CN106884165B - A method of based on the modified raising material against oxidative ablation property of surface micro-structure - Google Patents

A method of based on the modified raising material against oxidative ablation property of surface micro-structure Download PDF

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CN106884165B
CN106884165B CN201710023614.5A CN201710023614A CN106884165B CN 106884165 B CN106884165 B CN 106884165B CN 201710023614 A CN201710023614 A CN 201710023614A CN 106884165 B CN106884165 B CN 106884165B
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dihydrogen phosphate
matrix
aluminium dihydrogen
micro
photoresist
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CN106884165A (en
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冯雪
朱相宇
方旭飞
张迎超
屈哲
张长兴
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Tsinghua University
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Tsinghua University
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Chemical Treatment Of Metals (AREA)

Abstract

The invention discloses a kind of based on the modified method for improving material against oxidative ablation property of surface micro-structure, first coats aluminium dihydrogen phosphate in substrate material surface, then forms specific surface micromorphology.Aluminium dihydrogen phosphate micro-structure and basis material adhesiveness are strong, have the characteristics that high temperature resistant, anti-vibration, anti-strip, high temperature resistant airflow scouring, the flowing of surface liquid reactant can be effectively hindered under high-temperature high-speed airflow, to improve anti-oxidant ablation property of the matrix under high-temperature high-speed airflow.

Description

A method of based on the modified raising material against oxidative ablation property of surface micro-structure
Technical field
The present invention relates to a kind of preparation methods of surface topology for improving material against oxidative ablation property, belong to engineering Material, structural deformation and experiment of machanics field.
Background technique
When entering atmosphere, acutely effect occurs high-speed aircraft for aircraft leading edge, fuselage surface and air, generates high temperature Oxidation ablation will occur at high temperature for environment, high-speed aircraft surface, influence the aerodynamic force of aircraft and induce a series of problems, Jeopardize the flight safety of high-speed aircraft.In addition to this, aerospace engine interior, such as blade of aviation engine position, Hot environment can be equally generated at work, made blade of aviation engine that ablation occur, influenced the normal work of aero-engine, Then the flight safety of aircraft is influenced.
Starting in terms of the physicochemical properties of material itself improves Burning corrosion resistance can closely develop to the limit, study people Member, which starts to be conceived to, changes material surface structure to improve anti-oxidant ablation property.There is ablation in material surface, occurs acutely anti- It answers, generates liquid reaction product at high temperature.If lacking effective control means, reaction product will be washed away rapidly by high-speed flow It flows away, is exposed to basis material in air and continues ablation.If the topological structure of material surface can be changed, liquid is stopped to generate Object, which is washed, to flow away, and keeps liquid product resident in substrate material surface, then can effectively completely cut off basis material and air, prevent Basis material continues ablation;And amount of heat can be absorbed in liquid product, reduces basis material temperature.
Chinese patent CN103145445B authorizes a kind of surface micro-structure preparation for improving material against oxidative ablation property Method.It includes the following steps: 1) to polish silicon carbide or carbon-silicon carbide surface;2) by silicon carbide fibre or silicon carbide Fibre bundle is arranged in the matrix surface of polishing, obtains the matrix for being attached with silicon carbide fibre or silicon carbide fibre beam;3) by step 2) matrix that silicon carbide fibre or silicon carbide fibre beam are attached in is placed in chemical vapor deposition expansion chamber, carries out carbon to surface The chemical vapor deposition of SiClx;4) laser ablation is carried out to material surface obtained in step 3), obtained with different form ratios The surface micro-structure of conduit.Above-mentioned patent has made surface micro-structure by the method for laser ablation, effectively stops liquid raw It is washed and flows away at object, completely cut off basis material and air, prevent basis material from continuing ablation.Although can make to give birth in the short time At liquid silica reside in inside surface micro-structure, but the method that refers to of above patent document is in the production micro- knot in surface Laser ablation used is easy injury basis material itself during structure, therefore under the conditions of long-time ablation, it is possible to aggravate The ablation degree of material.
Summary of the invention
The purpose of the present invention is to provide a kind of based on the modified side for improving material against oxidative ablation property of surface micro-structure Method.This method prepares specific microstructure appearance in matrix surface, to improve base by Control of chemical reaction preparation process Anti-oxidant ablation property of the body under high-temperature high-speed airflow.
Technical scheme is as follows: one kind is by Control of chemical reaction material surface micro-structure to improve material antioxygen Change the method for performance, comprising the following steps:
1) the above di(2-ethylhexyl)phosphate of compound concentration 70% (i.e. aluminium dihydrogen phosphate containing 70g in 100mL solution, unit g/mL, similarly hereinafter) Then hydrogen aluminum water solution vacuumizes the gas removed in solution;
2) aluminium dihydrogen phosphate aqueous solution after vacuumizing step 1) is coated on matrix surface;
3) matrix for coating aluminium dihydrogen phosphate is dried in a vacuum, aluminium dihydrogen phosphate becomes solid-state, is tightly attached to matrix table Face;
4) photoresist is coated on the biphosphate aluminium layer of matrix surface, and carried out according to required surface micro-structure shape Ultraviolet light irradiation, development obtain photoresist micro-structure (referring to fig. 2);
5) matrix after step 4) processing is washed away with weakly alkaline solution, the aluminium dihydrogen phosphate contacted with weakly alkaline solution is rushed Fall, the matrix after washing away is dry;
6) photoresist is removed, obtains specific aluminium dihydrogen phosphate micro-structure (referring to fig. 4) in matrix surface, which can be with Improve anti-oxidant ablation property of the matrix under high-temperature high-speed airflow.
Above-mentioned steps 1) in, the concentration of aluminium dihydrogen phosphate aqueous solution is preferably 75%.It can be by aluminium dihydrogen phosphate aqueous solution It is placed in a beaker, is put into vacuum tank and vacuumizes, extract the gas in solution out, prevent thering is bubble generation to lead to di(2-ethylhexyl)phosphate when solidification The thickness of hydrogen aluminium is excessive.Pumpdown time is usually 5~10min, until there is no bubbles to generate.
Phosphate dihydrogen aluminum solution after vacuumizing is coated on before matrix surface by step 2), it is preferred that matrix of first polishing Surface, and make matrix surface cleaning, drying.Step 2) primary coating aluminium dihydrogen phosphate thickness is preferably 25~50 μm.
The matrix for coating aluminium dihydrogen phosphate can be put into drying in heating in vacuum case by step 3), and drying temperature is preferably 35 DEG C -45 DEG C, until moisture evaporating completely, aluminium dihydrogen phosphate become solid-state, are tightly attached to matrix surface.
The thickness of photoresist coated by step 4) is about 3 μm.
Weakly alkaline solution described in step 5) can be water or other weakly alkaline aqueous solutions, such as dilute KOH of pH7-10 Solution, dilute NaOH solution, because neutralization reaction occurs for aluminium dihydrogen phosphate and weakly alkaline solution, therefore the phosphoric acid contacted with weakly alkaline solution Aluminum dihydrogen is washed out rapidly.Flushing time is usually 2~3s, and the matrix after washing away can be put into heater box in 50 DEG C of left and right trunks It is dry, drying time about 5 minutes, until moisture evaporation is complete.
Resulting structures can be put into acetone by step 6) to be washed away, and photoresist decomposes in acetone, obtains final surface Aluminium dihydrogen phosphate micro-structure.
, can be with repetitive operation above-mentioned steps 2 in order to obtain diversified, different-thickness aluminium dihydrogen phosphate micro-structure) and 3), the biphosphate aluminized coating of different-thickness is formed in matrix surface different zones as needed.In repetitive coatings aluminium dihydrogen phosphate When aqueous solution thicker biphosphate aluminized coating can be formed in specific region after dry, is then carried out subsequent by template Step finally obtains the micro-structure of matrix surface variable thickness, referring to Fig. 5.
Compared with prior art, the present invention having the following advantages that and high-lighting effect:
1) micro-structure that the present invention is prepared in matrix surface can effectively contain the liquid reactant of ablation generation, prevent Only liquid reactant washes away loss by high-speed flow, thus prevent the gases such as oxygen further diffuse into matrix cause it is more tight The oxidation ablation of weight;
2) micro-structure preparation method of the invention is directly to grow micro-structure in matrix surface, to matrix itself without broken It is bad, it prevents the gases such as oxygen from entering matrix, ensure that the integrality of matrix, improve the anti-oxidant ablation property of matrix;
3) in the present invention, by the way that the di(2-ethylhexyl)phosphate of different-thickness can be arrived in matrix surface repetitive coatings aluminium dihydrogen phosphate Hydrogen aluminium micro-structure;
4) surface micro-structure of method of the invention preparation has high temperature resistant, anti-vibration, anti-strip, the punching of high temperature resistant air-flow Brush, it is strong with basis material adhesiveness the features such as, the topological structure can effectively under high-temperature high-speed airflow hinder surface liquid The flowing of reactant;
5) present invention vacuumizes aluminium dihydrogen phosphate, and makes it dry under vacuum conditions, effectively reduces and is coated with At 35 DEG C -45 DEG C of matrix of aluminium dihydrogen phosphate in drying process aluminium dihydrogen phosphate expansion, reduce it is dry after matrix surface phosphorus The final thickness of acid dihydride aluminium, and effectively strengthen the adhesiveness of aluminium dihydrogen phosphate and matrix.
Detailed description of the invention
Fig. 1 is that photoresist is coated on the aluminium dihydrogen phosphate of matrix surface in embodiment step B, obtained matrix table Face micro-structure schematic diagram.
Fig. 2 is the matrix surface micro-structure schematic diagram obtained after embodiment step C develops.
Fig. 3 is the matrix surface micro-structure schematic diagram obtained after embodiment step C is completed.
Fig. 4 is the matrix surface micro-structure schematic diagram that embodiment step D is obtained.
Fig. 5 is that embodiment repeats phosphate dihydrogen aluminum solution coating and dry processing, the matrix surface finally obtained The micro-structure schematic diagram of variable thickness.
In figure, 1- matrix, 2- aluminium dihydrogen phosphate, 3- photoresist.
Specific embodiment
With reference to the accompanying drawing, by specific embodiment, the present invention is further explained.
A, polishing matrix surface makes matrix surface cleaning, drying, the aluminium dihydrogen phosphate aqueous solution that concentration is 75% is placed in It in beaker, is put into vacuum tank and vacuumizes, extract the gas in solution out.Then the phosphate dihydrogen aluminum solution coating after vacuumizing In matrix surface.
B, the matrix for coating aluminium dihydrogen phosphate is put into heating in vacuum case the drying at 35 DEG C -45 DEG C, until liquid is complete Pervaporation, aluminium dihydrogen phosphate become solid-state, are tightly attached to matrix surface.Photoresist is coated on biphosphate aluminium surface, institute at this time Obtained micro-structure schematic diagram is as shown in Figure 1, Fig. 1 includes matrix 1, aluminium dihydrogen phosphate 2, photoresist 3.Then it is obtained according to required The surface micro-structure shape arrived utilizes ultraviolet light irradiation light photoresist.
C, matrix and its aluminium dihydrogen phosphate on surface are put into developer solution with the photoresist being irradiated by ultraviolet light, about 20 seconds The photoresist being irradiated afterwards by ultraviolet light decomposes, and at this time takes out it from developer solution, obtained micro-structure schematic diagram such as Fig. 2 It is shown.Obtained structure is put into weak caustic solution at this time and is washed away, the aluminium dihydrogen phosphate contacted with weak caustic solution is rushed rapidly Fall, then the matrix after washing away is put into heater box in 50 DEG C or so dryings, until moisture evaporation is completely, obtained micro- knot Structure schematic diagram is as shown in Figure 3.
D, finally resulting structure is put into acetone and is washed away, photoresist decomposes in acetone, and resulting structures are extremely final Surface micro-structure, micro-structure schematic diagram is as shown in Figure 4.
In stepb, if the particular surface in matrix repeats to coat phosphate dihydrogen aluminum solution and dry processing, The micro-structure of matrix surface variable thickness can be finally obtained, as shown in Figure 5.

Claims (9)

1. a kind of method for improving material against oxidative ablation property is to carry out surface micro-structure to material matrix by following step It is modified:
1) then 70% or more aluminium dihydrogen phosphate aqueous solution of compound concentration vacuumizes the gas removed in solution;
2) aluminium dihydrogen phosphate aqueous solution after vacuumizing step 1) is coated on matrix surface;
3) matrix for coating aluminium dihydrogen phosphate is dried in a vacuum, aluminium dihydrogen phosphate becomes solid-state, is tightly attached to matrix surface;
4) photoresist is coated on the biphosphate aluminium layer of matrix surface, and ultraviolet according to the progress of required surface micro-structure shape Line irradiation, development obtain photoresist micro-structure;
5) matrix after step 4) processing being washed away with weakly alkaline solution, the aluminium dihydrogen phosphate contacted with weakly alkaline solution is washed out, Matrix after washing away is dry;
6) photoresist is removed, obtains aluminium dihydrogen phosphate micro-structure in matrix surface.
2. the method as described in claim 1, which is characterized in that the concentration of aluminium dihydrogen phosphate aqueous solution described in step 1) is 75%, it is placed in a beaker and vacuumizes 5~10min, until there is no bubbles to generate.
3. the method as described in claim 1, which is characterized in that before step 2) coats aluminium dihydrogen phosphate aqueous solution painting, first beat Matrix surface is ground, and makes matrix surface cleaning, drying.
4. the method as described in claim 1, which is characterized in that step 2) coat aluminium dihydrogen phosphate with a thickness of 25~50 μm.
5. the method as described in claim 1, which is characterized in that the vacuum drying temperature of step 3) is 35 DEG C -45 DEG C.
6. the method as described in claim 1, which is characterized in that photoresist coated by step 4) with a thickness of 3 μm.
7. the method as described in claim 1, which is characterized in that weakly alkaline solution described in step 5) is dilute KOH of pH7-10 Or NaOH solution.
8. the method as described in claim 1, which is characterized in that step 6) washes away removal photoresist with acetone.
9. the method as described in claim 1, which is characterized in that before step 4), repetitive operation step 2) and 3), as needed The biphosphate aluminized coating of different-thickness is formed in matrix surface different zones.
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CN108982303B (en) * 2018-08-29 2020-04-14 清华大学 Method and device for acquiring residence characteristic of liquid substance on material surface
CN114672766B (en) * 2022-03-28 2023-02-03 清华大学 Oxidation resistant structure and method of forming an oxidation resistant structure

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002518594A (en) * 1998-06-19 2002-06-25 アルコア インコーポレイテッド How to prevent dirt on the surface of aluminum products
CN103145445A (en) * 2013-03-21 2013-06-12 清华大学 Preparation method for surface microstructure capable of improving oxidization resistance and ablation resistance of material
CN104060252A (en) * 2013-09-05 2014-09-24 攀钢集团攀枝花钢铁研究院有限公司 Surface treatment agent and preparation method thereof and hot-dip plated metal material
CN104150953A (en) * 2014-08-01 2014-11-19 锦州大业炭素制品有限公司 Oxidation resistance treatment method of graphite jig for priducing quartz crucibles
CN103911621B (en) * 2014-04-04 2016-01-06 大连理工大学 A kind of method changing electroformed structure surface energy
CN105347847A (en) * 2014-08-21 2016-02-24 青岛炜烨锻压机械有限公司 Fireproof material impregnation treatment process

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002518594A (en) * 1998-06-19 2002-06-25 アルコア インコーポレイテッド How to prevent dirt on the surface of aluminum products
CN103145445A (en) * 2013-03-21 2013-06-12 清华大学 Preparation method for surface microstructure capable of improving oxidization resistance and ablation resistance of material
CN104060252A (en) * 2013-09-05 2014-09-24 攀钢集团攀枝花钢铁研究院有限公司 Surface treatment agent and preparation method thereof and hot-dip plated metal material
CN103911621B (en) * 2014-04-04 2016-01-06 大连理工大学 A kind of method changing electroformed structure surface energy
CN104150953A (en) * 2014-08-01 2014-11-19 锦州大业炭素制品有限公司 Oxidation resistance treatment method of graphite jig for priducing quartz crucibles
CN105347847A (en) * 2014-08-21 2016-02-24 青岛炜烨锻压机械有限公司 Fireproof material impregnation treatment process

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