 2017-03-03 | A kind of magneto-optic surface plasma resonance sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109900659A (en) * | 2019-03-20 | 2019-06-18 | 电子科技大学 | A kind of index sensor based on magneto-optic surface plasma body resonant vibration |
| CN111272666A (en) * | 2020-02-27 | 2020-06-12 | 电子科技大学 | Bio-protein sensor based on magneto-optical surface plasmon resonance |
| CN113189051A (en) * | 2021-05-11 | 2021-07-30 | 河南工业大学 | Method for preparing magneto-optical glass-based periodic nanopore magnetic plasma sensor |
| US20220229318A1 (en) * | 2020-08-13 | 2022-07-21 | Conrad Rial | Materials and methods used with plasmon resonance detection techniques |
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| US20040239936A1 (en) * | 2003-01-27 | 2004-12-02 | Lake Shore Cryotronics, Inc. | Surface corrugation enhanced magneto-optical indicator film |
| CN103891068A (en) * | 2011-10-20 | 2014-06-25 | 阿尔卡特朗讯 | Integrated optical structure comprising an optical isolator |
| CN104089931A (en) * | 2014-06-13 | 2014-10-08 | 电子科技大学 | High sensitivity refractive index sensor based on medium magneto-optic surface plasma resonance |
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| US20040239936A1 (en) * | 2003-01-27 | 2004-12-02 | Lake Shore Cryotronics, Inc. | Surface corrugation enhanced magneto-optical indicator film |
| CN103891068A (en) * | 2011-10-20 | 2014-06-25 | 阿尔卡特朗讯 | Integrated optical structure comprising an optical isolator |
| CN104089931A (en) * | 2014-06-13 | 2014-10-08 | 电子科技大学 | High sensitivity refractive index sensor based on medium magneto-optic surface plasma resonance |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109900659A (en) * | 2019-03-20 | 2019-06-18 | 电子科技大学 | A kind of index sensor based on magneto-optic surface plasma body resonant vibration |
| CN109900659B (en) * | 2019-03-20 | 2022-05-03 | 电子科技大学 | Refractive index sensor based on magneto-optical surface plasma resonance |
| CN111272666A (en) * | 2020-02-27 | 2020-06-12 | 电子科技大学 | Bio-protein sensor based on magneto-optical surface plasmon resonance |
| CN111272666B (en) * | 2020-02-27 | 2022-01-25 | 电子科技大学 | Bio-protein sensor based on magneto-optical surface plasmon resonance |
| US20220229318A1 (en) * | 2020-08-13 | 2022-07-21 | Conrad Rial | Materials and methods used with plasmon resonance detection techniques |
| CN113189051A (en) * | 2021-05-11 | 2021-07-30 | 河南工业大学 | Method for preparing magneto-optical glass-based periodic nanopore magnetic plasma sensor |
| CN113189051B (en) * | 2021-05-11 | 2022-08-02 | 河南工业大学 | Method for preparing magneto-optical glass-based periodic nanopore magnetic plasma sensor |
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