CN106879153A - High-Power Microwave medium window punctures inlet side plasma diagnosis device and method - Google Patents
High-Power Microwave medium window punctures inlet side plasma diagnosis device and method Download PDFInfo
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- CN106879153A CN106879153A CN201710038695.6A CN201710038695A CN106879153A CN 106879153 A CN106879153 A CN 106879153A CN 201710038695 A CN201710038695 A CN 201710038695A CN 106879153 A CN106879153 A CN 106879153A
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- H—ELECTRICITY
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- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
- H05H1/0025—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using photoelectric means
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Abstract
The present invention discloses a kind of High-Power Microwave medium window and punctures inlet side plasma diagnosis device and method, device mainly includes the different fibre bundle of Feed Horn, the medium window positioned at Feed Horn bottom, length, spectrometer and camera, and the Feed Horn is being provided with matrix array optic fibre hole along three directions respectively on the side wall of medium window；Three directions include the Y-direction parallel with E field polarization direction, the X-direction vertical with E field polarization direction, and Z-direction that is parallel with microwave transmission direction or having certain angle；The input of fibre bundle is inserted in the optic fibre hole respectively；The optical fiber of the output end of fibre bundle is connected with spectrometer input successively in single mode, and the output end of spectrometer is connected with camera；The device can diagnose the spatio-temporal distribution of plasma in single microwave pulse.
Description
Technical field
The invention belongs to high power microwave plasma diagnostic techniques field, more particularly to a kind of single nanosecond microwave arteries and veins
Real-time luminescence of plasma spectrum is with time and the method for spatial evolution in punching.
Background technology
High-Power Microwave (High Power Microwave, HPM) refers to peak power more than 100MW, frequency 1GHz~
The electromagnetic radiation of 300GHz.HPM has boundless application prospect in scientific research, civilian and national defence.Main application includes：
(1) by electron cyclotron resonace mechanism to controlled thermonuclear plasma heating；(2) for high power pulses radar, realize compared with
Detected and tracking the target of fine-resolution under broadband；(3) it is transmission energy between the earth and space, is spaceship transmitting
Energy is provided to being converted between space track or track；(4) for high energy particle radio-frequency accelerator, high-energy physics, core are carried out
Physics research；(5) for HPM directed energy weapons；By HPM by directional antenna radiation, with high power, high directivity it is narrow
Microbeam instantaneous irradiation target, punctures or burns the critical electronic equipment of enemy's sophisticated weapon system, can effectively attack radar,
Communication equipment, computer, aircraft and guided missile etc., it is military that HPM weapons have turned into selectable trump card on following new and high technology battlefield
Device.
In High-Power Microwave generation device, medium window ensures that microwave produces required vacuum environment, radiation microwave, and being must
Indispensable important component.It is particularly high-power, small with the raising of the peak power and pulse width of high-power pulsed ion beams
The development of type microwave device, medium window microwave surface puncture have become limitation High-Power Microwave transmission with emission system power
The Main Bottleneck of raising.Puncture the inlet side for occurring mainly in medium window, it is triggered by Secondary-emission multipbcation, is in dielectric surface
Plasma avalanche of ionization electric discharge in release gas blanket.
High-Power Microwave medium window breakdown test finds that the luminescence of plasma of different spatial also has difference, therefore,
Need the spatial distribution of the diagnosis plasma spectral line in single microwave pulse.
Because generally there is certain spatial non-uniformity in the plasma of High-Power Microwave medium window vacuum surface, transmitting
Spectrum is also presented spatial non-uniform therewith.Observation medium window inlet side punctures the luminescent spectrum for producing plasma, can be according to light
The anti-elemental composition for pushing away plasma of spectrum, density, temperature and its Annual distribution and spatial distribution are (vertically and along microwave propagation side
To), so as to recognize its mechanism deeper into ground.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of High-Power Microwave medium window and puncture inlet side plasma
Diagnostic device and method, within the light launch time of Nanosecond discharge, it is possible to achieve the plasma time in x, y and z direction and
Three dimensions develops and diagnoses.
Technical solution of the invention is to provide a kind of High-Power Microwave medium window and punctures inlet side plasma diagnostics
Method, comprises the following steps：
1) in Feed Horn different spatial luminescence of plasma simultaneously by being arranged on three on the wall of Feed Horn side
Multiple sub-optical fibre beams in individual direction are drawn；The sub-optical fibre beam includes the different optical fiber of multiple length, the length between adjacent fiber
Degree difference is equal, and length difference is the product of spectrometer time resolution ratio and the light velocity, and three directions include and E field polarization direction
Parallel Y-direction, the X-direction vertical with E field polarization direction, and Z side that is parallel with microwave transmission direction or having certain angle
To；
2) spectrometer gathers the spectrum of all sub-optical fibre beams simultaneously, measures the spatial discrimination of the emission spectrum of plasma；
3) Stark broadening and hot dopplerbroadening are carried out to each plasma spectrometry, plasma optical emission spectroscopy line is obtained
Broadening, the halfwidth for obtaining Stark broadening according to Lorentz lorentz and gauss of distribution function deconvolution is close to obtain plasma
Degree, obtains hot dopplerbroadening to obtain the temperature of plasma according still further to Lorentz lorentz and gauss of distribution function deconvolution；
4) spatial and temporal distributions of plasma are obtained simultaneously by multiple sub-optical fibre beams, when the spatial and temporal distributions include different
Quarter, the density of the plasma of different spatial and energy parameter.
Multiple sub-optical fibre beams of above-mentioned Z-direction and the complementary angle that the angle in microwave transmission direction is Feed Horn subtended angle.
Three quadrants and four-quadrant of the sub-optical fibre beam alignment medium window of above-mentioned X-direction；The sub-optical fibre beam alignment of above-mentioned Y-direction
The two quadrant of medium window and three quadrants；Three quadrants of the sub-optical fibre beam alignment medium window of above-mentioned Z-direction.
The present invention also provides a kind of High-Power Microwave medium window and punctures inlet side plasma diagnosis device, including feed loudspeaker
, the medium window positioned at Feed Horn bottom, fibre bundle, spectrometer and camera, it is characterized in that：Above-mentioned Feed Horn is leaned on
Matrix array optic fibre hole is being provided with the side wall of nearly medium window along three directions respectively；Above three direction includes and electric field pole
Change the parallel Y-direction in direction, the X-direction vertical with E field polarization direction, and it is parallel with microwave transmission direction or have a clamp
The Z-direction at angle；
Above-mentioned fibre bundle includes multiple sub-optical fibre beams；Above-mentioned sub-optical fibre beam includes the different optical fiber of multiple length；Above-mentioned son
The quantity of fibre bundle is identical with optic fibre hole；The input of above-mentioned sub-optical fibre beam is inserted in the optic fibre hole respectively；Above-mentioned optical fiber
The optical fiber of the output end of beam is connected with spectrometer input successively in single mode, and output end and the camera of above-mentioned spectrometer connect
Connect；
Spacing between arbitrary neighborhood optic fibre hole is not less than twice fibre diameter distance, fibre bundle output end adjacent fiber
Spacing is not less than twice fibre diameter distance.
Three quadrants and four-quadrant of the matrix array optic fibre hole alignment medium window of above-mentioned X-direction；The matrix battle array of above-mentioned Y-direction
The two quadrant and three quadrants of row optic fibre hole alignment medium window；The three of the matrix array optic fibre hole alignment medium window of above-mentioned Z-direction as
Limit.
Preferably, the spacing between adjacent fiber hole is identical；Length in same sub-optical fibre beam between output end adjacent fiber
Degree difference is equal, and length difference is the product with spectrometer time resolution ratio and the light velocity.
Preferably, above-mentioned fibre bundle also includes many positioning optical fiber, and the output end of above-mentioned positioning optical fiber is located at adjacent sub-light
Between fine beam, the input shading treatment of above-mentioned positioning optical fiber.
Multiple sub-optical fibre beams of above-mentioned Z-direction and the complementary angle that the angle in microwave transmission direction is Feed Horn subtended angle.
The structural parameters of above-mentioned different sub-optical fibre beams are identical, and the matrix array optic fibre hole is 10 × 2 structures.
The beneficial effects of the invention are as follows：
A kind of dress of real-time diagnosis High-Power Microwave medium window vacuum surface plasma time-space resolution of invention
Put, the spatio-temporal distribution of plasma can be diagnosed in single microwave pulse by the device.
Brief description of the drawings
Fig. 1 is diagnostic device of the present invention；
Fig. 2 is the loudspeaker side view of the optic fibre hole with horizontal X direction, vertical Y-direction and microwave transmission Z-direction；
Fig. 3 is the loudspeaker front view of the optic fibre hole with horizontal X direction, vertical Y-direction and microwave transmission Z-direction；
Fig. 4 is the luminescent image in embodiment, and spectrometer is single, and different directions are distinguished by quantity in figure；
Fig. 5 is the experiment spectral line in embodiment.
Reference is in figure：1- Feed Horns, 2- along Y-direction optic fibre hole, 3- optic fibre holes in X direction, 4- is along Z side
To optic fibre hole, the medium window of 5- inner concaves, 6- fibre bundles, 7- spectrometers, 8- cameras.
Specific embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
As shown in figure 1, being diagnostic device schematic diagram of the present invention, it is included on the wall of side and is being provided with square along three directions respectively
(inner concave ensures that optical fiber can be from medium window inlet side just for the loudspeaker of a burst of row optic fibre hole, multi fiber beam, inner concave medium window
Side observation is luminous), spectrometer and EMICCD cameras, the input of fibre bundle inserts in optic fibre hole respectively；The output of fibre bundle
The optical fiber at end is connected with spectrometer input successively in single mode, and the output end of spectrometer is connected with camera；Above three side
To including the Y-direction parallel with E field polarization direction, the X-direction vertical with E field polarization direction, and with microwave transmission direction
Z-direction that is parallel or having certain angle.
Optic fibre hole includes M along horizontal X direction and (is abbreviated as N rows to be multiplied by the optic fibre hole that longitudinal Z-direction repeats N rows
M row optic fibre hole), often arranging M optic fibre hole is used to diagnose different angular plasma spectrometry spatial distributions, and N row's optic fibre holes are used for
The spectral space distribution of the longitudinal Z-direction of diagnosis.Similarly, the optic fibre hole that O rows are multiplied by P row is opened in loudspeaker another side, often arranges P optical fiber
Hole (along Y-direction) is used to diagnose the spectral space distribution of different vertical positions, and O arranges optic fibre hole (along Z-direction) to be used to diagnose longitudinal Z
The spectral space distribution in direction.The optic fibre hole that L row are multiplied by along Q rows is also opened in loudspeaker side, often arranges L optic fibre hole (along Z-direction)
Spectral space for observing along microwave transmission direction is distributed, and Q row optic fibre hole (in X direction) are used for the light angularly such as diagnosis
Spectral space is distributed.
Three quadrants and four-quadrant of the matrix array optic fibre hole alignment medium window of X-direction；The matrix array optic fibre hole of Y-direction
The two quadrant of alignment medium window and three quadrants；Three quadrants of the matrix array optic fibre hole alignment medium window of Z-direction.
Multi fiber beam is divided into R beamlet, represents and is capable of achieving R frame imagings.Each beamlet of multi fiber beam is comprising some
The different optical fiber of root length, for transmitting the luminous of the same space position different time；Fiber lengths can be in arithmetic progression, length
The business of difference and the light velocity be temporal resolution.To gather the luminescence of plasma of different spatial, the beamlet of multi fiber beam
Insert the optic fibre hole of loudspeaker.Multiple sub-optical fibre beams of Z-direction and the complementary angle that the angle in microwave transmission direction is Feed Horn subtended angle.
For avoid each beamlet from being collected it is luminous spatially overlap, pitch of holes (may be the same or different) Ying Bu little of input
In twice fibre diameter distance, should be also the bigger the better in the pitch of holes of output end, while the length of spectrometer input slit should be combined
Depending on degree.The structural parameters of different sub-optical fibre beams are identical.Fibre bundle can also include many positioning optical fiber, position the output of optical fiber
End is located between adjacent sub-optical fibre beam, positions the input shading treatment of optical fiber, concrete methods of realizing：Can be tight by fibre bundle
Line up extended spread, two optical fiber heads at middle interval are concentrated to muffle, not to input light.EMICCD cameras, while gathering R roads light
Spectrum.So, the measurement of spatial discrimination can be carried out with the emission spectrum of plasma.By the identification composed to R width sub-light, can enter
The time-resolved measurement of row.
The broadening of plasma optical emission spectroscopy line can be analyzed according to Stark broadening, hot dopplerbroadening, according to Lorentz lorentz
With gauss of distribution function deconvolution obtain Stark broadening halfwidth with obtain plasma density, hot dopplerbroadening with
To the temperature of emitter, specifically refer to Konjevic, Roberts, J.Phys.Chem.Ref.Date 209,1996 and
Konjevic,Phys.Rep.316,339,1999.Therefore, can by multi fiber beam simultaneously obtain not in the same time, different spaces position
The density and energy parameter of the plasma put, obtain its spatial and temporal distributions.
Arrange 2 row optic fibre holes on Feed Horn in the present embodiment (at medium window), a row are vertically (y to), another
Row are in the horizontal direction (x to)；10 root fibre bundles insert 10 optic fibre holes (each direction each 5 of y and x both directions respectively
Root), a branch of total fibre bundle is then polymerized to, in spectrograph slit entrance into longitudinal arrangement.Space isolation distance 3 between beamlet
The diameter of individual optical fiber, it is to avoid light is spatially coupled in adjacent beamlet.Total fibre bundle is connected to the input port of spectrometer, spectrum
The delivery outlet connection high speed camera of instrument, spatial resolution 13um/px.The hot spot of wherein 5 space separations is as shown in Figure 4.
Multi fiber beam is combined with spectrometer, many framings can detect the space distribution situation of whole spectrum in real time.It is typical real
Spectral line is tested as shown in figure 5, being respectively roi2,4,6,8,10 from top to bottom, correspondence viewing area is five vertically from top to bottom
Optical fiber.
The multizone spectrum obtained using multi fiber beam and spectrometer joint, plasma can be calculated by spectral line ratio method
The electron temperature of body, so as to obtain the space distribution situation of electron temperature.
Roi-2 to roi-10, corresponds to the five root fibre bundles that vertical direction is arranged in order from top to bottom respectively, is calculated
Electron temperature space distribution situation it is as shown in the table.
Roi-1 to roi-9, corresponds to five be arranged in order along microwave transmission direction (from microwave source to medium window direction) respectively
Root fibre bundle, the electron temperature space distribution situation being calculated is as shown in the table.
Claims (9)
1. a kind of High-Power Microwave medium window punctures inlet side plasma diagnostic method, it is characterised in that：Comprise the following steps：
1) in Feed Horn different spatial luminescence of plasma simultaneously by being arranged on three sides on the wall of Feed Horn side
To multiple sub-optical fibre beams draw；The sub-optical fibre beam includes the different optical fiber of multiple length, the length difference between adjacent fiber
Equal, length difference is the product of spectrometer time resolution ratio and the light velocity, and three directions include parallel with E field polarization direction
Y-direction, the X-direction vertical with E field polarization direction, and Z-direction that is parallel with microwave transmission direction or having certain angle；
2) spectrometer gathers the spectrum of all sub-optical fibre beams simultaneously, measures the spatial discrimination of the emission spectrum of plasma；
3) Stark broadening and hot dopplerbroadening are carried out to each plasma spectrometry, the exhibition of plasma optical emission spectroscopy line is obtained
Width, the halfwidth of Stark broadening is obtained to obtain plasma density according to Lorentz lorentz and gauss of distribution function deconvolution, then
Obtain hot dopplerbroadening to obtain the temperature of plasma according to Lorentz lorentz and gauss of distribution function deconvolution；
4) spatial and temporal distributions of plasma are obtained simultaneously by multiple sub-optical fibre beams, the spatial and temporal distributions are included not in the same time, no
The density and energy parameter of the plasma of isospace position.
2. High-Power Microwave medium window punctures inlet side plasma diagnostic method according to claim 1, it is characterised in that：
Multiple sub-optical fibre beams of the Z-direction and the complementary angle that the angle in microwave transmission direction is Feed Horn subtended angle.
3. High-Power Microwave medium window according to claim 1 or claim 2 punctures inlet side plasma diagnostic method, and its feature exists
In：Three quadrants and four-quadrant of the sub-optical fibre beam alignment medium window of the X-direction；The sub-optical fibre beam alignment medium of the Y-direction
The two quadrant of window and three quadrants；Three quadrants of the sub-optical fibre beam alignment medium window of the Z-direction.
4. High-Power Microwave medium window punctures inlet side plasma diagnosis device, including Feed Horn, positioned at Feed Horn bottom
The medium window in portion, fibre bundle, spectrometer and camera, it is characterised in that：The Feed Horn is distinguished on the side wall of medium window
Matrix array optic fibre hole is being provided with along three directions；Three directions include the Y-direction parallel with E field polarization direction, with
The vertical X-direction of E field polarization direction, and Z-direction that is parallel with microwave transmission direction or having certain angle；
The fibre bundle includes multiple sub-optical fibre beams；The sub-optical fibre beam includes the different optical fiber of multiple length；The sub-optical fibre
The quantity of beam is identical with optic fibre hole；The input of the sub-optical fibre beam is inserted in the optic fibre hole respectively；The fibre bundle
The optical fiber of output end is connected with spectrometer input successively in single mode, and the output end of the spectrometer is connected with camera；
Spacing between arbitrary neighborhood optic fibre hole is not less than twice fibre diameter distance, the spacing of fibre bundle output end adjacent fiber
Not less than twice fibre diameter distance.
5. High-Power Microwave medium window according to claim 4 punctures inlet side plasma diagnosis device, and its feature exists
In：Three quadrants and four-quadrant of the matrix array optic fibre hole alignment medium window of the X-direction；The matrix array light of the Y-direction
The two quadrant and three quadrants of fine hole alignment medium window；Three quadrants of the matrix array optic fibre hole alignment medium window of the Z-direction.
6. the High-Power Microwave medium window according to claim 4 or 5 punctures inlet side plasma diagnosis device, its feature
It is：Spacing between adjacent fiber hole is identical；Length difference in same sub-optical fibre beam between output end adjacent fiber is equal, long
Degree difference is the product with spectrometer time resolution ratio and the light velocity.
7. High-Power Microwave medium window according to claim 6 punctures inlet side plasma diagnosis device, and its feature exists
In：The fibre bundle also includes many positioning optical fiber, and the output end of the positioning optical fiber is located between adjacent sub-optical fibre beam, described
Position the input shading treatment of optical fiber.
8. High-Power Microwave medium window according to claim 6 punctures inlet side plasma diagnosis device, and its feature exists
In：Multiple sub-optical fibre beams of the Z-direction and the complementary angle that the angle in microwave transmission direction is Feed Horn subtended angle.
9. High-Power Microwave medium window according to claim 6 punctures inlet side plasma diagnosis device, and its feature exists
In：The structural parameters of the different sub-optical fibre beams are identical, and the matrix array optic fibre hole is 10 × 2 structures.
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Citations (6)
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| JPH03163319A (en) * | 1989-11-21 | 1991-07-15 | Nec Corp | Plasma measuring apparatus |
| US20020016068A1 (en) * | 2000-08-07 | 2002-02-07 | Hiroyuki Nakano | Method and its apparatus for detecting floating particles in a plasma processing chamber and an apparatus for processing a semiconductor device |
| US6657719B1 (en) * | 1999-11-09 | 2003-12-02 | The United States Of America As Represented By The Department Of Commerce | Fiber optic tomographic plasma uniformity monitor |
| JP2012209455A (en) * | 2011-03-30 | 2012-10-25 | Toray Ind Inc | Plasma processing apparatus and processing method |
| CN104134833A (en) * | 2014-07-31 | 2014-11-05 | 西北核技术研究所 | High-power microwave (HPM) medium window for improving vacuum side power capacity |
| CN205622964U (en) * | 2016-04-15 | 2016-10-05 | 中国人民解放军装甲兵工程学院 | Thermal ionization plasma generate test device |
-
2017
- 2017-01-18 CN CN201710038695.6A patent/CN106879153B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03163319A (en) * | 1989-11-21 | 1991-07-15 | Nec Corp | Plasma measuring apparatus |
| US6657719B1 (en) * | 1999-11-09 | 2003-12-02 | The United States Of America As Represented By The Department Of Commerce | Fiber optic tomographic plasma uniformity monitor |
| US20020016068A1 (en) * | 2000-08-07 | 2002-02-07 | Hiroyuki Nakano | Method and its apparatus for detecting floating particles in a plasma processing chamber and an apparatus for processing a semiconductor device |
| JP2012209455A (en) * | 2011-03-30 | 2012-10-25 | Toray Ind Inc | Plasma processing apparatus and processing method |
| CN104134833A (en) * | 2014-07-31 | 2014-11-05 | 西北核技术研究所 | High-power microwave (HPM) medium window for improving vacuum side power capacity |
| CN205622964U (en) * | 2016-04-15 | 2016-10-05 | 中国人民解放军装甲兵工程学院 | Thermal ionization plasma generate test device |
Non-Patent Citations (1)
| Title |
|---|
| C CHANG ET AL.: "Snapshots of nanosecond HPM plasma discharge in waveguides", 《VACUUM ELECTRONICS CONFERENCE》 * |
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