CN106876314A - A kind of new batch is inserted and unloads silicon chip devices - Google Patents
A kind of new batch is inserted and unloads silicon chip devices Download PDFInfo
- Publication number
- CN106876314A CN106876314A CN201710217844.5A CN201710217844A CN106876314A CN 106876314 A CN106876314 A CN 106876314A CN 201710217844 A CN201710217844 A CN 201710217844A CN 106876314 A CN106876314 A CN 106876314A
- Authority
- CN
- China
- Prior art keywords
- box
- silicon chip
- public gas
- gas box
- hand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 47
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 46
- 239000010703 silicon Substances 0.000 title claims abstract description 46
- 238000003032 molecular docking Methods 0.000 claims description 11
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 239000012634 fragment Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Abstract
The present invention relates to silicon wafer suction pen field, specifically a kind of new batch is inserted and unloads silicon chip devices.The new batch is inserted and unloads silicon chip devices, including hand grips panel.The present invention is to grip panel combination by base plate, hollowed box, the first public gas box, the second public gas box and hand to install, by this kind of mounting means, for the ease of two groups of dislocation, directly can be taken out from the gaily decorated basket, the bottom of device is provided with multiple wand head air flue boxes, and multiple wand head air flue boxes are connected with the first public gas box and the second public gas box respectively, silicon chip can be adsorbed by it, this kind of design is the line space design according to the existing gaily decorated basket, silicon chip directly can be taken out in the gaily decorated basket, greatly improve operating efficiency;Hand pushing movable dislocation block can be adjusted to the relative position of wand head air flue box.Additionally, the new batch is inserted unloads silicon chip devices reasonable in design, using reliable and stable, it is adapted to promote the use of.
Description
Technical field
The present invention relates to silicon wafer suction pen field, specifically a kind of new batch is inserted and unloads silicon chip devices.
Background technology
In battery installing area, most of operation can be all automatically performed by machine, but because the problem of fragment rate still has one
A little operations will be relied on and manually carried out, for example, need to take out silicon chip from graphite boat in coated with antireflection membrane process, now because to keep away
Exempt from operating personnel's salinity on hand or oil pollution silicon chip and using the reason such as machine fragment rate is high so needing to use suction
Pen, but traditional wand can only draw a piece of silicon chip, inefficiency every time, therefore it provides one kind is combined with practical problem
Combined wand, can realize once drawing multi-disc silicon chip, operating efficiency can be effectively improved, be to be of practical significance very much
's.
A kind of new batch is inserted and unloads the appearance of silicon chip devices and greatly facilitate picking and placeing for silicon chip, but current stage silicon chip
Pick and place and there is many weak points, for example, inefficiency, inserts, unloads silicon chip inconvenience, easily cause silicon chip fragment.
The content of the invention
Inserted it is an object of the invention to provide a kind of new batch and unload silicon chip devices, to solve of the prior art to make efficiency
It is low, insert, unload silicon chip inconvenience, easily cause the problem of silicon chip fragment.
In order to overcome defect present in background technology, the technical solution adopted for the present invention to solve the technical problems to be:
A kind of new batch is inserted and unloads silicon chip devices, including hand grips panel, and the hand to be gripped and be provided with control hole at the top of panel, described
The left and right sides that hand grips panel is provided with located lateral bar, and the front and rear both sides that the hand grips panel are provided with longitudinal register
Bar, the hand grips correspondence control hole on the leading flank of panel and is provided with air inlet, and the hand is gripped and is fixed on below panel
In hollowed box, the bottom of the hollowed box is fixed on base plate, and the second public gas box and first public is provided with the hollowed box
Gas box, the second public gas box and the first public gas box are placed on, the second public gas box and the first public gas
Connected by connecting flexible pipe between box, multiple connections are respectively equipped with the second public gas box and the first public gas box
Plate, the connecting plate on the second public gas box and the first public gas box intersects setting, the second public gas box it is outer
The middle position of side is provided with hand pushing movable dislocation block, and hand pushing movable dislocation block is passed through from hollowed box, and described first
Docking port is provided with public gas box, the docking port is connected with air inlet, and the bottom of the connecting plate is at least provided with one
The individual connection tracheae being connected with wand head air flue box, is provided with vertically oriented bar between adjacent connection tracheae, described fixed vertically
One end of position bar is fixed on connecting plate, and the wand head air flue box is provided with multiple suction holes, on the wand head air flue box
Wand head sponge patch is provided with, the wand head sponge is sticked and is provided with wand head air flue.
The preferred radius rod and located lateral bar are fixed by screws in hand and grip on panel.
Preferred new batch is inserted and unloads the wand head air flue box of the silicon chip devices left and right sides and be provided with horizontal location bar.
The preferred wand head air flue is rectangular.
The gas outlet slitless connection of the bottom that the preferred docking port grips panel with hand is installed, and with air inlet phase
Shield insertion.
A kind of new batch involved in the present invention is inserted and unloads the beneficial effect of silicon chip devices and be:The present invention be by base plate,
Hollowed box, the first public gas box, the second public gas box and hand grip panel combination and install, by this kind of mounting means, in order to just
In two groups of dislocation, directly can be taken out from the gaily decorated basket, the bottom of device is provided with multiple wand head air flue boxes, and multiple wand head gas
Road box is connected with the first public gas box and the second public gas box respectively, and silicon chip can be adsorbed by it, and this kind of design is
According to the line space design of the existing gaily decorated basket, silicon chip directly can be taken out in the gaily decorated basket, greatly improve operating efficiency;Hand pushing movable dislocation block
The relative position of wand head air flue box can be adjusted.Additionally, the new batch is inserted unloads silicon chip devices reasonable in design,
Using reliable and stable, it is adapted to promote the use of.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is that a kind of new batch of the present invention inserts the structural representation for unloading silicon chip devices;
Fig. 2 is the partial enlarged drawing at A in Fig. 1;
Fig. 3 is that a kind of new batch of the present invention inserts the top view for unloading silicon chip devices;
Fig. 4 is that a kind of new batch of the present invention inserts the front view for unloading silicon chip devices;
Fig. 5 is that a kind of new batch of the present invention inserts the internal structure schematic diagram for unloading silicon chip devices;
Wherein:1- base plates, 2- connections tracheae, the vertically oriented bars of 3-, 4- wands head air flue box, 5- horizontal locations bar, 6- hands are gripped
Panel, 7- air inlets, 8- radius rods, 9- hand pushing movables dislocation block, 10- hollowed box, 11- located laterals bar, 12- connections
Plate, 13- control holes, the first public gas of 14- box, 15- docking ports, the second public gas of 16- box, 17- connections flexible pipe, 18- wand heads
Sponge patch, 19- wands head air flue, 20- suction holes.
Specific embodiment
In conjunction with the accompanying drawings, the present invention is further explained in detail.Accompanying drawing is simplified schematic diagram, only with signal side
Formula illustrates basic structure of the invention, therefore it only shows the composition relevant with the present invention.
Specific embodiment, refers to Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, and a kind of new batch is inserted and unloads silicon chip devices, including hand
Panel 6 is gripped, the top that the hand grips panel 6 is provided with control hole 13, and the left and right sides that the hand grips panel 6 is provided with
Located lateral bar 11, the front and rear both sides that the hand grips panel 6 are provided with radius rod 8, and the hand grips the front side of panel 6
Correspondence control hole 13 is provided with air inlet 7 on face, and the lower section that the hand grips panel 6 is fixed in hollowed box 10, the hollow out
The bottom of box 10 is fixed on base plate 1, and the second public gas box 16 and the first public gas box 14 are provided with the hollowed box 10, described
Second public gas box 16 and the first public gas box 14 are placed on base plate 1, the second public gas box 16 and the first public gas box
14 are connected by connecting flexible pipe 17 each other, and multiple is respectively equipped with the second public gas box 16 and the first public gas box 14
Connecting plate 12, the connecting plate 12 on the second public gas box 16 and the first public gas box 14 intersects setting, described second
The middle position of the lateral surface of public gas box 16 is provided with hand pushing movable dislocation block 9, and hand pushing movable misplaces block 9 from hollowed box
Passed through in 10, docking port 15 is provided with the first public gas box 14, the docking port 15 is connected with air inlet 7, described
The bottom of connecting plate 12 is at least provided with a connection tracheae 2 being connected with wand head air flue box 4, adjacent connection tracheae 2
Between be provided with vertically oriented bar 3, one end of the vertically oriented bar 3 is fixed on connecting plate 12, on wand head air flue box 4
Multiple suction holes 20 are provided with, the wand head air flue box 4 is provided with wand head sponge patch 18, is set in the wand head sponge patch 18
There is wand head air flue 19, the radius rod 8 and located lateral bar 11 are fixed by screws in hand and grip on panel 6, new
The slotting wand head air flue box 4 for unloading the silicon chip devices left and right sides of batch is provided with horizontal location bar 5, and the wand head air flue 19 is in square
Shape, the gas outlet slitless connection of the bottom that the docking port 15 grips panel 6 with hand is installed, and mutually protects insertion with air inlet 7.
Operation principle of the invention is:The equipment when in use, is gripped to hand by air inlet 7 and vacuumized in panel 6, is led to
Cross 15 pairs of the first public gas boxes 14 of docking port and the second public gas box 16 is vacuumized, it is public by the first public gas box 14 and second
The 12 pairs of connection connection wand head air flue of tracheae 2 boxes 4 of connecting plate on gas box 16 are vacuumized, by the suction on wand head air flue box 4
Written sponge is pasted 18 pairs of silicon chips and adsorbs, and control hole 13 is closed in the process, when silicon chip moves to correct position, is opened
Control hole 13 puts down silicon chip.
A kind of new batch involved in the present invention is inserted and unloads the beneficial effect of silicon chip devices and be:The present invention be by base plate,
Hollowed box, the first public gas box, the second public gas box and hand grip panel combination and install, by this kind of mounting means, in order to just
In two groups of dislocation, directly can be taken out from the gaily decorated basket, the bottom of device is provided with multiple wand head air flue boxes, and multiple wand head gas
Road box is connected with the first public gas box and the second public gas box respectively, and silicon chip can be adsorbed by it, and this kind of design is
According to the line space design of the existing gaily decorated basket, silicon chip directly can be taken out in the gaily decorated basket, greatly improve operating efficiency;Hand pushing movable dislocation block
The relative position of wand head air flue box can be adjusted.Additionally, the new batch is inserted unloads silicon chip devices reasonable in design,
Using reliable and stable, it is adapted to promote the use of.
Obviously, above-described embodiment is only intended to clearly illustrate example, and not to the restriction of implementation method.It is right
For those of ordinary skill in the art, can also make on the basis of the above description other multi-forms change or
Change.There is no need and unable to be exhaustive to all of implementation method.And the obvious change thus extended out or
Among changing still in the protection domain of the invention.
Claims (5)
1. a kind of new batch is inserted and unloads silicon chip devices, including hand grips panel(6), it is characterised in that:The hand grips panel
(6)Top be provided with control hole(13), the hand gripping panel(6)The left and right sides located lateral bar is installed(11), institute
State hand and grip panel(6)Front and rear both sides radius rod is installed(8), the hand gripping panel(6)Leading flank on correspondence
Control hole(13)It is provided with air inlet(7), the hand gripping panel(6)Lower section be fixed on hollowed box(10)On, the hollow out
Box(10)Bottom be fixed on base plate(1)On, the hollowed box(10)Inside it is provided with the second public gas box(16)With the first public gas
Box(14), the second public gas box(16)With the first public gas box(14)It is placed on base plate(1)On, the second public gas box
(16)With the first public gas box(14)Each other by connecting flexible pipe(17)Connection, the second public gas box(16)With first
Public gas box(14)On be respectively equipped with multiple connecting plates(12), the second public gas box(16)With the first public gas box(14)On
Connecting plate(12)Intersect setting, the second public gas box(16)Lateral surface middle position be provided with hand push shifting
Dynamic dislocation block(9), and hand pushing movable dislocation block(9)From hollowed box(10)Inside pass through, the first public gas box(14)Upper setting
There is docking port(15), the docking port(15)With air inlet(7)It is connected, the connecting plate(12)Bottom be at least provided with one
Individual and wand head air flue box(4)The connection tracheae being connected(2), adjacent connection tracheae(2)Between be provided with vertically oriented bar
(3), the vertically oriented bar(3)One end be fixed on connecting plate(12)On, the wand head air flue box(4)It is provided with multiple suctions
Stomata(20), the wand head air flue box(4)It is provided with wand head sponge patch(18), the wand head sponge patch(18)It is provided with
Wand head air flue(19).
2. a kind of new batch according to claim 1 is inserted and unloads silicon chip devices, it is characterised in that the radius rod
(8)With located lateral bar(11)It is fixed by screws in hand and grips panel(6)On.
3. a kind of new batch according to claim 1 is inserted and unloads silicon chip devices, it is characterised in that new batch is inserted and unloads silicon chip
The wand head air flue box of the device left and right sides(4)It is provided with horizontal location bar(5).
4. a kind of new batch according to claim 1 is inserted and unloads silicon chip devices, it is characterised in that the wand head air flue
(19)It is rectangular.
5. a kind of new batch according to claim 1 is inserted and unloads silicon chip devices, it is characterised in that the docking port(15)With
Hand grips panel(6)The gas outlet slitless connection of bottom install, and and air inlet(7)Mutually shield insertion.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710217844.5A CN106876314A (en) | 2017-04-05 | 2017-04-05 | A kind of new batch is inserted and unloads silicon chip devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710217844.5A CN106876314A (en) | 2017-04-05 | 2017-04-05 | A kind of new batch is inserted and unloads silicon chip devices |
Publications (1)
Publication Number | Publication Date |
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CN106876314A true CN106876314A (en) | 2017-06-20 |
Family
ID=59160778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710217844.5A Pending CN106876314A (en) | 2017-04-05 | 2017-04-05 | A kind of new batch is inserted and unloads silicon chip devices |
Country Status (1)
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CN (1) | CN106876314A (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN202585376U (en) * | 2012-04-11 | 2012-12-05 | 广东爱康太阳能科技有限公司 | Combined vacuum pipette |
CN202816898U (en) * | 2012-10-23 | 2013-03-20 | 天威新能源控股有限公司 | Semi-automatic battery string sucker |
CN104319254A (en) * | 2014-11-13 | 2015-01-28 | 苏州润阳光伏科技有限公司 | Combined solar silicon wafer attracting pen |
CN206628452U (en) * | 2017-04-05 | 2017-11-10 | 刘丽琴 | A kind of new batch is inserted and unloads silicon chip devices |
-
2017
- 2017-04-05 CN CN201710217844.5A patent/CN106876314A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN202585376U (en) * | 2012-04-11 | 2012-12-05 | 广东爱康太阳能科技有限公司 | Combined vacuum pipette |
CN202816898U (en) * | 2012-10-23 | 2013-03-20 | 天威新能源控股有限公司 | Semi-automatic battery string sucker |
CN104319254A (en) * | 2014-11-13 | 2015-01-28 | 苏州润阳光伏科技有限公司 | Combined solar silicon wafer attracting pen |
CN206628452U (en) * | 2017-04-05 | 2017-11-10 | 刘丽琴 | A kind of new batch is inserted and unloads silicon chip devices |
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PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170620 |
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WD01 | Invention patent application deemed withdrawn after publication |