CN106872124A - A kind of conducting liquid leaks detecting system - Google Patents
A kind of conducting liquid leaks detecting system Download PDFInfo
- Publication number
- CN106872124A CN106872124A CN201710066746.6A CN201710066746A CN106872124A CN 106872124 A CN106872124 A CN 106872124A CN 201710066746 A CN201710066746 A CN 201710066746A CN 106872124 A CN106872124 A CN 106872124A
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- China
- Prior art keywords
- leakage
- liquid
- detecting system
- conducting liquid
- leak detector
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/40—Investigating fluid-tightness of structures by using electric means, e.g. by observing electric discharges
Abstract
The invention discloses a kind of conducting liquid leakage detecting system, it includes：Safety box, it is set in the connecting portion that pipeline valve and pipe flange connect；Fluidic leak detector for detecting the liquid leakage of the connecting portion, it is located in the safety box；Signal input and output module, the leakage signal transmission that it sends the fluidic leak detector to watch-dog.Conducting liquid disclosed by the invention leaks detecting system simple structure, it can improve conducting liquid leakage detecting system framework in electron trade, pole early alert can be made to pipeline valve and flange connections liquid leakage, and accomplish treatment in time, so as to realize avoiding the effect of casualties and property loss.
Description
Technical field
Conducting liquid the present invention relates to be used in electron trade leaks detecting system, more particularly to a kind of semiconductor and face
The conducting liquid leakage detecting system used in plate production process.
Background technology
This can be being conveyed in the electron trade production process such as semiconductor and panel using to various liquid chemicals and water
During a little liquid chemicals and water, in equipment, pipeline valve and flange connections due to being chronically at pressure effect, may
Cause liquid leakage occur, if can not in time find and process these leakage points, may result in a large amount of liquid leakages of appearance
Accident, so as to cause casualties and property loss.
Conducting liquid leakage detecting system widely used in electron trade at present can only detect a large amount of liquid leakages and arrive
Alarm can be just sent during ground, is that the very first time cannot detect liquid leakage in pipeline valve and flange connections, and make
Pole early warning.
To solve used problem, it is necessary to propose a kind of new conducting liquid leakage detecting system.
The content of the invention
The present invention proposes a kind of conducting liquid leakage detecting system, and it can improve conducting liquid leakage in electron trade
Detecting system framework, pole early alert can be made to pipeline valve and flange connections liquid leakage, and accomplishes treatment in time, from
And realize avoiding the effect of casualties and property loss.
To achieve the above object, the present invention proposes a kind of conducting liquid leakage detecting system, wherein, it includes：
Safety box, it is set in the connecting portion that pipeline valve and pipe flange connect；
Fluidic leak detector for detecting the liquid leakage of the connecting portion, it is located in the safety box；
Signal input and output module, the leakage signal transmission that it sends the fluidic leak detector to watch-dog.
Conducting liquid leakage detecting system as described above, wherein, the fluidic leak detector includes：
The leaking liquid detecting belt of electric insulation, it is located in the safety box and positioned at the lower section of the connecting portion；
The leaking liquid detecting belt is provided with power supply near the first end of the signal input and output module, the power supply
Positive pole and negative pole are connected to wire, the positive pole and negative pole of the power supply respectively near the side of the second end of the leaking liquid detecting belt
Opposite side connect with the signal input and output module phase electricity by holding wire respectively.
Conducting liquid leakage detecting system as described above, wherein, the leakage signal that the fluidic leak detector sends passes through
Sensor is input to the signal input and output module.
Conducting liquid leakage detecting system as described above, wherein, the sensor is leakage point sensor.
Conducting liquid leakage detecting system as described above, wherein, the wire extends to the of the leaking liquid detecting belt
Two ends.
Conducting liquid leakage detecting system as described above, wherein, the fluidic leak detector passes through terminal board and the biography
Sensor phase electricity connects.
Conducting liquid leakage detecting system as described above, wherein, the safety box is made of pvc material.
Conducting liquid leakage detecting system as described above, wherein, the signal input and output module are by the leakage
To watch-dog, leakage source is found in the alarm position sent according to the watch-dog to signal transmission.
Conducting liquid leakage detecting system as described above, wherein, when there is leakage in the connecting portion, the liquid drop of leakage
Fall on the leaking liquid detecting belt, the fluidic leak detector sends the leakage signal.
Conducting liquid leakage detecting system of the invention is directed to equipment and pipeline valve and flange connections liquid leakage
Detecting system, its simple structure is installed liquid leakage of the invention and is detectd in important equipment and pipeline valve and flange connections
Examining system, when valve and flange connections occur liquid leakage, liquid is leaked to safety box, is arranged on the liquid in safety box
When detector detects liquid, monitoring system display leakage alarms facilitate personnel to find source of leaks early, and process in time, keep away
Exempt from a large amount of leakage accidents of liquid occur.
Brief description of the drawings
Accompanying drawing described here is only used for task of explanation, and is not intended to by any way limit model disclosed by the invention
Enclose.In addition, shape and proportional sizes of each part in figure etc. are only schematical, the understanding of the present invention is used to help, and
It is not the shape and proportional sizes for specifically limiting each part of the invention.Those skilled in the art under the teachings of the present invention, can
To select various possible shapes and proportional sizes to implement the present invention as the case may be.
Fig. 1 is that the annexation between the connecting portion that safety box of the invention connects with pipeline valve and pipe flange is illustrated
Figure；
Fig. 2 is the structural representation that conducting liquid of the invention leaks detecting system.
Specific embodiment
With reference to the description of accompanying drawing and the specific embodiment of the invention, details of the invention can be clearly understood.But
It is, the specific embodiment of invention described herein to be only used for explaining the purpose of the present invention, and can not understands by any way
Into being limitation of the present invention.Under the teachings of the present invention, technical staff is contemplated that based on any possible change of the invention
Shape, these are regarded as belonging to the scope of the present invention, and below in conjunction with accompanying drawing, the invention will be further described.
Fig. 1 and Fig. 2 are respectively the company between the connecting portion that safety box of the invention connects with pipeline valve and pipe flange
Connect relation schematic diagram and conducting liquid leaks the structural representation of detecting system.
As depicted in figs. 1 and 2, conducting liquid leakage detecting system of the invention includes：Safety box 1, fluidic leak detector 2,
Signal input and output module 3 (I/O modules) and watch-dog 4, wherein, safety box 1 is set in pipeline valve 11 and pipe flange
12 connecting portions 13 for connecting, fluidic leak detector 2 is used to detect that the liquid of connecting portion 13 is leaked that it to be located in safety box 1, letter
Number input and the leakage signal transmission that sends fluidic leak detector 2 of output module 3 are to watch-dog 4.
Specifically, in the present invention, safety box 1 is made of transparent pvc material (PVC), to facilitate work people
The convenient inner case for observing safety box 1 of member.
Fluidic leak detector 2 includes：The leaking liquid detecting belt 21 of electric insulation, it is located in safety box 1 and positioned at connecting portion 13
Lower section；Leaking liquid detecting belt 21 is provided with power supply 22 near the first end of signal input and output module 3, the positive pole of power supply 22 and negative
Extremely wire 23, the positive pole of power supply 22 and the opposite side of negative pole point are connected to respectively near the side of the second end of leaking liquid detecting belt 21
Do not connect with signal input and the phase electricity of output module 3 by holding wire 24.In one embodiment, leaking liquid detecting belt 21 is along safety
The axis of box 1 is applied in safety box 1, as shown in Fig. 2 wire 23 extends to leakage inspection from the first end of leaking liquid detecting belt 21
The second end of measuring tape 21, so as to realize the purpose detected to whole connecting portion 13, leaking liquid detecting belt 21 is electric insulation,
I.e. leaking liquid detecting belt 21 is non-conductive, and when connecting portion 13 does not leak out liquid, the circuit between power supply 22 and wire 23 is
Off-state, when liquid leakage occurs in the connecting portion 13 of equipment and pipeline valve and flange connections, liquid can be drained to first
In safety box 1, and invade on leaking liquid detecting belt 21, because liquid is conductive liquid, liquid make power supply 22 and wire 23 it
Between closing of circuit, closing of circuit so that fluidic leak detector of the invention 2 to signal input and output module 3 send leakage letter
Number, input and output module 3 are passed the signal on watch-dog 4 (or being monitoring system), and watch-dog 4 sends alarm, that is, examine
The positive and negative electrode heart yearn of normally open is usually on measuring tape 21, because liquid conduction is so as to connection circuit and sends leakage signal again
The signal input module in signal input and output module 3 is input to, then by the output mould in signal input and output module 3
Block outputs a signal on watch-dog 4 and provides alarm, because input and output module 3 (I/O modules) can be realized and connecting portion
Each position it is corresponding (I/O modules operation principle be art technology known to, will not be repeated here), so as to realize work people
Member is according to the alarm location lookup source of leaks of watch-dog 4 and processes in time, so as to realize to pipeline valve and flange connections liquid
Pole early alert is made in leakage, and accomplishes treatment in time, so as to avoid the effect of casualties and property loss.
Further, in the present invention, electricity is connected to sensor 5 between fluidic leak detector 2 and input and output module 3, passes
The leakage signal transmission that sensor 5 sends fluidic leak detector 2 in one embodiment, is sensed to being input into in output module 3
Device 5 is leakage point sensor, and it is defeated that leakage signal is converted into dry contact signal by fluidic leak detector 2 by leakage point sensor
Go out onto input and output module 3.
Further, fluidic leak detector 2 is mutually electric with leakage point sensor by terminal board 6 (or being connection terminal platform)
Connect, i.e., the holding wire of the side of power supply 21 passes through terminal board 6 with the holding wire being connected on leakage point sensor, to facilitate this to be
The installation of system.In one embodiment, supply voltage is dc source, and voltage is 24V (DC24V).
Conducting liquid leakage detecting system of the invention is directed to equipment and pipeline valve and flange connections liquid leakage
Detecting system, its simple structure is installed liquid leakage of the invention and is detectd in important equipment and pipeline valve and flange connections
Examining system, when valve and flange connections occur liquid leakage, liquid is leaked to safety box, is arranged on the liquid in safety box
When detector detects liquid, monitoring system display leakage alarms facilitate personnel to find source of leaks early, and process in time, keep away
Exempt from a large amount of leakage accidents of liquid occur.
Above-mentioned technical proposal is one embodiment of the present invention, for those skilled in the art, at this
On the basis of disclosure of the invention application process and principle, it is easy to make various types of improvement or deformation, this is not limited solely to
Invent the method described by above-mentioned specific embodiment.Although by reference to preferred embodiment, invention has been described,
Without departing from the scope of the invention, various improvement can be carried out to it and portion therein can be replaced with equivalent
Part.Especially, as long as not existing structural hazard, the every technical characteristic being previously mentioned in each embodiment can group in any way
Altogether.The invention is not limited in specific embodiment disclosed herein, but the institute including falling within the scope of the appended claims
There is technical scheme.
Claims (9)
1. a kind of conducting liquid leaks detecting system, it is characterised in that the conducting liquid leakage detecting system includes：
Safety box, it is set in the connecting portion that pipeline valve and pipe flange connect；
Fluidic leak detector for detecting the liquid leakage of the connecting portion, it is located in the safety box；
Signal input and output module, the leakage signal transmission that it sends the fluidic leak detector to watch-dog.
2. conducting liquid as claimed in claim 1 leaks detecting system, it is characterised in that the fluidic leak detector includes：
The leaking liquid detecting belt of electric insulation, it is located in the safety box and positioned at the lower section of the connecting portion；
The leaking liquid detecting belt is provided with power supply, the positive pole of the power supply near the first end of the signal input and output module
Be connected to wire respectively near the side of the second end of the leaking liquid detecting belt with negative pole, the positive pole of the power supply and negative pole it is another
Side is connect by holding wire with the signal input and output module phase electricity respectively.
3. conducting liquid as claimed in claim 2 leaks detecting system, it is characterised in that the leakage that the fluidic leak detector sends
Liquid signal is input to the signal input and output module by sensor.
4. conducting liquid as claimed in claim 3 leaks detecting system, it is characterised in that the sensor is that leakage point type is passed
Sensor.
5. conducting liquid as claimed in claim 2 leaks detecting system, it is characterised in that the wire extends to the leakage
The second end of detection band.
6. conducting liquid as claimed in claim 3 leaks detecting system, it is characterised in that the fluidic leak detector passes through terminal
Platform connects with the sensor phase electricity.
7. the conducting liquid as described in any one in claim 1 to 6 leaks detecting system, it is characterised in that the safety
Box is made of pvc material.
8. the conducting liquid as described in any one in claim 1 to 6 leaks detecting system, it is characterised in that the signal
, by the leakage signal transmission to watch-dog, leakage is found in the alarm position sent according to the watch-dog for input and output module
Source.
9. conducting liquid as claimed in claim 2 leaks detecting system, it is characterised in that when the connecting portion occurs leakage,
The liquid of leakage is dropped on the leaking liquid detecting belt, and the fluidic leak detector sends the leakage signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710066746.6A CN106872124A (en) | 2017-02-07 | 2017-02-07 | A kind of conducting liquid leaks detecting system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710066746.6A CN106872124A (en) | 2017-02-07 | 2017-02-07 | A kind of conducting liquid leaks detecting system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106872124A true CN106872124A (en) | 2017-06-20 |
Family
ID=59166860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710066746.6A Pending CN106872124A (en) | 2017-02-07 | 2017-02-07 | A kind of conducting liquid leaks detecting system |
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| CN (1) | CN106872124A (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107331908A (en) * | 2017-08-15 | 2017-11-07 | 慕金汶 | Battery bulge and the intelligent Detection and method of leakage failure |
| CN107477372A (en) * | 2017-07-26 | 2017-12-15 | 柳哲 | Leakage gathers monitoring platform |
| CN107741304A (en) * | 2017-10-24 | 2018-02-27 | 柳哲 | A kind of annular leakage detection system |
| CN108916465A (en) * | 2018-08-30 | 2018-11-30 | 安徽仕烽油压科技有限公司 | A kind of high security pressure valve |
| CN109027365A (en) * | 2018-08-30 | 2018-12-18 | 安徽仕烽油压科技有限公司 | One kind is from early warning type pressure valve |
| CN109538947A (en) * | 2019-01-21 | 2019-03-29 | 天津景威油田技术服务有限公司 | A kind of utilidor liquid leakage detection device |
| CN109932138A (en) * | 2017-12-15 | 2019-06-25 | 四川久环环境技术有限责任公司 | A kind of water quality on-line monitoring instrument liquid leakage detection device and its application |
| CN112483907A (en) * | 2020-11-10 | 2021-03-12 | 深圳市祥为测控技术有限公司 | Pipeline leakage detection system and method |
| CN112747867A (en) * | 2020-12-24 | 2021-05-04 | 上泰仪器（昆山）有限公司 | Liquid leakage detector |
| CN113154271A (en) * | 2021-05-06 | 2021-07-23 | 蜂巢能源科技有限公司 | Liquid leakage detection system and method and liquid cooling energy storage system |
| CN113410699A (en) * | 2021-06-17 | 2021-09-17 | 中国电子科技集团公司第十四研究所 | Electro-hydraulic synchronous blind plugging technology for electronic unit module |
| CN113870538A (en) * | 2021-11-01 | 2021-12-31 | 江西诚科建设咨询监理有限公司 | Communication pipeline monitoring device for intelligent engineering |
| CN115031901A (en) * | 2022-08-11 | 2022-09-09 | 拓荆科技(北京)有限公司 | Liquid leakage detection system and semiconductor process equipment |
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| CN205785702U (en) * | 2016-04-01 | 2016-12-07 | 上海柳智科技股份有限公司 | A kind of Novel strip belt sensor device detecting leakage |
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| TW200517645A (en) * | 2003-11-20 | 2005-06-01 | Tseng-Yu Tsai | Liquid detection tape |
| CN101210855A (en) * | 2006-12-27 | 2008-07-02 | 中芯国际集成电路制造(上海)有限公司 | Multipath fluid leakage detector |
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| CN105043680A (en) * | 2015-09-10 | 2015-11-11 | 武汉华星光电技术有限公司 | Trace liquid leakage detection system |
| CN105716795A (en) * | 2016-02-15 | 2016-06-29 | 河海大学 | Hydraulic engineering leakage hidden danger positioning system and positioning method |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107477372A (en) * | 2017-07-26 | 2017-12-15 | 柳哲 | Leakage gathers monitoring platform |
| CN107331908A (en) * | 2017-08-15 | 2017-11-07 | 慕金汶 | Battery bulge and the intelligent Detection and method of leakage failure |
| CN107741304A (en) * | 2017-10-24 | 2018-02-27 | 柳哲 | A kind of annular leakage detection system |
| CN109932138A (en) * | 2017-12-15 | 2019-06-25 | 四川久环环境技术有限责任公司 | A kind of water quality on-line monitoring instrument liquid leakage detection device and its application |
| CN108916465A (en) * | 2018-08-30 | 2018-11-30 | 安徽仕烽油压科技有限公司 | A kind of high security pressure valve |
| CN109027365A (en) * | 2018-08-30 | 2018-12-18 | 安徽仕烽油压科技有限公司 | One kind is from early warning type pressure valve |
| CN109538947A (en) * | 2019-01-21 | 2019-03-29 | 天津景威油田技术服务有限公司 | A kind of utilidor liquid leakage detection device |
| CN112483907A (en) * | 2020-11-10 | 2021-03-12 | 深圳市祥为测控技术有限公司 | Pipeline leakage detection system and method |
| CN112747867A (en) * | 2020-12-24 | 2021-05-04 | 上泰仪器（昆山）有限公司 | Liquid leakage detector |
| CN113154271A (en) * | 2021-05-06 | 2021-07-23 | 蜂巢能源科技有限公司 | Liquid leakage detection system and method and liquid cooling energy storage system |
| CN113410699A (en) * | 2021-06-17 | 2021-09-17 | 中国电子科技集团公司第十四研究所 | Electro-hydraulic synchronous blind plugging technology for electronic unit module |
| CN113870538A (en) * | 2021-11-01 | 2021-12-31 | 江西诚科建设咨询监理有限公司 | Communication pipeline monitoring device for intelligent engineering |
| CN115031901A (en) * | 2022-08-11 | 2022-09-09 | 拓荆科技(北京)有限公司 | Liquid leakage detection system and semiconductor process equipment |
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