CN106907962A - Low overload MEMS detonations actuator - Google Patents
Low overload MEMS detonations actuator Download PDFInfo
- Publication number
- CN106907962A CN106907962A CN201710033330.4A CN201710033330A CN106907962A CN 106907962 A CN106907962 A CN 106907962A CN 201710033330 A CN201710033330 A CN 201710033330A CN 106907962 A CN106907962 A CN 106907962A
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- Prior art keywords
- recoil
- flame proof
- spring
- substrate
- resell
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- 238000005474 detonation Methods 0.000 title abstract description 7
- 239000002360 explosive Substances 0.000 claims abstract description 23
- 239000003721 gunpowder Substances 0.000 claims abstract description 13
- 230000007246 mechanism Effects 0.000 claims abstract description 12
- 239000003999 initiator Substances 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims description 27
- 229940079593 drug Drugs 0.000 claims description 17
- 239000003814 drug Substances 0.000 claims description 17
- 238000004880 explosion Methods 0.000 claims description 17
- 230000009471 action Effects 0.000 abstract description 6
- 238000013461 design Methods 0.000 abstract description 3
- 230000005611 electricity Effects 0.000 abstract description 3
- 230000002045 lasting effect Effects 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006353 environmental stress Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 231100000518 lethal Toxicity 0.000 description 1
- 230000001665 lethal effect Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F42—AMMUNITION; BLASTING
- F42C—AMMUNITION FUZES; ARMING OR SAFETY MEANS THEREFOR
- F42C15/00—Arming-means in fuzes; Safety means for preventing premature detonation of fuzes or charges
- F42C15/005—Combination-type safety mechanisms, i.e. two or more safeties are moved in a predetermined sequence to each other
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F42—AMMUNITION; BLASTING
- F42C—AMMUNITION FUZES; ARMING OR SAFETY MEANS THEREFOR
- F42C19/00—Details of fuzes
- F42C19/08—Primers; Detonators
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Toys (AREA)
Abstract
Low overload MEMS detonations actuator：The technical scheme is that thering are twice to insure in mechanism's design.Secondary safety mechanism is machine insurance, by recognizing that lasting recoil is released, including recoil spring, recoil sliding block and is shipped and resell on another market, i.e., the insurance for releasing first.Main safeties insure for electricity, and the arming action energy is provided by gunpowder prime mover.Gunpowder prime mover includes delay circuit and pin pulling out device, realizes releasing the insurance of flame proof plate, aligns three-level booster explosive, compensate for the domestic vacancy to MEMS initiator applications.
Description
Technical field
It is low overload MEMS detonation actuators the invention belongs to the micromechanics field of MEMS.It is related to MEMS process technologies.
Background technology
MEMS（Micro Electro-Mechanical System, MEMS）, abbreviation micro-system is more than nearly 20
The emerging technical field grown up over year.It is based on microelectric technique and micro-processing technology, its device
Size is general in micron, sub-micron or even nanometer scale.The core parts of MEMS are generally comprised：Microsensor, micro- brake and
Signal processing unit.Nineteen fifty-nine the U.S. physicist, Nobel laureate R.Feynman holds in California Institute of Technology
The imagination of micromachine is proposed in the annual meeting of the whole America physical society first.Silicon micropressure sensor comes out within 1962, and major technique is
Bulk silicon etching technique.Then, size is that the micro mechanisms such as 50~500 μm of gear, gear pump, air driven pump and connector are in succession sharp
Developed with silicon processing method.California, USA university Berkeley sacrifice layer corrosion techniques in 1987 and electrostatic drive are developed
Root diameter is 60~120 μm of the micro- electrostatic motor of silicon, it was demonstrated that silicon micromachined method is making three-dimensional movable Mechatronic Systems
On feasibility[2].In the past more than ten years, the developed country such as U.S., Japan, Germany are successively in this emerging technology upslide
Enter substantial contribution, promote the development of micro-system.
System be related to micro mechanics, microelectronics, automatically control, the subject such as physics, chemistry and material science, be one
Multidisciplinary, high-tech frontier branch of science.MEMS has small volume, light weight, the feature-rich and batch production low spy of cost
Point, is with a wide range of applications and huge applications potentiality in civil and military field.And these features of MEMS are adapted to just
The requirement of fuse so that MEMS obtains very big application in fuse, these applications will greatly advance the hair of Fuze Technology
Exhibition, makes Fuze Technology obtain qualitative leap.Applications of the MEMS in fuse be related to the security system of fuse, ignition system and
Iganition control system, and be possible to produce New System, the fuse of new principle or mechanism and system because of the development of MEMS technology.
Rapid infiltration MEMS technology will be holding technical advantage, the important war safeguarded national security with global stability in Military Application
Slightly.
Initiator there are many compellent advantages：The size for taking fuse can be substantially reduced, light weight, and
Part material is single（Use silicon or nickel）；If produced in enormous quantities, using IC methods or LIGA methods, cost can be down to very
It is low；Very well, the device impact resistance made and the performance of vibration will improve a lot the strength of materials, rising based on MEMS technology
Quick-fried device, very well, highest can withstand up to the overload of 100000G to anti-overloading performance；And the fuze action device of MEMS can make lead
Consumption reduction about 90%, greatly reduces the pollution to environment.
The development of technology brings good opportunity to the development of Fuze Technology, and the development for fuze action device MEMS is empty
Between it is bigger.By the improved armings of MEMS/detonation function and inherent quality（Current bomblet and small shell does not possess）
There is provided 5 times~10 times of higher reliability, performance and used life.This means MEMS is safer, not quick-fried article will be reduced
It is more than an order of magnitude.The initiator of MEMS can make the target of the bigger lethal space of the shell realization of smaller power and Geng Gao
Destroy effect.
The content of the invention
The present invention is that design one kind is used in persistently low overload（10g~20g）Wherein g is acceleration of gravity, and micro-
Rotation or non-rotating bullet such as pickaback low overload MEMS initiators of formula guided missile, mortar projectile etc..Its trajectory environmental forces is more single
One, suffered recoil very little is so that it is difficult to environment stress when being processed with normal duties is distinguished.But due to recoil
Power continuous action, therefore environment-identification power can be used an accelerometer to.
Low overload MEMS detonations actuator：
The technical scheme is that thering are twice to insure in mechanism's design.
Secondary safety mechanism is machine insurance, by recognizing that lasting recoil is released, including recoil spring, recoil sliding block and
Ship and resell on another market.（The insurance for releasing first）.
Main safeties insure for electricity, and the arming action energy is provided by gunpowder prime mover.Gunpowder prime mover includes prolonging
When circuit and pin pulling out device, realize arming.（Secondly the insurance for releasing）.
The advantage is that：
The conceptual phase studied on fuse by domestic microcomputer electrical domain has pushed the practical stage to, compensate for domestic to MEMS
The vacancy of quick-fried device application.
Brief description of the drawings
Accompanying drawing 1 is the structure chart of low overload MEMS fuze action devices.
Accompanying drawing 2 is initiation system functional diagram.
Accompanying drawing 3 is the clamping figure of substrate.
Accompanying drawing 4 is delay circuit diagram.
Accompanying drawing 5 is the front view of pin pulling out device.
Accompanying drawing 6 is the A-A sectional views of accompanying drawing 5.
Accompanying drawing 7 is the B-B sectional views of accompanying drawing 5.
Accompanying drawing 8 is state diagram of the Explosive sequence to timing.
Specific embodiment
Low overload MEMS initiators include substrate 1 and main safeties.
Main safeties include gunpowder prime mover, and gunpowder prime mover includes delay circuit and pin pulling out device.
Substrate 1 offers main safety groove 6, and flame proof plate 7 and flame proof spring 8 are arranged in main safety groove 6.
The upper end of flame proof spring 8 is fixedly connected with flame proof plate 7, and the lower end of flame proof spring 8 is fixedly connected with substrate 1, the side of flame proof plate 7
Edge is provided with stopper slot 9, and pulling pin for pin pulling out device 10 20 is inserted in stopper slot 9, and flame proof spring 8 fitted to be preloading condition.Main guarantor
Space after dangerous groove 6 leaves flame proof plate 7 and flame proof spring 8 is released.
The top of flame proof plate 7 is provided with dop 11, and the draw-in groove corresponding with the location and shape of dop 11 is offered on substrate 1
12。
Flame proof plate 7 offers two grades of propagation of explosion drug slots 13, and substrate 1 offers three-level propagation of explosion drug slot 14.
Three-level propagation of explosion drug slot 14 and two grades of propagation of explosion drug slots 13 are arranged to snap in draw-in groove 12, three-level propagation of explosion drug slot when dop 11
14 and two grades of propagation of explosion drug slots 13 aligned in the horizontal plane of substrate 1.
First wire 15 and the second wire 16 of pin pulling out device 10 are connected with two output ends of delay circuit respectively.
When the accelerometer 25 of delay circuit is closed, the resistance wire 17 between the first wire 15 and the second wire 16 passes through
Electric current.
Pin pulling out device 10 includes pin pulling out device housing.This pin pulling out device is known technology.
Gunpowder 18 and resistance wire 17 are provided with pin pulling out device housing.
Resistance wire 17 is arranged in gunpowder 18, and the first wire 15 and the second wire 16 are drawn in the two ends of resistance wire 17 respectively.
Pull pin and 20 be provided with slot for cotter 21, there is pin pulling out device enclosure slot on pin pulling out device housing, pin pulling out device enclosure slot and
Abaculus 22 is provided between slot for cotter 21, slot for cotter 21 is fitted to be when abaculus 22 is broken, 20 retractions of pulling pin.20 inner ends of pulling pin set
There is push pedal 27, abaculus 22 and push pedal 27 are respectively positioned at the both sides of gunpowder 18.
Substrate 1 is fixedly arranged above upper cover plate 23.The housing of pin pulling out device 10 is arranged in upper cover plate mounting hole 19.
Upper cover plate 23 is provided with one-level booster explosive hole 24, and the position in one-level booster explosive hole 24 is located at, when dop 11 snaps in draw-in groove
12, one-level booster explosive hole 24 and two grades of propagation of explosion drug slots are aligned about 13.
The lower section of substrate 1 is fixed with lower cover.
When dop 11 snaps in draw-in groove 12, one-level booster explosive is located at two grades of booster explosive tops, two grades of booster explosives and three-level propagation of explosion
Medicine is located at the plane at the place of substrate 1.
One-level booster explosive hole 24 is built with one-level booster explosive.
Two grades of propagation of explosion drug slots 13 are built with two grades of booster explosives.
Three-level propagation of explosion drug slot 14 is built with three-level booster explosive.
The side of flame proof spring 8 is provided with secondary safety mechanism, and secondary safety mechanism includes recoil sliding block 2, recoil spring 3 and turns
Pin 4.
Offered on substrate 1 auxiliary safety groove 5, recoil sliding block 2, recoil spring 3 and ship and resell on another market 4 be arranged at aid in safety groove
In 5.Auxiliary safety groove 5 is connected with main safety groove 6, ships and resell on another market 4 positioned at connectivity part.
The upper end of recoil spring 3 is fixed on substrate 1, and the lower end of recoil spring 3 is fixed on recoil sliding block 2.Recoil bullet
It is pre- tension state that spring 3 is arranged to during assembling.
4 are shipped and resell on another market by the setting substrate 1 of rotating shaft 26, shipping and reselling on another market 4 as rotating shaft 26 is rotated together.
4 are shipped and resell on another market when fitteding to be recoil spring 3 for pre- tension state, is shipped and resell on another market and 4 is blocked by recoil sliding block 2, and block flame proof
Plate 7.
Auxiliary safety groove 5 leaves recoil spring 3 and the space after recoil sliding block 2 is released.
Auxiliary safety groove 5 be provided with can allow ship and resell on another market 4 to the direction of recoil sliding block 2 rotate inclined-planes.
Described delay circuit includes accelerometer 25.
The VDD pins of accelerometer 25 and the VDD2 pins of accelerometer 25 connect the VCC pin of chip LM339 jointly,
The VDD pins of accelerometer 25 and the VDD2 pins of accelerometer 25 also commonly through resistance R4 connections chip LM339-
Input pins, the VDD pins of accelerometer 25 and the VDD2 pins of accelerometer 25 also pass through after commonly through resistance R4
Resistance R3 connects GND.
The VDD pins of accelerometer 25 and the VDD2 pins of accelerometer 25 also connect electricity after connecting jointly by electric capacity C1
Pond negative pole.
The COM pins connection GND of accelerometer 25.
The ST pins of accelerometer 25 connect GND by resistance R2.
The Xout pins of accelerometer 25 and the+input1 pins of chip LM339 after connection, connect electric capacity C4's jointly
One pole plate.
GND pin and electric capacity C4 another pole plate connection after, GND is connected jointly.
Output1 pins connection chip NE555 Trigger pins, the Trigger pins of chip NE555 connect simultaneously
Anode is connect, the Trigger pins of chip NE555 connect GND by electric capacity C2 simultaneously.
The threshold pins connection anode of chip NE555.
The VCC pin of chip NE555 connects anode by resistance R1.
The reset pins connection anode of chip NE555.
The control pins of chip NE555 connect GND by electric capacity C3.
The GND pin connection GND of chip NE555.
Anode is drawn an output end and connects the second wire 16.
The VDD pins of accelerometer 25 and the VDD2 pins of accelerometer 25 be jointly after connection, connection resistance R4 it
It is preceding to draw output end first wire 15 of connection.
Described battery is 6V.The model ADXL500 of accelerometer 25.
Delay circuit can be arranged in upper cover plate mounting hole 19.
As its operation principle is：
Shown in Fig. 2, in the presence of launch environment, for delay circuit provides 6v voltages.
According to the circuit diagram shown in accompanying drawing 4, circuit board is processed（30mm long, 26mm wide, thick 1mm）, ADXL500 is accelerated
Degree meter is welded on corresponding position according to the delay circuit shown in Fig. 4, and there is the voltage of 3v at the two ends of accelerometer 25, while launching ring
Border is that accelerometer 25 provides acceleration, is reaching 78.4（m/s2）When, accelerometer 25 is closed, and can realize that voltage is defeated
Go out.Launch environment also provides acceleration to this low overload MEMS initiator, produces recoil.
In confined state：
Flame proof plate 7 shipped and resell on another market 4 and pin pulling out device 10 limit and can not move.As shown in Figure 1, recoil spring 3 assembling when at
In pre- tension state, recoil sliding block 2 is linked together with substrate 1.
Ship and resell on another market and 4 blocked by recoil sliding block 2 and can not rotated counterclockwise.In order to ensure recoil sliding block 2, flame proof plate 7, recoil spring
3 and flame proof spring 8 in the move in plane of substrate 1, with transparent polymethacrylates upper and lower cover board clamping, and with the spiral shell of M3
Nail is fixed together substrate 1 and upper and lower cover plate by screw hole.
In the presence of recoil, recoil sliding block 2 overcomes the pulling force of recoil spring 3 and the resistance of friction and complications glide.
Because recoil is persistently present, recoil sliding block 2 will not be returned behind the bottom of auxiliary safety groove 5 that time delay reaches substrate 1, i.e. recoil
Sliding block 2 is moved in place.Recoil sliding block 2 move release afterwards in place to ship and resell on another market 4 limitation, shipping and reselling on another market 4 is released, and ships and resell on another market 4 in recoil
In the presence of, the position shown in Fig. 8 can be rotated counterclockwise to, that is, ship and resell on another market 4 motions in place.And then, can prepare to discharge flame proof
Plate 7, releases secondary safety mechanism.
It in order to meet recoil sliding block 2 and ship and resell on another market after 4 motions is in place again pin pulling out device 10 that the delayed-action of delay circuit is
The voltage of 3v is provided.
When connecting delay circuit as shown in Figure 4, two leads are drawn in position 1 and 2 on Fig. 4, first is connected respectively and is led
The wire 16 of line 15 and second, exports the voltage of 3v.The mounting hole pulled pin on 20 insertion upper cover plates 23 of pin pulling out device 10, into limit
Position groove 9.The voltage of 3v is introduced by the first wire 15 and the second wire 16, is transferred to resistance wire 17, and resistance wire 17 can be annular
Resistance wire.
In the presence of 3v voltages, resistance wire 17 generates heat, and lights the gunpowder 18 in powder charge chamber.The gunpowder 18 lighted produces gas
Pressure, promotes push pedal 27, cuts off abaculus 24, pull pin 20, secondary safety mechanism of the releasing to flame proof plate 7.As shown in figure 3, on
Booster explosive is respectively provided with cover plate 23, flame proof plate 7 and substrate 1.So, usually due to ship and resell on another market 4 and pin pulling out device 10 to flame proof plate 7
Limitation, cause one-level booster explosive and three-level booster explosive to misplace, once one-level booster explosive accidental ignition, will not pass detonation energy
The third level is delivered to, so ensure that the safety of fuse.Hereafter, the upward sliding under the promotion of precompressed flame proof spring 8 of flame proof plate 7,
When reaching the top of main safety groove 6, dop 11 deforms with the extruding of substrate 1, into draw-in groove 12, is locked in draw-in groove 12
It is interior.Meanwhile, two grades of booster explosives on flame proof plate 7 as shown in Figure 8 reach position corresponding with one-level booster explosive, finally make one-level
Booster explosive and three-level booster explosive are turned on.Now, fuse arming, arm-to-arm as shown in Figure 8 is become by safety position.
When normal duties are processed, bullet the interference such as is most likely subject to carry, falls, vibrates and causing initiator misoperation.
Wherein, the influence fallen to recoil sliding block 2 is larger.When bullet drops into hardstand or soft ground such as steel plate, power supply can not be carried
Voltage supplied, pin pulling out device 10 can not be extracted, and flame proof plate 7 can not be moved in place, and one-level booster explosive and three-level booster explosive are to disconnect,
Initiator can not be made to be in arm-to-arm.Because collision impact is likely to produce the acceleration for moving recoil sliding block 2, but make
The recoil duration is but much smaller than with the time, recoil sliding block 2 can only move one in the presence of inertia force in this case
After segment displacement or motion in place, in the presence of the pulling force of recoil spring 3, recoil sliding block 2 can return to, and pin pulling out device 10 does not have
There is extraction, limit flame proof plate 7 and move, it is impossible to release main insurance, it is ensured that the security of initiator.
Claims (2)
1. low overload MEMS initiators, including substrate（1）With main safeties；It is characterized in that：
Main safeties include gunpowder prime mover, and gunpowder prime mover includes delay circuit and pin pulling out device；
Substrate（1）Offer main safety groove（6）, flame proof plate（7）With flame proof spring（8）It is arranged at main safety groove（6）It is interior；
Flame proof spring（8）Upper end and flame proof plate（7）It is fixedly connected, flame proof spring（8）Lower end and substrate（1）It is fixedly connected, flame proof
Plate（7）Edge is provided with stopper slot（9）, pin pulling out device（10）Pull pin（20）It is inserted in stopper slot（9）It is interior, flame proof spring（8）Filled
With being preloading condition；Main safety groove（6）Leave flame proof plate（7）With flame proof spring（8）Space after being released；
Flame proof plate（7）Top is provided with dop（11）, in substrate（1）On offer and dop（11）The corresponding card of location and shape
Groove（12）；
Flame proof plate（7）Offer two grades of propagation of explosion drug slots（13）, substrate（1）Offer three-level propagation of explosion drug slot（14）；
Three-level propagation of explosion drug slot（14）With two grades of propagation of explosion drug slots（13）It is arranged to work as dop（11）Snap in draw-in groove（12）, three-level propagation of explosion
Drug slot（14）With two grades of propagation of explosion drug slots（13）Align；
Pin pulling out device（10）The first wire（15）With the second wire（16）It is connected with two output ends of delay circuit respectively；
The accelerometer of delay circuit（25）Closure, the first wire（15）With the second wire（16）Between resistance wire（17）Pass through
Electric current；
Work as dop（11）Snap in draw-in groove（12）, one-level booster explosive hole（24）With two grades of propagation of explosion drug slots（13）Align.
2. low overload MEMS initiators according to claim 1, it is characterised in that：
Flame proof spring（8）Side is provided with secondary safety mechanism, and secondary safety mechanism includes recoil sliding block（2）, recoil spring（3）With
Ship and resell on another market（4）；
Substrate（1）On offer auxiliary safety groove（5）, recoil sliding block（2）, recoil spring（3）With ship and resell on another market（4）It is arranged at auxiliary
Safety groove（5）It is interior；Auxiliary safety groove（5）With main safety groove（6）It is connected, ships and resell on another market（4）Positioned at connectivity part；
Recoil spring（3）Upper end be fixed on substrate（1）On, recoil spring（3）Lower end be fixed on recoil sliding block（2）On；Afterwards
Sit spring（3）It is pre- tension state to be arranged to during assembling；
Ship and resell on another market（4）By rotating shaft（26）Substrate is set（1）On, ship and resell on another market（4）It fitted to be recoil spring（3）During for pre- tension state,
Ship and resell on another market（4）By recoil sliding block（2）Block, and block flame proof plate（7）；
Auxiliary safety groove（5）Leave recoil spring（3）With recoil sliding block（2）Space after being released；
Auxiliary safety groove（5）It is provided with to allow and ships and resell on another market（4）To recoil sliding block（2）The inclined-plane that direction rotates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710033330.4A CN106907962A (en) | 2017-01-18 | 2017-01-18 | Low overload MEMS detonations actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710033330.4A CN106907962A (en) | 2017-01-18 | 2017-01-18 | Low overload MEMS detonations actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106907962A true CN106907962A (en) | 2017-06-30 |
Family
ID=59207128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710033330.4A Pending CN106907962A (en) | 2017-01-18 | 2017-01-18 | Low overload MEMS detonations actuator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106907962A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107830773A (en) * | 2017-10-09 | 2018-03-23 | 北京理工大学 | A kind of slim MEMS motion controls integrated apparatus and propellant actuated device |
| CN108502842A (en) * | 2018-03-26 | 2018-09-07 | 北京理工大学 | A kind of micro electronmechanical combinational logic device and preparation method thereof applied to fuse security |
| CN109696094A (en) * | 2019-01-15 | 2019-04-30 | 西安交通大学 | A kind of silicon substrate MEMS recoil drag |
| CN109751929A (en) * | 2019-01-15 | 2019-05-14 | 西安交通大学 | A kind of enclosed type MOEMS fuze safety mechanism |
| CN109855488A (en) * | 2019-01-15 | 2019-06-07 | 西安交通大学 | A kind of MOEMS Fuze Safety System |
| CN110285725A (en) * | 2019-05-31 | 2019-09-27 | 北京理工大学 | A kind of Manufacturing resource security system and its implementation applied to Small cartridge |
| CN111561844A (en) * | 2020-06-08 | 2020-08-21 | 西安交通大学 | Low-acceleration time-delay MEMS security device |
| CN112033239A (en) * | 2019-06-18 | 2020-12-04 | 南京理工大学 | Fuse MEMS safety and safety relief device |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107830773B (en) * | 2017-10-09 | 2019-06-14 | 北京理工大学 | A kind of slim MEMS motion control integrated apparatus and propellant actuated device |
| CN107830773A (en) * | 2017-10-09 | 2018-03-23 | 北京理工大学 | A kind of slim MEMS motion controls integrated apparatus and propellant actuated device |
| CN108502842A (en) * | 2018-03-26 | 2018-09-07 | 北京理工大学 | A kind of micro electronmechanical combinational logic device and preparation method thereof applied to fuse security |
| CN109696094B (en) * | 2019-01-15 | 2020-08-04 | 西安交通大学 | Silicon-based MEMS (micro-electromechanical systems) recoil safety mechanism |
| CN109855488A (en) * | 2019-01-15 | 2019-06-07 | 西安交通大学 | A kind of MOEMS Fuze Safety System |
| CN109751929A (en) * | 2019-01-15 | 2019-05-14 | 西安交通大学 | A kind of enclosed type MOEMS fuze safety mechanism |
| CN109751929B (en) * | 2019-01-15 | 2020-06-02 | 西安交通大学 | Locking type MOEMS fuse safety mechanism |
| CN109855488B (en) * | 2019-01-15 | 2020-06-02 | 西安交通大学 | MOEMS fuse safety system |
| CN109696094A (en) * | 2019-01-15 | 2019-04-30 | 西安交通大学 | A kind of silicon substrate MEMS recoil drag |
| CN110285725A (en) * | 2019-05-31 | 2019-09-27 | 北京理工大学 | A kind of Manufacturing resource security system and its implementation applied to Small cartridge |
| CN112033239A (en) * | 2019-06-18 | 2020-12-04 | 南京理工大学 | Fuse MEMS safety and safety relief device |
| CN112033239B (en) * | 2019-06-18 | 2022-03-18 | 南京理工大学 | Fuse MEMS safety and safety relief device |
| CN111561844A (en) * | 2020-06-08 | 2020-08-21 | 西安交通大学 | Low-acceleration time-delay MEMS security device |
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