CN106882835A - A kind of preparation method of indium tin oxide composite powder - Google Patents

A kind of preparation method of indium tin oxide composite powder Download PDF

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CN106882835A
CN106882835A CN201710189464.5A CN201710189464A CN106882835A CN 106882835 A CN106882835 A CN 106882835A CN 201710189464 A CN201710189464 A CN 201710189464A CN 106882835 A CN106882835 A CN 106882835A
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indium tin
oxide composite
tin oxide
composite powder
preparation
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CN106882835B (en
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张天舒
宋晓超
张天宇
何东
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ANHUI TUOJITAI NOVEL CERAMIC TECHNOLOGY Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G19/00Compounds of tin
    • C01G19/02Oxides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G15/00Compounds of gallium, indium or thallium
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/01Particle morphology depicted by an image
    • C01P2004/03Particle morphology depicted by an image obtained by SEM
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/01Particle morphology depicted by an image
    • C01P2004/04Particle morphology depicted by an image obtained by TEM, STEM, STM or AFM
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/64Nanometer sized, i.e. from 1-100 nanometer
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/11Powder tap density

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  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
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  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
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Abstract

The present invention discloses a kind of preparation method of indium tin oxide composite powder, belongs to indium tin oxide composite powder preparing technical field, comprises the following steps:It is prepared by mixing salt solution:It is according to weight ratio2O3:SnO2=9:1, by InCl3Solution and SnCl4Solution is placed in reactor, is uniformly mixed;Add dispersant:It is 2 to add weight ratio:1:3 polyvinylpyrrolidone, beta Alanine and ethylene glycol, add excessive more than 20% urea;Coprecipitation reaction:60~90 DEG C are progressively warming up to, constant temperature simultaneously keeps ceaselessly stirring, In in question response liquid3+Untill precipitating completely, ultrasonication continues to be kept stirring for after 1 hour, and is aged, and obtains indium tin sediment;Scrubbed, dry, grinding, sieving and high-temperature calcination, obtain final product the nano-indium stannum oxide composite granule of sintering activity high.The indium tin oxide composite powder hard aggregation that is made of preparation method of the present invention is few, good fluidity, be easy to compressing.

Description

A kind of preparation method of indium tin oxide composite powder
Technical field
The present invention relates to indium tin oxide composite powder preparing technical field, a kind of more particularly to preparation with coprecipitation aoxidizes The method of indium tin composite granule.
Background technology
Ito powder is the raw material for preparing ITO sputtering coating targets, high-quality to be obtained, highdensity ITO sputtering target materials, Then need the ito powder of the uniform ultrapure ultra-fine agglutinating property high of composition.
In general, it is to ito powder specific requirement:Particle size is less than 100nm, and specific surface area is more than 15m2/ g, and And granule-morphology is in spherical, particle size distribution range is narrow, and hard aggregation is few.The preparation of the ITO powders reported in current various countries document Method mainly has and prepares ito powder method and have at present:Homogeneous co-precipitation process, aqueous solution coprecipitation, electrolysis, sol-gel Method, spray burning method, spray heating decomposition etc..It is pure that there is chemical coprecipitation process is simple to be easily achieved work metaplasia product, product The advantages of spending uniform high, component, favorable dispersibility, its basic step:Composition metering is pressed to prepare containing soluble metal salt solution;With Precipitating reagent is added dropwise to slaine is homogeneously crystallized, Precipitation in mixing salt solution;By thermal dehydration and high-temperature calcination solid solution Fine powder is prepared Deng treatment.
But particle dispersion obtained in existing method is not highly desirable, particle diameter is answered in more than 100nm with this tin indium oxide The density for closing target prepared by powder can not typically reach more than 99%, it is difficult to meet the requirement of high performance thin film plated film.
The content of the invention
The present invention provides a kind of preparation method of indium tin oxide composite powder, solves the obtained oxidation of existing preparation method Indium tin composite granule dispersiveness is undesirable, the problem that hard aggregation is more, sintering activity is low.
In order to solve the above technical problems, the technical scheme is that:
A kind of preparation method of indium tin oxide composite powder, comprises the following steps:
(1) preparation of mixing salt solution and precipitation system:It is according to weight ratio2O3:SnO2=9:1, measure mass concentration It is the InCl of 200~250g/L3Solution and mass concentration are the SnCl of 200~250g/L4Solution is placed in reactor, is added More than 20% urea of amount, is uniformly mixed;
(2) dispersant is added:It is 2 to add weight ratio:1:3 polyvinylpyrrolidone, Beta-alanine and polyethylene glycol,;
(3) coprecipitation reaction:In whole precipitation process, it is kept stirring for progressively being warming up to 60~90 DEG C, In in question response liquid3+ Precipitate completely, through ultrasonication 1 hour after, continue to stir and be aged 1~24 hour, obtain indium tin sediment;
(4) wash:By step (3) obtain indium tin sediment difference water and organic solvent washing filtrate in without Cl-Ion;
(5) dry, grind and sieve:Indium tin sediment after washing is vacuumized into drying, ground, sieving is obtained ITO Presoma;
(6) high-temperature calcination:20~30 DEG C/h of ITO presomas is warming up to 400~700 DEG C, 30~50min is incubated, then with 80~100 DEG C/h is warming up to 800~1100 DEG C, is incubated 3~5 hours, obtains final product indium tin oxide composite powder.
Wherein it is preferred to, the dispersant in the step (1) is that weight ratio is 2:1:3 polyvinylpyrrolidone, β-the third Propylhomoserin and polyethylene glycol,;Its addition is InCl3And SnCl4The 2~5% of total amount.
Wherein it is preferred to, the frequency range of ultrasonically treated ultrasonic wave is 40~60MHz in the step (2).
Wherein it is preferred to, the organic solvent in the step (4) is that volume ratio is 1:3:5 ethanol, ethyl acetate and ring Hexanol.
Beneficial effects of the present invention:
Composite dispersing agent is added in mixing salt solution of the present invention, wherein, it is water-soluble that polyvinylpyrrolidone belongs to nonionic Property high molecular polymer, water-soluble and various organic solvents, with bonding, thickening, suspending, dispersion, hydrotropy, complexing, film forming Etc. various premium properties.PVP can reduce agglomeration of the particle during coprecipitated, be a kind of due to its low viscosity effect Effective anti-agglomeration agent.The identical synergy of polyvinylpyrrolidone and Beta-alanine, polyethylene glycol, as composite dispersing agent, The agglomeration of coprecipitation reaction can effectively be reduced.The indium tin oxide composite powder hard aggregation being made of preparation method of the present invention Less, good fluidity, be easy to compressing.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this Some embodiments of invention, for those of ordinary skill in the art, without having to pay creative labor, may be used also Other accompanying drawings are obtained with according to these accompanying drawings.
Fig. 1 is the typical microstructure figure of indium tin oxide composite powder in the embodiment of the present invention 1.
Specific embodiment
Below in conjunction with the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, Obviously, described embodiment is only a part of embodiment of the invention, rather than whole embodiments.Based in the present invention Embodiment, all other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, all Belong to the scope of protection of the invention.
Embodiment 1
The present embodiment provides a kind of preparation method of indium tin oxide composite powder, comprises the following steps:
(1) preparation of mixing salt solution and precipitation system:It is according to weight ratio2O3:SnO2=9:1, measure mass concentration It is the InCl of 220g/L3Solution and mass concentration are the SnCl of 230g/L4Solution is placed in reactor, adds excessive 20% Urea, is uniformly mixed;
(2) dispersant is added:It is 2 to add weight ratio:1:3 polyvinylpyrrolidone, Beta-alanine and polyethylene glycol,; The addition of the dispersant is InCl3And SnCl4The 3.5% of total amount;
(3) coprecipitation reaction:70 DEG C are progressively warming up to, and keep In in constant temperature to reaction solution3+Untill precipitating completely;Ultrasound Ripple is processed 1 hour, and the frequency range of ultrasonic wave is 50MHz, continues to stir and be aged 12 hours, obtains metal precipitates;
(4) wash:By step (3) obtain metal precipitates respectively with water and organic solvent washing to filtrate without Cl-From Son is present;Organic solvent is that volume ratio is 1:3:5 ethanol, ethyl acetate and cyclohexanol.
(5) dry, grind and sieve:Indium tin sediment after washing is vacuumized into drying, ground, sieving is obtained ITO Presoma;
(6) high-temperature calcination:25 DEG C/h of ITO presomas is warming up to 500 DEG C, 40min is incubated, then be warming up to 90 DEG C/h 950 DEG C, 4 hours are incubated, obtain final product indium tin oxide composite powder.
The electron scanning Electron microscope showed powder of indium tin oxide composite powder obtained in the present embodiment has good dividing Property is dissipated, rarely hard aggregation, its typical microstructure is referring to Fig. 1.
Embodiment 2
The present embodiment provides a kind of preparation method of indium tin oxide composite powder, comprises the following steps:
(1) preparation of mixing salt solution and precipitation system:It is according to weight ratio2O3:SnO2=9:1, measure mass concentration It is the InCl of 200g/L3Solution and mass concentration are the SnCl of 250g/L4Solution is placed in reactor, adds excessive 25% Urea, is uniformly mixed;
(2) dispersant is added:It is 2 to add weight ratio:1:3 polyvinylpyrrolidone, Beta-alanine and polyethylene glycol,; The addition of the dispersant is InCl3And SnCl4The 4% of total amount;
(3) coprecipitation reaction:60 DEG C are progressively warming up to, and keep In in constant temperature to reaction solution3+Untill precipitating completely, ultrasound Ripple is processed 1 hour, and the frequency range of ultrasonic wave is 60MHz;Continue to stir and be aged 10 hours, obtain metal precipitates;
(4) wash:By step (3) obtain metal precipitates respectively with water and organic solvent washing to filtrate without Cl-From Son is present;Organic solvent is that volume ratio is 1:3:5 ethanol, ethyl acetate and cyclohexanol.
(5) dry, grind and sieve:Metal precipitates after washing are vacuumized into drying, ground, sieving is obtained ITO Presoma;
(6) high-temperature calcination:30 DEG C/h of ITO presomas is warming up to 400 DEG C, 50min is incubated, then be warming up to 80 DEG C/h 1080 DEG C, 5 hours are incubated, obtain final product indium tin oxide composite powder.
The high-resolution electron scanning Electron microscope showed powder of indium tin oxide composite powder obtained in the present embodiment has Good dispersiveness, rarely hard aggregation.
Embodiment 3
The present embodiment provides a kind of preparation method of indium tin oxide composite powder, comprises the following steps:
(1) preparation of mixing salt solution and precipitation system:It is according to weight ratio2O3:SnO2=9:1, measure mass concentration It is the InCl of 250g/L3Solution and mass concentration are the SnCl of 200g/L4Solution is placed in reactor, adds excessive 28% Urea, is uniformly mixed;
(2) dispersant is added:It is 2 to add weight ratio:1:3 polyvinylpyrrolidone, Beta-alanine and polyethylene glycol, institute The addition for stating dispersant is InCl3 and SnCl4The 2% of total amount;
(3) coprecipitation reaction:90 DEG C are progressively warming up to, and keep In in constant temperature to reaction solution3+Untill precipitating completely, ultrasound Ripple is processed 1 hour, and the frequency range of ultrasonic wave is 60MHz;Continue to stir and be aged 20 hours, obtain metal hydroxides;
(4) wash:By step (3) obtain metal precipitates thing respectively with water and organic solvent washing to filtrate without Cl- Ion is present;Organic solvent is that volume ratio is 1:3:5 ethanol, ethyl acetate and cyclohexanol.
(5) dry, grind and sieve:Metal precipitates after washing are vacuumized into drying, ground, sieving is obtained ITO Presoma;
(6) high-temperature calcination:20 DEG C/h of ITO presomas is warming up to 600 DEG C, 30min is incubated, then be warming up to 100 DEG C/h 800 DEG C, 3 hours are incubated, obtain final product indium tin oxide composite powder.
The electron scanning Electron microscope showed powder of indium tin oxide composite powder obtained in the present embodiment has good dividing Property is dissipated, rarely hard aggregation.
Embodiment 4
The present embodiment provides a kind of preparation method of indium tin oxide composite powder, comprises the following steps:
(1) preparation of mixing salt solution and precipitation system:It is according to weight ratio2O3:SnO2=9:1, measure mass concentration It is the InCl of 220g/L3Solution and mass concentration are the SnCl of 230g/L4Solution is placed in reactor, adds excessive 30% Urea, is uniformly mixed;
(2) dispersant is added:It is 2 to add weight ratio:1:3 polyvinylpyrrolidone, Beta-alanine and polyethylene glycol, institute The addition for stating dispersant is InCl3And SnCl4The 4% of total amount;
(3) coprecipitation reaction:80 DEG C are progressively warming up to, and keep In in constant temperature to reaction solution3+Untill precipitating completely, ultrasound Ripple is processed 1 hour, and the frequency range of ultrasonic wave is 50MHz;Continue to stir and be aged 10 hours, obtain metal precipitates;
(4) wash:By step (3) obtain metal precipitates respectively with water and organic solvent washing to filtrate without Cl-From Son is present;Organic solvent is that volume ratio is 1:3:5 ethanol, ethyl acetate and cyclohexanol.
(5) dry, grind and sieve:Metal precipitates after washing are vacuumized into drying, ground, sieving is obtained ITO Presoma;
(6) high-temperature calcination:25 DEG C/h of ITO presomas is warming up to 650 DEG C, 40min is incubated, then be warming up to 90 DEG C/h 1050 DEG C, 4 hours are incubated, obtain final product indium tin oxide composite powder.
The transmission electron microscope photo display powder of indium tin oxide composite powder obtained in the present embodiment has good dispersiveness, Rarely hard aggregation.
Embodiment 5
The present embodiment provides a kind of preparation method of indium tin oxide composite powder, comprises the following steps:
(1) preparation of mixing salt solution and precipitation system:It is according to weight ratio2O3:SnO2=9:1, measure mass concentration It is the InCl of 240g/L3Solution and mass concentration are the SnCl of 230g/L4Solution is placed in reactor, add excessive 20% with On urea, be uniformly mixed;
(2) dispersant is added:It is 2 to add weight ratio:1:3 polyvinylpyrrolidone, Beta-alanine and polyethylene glycol, institute The addition for stating dispersant is InCl3And SnCl4The 3% of total amount;
(3) coprecipitation reaction:Heat up, be warming up to 68 DEG C, and keep In in constant temperature to reaction solution3+Untill precipitating completely, surpass Sonicated 1 hour, the frequency range of ultrasonic wave is 55MHz;Continue to stir and be aged 12 hours, obtain metal precipitates;
(4) wash:By step (3) obtain metal precipitates respectively with water and organic solvent washing filtrate without Cl-Ion In the presence of;Organic solvent is that volume ratio is 1:3:5 ethanol, ethyl acetate and cyclohexanol.
(5) dry, grind and sieve:Metal hydroxides after washing is vacuumized into drying, ground, sieving is obtained ITO presomas;
(6) high-temperature calcination:25 DEG C/h of ITO presomas is warming up to 700 DEG C, 45min is incubated, then be warming up to 95 DEG C/h 1100 DEG C, 4 hours are incubated, obtain final product indium tin oxide composite powder.
The transmission electron microscope photo display powder of indium tin oxide composite powder obtained in the present embodiment has good dispersiveness, Rarely reunite.
In order to characterize mobility, the porosity etc. of powder, generally using angle of repose, flat board angle, apparent density and vibration density Spend to be characterized.
Angle of repose is also referred to as angle of repose, refer to the Free Surface of powder accumulation horizon under static balance state, formed with horizontal plane Maximum angle angle of repose.It is to make to fall formation on particular platform under powder nature by ad hoc fashion.Angle of repose pair The mobility influence of powder is maximum, and angle of repose is smaller, and the mobility of powder is better.
Flat board angle refers to that the flat board that will be embedded in powder vertically lifts upwards, Free Planar (inclined-plane) of the powder on flat board Angle and flat board between be given a shock after angle average value referred to as flat board angle.Flat board angle is smaller, the mobility of powder It is stronger.
Tap density refer to powder filling after special container, container is vibrated so that the space destroyed in powder, Make powder for the density after tightly packed state.By measuring tap density it is known that the mobility and porosity etc. of powder Data.
Apparent density refers to density of the powder in special container after nature full state.
Angle of repose, the flat board of the indium tin oxide composite powder obtained by above-described embodiment are tested with powder tester for overall characteristic Angle, apparent density and tap density (concrete numerical value sees attached list)
Angle of repose (°) Flat board angle (°)
Embodiment 1 29.88 36.56 1.52 1.90
Embodiment 2 32.33 42.11 1.63 1.85
Embodiment 3 26.77 65.78 1.49 1.92
Embodiment 4 31.46 40.11 1.55 1.86
Embodiment 5 29.67 39.66 1.62 1.91
The upper only presently preferred embodiments of the present invention, is not intended to limit the invention, all in spirit of the invention Within principle, any modification, equivalent substitution and improvements made etc. should be included within the scope of the present invention.

Claims (4)

1. a kind of preparation method of indium tin oxide composite powder, it is characterised in that comprise the following steps:
(1) preparation of mixing salt solution and precipitation system:It is according to weight ratio2O3:SnO2=9:1, measuring mass concentration is The InCl of 200~250g/L3Solution and mass concentration are the SnCl of 200~250g/L4Solution is placed in reactor, is added excessive More than 20% urea;It is uniformly mixed;
(2) dispersant is added:It is 2 to add weight ratio:1:3 polyvinylpyrrolidone, Beta-alanine and polyethylene glycol;
(3) coprecipitation reaction:Progressively it is warming up to 60~90 DEG C, In in question response liquid3+Precipitate completely, through ultrasonication 1 hour Afterwards, continue to stir and be aged 1~24 hour, obtain indium tin sediment;
(4) wash:By step (3) obtain indium tin sediment respectively with water and organic solvent washing to filtrate without Cl-Ion is deposited ;
(5) dry, grind and sieve:Indium tin sediment after washing is vacuumized into drying, ground, sieving is obtained ITO forerunner Body;
(6) high-temperature calcination:20~30 DEG C/h of ITO presomas is warming up to 400~700 DEG C, 30~50min is incubated, then with 80~ 100 DEG C/h is warming up to 800~1100 DEG C, is incubated 3~5 hours, obtains final product indium tin oxide composite powder.
2. the preparation method of a kind of indium tin oxide composite powder according to claim 1, it is characterised in that:The dispersant Addition be InCl3And SnCl4The 2~5% of total amount.
3. the preparation method of a kind of indium tin oxide composite powder according to claim 1, it is characterised in that:The step (2) frequency range of ultrasonically treated ultrasonic wave is 40~60MHz in.
4. the preparation method of a kind of indium tin oxide composite powder according to claim 1, it is characterised in that:The step (4) organic solvent in is that volume ratio is 1:3:5 ethanol, ethyl acetate and cyclohexanol.
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CN112457025A (en) * 2020-12-11 2021-03-09 广西晶联光电材料有限责任公司 Preparation method of nano ITO powder with large specific surface area
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CN114849714A (en) * 2022-05-27 2022-08-05 南京大学 Preparation method of solid base catalyst for alcoholysis of PET

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110540233A (en) * 2019-09-20 2019-12-06 华南理工大学 Indium oxide nanorod with uniform size and preparation method and application thereof
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CN113277549A (en) * 2021-06-15 2021-08-20 先导薄膜材料有限公司 Indium tin oxide powder and preparation method thereof
CN114849714A (en) * 2022-05-27 2022-08-05 南京大学 Preparation method of solid base catalyst for alcoholysis of PET

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