CN106920879A - A kind of forming method of the natural nano post film of self assembly - Google Patents

A kind of forming method of the natural nano post film of self assembly Download PDF

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Publication number
CN106920879A
CN106920879A CN201710166293.4A CN201710166293A CN106920879A CN 106920879 A CN106920879 A CN 106920879A CN 201710166293 A CN201710166293 A CN 201710166293A CN 106920879 A CN106920879 A CN 106920879A
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China
Prior art keywords
natural nano
forming method
substrate
self assembly
post film
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CN201710166293.4A
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Inventor
仪明东
徐姣姣
黄维
解令海
郭丰宁
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Nanjing Post and Telecommunication University
Nanjing University of Posts and Telecommunications
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Nanjing Post and Telecommunication University
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Priority to CN201710166293.4A priority Critical patent/CN106920879A/en
Publication of CN106920879A publication Critical patent/CN106920879A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/466Lateral bottom-gate IGFETs comprising only a single gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40Thermal treatment, e.g. annealing in the presence of a solvent vapour

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Semiconductor Memories (AREA)

Abstract

The invention discloses a kind of forming method of the natural nano post film of self assembly, bulky amine material and wide bandgap semiconductor materials are dissolved in low boiling point solvent respectively, are spin-coated on after blending on substrate and annealing prepares natural nano post film;The application can be widely applied to all kinds of polymer, the generation of the nano-pillar film of solvable small molecule electret type, the application is charge storage layer by using nano-pillar film, greatly improved with organic active layer contact area, so that memory capacity and charge stability are greatly improved, there is huge potential application foreground in organic field effect tube memory, and device preparation cost is reduced, is easy to promote, applied.

Description

A kind of forming method of the natural nano post film of self assembly
Technical field
It is thin the invention belongs to plastic electronic science and technology and industrial technical field, more particularly to a kind of natural nano post of self assembly The forming method of film.
Background technology
Organic nanoparticles are the important components of nano material, and it has the morphosis of stabilization, can pass through Polymerization methodses and polymerized monomer design synthesis and prepare from molecular level, and its size easy to control and particle is homogeneous Property, make it in the skin effect with nano material, quantum size effect, while macro quanta tunnel effect, also with it His specific function, such as temperature, acid-base value, electric field and magnetic field responsiveness.In recent years, organic nano material has photoelectricity due to it Property and the controllable extensive concern for causing everybody of micro-nano structure, have been applied to multiple fields, such as in organic effect crystal The devices such as pipe memory, fiber waveguide, laser.Organic nanostructure based on small molecule is expected to construct the small-sized micro-nano device of novelty Part, and with unique performance, can supplement or match in excellence or beauty CNT and inorganic nanostructures in micro-nano photoelectric device Using.
The diversity of structure, easily cutting property, the low feature of assembly cost, so that organic can be showed due to organic molecule Nano material shows many functions that inorganic or metal nano material cannot possess.Such as organic nano material has due to it Mechanicalness and be used widely in flexible electronic device, achieved storage wearableization.
The present invention provides a kind of forming method of the natural nano post film of self assembly, can be by regulating and controlling two kinds of doped solutions Solubility, volume ratio and rotating speed during spin coating regulate and control thickness, size and the height of nano-pillar.Described nano-pillar film energy The contact area with organic active layer is enough effectively improved, so as to improve depositing for the organic field effect tube memory prepared by it Storage characteristic, and the features such as with big memory window, speed of photoresponse high, high storage density and data stability high.
The content of the invention
The technical problem of solution:The present invention mainly proposes a kind of forming method of the natural nano post film of self assembly, Solution has that memory capacity is low, charge stability is low, preparation cost is high in the prior art, using skills such as inconvenient and complex process Art problem.The preparation side that nano-pillar film layer improves stability with enlarged contact areas can be prepared by aqueous solution green processing Method, the present invention does not increase large test technique, technical difficulty on the basis of existing universal test sign equipment, there is provided Yi Zhongjian Single method prepares nano-pillar charge storage layer, with extremely strong universality.
Technical scheme:A kind of forming method of the natural nano post film of self assembly, comprises the following steps:
The first step:Bulky amine material and wide bandgap semiconductor materials are dissolved in low boiling point solvent respectively, concentration is 3mg/mL, made Obtain bulky amine material solution and wide bandgap semiconductor materials solution;
Second step:Bulky amine material solution that to be prepared in the first step and wide bandgap semiconductor materials solution by volume 1:5 are total to It is mixed, stand;
3rd step:Gate electrode and gate insulation layer are sequentially formed on substrate, the thickness of gate insulation layer is 300 nm, is made substrate, Substrate is respectively cleaned by ultrasonic 10min with acetone, ethanol and deionized water successively, and supersonic frequency is 100 KHz, then will with high pure nitrogen Substrate surface liquid is dried up, and drying in 120 DEG C of baking oven is put into afterwards;
4th step:Clean substrate after by drying processes 3 ~ 5 min using UV ozone;
5th step:The solution that the substrate surface spin coating second step that 4th step is handled well is prepared, spin coating rotating speed is 3000 r/ Min, spin-coating time 30s, thickness control in atmosphere, the good substrate of spin coating are placed in 80 DEG C of baking oven and are dried in 5 ~ 50 nm Anneal 30 min, and natural nano post film is obtained;
6th step:The pattern of natural nano post film is observed by atomic force microscope, natural nano column diameter height exists 10-20 nm。
As a preferred technical solution of the present invention:The substrate is selected from heavy doping silicon chip, sheet glass or plastics PET, Gate electrode is selected from highly doped silicon, aluminium, copper, silver, gold, titanium or tantalum, and gate insulation layer is selected from silica, aluminum oxide, zirconium oxide, polyphenyl Ethene PS or polyvinylpyrrolidone PVP.
As a preferred technical solution of the present invention:Low boiling point solvent is toluene in the first step.
As a preferred technical solution of the present invention:Spin coating process in 5th step is to carry out in atmosphere, empty Air humidity degree is 40-50%.
As a preferred technical solution of the present invention:The bulky amine material uses ternary toroidal molecule, and broad-band gap is partly led Body material uses trimethylolpropane.
Beneficial effect:A kind of forming method of the natural nano post film of self assembly of the present invention uses above technical side Case compared with prior art, with following technique effect:1st, the present invention provides a kind of shape of the natural nano post film of self assembly Into method, can be on the premise of being tested using AFM general at present, it is not necessary to increase extra analysis test System, can preferably test out the pattern of nano-pillar film, there is preferable effect of visualization;What the 2nd, the present invention was provided is this from group The forming method of the natural nano post film of dress, process complexity can be not being increased and in letter using simple spin coating proceeding On the premise of prepared by single equipment, the contact area between increase charge storage layer and organic active layer is deposited to design with height A kind of feasible thinking of offer is promoted in the commercialization for storing up the organic transistor memory of density;3rd, the composite can be widely applied to each Birds of the same feather flock together compound, the generation of the nano-pillar film of solvable small molecule electret type;4th, the present invention is electricity by using nano-pillar film Lotus accumulation layer, greatly improves with organic active layer contact area so that memory capacity and charge stability obtain very big carrying Rise, there is huge potential application foreground in organic field effect tube memory, and reduce device preparation cost, just In popularization, application;5th, the thickness of nano-pillar, size and height adjustable, so as to improve the organic field effect tube prepared by it The storage characteristics of memory, and with spies such as big memory window, speed of photoresponse high, high storage density and data stability high Point;6th, large test technique, technical difficulty are not increased on the basis of existing universal test sign equipment, there is provided a kind of simple Method prepares nano-pillar charge storage layer, with extremely strong universality, is easy to promote, applies;7th, suggestion addition experimental data is made Be beneficial effect, auditor's later stage examine in more can intuitively understand the technique effect of the application.
Brief description of the drawings:
The nano-pillar membrane structure schematic diagram that Fig. 1 is used by present example;
Fig. 2 is the AFM photos of the organic charge accumulation layer with nanometer rod structure in embodiment 1.
Specific embodiment
Specific embodiment of the invention is described in further detail with reference to Figure of description:
Embodiment 1
As depicted in figs. 1 and 2, the first step:By ternary toroidal molecule WG3It is dissolved in without extra except the organic solvent toluene of water process In, concentration is 3mg/mL, it is uniformly dispersed, and trimethylolpropane TMP is dissolved in and removes the organic of water process without extra In solvent toluene, solution concentration is 3 mg/ml, stands 24 h, it is uniformly dispersed;
Second step:The WG that will be configured in the first step3Solution and trimethylolpropane TMP solution by volume 1:5 blendings, rock Stood after even, it is uniformly dispersed;
3rd step:Highly doped silicon layer and silicon dioxide layer are sequentially formed on heavy doping silicon chip, the thickness of silicon dioxide layer is 300 Nm, is made substrate, and substrate is respectively cleaned by ultrasonic 10min with acetone, ethanol, deionized water successively, and supersonic frequency is 100 KHz, then Substrate surface liquid is dried up with high pure nitrogen ensure that substrate surface is clean, drying in 120 DEG C of baking oven is put into afterwards;
4th step:Clean substrate after by drying processes 3 ~ 5 min using UV ozone;
5th step:In air humidity is 40-50% air, the substrate surface spin coating second step that the 4th step is handled well is configured Solution, spin coating rotating speed is the slow-speed of revolution 3000 r/min, spin-coating time 30s, thickness control in 50 nm, in atmosphere, by spin coating Good substrate is placed on the min of drying and annealing 30 in 80 DEG C of baking oven, and natural nano post film is obtained, and AFM photos are as shown in Figure 2;
6th step:The pattern of natural nano post film is observed by atomic force microscope, natural nano column diameter height exists 10-20 nm, are presented the geometry of rule, and surface is smooth, even thickness crystal structure.
All test results show, a kind of forming method of the natural nano post film of self assembly involved in the present invention, Preparation process is simple to operate, with low cost, and main processes are completed in the solution, energy saving, and can be given birth on a large scale Product is applied in organic effect memory.
The present invention provides a kind of forming method of the natural nano post film of self assembly, can use original general at present On the premise of sub- force microscope is tested, it is not necessary to increase extra analysis of test system, can preferably test out nano-pillar film Pattern, have preferable effect of visualization;The forming method of the natural nano post film of this self assembly that the present invention is provided, adopts Can not increased process complexity and on the premise of the preparation of simple equipment, increase electric charge and deposit with simple spin coating proceeding Contact area between reservoir and organic active layer, is the commercialization of organic transistor memory of the design with high storage density Promote and a kind of feasible thinking is provided;The composite can be widely applied to all kinds of polymer, the nanometer of solvable small molecule electret type The generation of post film;The present invention is charge storage layer by using nano-pillar film, is carried significantly with organic active layer contact area It is high so that memory capacity and charge stability are greatly improved, and have huge in organic field effect tube memory Big potential application foreground, and device preparation cost is reduced, it is easy to promote, applies;The thickness of nano-pillar, size and height It is adjustable, so that improve the storage characteristics of the organic field effect tube memory prepared by it, and with big memory window, bloom The features such as response speed, high storage density and data stability high;Do not increase on the basis of existing universal test sign equipment Large test technique, technical difficulty, there is provided a kind of simple method prepares nano-pillar charge storage layer, with extremely strong pervasive Property, it is easy to promote, applies;Suggestion addition experimental data as beneficial effect, auditor's later stage examine in more can intuitively understand The technique effect of the application.
Embodiments of the present invention are explained in detail above in conjunction with accompanying drawing, but the present invention is not limited to above-mentioned implementation Mode, in the ken that those of ordinary skill in the art possess, can also be on the premise of present inventive concept not be departed from Make a variety of changes.

Claims (5)

1. the forming method of the natural nano post film of a kind of self assembly, it is characterised in that comprise the following steps:
The first step:Bulky amine material and wide bandgap semiconductor materials are dissolved in low boiling point solvent respectively, concentration is 3mg/mL, made Obtain bulky amine material solution and wide bandgap semiconductor materials solution;
Second step:Bulky amine material solution that to be prepared in the first step and wide bandgap semiconductor materials solution by volume 1:5 are total to It is mixed, stand;
3rd step:Gate electrode and gate insulation layer are sequentially formed on substrate, the thickness of gate insulation layer is 300 nm, is made substrate, Substrate is respectively cleaned by ultrasonic 10min with acetone, ethanol and deionized water successively, and supersonic frequency is 100 KHz, then will with high pure nitrogen Substrate surface liquid is dried up, and drying in 120 DEG C of baking oven is put into afterwards;
4th step:Clean substrate after by drying processes 3 ~ 5 min using UV ozone;
5th step:The solution that the substrate surface spin coating second step that 4th step is handled well is prepared, spin coating rotating speed is 3000 r/ Min, spin-coating time 30s, thickness control in atmosphere, the good substrate of spin coating are placed in 80 DEG C of baking oven and are dried in 5 ~ 50 nm Anneal 30 min, and natural nano post film is obtained;
6th step:The pattern of natural nano post film is observed by atomic force microscope, natural nano column diameter height exists 10-20 nm。
2. the forming method of the natural nano post film of self assembly according to claim 1, it is characterised in that:The substrate Selected from heavy doping silicon chip, sheet glass or plastics PET, gate electrode is selected from highly doped silicon, aluminium, copper, silver, gold, titanium or tantalum, gate insulation layer Selected from silica, aluminum oxide, zirconium oxide, polystyrene PS or polyvinylpyrrolidone PVP.
3. the forming method of the natural nano post film of self assembly according to claim 1, it is characterised in that:Described first Low boiling point solvent is toluene in step.
4. the forming method of the natural nano post film of self assembly according to claim 1, it is characterised in that:Described 5th Spin coating process in step is to carry out in atmosphere, and air humidity is 40-50%.
5. the forming method of the natural nano post film of self assembly according to claim 1, it is characterised in that:The steric hindrance Amine material uses ternary toroidal molecule, and wide bandgap semiconductor materials use trimethylolpropane.
CN201710166293.4A 2017-03-20 2017-03-20 A kind of forming method of the natural nano post film of self assembly Pending CN106920879A (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105646529A (en) * 2016-01-15 2016-06-08 南京邮电大学 Fluorenyl windmill grid material and preparation and application method thereof
CN106098942A (en) * 2016-07-29 2016-11-09 南京邮电大学 A kind of nano-pillar structure organic field effect tube memorizer and preparation method thereof

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105646529A (en) * 2016-01-15 2016-06-08 南京邮电大学 Fluorenyl windmill grid material and preparation and application method thereof
CN106098942A (en) * 2016-07-29 2016-11-09 南京邮电大学 A kind of nano-pillar structure organic field effect tube memorizer and preparation method thereof

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Application publication date: 20170704