CN106920887A - Printing OLED and preparation method thereof - Google Patents
Printing OLED and preparation method thereof Download PDFInfo
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- CN106920887A CN106920887A CN201610308048.8A CN201610308048A CN106920887A CN 106920887 A CN106920887 A CN 106920887A CN 201610308048 A CN201610308048 A CN 201610308048A CN 106920887 A CN106920887 A CN 106920887A
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- oled
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The present invention relates to one kind printing OLED and preparation method thereof, the preparation method is comprised the following steps:A, on the substrate for be coated with conductive anode anode pattern is prepared with photoetching process;B, on the conductive anode with coating process prepare pixel defining layer, then by photoetching process each pixel position formed pixel container;C, using InkJet printing processes toward OLED ink materials are injected in the pixel container, obtain liquid film;D, using wind pouring by the way of pre-dried is carried out to the liquid film;E, the solvent that residual in the liquid film after the step D is processed thoroughly is removed using vacuum drying, form the film of dry solidification;F, by the way of evaporation complete the preparation of negative electrode and encapsulate, obtain final product.The present invention can improve the uniformity of film forming in printing OLED pixel, reduce or avoid Mura phenomenons, and then improve the performance of printing OLED.
Description
Technical field
The present invention relates to light emitting device field, more particularly to a kind of printing OLED and preparation method thereof.
Background technology
Organic luminescent device (OLED) obtains larger hair in recent years as flat panel display of future generation
Exhibition.The small size OLED of the mobile display field such as mobile phone is applied to, volume production is had been realized in, entered
Market-oriented stage.For the large scale OLED towards applications such as TVs, due to material, technique still
It is not mature enough, at present still in the development phase.Wherein, the OLED technology based on solwution method typography,
Because its stock utilization high, without using hyperfine mask plate (FFM) and low equipment investment cost etc.
A kind of advantage, it is considered to be large scale OLED Display Techniques of great potential.However, printing OLED is still
Having many technical barriers needs to overcome.Wherein, the film-forming process of printing OLED is a key technology.Cause
Performance, life-span and the Luminescence Uniformity of printing OLED can be directly affected for the quality of film forming.How to carry
The uniformity of film forming is a difficult point in pixel high.
Being generally used for the material of typography would generally coordinate printing equipment accordingly to be optimized, and for example would generally
Increase a certain proportion of high boiling solvent in the solvent of material, so as to effectively prevent inkjet printing (Inkjet
Printing nozzle (Nozzle)) because material solvent volatilizees it is too fast and caused by spray nozzle clogging.And this height boiling
The solvent of point will be than more intractable after inkjet printing terminates, and common processing method is dry using vacuum
Dry (Vacuum Dry) reduces the boiling point of solvent so as to more fully volatilize at a lower temperature.And
This processing mode generally still can cause film forming in certain pixel uneven or even produce the halo of many colours (Mura),
Just carried out by transmission devices such as manipulators when especially film has mobility also in liquid in pixel
Transmission transfer.
Therefore, prior art has yet to be improved and developed.
The content of the invention
Based on this, it is necessary to regarding to the issue above, there is provided one kind printing OLED and preparation method thereof,
Aim to solve the problem that the uneven problem of film forming in existing printing OLED manufacturing process.
To reach above-mentioned technical purpose, concrete technical scheme is as follows:
A kind of preparation method for printing OLED, comprises the following steps:
A, on the substrate for be coated with conductive anode anode pattern is prepared with photoetching process;
B, on the conductive anode with coating process prepare pixel defining layer, then existed by photoetching process
The position of each pixel forms pixel container;
C, using InkJet printing processes toward OLED ink materials are injected in the pixel container, obtain liquid film;
D, using wind pouring by the way of pre-dried is carried out to the liquid film;
E, remain in the liquid film after the step D is processed molten is thoroughly removed using vacuum drying
Agent, forms the film of dry solidification;
F, by the way of evaporation complete the preparation of negative electrode and encapsulate, obtain final product.
Wherein in some embodiments, the magnitude range of the air velocity v that the wind in the step D drenches is
0<v≤10m/s。
Wherein in some embodiments, the airflow direction that the wind in the step D drenches is perpendicular to the liquid
The direction of film.
Wherein in some embodiments, the scope of the pre-dried time T in the step D is T<1min.
Wherein in some embodiments, wind in the step D drench source of the gas used for not with the OLED
There is the gas of physics or chemical reaction in ink material or liquid film.
Wherein in some embodiments, the wind in the step D drenches source of the gas used for cleaniliness classs is less than
Clean gas equal to 100 grades.
Wherein in some embodiments, the conductive anode is in ITO, AZO, nanometer Ag film, Graphene
One or more.
Wherein in some embodiments, the pixel defining layer is oleophobic material or hydrophobic material.
The present invention also provides the printing OLED obtained by a kind of above-mentioned preparation method.
Inventor causes film forming in certain pixel uneven even in the prior art by numerous studies discovery
Produce the halo of many colours (Mura) phenomenon main reason is that the liquid film after terminating to ink-jet does not take predry
Drying process.Therefore inventor is after the printing for completing OLED ink materials using the mode of inkjet printing,
The mode for taking wind to drench in the original location carries out pre-dried to liquid film, and the most of solvent of removal makes it not
With mobility;The kinds of drive such as manipulator, conveyer belt are recycled to be shifted simultaneously film after the step
Carry out the vacuum drying treatment technique of next step;Thus successfully ensure that film during transfer not
The Mura phenomenons that the flowing of liquid can occur and cause.Meanwhile, the preferred wind of the present invention drenches technique carries out predry
Dry, it is that the solvent in liquid film is taken away using the convection current of gas that wind drenches.Present invention utilizes the inertia of air-flow
What characteristic, i.e. air-flow were often walked is most short nearest approach, using air-flow the characteristic and coordinate the present invention it is excellent
The air velocity of choosing, source of the gas and airflow direction, can cause that film volatilizees homogeneous, and evaporation rate tends to flat
With so as to improve the uniformity of film in pixel.
The present invention by terminating to inkjet printing after liquid film carry out the method that wind in situ drenches pretreatment, can
To improve the uniformity of film forming in printing OLED pixel, Mura phenomenons, Jin Erti are reduced or avoided
The performance of printing OLED high.
Brief description of the drawings
Fig. 1 is structural representation of the present invention printing OLED when manufacturing process apoplexy drenches step;Its
In, 11 is substrate, and 12 is conductive anode, and 13 is pixel defining layer, and 14 is OLED ink materials, 15
For the air-flow that wind drenches, 16 is gas source generator.
Specific embodiment
The present invention is further illustrated by the following examples, it will be appreciated that specific embodiment described herein is simultaneously
It is not used in the restriction present invention.
Device therefor raw material of the present invention is commercially available mill run.
Embodiment 1
It is of the invention to illustrate with the preparation scheme of the printing OLED of the structure shown in Fig. 1 below
Implementation process.
A kind of preparation method for printing OLED, comprises the following steps:
A, on the substrate 11 for being coated with conductive anode 12 anode pattern is prepared with photoetching process;
B, on conductive anode with coating process prepare pixel defining layer 13, then existed by photoetching process
The position of each pixel forms pixel container;
C, with InkJet printing processes toward OLED ink materials 14 are injected in pixel container, obtain liquid film;
D, by wind drench in the way of pre-dried is carried out to liquid film;
E, the solvent that residual in film is thoroughly removed using vacuum drying, form the film of dry solidification;
F, the preparation for completing OLED cathode thin films are simultaneously packaged to device, form printing OLED.
In step, produced necessarily with normal photolithographic process on the substrate 11 for being coated with conductive anode 12
The conductive anode 12 of pattern.Conductive anode 12 can select in ITO, AZO, nanometer Ag film, Graphene
One or more.
In stepb, pixel defining layer 13 is made with conventional coating process on conductive anode 12, then
Pixel container is formed in the position of each pixel by normal photolithographic process.The surface of pixel defining layer 13 has dredges
The characteristic of liquid, it, according to the difference from OLED ink material performances, can be hydrophobicity or oleophobic property
Material, to prevent the OLED ink materials in inkjet printing steps from spilling over outside pixel container, in the present embodiment
In, pixel defining layer 13 is hydrophobic material.
In step C, pixel film is carried out using the method for typical inkjet printing (Inkjet Printing),
Injection OLED ink materials 14, obtain liquid film in toward pixel container.In order to prevent the nozzle of printer
(Nozzle) resulted in blockage because material volatilization is too fast, generally from boiling point it is higher (>100 DEG C) material
As the solvent of OLED ink materials 14, such as ethylene glycol phenyl ether (JS-EPH), hexamethyl Asia phosphono three
Amine (HMPT), HEPT, CHB etc., the OLED ink materials selected in the present embodiment are empty liquid
Cave implanted layer (Liquid HIL), after step C terminates, there has been corresponding in the pixel container of substrate 11
OLED ink materials 14, because its partial solvent boiling point is of a relatively high, Gu generally now still with the shape of liquid
State is present, and forms liquid film.
In step D, the mode drenched using wind on the original position of above-mentioned InkJet printing processes is held to pixel
OLED ink materials 14 in device carry out predrying, and those skilled in the art can be according to different OLED
Ink material 14 selects corresponding air velocity, source of the gas species, and air-flow flow circuit mode.The present embodiment
In (see Fig. 1) wind drench mode be thin to liquid using the gas source generator 16 with high efficiency filter core
Film applies the air-flow 15 perpendicular to liquid film direction, and the source of the gas for using is air, and air velocity is 2.5m/s,
Drying time is 8s;In the present embodiment high efficiency particulate air filter using come ensure apply gas cleanliness factor, keep away
Exempt from the process carries out secondary pollution to film, usually requires that cleaning gas degree is less than or equal to 100 grades of (the United States Federal
The standard [Federal Atandard (FS) 209E, 1992] that government promulgates).The species of source of the gas depends on OLED
Ink material, wind drenches to be needed to ensure that source of the gas is gases used any physics will not occur with OLED ink materials 14
Chemical reaction, or there is specific physical and chemical reaction according to the actual requirements.Source of the gas can also be according to reality
There is the specific gas for physically or chemically reacting with the ink or film in border demand.Source of the gas be selected from air,
Nitrogen or other gases.By taking the liquid hole injection layer (Liquid HIL) of the present embodiment as an example, with PEDOT:
PSS will not generally react for the liquid hole-injecting material of main component with the atmosphere in air, the feelings
Condition can use air as wind and drench source of the gas;And equally it is the small molecule solvent type of liquid hole-injecting material
Material then needs the source of the gas of nitrogen to avoid the water oxygen in air from damaging film;The size of air velocity
It is then very crucial technological parameter with direction, there should be difference to the OLED ink materials 14 of different boiling
Speed matched, drench rate of drying, the air velocity v for generally selecting so as to reach a preferable wind
Scope is 0<V≤10m/s, this step removes most of solvent of liquid film, it is not had mobility;This
Using the most preferred airflow direction perpendicular to liquid film direction in embodiment, and in other embodiments,
Wind drenches can also take other airflow directions, but wherein be most preferably perpendicular to the air-flow side in liquid film direction
To.
In step E, remain in film molten is thoroughly removed using vacuum drying method under heating condition
Agent, obtains dry film, because the requirement solvent removal of this step is thorough, therefore it is preferred that in the same of heat drying
Shi Jinhang applications of vacuum reduce the boiling point of solvent.
In step F, after the above step is finished, the mode that evaporation may be selected carries out remaining OLED work(
, finally be packaged for OLED by the thin film deposition of ergosphere, and packaging technology can be selected from tradition routine
The thin-film package such as the encapsulation of paster cover plate or face encapsulation.
The present invention also provides a kind of printing OLED, and it uses preparation method as described above to be made.
Each technical characteristic of embodiment described above can be combined arbitrarily, not right to make description succinct
The all possible combination of each technical characteristic in above-described embodiment is all described, as long as however, these skills
The combination of art feature does not exist contradiction, is all considered to be the scope of this specification record.
Embodiment described above only expresses several embodiments of the invention, and its description is more specific and detailed,
But can not therefore be construed as limiting the scope of the patent.It should be pointed out that for this area
For those of ordinary skill, without departing from the inventive concept of the premise, some deformations can also be made and changed
Enter, these belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be with appended power
Profit requires to be defined.
Claims (9)
1. it is a kind of print OLED preparation method, it is characterised in that comprise the following steps:
A, on the substrate for be coated with conductive anode anode pattern is prepared with photoetching process;
B, on the conductive anode with coating process prepare pixel defining layer, then existed by photoetching process
The position of each pixel forms pixel container;
C, using InkJet printing processes toward OLED ink materials are injected in the pixel container, obtain liquid film;
D, using wind pouring by the way of pre-dried is carried out to the liquid film;
E, remain in the liquid film after the step D is processed molten is thoroughly removed using vacuum drying
Agent, forms the film of dry solidification;
F, by the way of evaporation complete the preparation of negative electrode and encapsulate, obtain final product.
2. it is according to claim 1 printing OLED preparation method, it is characterised in that it is described
The magnitude range of the air velocity v that the wind in step D drenches is 0<v≤10m/s.
3. it is according to claim 1 printing OLED preparation method, it is characterised in that it is described
The airflow direction that wind in step D drenches is perpendicular to the direction of the liquid film.
4. it is according to claim 1 printing OLED preparation method, it is characterised in that it is described
The scope of the pre-dried time T in step D is T<1min.
5. the preparation method of the printing OLED according to any one of claims 1 to 3, its feature exists
In, wind in the step D drench source of the gas used for not with the OLED ink materials or liquid film
There is the gas of physics or chemical reaction.
6. the preparation method of the printing OLED according to any one of claims 1 to 3, its feature exists
In the wind in the step D drenches the clean gas of source of the gas used for cleaniliness classs less than or equal to 100 grades.
7. the preparation method of the printing OLED according to any one of claims 1 to 3, its feature exists
In the conductive anode is one or more in ITO, AZO, nanometer Ag film, Graphene.
8. the preparation method of the printing OLED according to any one of claims 1 to 3, its feature exists
In the pixel defining layer is oleophobic material or hydrophobic material.
9. the printing OLED obtained by a kind of any one of claim 1~8 preparation method.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108963046A (en) * | 2017-10-25 | 2018-12-07 | 广东聚华印刷显示技术有限公司 | Luminescent device and preparation method thereof |
CN109285926A (en) * | 2017-07-20 | 2019-01-29 | Tcl集团股份有限公司 | Film for printing LED substrate, printed form film LED device and preparation method thereof |
CN111063816A (en) * | 2019-12-19 | 2020-04-24 | 深圳市华星光电半导体显示技术有限公司 | Organic light-emitting diode, preparation method and display device |
CN111384310A (en) * | 2018-12-29 | 2020-07-07 | 广东聚华印刷显示技术有限公司 | Method for forming organic thin film and use thereof |
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CN105428554A (en) * | 2015-12-21 | 2016-03-23 | Tcl集团股份有限公司 | Printed OLED device and fabrication method thereof |
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CN1434666A (en) * | 2002-01-23 | 2003-08-06 | 精工爱普生株式会社 | Organic EL device and making method, making device and liquid drop spraying out device thereof |
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Publication number | Priority date | Publication date | Assignee | Title |
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