CN106909179A - A kind of large-sized dust free room pressure difference monitoring and method of adjustment - Google Patents
A kind of large-sized dust free room pressure difference monitoring and method of adjustment Download PDFInfo
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- CN106909179A CN106909179A CN201710145237.2A CN201710145237A CN106909179A CN 106909179 A CN106909179 A CN 106909179A CN 201710145237 A CN201710145237 A CN 201710145237A CN 106909179 A CN106909179 A CN 106909179A
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- Prior art keywords
- pressure difference
- air
- dust free
- free room
- adjustment
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
Abstract
The invention discloses a kind of monitoring of large-sized dust free room pressure difference and method of adjustment, comprise the following steps：(1) total wire routing, lays according to common process to bus；(2) selection of pressure difference test point position, (3) install connecting pipe, and the installation of (4) differential pressure pickup and data acquisition unit, (5) computer disposal carries out numeric ratio pair；(6) after the inspection before carrying out pressure difference adjustment and controlling, shown according to pressure difference, overproof alarm control system adjusts related electric or hand valve area.The synchronous real-time Transmission of measurement data is realized by differential pressure pickup, the corresponding speed of measurement is greatly accelerated.Measurement point position is set by process requirements in same cleaning unit, it is ensured that air-flow body meets process requirements.The pressure difference data in multiple regions is transmitted to computer, is compared by calculating, and intuitively reflects each region differential pressure conditions.
Description
Technical field
The present invention relates to technical field of motors, specially a kind of large-sized dust free room pressure difference is monitored and method of adjustment.
Background technology
Pressure difference controls to be a very important link in air cleaning and conditioning system.Only by the pressure difference to purifying region
It is controlled, it is ensured that rational air current composition, can be only achieved purification and the requirement of technique.And the monitoring of pressure difference is pressure difference control
Basis, pressure difference determine stability and corresponding speed be related to again pressure difference control it is timely with it is accurate.
Clean room pressure difference is generally measured using portable pressure difference meter, electronics differential manometer etc. at present, with it is directly perceived,
The characteristics of facilitating.But there is also minute long, poor repeatability (locate change), determination data and be unable to immediate feedback
Deng；The shortcomings of poor synchronization.Especially large-scale clean room, adjustment and the controlling cycle of its pressure difference seem especially long, monitor and adjust
Whole control can not be carried out synchronously.
The content of the invention
It is an object of the invention to provide one kind in order to strengthen large-scale clean room differential pressure measurement (monitoring) and pressure difference adjustment
The synchronism of (control), harmony, shorten its debugging cycle, introduce differential pressure pickup and measure (monitoring) and carry out data biography
It is defeated, calculating contrast is carried out using computer technology, the pressure difference with each cleaning unit shows, overproof warning function, and is pressure difference
Manual debugging (control) automatically controls debugging provided auxiliary., to solve the problems, such as to be proposed in above-mentioned background technology.
To achieve the above object, the present invention provides following technical scheme：A kind of large-sized dust free room pressure difference monitoring and adjustment side
Method, comprises the following steps：
(1) total wire routing, lays according to common process to bus；
(2) selection of pressure difference test point position, according to tuyere position is sent back to, selection air-flow is stablized relatively, transient fluctuation shadow
The less position of sound, makes pressure point stably reflect the true pressure difference in room relatively, and test tube mouth should be located at does not have gas in dust free room
The place of influence is flowed, surveying orifice plane should be parallel with airflow direction；
(3) connecting pipe is installed, connecting pipe is laid according to common process, reduce pilot length of tube, shorten path, keep away
Exempt from connecting pipe flexibility too small, cause flat pipe, influence testing result；
(4) installation of differential pressure pickup and data acquisition unit, after being calibrated to differential pressure pickup and data acquisition unit
Installed, contrast correction is carried out using portable pressure difference meter during differential pressure measurement；
(5) computer disposal carries out numeric ratio pair；
(6) after the inspection before carrying out pressure difference adjustment and controlling, shown according to pressure difference, overproof alarm control system adjusts phase
Powered-down dynamic or hand_pneumatic valve aperture.
Preferably, clean area keeps malleation in dust free room, and the air in toilet is to flow to low clean area by high-cleanness area
Or non-clean area is flowed to by clean area；Static pressure difference is not less than 5Pa, clean area and non-cleaning between adjacent different grades of dust free room
Pressure difference between area is not less than 10Pa, clean area and outdoor pressure difference, not less than 12Pa.
Preferably, pressure difference adjustment includes airtight test and wind system inspection with the inspection before control in step (6)；
Each small dust free room of airtight test is relative to the air-tightness between other dust free rooms or non-clean area, including dust free room
Seam, various pipeline crane span structures between the wall of the world are worn between the seam of dust free room world wall, dust free room world wall and structural column
Seam, dust free room wall and smallpox in itself between seam, the seam between door and window and manhole and wall smallpox and all do not permit
Perhaps the hole of wind is crossed, is intended to airtight intact
Wind system inspection first checks for whether all FFU can normally run, and determines whether its air quantity can reach nominal air delivery；
Check all air conditioner fresh airs, whether valve and frequency conversion fan determine its every fresh wind tube maximum resh air requirement and meet and set when reaching maximum
Meter is required, if any dust free room using circulated air air-conditioning box, then needs to check whether its maximum air blow and return air quantity can meet layout design
It is required that；Check that can each regulating valve of VMC freely be adjusted, adjust each its pressure difference of relief valve and be allowed to meet previously determined
Static pressure difference requirement, the exhaust system that can be normally run when checking all dynamic determines whether its exhaust air rate has reached most exhaust air rate；
Check above if any being unsatisfactory for requiring, then need to analyze reason, take corresponding measure just to be pressed after being allowed to normally
Difference adjustment.
Preferably, pressure difference adjustment is either statically or dynamically being carried out down with control in step (6)；
The air quantity of all VMCs is adjusted, the variable-frequency motor comprising Fresh air handling units, all air-valves of VMC, each
The air-valve of air-supply between small dust free room, is allowed to air quantity and reaches maximum；
Pressure difference determine and adjust it is qualified after, marked in all new air-valves with red paint, and valve location is fixed, must not
Arbitrarily change.
Compared with prior art, the beneficial effects of the invention are as follows：
The present invention realizes the synchronous real-time Transmission of measurement data by differential pressure pickup, greatly accelerates the phase of measurement
Answer speed.Measurement point position is set by process requirements in same cleaning unit, it is ensured that air-flow body meets process requirements.Multiple regions
Pressure difference data transmit to computer, by calculate compare, intuitively reflect each region differential pressure conditions.No matter using debugging manually
Or automatically control, can immediately reflect pressure difference situation of change, and by debugging repeatedly, meet design and technological requirement.Transmission and control
System part uses two lines bus system, and Meteorological is low.Test mouthful in toilet is salable, can repeat at periodic or other desired to use and be tested,
And debug after terminating, differential pressure controller can be removed, access differential pressure indicator, take full advantage of resource.
Brief description of the drawings
Fig. 1 is process chart of the invention.
Specific embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
Fig. 1 is referred to, the present invention provides a kind of technical scheme：A kind of large-sized dust free room pressure difference monitoring and method of adjustment, bag
Include following steps：
(1) total wire routing, lays according to common process to bus；
(2) selection of pressure difference test point position, according to tuyere position is sent back to, selection air-flow is stablized relatively, transient fluctuation shadow
The less position of sound, makes pressure point stably reflect the true pressure difference in room relatively, and test tube mouth should be located at does not have gas in dust free room
The place of influence is flowed, surveying orifice plane should be parallel with airflow direction；
(3) connecting pipe is installed, connecting pipe is laid according to common process, reduce pilot length of tube, shorten path, keep away
Exempt from connecting pipe flexibility too small, cause flat pipe, influence testing result；
(4) differential pressure pickup and data acquisition unit are installed, calibration is laggard being carried out to differential pressure pickup and data acquisition unit
Row is installed, and contrast correction is carried out using portable pressure difference meter during differential pressure measurement；
(5) computer disposal carries out numeric ratio pair；
(6) after the inspection before carrying out pressure difference adjustment and controlling, shown according to pressure difference, overproof alarm control system adjusts phase
Powered-down dynamic or hand_pneumatic valve aperture.
Clean area keeps malleation in dust free room, and the air in toilet is to flow to low clean area or by cleaning by high-cleanness area
Area flows to non-clean area；Static pressure difference is not less than 5Pa between adjacent different grades of dust free room, between clean area and non-clean area
Pressure difference is not less than 10Pa, clean area and outdoor pressure difference, not less than 12Pa.The selection of static pressure setting value, answers collateral security cleanliness factor
And from the aspect of energy-conservation two.The lower limit of static pressure difference is required due to being only gived in specification, and no maximum is required, thus system
Air quantity design often considers the fluctuating factor in control, and design pressure difference value is easily chosen excessive.Such as the different clean room of adjacent rank
Between, be control benchmark (consider disturbing factor cause delayed regulation) with 10Pa, then the pressure differential resetting value in highest level room
It is relatively outdoor up to more than 40Pa.For reliability, it is possible to by the higher of setting value choosing.As a result, static pressure is too high, increase
The leakage rate of pure air in dust free room, to ensure that High Pressure Difference is accomplished by more resh air requirements, causes unnecessary waste.But
Such as too low selection dust free room static pressure, because its pressure difference is smaller, the antijamming capability of dust free room static pressure is reduced, to dust free room
Cleanliness factor brings very big risk, it is possible to can reduce the qualification rate of product, be resulted in greater loss to production.There is practical experience
Data shows that the static pressure difference between different grades of toilet, between clean area and non-clean area is maintained at more than 2.94Pa, clean
Net pressure difference between area and outdoor is maintained at more than 4.9Pa, you can ensure that toilet is not polluted by outside air, its cleanliness factor
Also can be guarantee.It is therefore necessary to actual conditions (the interference source situation being mainly likely to occur and cleaning according to dust free room
Degree level requirements), between reasonable selection different brackets toilet and its with the pressure difference between non-toilet, both meet cleanliness factor
Reliability, stability, while avoiding unnecessary waste.One large-scale dust free room, the demand according to production technology is different,
The small dust free room for often being differed by more than ten or even tens lustration classes is constituted, electric panda 6.5 generation liquid crystal panel life such as in Nanjing
Producing line, is exactly an oversized dust free room, and the small dust free room that its big and small lustration class differs just has hundreds of, air-flow
Tissue is intricate, determines the static pressure of each small dust free room, is to ensure that its air current composition meets the first of production technology demand
Step.
Pressure difference adjustment includes airtight test and wind system inspection with the inspection before control in step (6)；Airtight test
Each small dust free room relative to the seam between the air-tightness between other dust free rooms or non-clean area, including dust free room world wall,
Various pipeline crane span structures wear seam between the seam of dust free room world wall, dust free room world wall and structural column, dust free room wall and day
Seam between flower itself, the seam between door and window and manhole and wall smallpox and all holes for not allowing wind, are intended to
It is airtight intact.Determine the static pressure of each small dust free room, must first determine that the small dust free room of the lowest class (is assumed to be A classes in regional area
Dust free room, often A classes dust free room more than one) static pressure (10Pa typically higher than non-clean area or so), then determine again therewith
The static pressure (5Pa at least higher than A class) of adjacent all small dust free room (it is B classes dust free room to fix tentatively), determines B class dust free room static pressure
Afterwards, then the static pressure of the dust free room (fix tentatively be C class dust free room) adjacent with B class dust free rooms is determined, C classes dust free room its lustration class should
Higher than B, then its static pressure will be higher by 5Pa, such as lower than B, then the small dust free room should be A classes, its static pressure 5Pa lower than B class, if phase
Adjacent two small dust free room lustration classes are identical, then air flow direction when by layout design, the small dust free room static pressure of its air-flow outflow end
Will low 5Pa, and so on, untill the static pressure of all small dust free rooms has determined.Dust free room static pressure is determined in this approach, and having can
One small dust free room of energy has two or more static pressure, and to ensure that air flow direction meets process requirements, then the small dust free room is quiet
Pressure is that foundation is debugged with peak.
Wind system inspection first checks for whether all FFU can normally run, and determines whether its air quantity can reach nominal air delivery；
Check all air conditioner fresh airs, whether valve and frequency conversion fan determine its every fresh wind tube maximum resh air requirement and meet and set when reaching maximum
Meter is required, if any dust free room using circulated air air-conditioning box, then needs to check whether its maximum air blow and return air quantity can meet layout design
It is required that；Check that can each regulating valve of VMC freely be adjusted, adjust each its pressure difference of relief valve and be allowed to meet previously determined
Static pressure difference requirement, the exhaust system that can be normally run when checking all dynamic determines whether its exhaust air rate has reached most exhaust air rate；
Check above if any being unsatisfactory for requiring, then need to analyze reason, take corresponding measure just to be pressed after being allowed to normally
Difference adjustment.
Pressure difference is adjusted typically either statically or dynamically to be carried out down with control, and now FFU all runs, and processing procedure gas extraction system is
All run under maximum exhaust air rate state, when air conditioner fresh air has also run many.
The air quantity of all VMCs is adjusted first, the variable-frequency motor comprising Fresh air handling units, all air-valves of VMC,
The air-valve of air-supply, is allowed to air quantity and reaches maximum between each small dust free room.
Confirm that the door of all A classes dust free rooms is in closed mode, then each small nothing of A classes is observed from computer monitoring center
The static pressure of dirt room, or on the spot with portable differential pressure meter measure, typically now A classes dust free room static pressure be above by 5.4.3 determine
Setting value (being otherwise that dustless chamber air-tightness is very poor, its inleakage very big or fresh-air volume does not reach design requirement), now adjusts
The fresh air valve of the small small dust free room, or adjacent dust free room sends into the air-valve of the dust free room, be allowed to static pressure ratio setting value bigger 0~
2Pa or so.
After the adjustment of A classes small dust free room static pressure is finished, the static pressure of each small dust free room of B classes is observed from Surveillance center, it is general this
When the small dust free room of B classes static pressure be also above setting value in 5.4.3, now turn the fresh air valve or fresh air of the small dust free room of B classes down
The frequency of unit frequency-conversion motor, or adjacent small dust free room sends into the air-valve of the dust free room, is allowed to static pressure and maintains than setting value summary
0~2Pa high, now observes the static pressure of the small dust free room of A classes from Surveillance center again, and such as its static pressure is less than setting value, then slightly simultaneously
The fresh air of A, B class dust free room or the frequency of air-supply valve opening or variable-frequency motor are increased, the static pressure of the small dust free room of A, B class is compared
Slightly higher 0~the 2Pa of setting value.The adjustment of the small dust free room static pressure of C classes will be seen from Surveillance center simultaneously with B classes after simply initial adjustment is finished
The static pressure of the small dust free room of A, B class is examined, such as its static pressure is less than setting value, then slightly increase the fresh air of the small dust free room of A, B, C class simultaneously
The variable-frequency motor frequency of valve opening or Fresh air handling units, makes the static pressure 0~2Pa higher than setting value of the small dust free room of A, B, C class.With this
Analogize, untill the static pressure of all small dust free rooms is slightly larger than 0~2Pa of setting value.
Pressure difference determine and adjust it is qualified after, marked in all new air-valves with red paint, and valve location is fixed, must not
Arbitrarily change.If from automatically controlling, needing the air-valve of manual regulation to change VAV (variable air rate adjustment unit) or ratio into by more than
Example formula Electric air valve, after Surveillance center receives the data-signal that spot sensor is measured, i.e., contrasts, and send finger with standard value
The corresponding VAV of step-less adjustment or proportional electric valve area are made, changes resh air requirement, so as to adjust its static pressure.Controlled automatically using VAV
Dust free room static pressure efficiency processed is very high, can in time be adjusted in synchronism resh air requirement, it is ensured that the stability of dust free room static pressure, but because VAV makes
Valency is higher, so its disposable input cost is larger, so comparatively speaking, Electric air valve is cheap due to its, then in work
Using more in journey practice.It is both needed to confirm when observing each small dust free room static pressure from Surveillance center every time, dust free room in debugging region
Men Junyi be closed.
To avoid dustless indoor positive pressure excessive, influence production, particularly liquid crystal electron factory building can cause liquid when malleation is excessive
Brilliant fragmentation, it is necessary to install excess pressure valve on the partition wall between adjacent dust free room.Due to the demand of production technology, adjacent dust free room it
Between when there is not closable opening, it is necessary to measure the wind speed and wind direction at opening, its wind speed and wind direction should meet design will
Ask.After the completion of debugging, it is necessary to test the air quantity of all adjusting air valves, its data is analyzed and compared with design air flow, in turn
The air-tightness of dust free room is verified, to avoid because of the energy waste that poor air-tightness causes.
Compared with traditional monitoring and control method, the engineering method employs the transmission of two lines bus system and control, computer for analysis collection
Data, greatly reduce manually, improve efficiency, save debug time and expense.Using this technology, can substantially shorten large-scale nothing
In the cycle of dirt room static pressure debugging, electronic workshop short time limit is met, the tight demand of production task is that electronics manufacturing enterprise enters early
Army market creates condition.Enterprise construction technical merit is improve, the construction cost of enterprise is reduced, the competitive advantage of enterprise is obtained
Reinforcement is arrived.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understanding can carry out various changes, modification, replacement to these embodiments without departing from the principles and spirit of the present invention
And modification, the scope of the present invention be defined by the appended.
Claims (4)
1. a kind of large-sized dust free room pressure difference is monitored and method of adjustment, it is characterised in that：Comprise the following steps：
(1) total wire routing, lays according to common process to bus；
(2) selection of pressure difference test point position, according to tuyere position is sent back to, selection air-flow is stablized relatively, transient fluctuation influence compared with
Small position, makes pressure point stably reflect the true pressure difference in room relatively, and test tube mouth should be located in dust free room does not have air-flow shadow
Loud place, surveying orifice plane should be parallel with airflow direction；
(3) connecting pipe is installed, connecting pipe is laid according to common process, reduce pilot length of tube, shorten path, it is to avoid lead
Pressure pipe flexibility is too small, causes flat pipe, influences testing result；
(4) installation of differential pressure pickup and data acquisition unit, is carried out after being calibrated to differential pressure pickup and data acquisition unit
Install, contrast correction is carried out using portable pressure difference meter during differential pressure measurement；
(5) computer disposal carries out numeric ratio pair；
(6) after the inspection before carrying out pressure difference adjustment and controlling, shown according to pressure difference, overproof alarm control system adjusts mutually powered-down
Dynamic or hand_pneumatic valve aperture.
2. a kind of large-sized dust free room pressure difference according to claim 1 is monitored and method of adjustment, it is characterised in that：It is described dustless
Indoor clean area keeps malleation, and the air in toilet is by high-cleanness area to flow to low clean area or flow to non-cleaning by clean area
Area；Static pressure difference is not less than 5Pa between adjacent different grades of dust free room, and the pressure difference between clean area and non-clean area is not less than
10Pa, clean area and outdoor pressure difference, not less than 12Pa.
3. a kind of large-sized dust free room pressure difference according to claim 1 is monitored and method of adjustment, it is characterised in that：The step
(6) pressure difference adjustment includes airtight test and wind system inspection with the inspection before control in；
Each small dust free room of airtight test is relative to the air-tightness between other dust free rooms or non-clean area, including dust free room
Seam, various pipeline crane span structures between the wall of the world are worn between the seam of dust free room world wall, dust free room world wall and structural column
Seam, dust free room wall and smallpox in itself between seam, the seam between door and window and manhole and wall smallpox and all do not permit
Perhaps the hole of wind is crossed, is intended to airtight intact
The wind system inspection first checks for whether all FFU can normally run, and determines whether its air quantity can reach nominal air delivery；
Check all air conditioner fresh airs, whether valve and frequency conversion fan determine its every fresh wind tube maximum resh air requirement and meet and set when reaching maximum
Meter is required, if any dust free room using circulated air air-conditioning box, then needs to check whether its maximum air blow and return air quantity can meet layout design
It is required that；Check that can each regulating valve of VMC freely be adjusted, adjust each its pressure difference of relief valve and be allowed to meet previously determined
Static pressure difference requirement, the exhaust system that can be normally run when checking all dynamic determines whether its exhaust air rate has reached most exhaust air rate；
Check above if any being unsatisfactory for requiring, then need to analyze reason, take corresponding measure just to carry out pressure difference tune after being allowed to normally
It is whole.
4. a kind of large-sized dust free room pressure difference according to claim 1 is monitored and method of adjustment, it is characterised in that：The step
(6) pressure difference adjustment is either statically or dynamically being carried out down with control in；
The air quantity of all VMCs is adjusted, the variable-frequency motor comprising Fresh air handling units, all air-valves of VMC, each small nothing
The air-valve of air-supply between dirt room, is allowed to air quantity and reaches maximum；Pressure difference determine and adjust it is qualified after, with it is red paint in all fresh airs
Marked on valve, and valve location is fixed, must not arbitrarily changed.
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| CN201710145237.2A CN106909179A (en) | 2017-03-13 | 2017-03-13 | A kind of large-sized dust free room pressure difference monitoring and method of adjustment |
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| CN201710145237.2A CN106909179A (en) | 2017-03-13 | 2017-03-13 | A kind of large-sized dust free room pressure difference monitoring and method of adjustment |
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| CN109631219A (en) * | 2018-11-13 | 2019-04-16 | 冠恒建设工程有限公司 | The decoration method of Multi-function cleaning room |
| CN110118045A (en) * | 2019-05-15 | 2019-08-13 | 北京联合大学 | A kind of enabling limit mechanical device and method of the toilet of adjustable differential pressure |
| CN110131811A (en) * | 2019-06-26 | 2019-08-16 | 中机中联工程有限公司 | Pressure difference control system and method suitable for MAU+FFU+DCC electronics toilet |
| BE1027785A1 (en) | 2019-11-25 | 2021-06-16 | Advipro Bvba | PROCEDURE FOR CONTROL OF PRESSURE DIFFERENCES, TEMPERATURE AND HUMIDITY IN A DUST-FREE ROOM |
| CN114323435A (en) * | 2021-12-13 | 2022-04-12 | 潍柴动力股份有限公司 | Differential pressure sensor credibility detection method and device, electronic equipment and storage medium |
| CN114484815A (en) * | 2021-12-20 | 2022-05-13 | 彩虹显示器件股份有限公司 | System and method for controlling environment between TFT-LCD photoelectric glass forming |
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| CN114323435A (en) * | 2021-12-13 | 2022-04-12 | 潍柴动力股份有限公司 | Differential pressure sensor credibility detection method and device, electronic equipment and storage medium |
| CN114323435B (en) * | 2021-12-13 | 2023-10-20 | 潍柴动力股份有限公司 | Differential pressure sensor credibility detection method and device, electronic equipment and storage medium |
| CN114484815A (en) * | 2021-12-20 | 2022-05-13 | 彩虹显示器件股份有限公司 | System and method for controlling environment between TFT-LCD photoelectric glass forming |
| CN114484815B (en) * | 2021-12-20 | 2023-12-26 | 彩虹显示器件股份有限公司 | TFT-LCD photoelectric glass forming room environment control system and method |
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