CN106871822A - The spectrometer and measuring method of a kind of measurable parallel light tube slight rotation angles degree - Google Patents
The spectrometer and measuring method of a kind of measurable parallel light tube slight rotation angles degree Download PDFInfo
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- CN106871822A CN106871822A CN201710028204.XA CN201710028204A CN106871822A CN 106871822 A CN106871822 A CN 106871822A CN 201710028204 A CN201710028204 A CN 201710028204A CN 106871822 A CN106871822 A CN 106871822A
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- parallel light
- telescope
- light tube
- alidade
- objective table
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 230000002452 interceptive effect Effects 0.000 claims abstract description 4
- 230000000007 visual effect Effects 0.000 claims description 30
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000007373 indentation Methods 0.000 claims description 3
- 238000005375 photometry Methods 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The invention discloses the spectrometer and measuring method of a kind of measurable parallel light tube slight rotation angles degree, spectrometer includes base, rotating shaft is fixed with base, telescope, parallel light tube, objective table, the first alidade, the second alidade, dial are connected with rotating shaft respectively, and non-interfering around the shaft can freely rotate;First screw can fix telescope with the second alidade, and the 3rd screw can fix objective table and dial, and the 5th screw can fix parallel light tube with the first alidade.Because parallel light tube can be fixedly connected with the first alidade, thus rotational angle when parallel light tube around the shaft it is larger when can be measured by the first alidade and dial and read.When the rotational angle of parallel light tube cannot be read less than 1 point by the first alidade and dial, the rotational angle α that can measure objective table by the measuring method of parallel light tube slight rotation angles degree is calculated.
Description
Technical field
The invention belongs to spectrometer technical field, and in particular to a kind of light splitting of measurable parallel light tube slight rotation angles degree
Meter and measuring method.
Background technology
Spectrometer is mainly made up of several parts such as telescope, objective table, parallel light tube, dial, alidade and base, its
It is common and conventional a kind of instrument that can accurately measure the anglec of rotation in Experiment of College Physics room.Combined using spectrometer and placed
A light source fixed outside parallel light tube, is capable of achieving the measurement of the physical quantitys such as prism drift angle, certain media refractive index.
It is currently reported that spectrometer is reequiped to improve its performance, such as Application No.
2015102705810 patent proposes the regulation process for adding motor to simplify spectrometer, Application No. 2015106254275
Patent propose that parallel light tube and telescope are detachable, facilitate student to understand the structure of spectrometer, Application No.
2011103245505 patent proposes reading and the upload for adding angle transducer to measure angle.Although Application No.
2016107271802 patent proposes a kind of moveable spectrometer of parallel light tube, but its " movement " for referring to generally refers to put down
Row light pipe can move radially distance along moving radially and measuring, and be not described and can read for the rotation of parallel light tube
Count, and objective table can not rotate.Therefore, not solve parallel light tube rotatable simultaneously around central rotating shaft for existing technical scheme
Measure the problem of the anglec of rotation.
To sum up, existing spectrometer, can only accurately measure the relative rotation angle of telescope and objective table, due to flat
Row light pipe is in a circumferential direction fixed, causes it to realize rotation simultaneously its anglec of rotation of accurate measurement.Like this,
Significantly limit the use scope of spectrometer.For example, in some need the experiment for fixing objective table, because parallel light tube is
Fixed, lead to not study the situation that incident ray needs rotate around central rotating shaft.
The content of the invention
Present invention aim to address above mentioned problem, there is provided a kind of parallel light tube, objective table and telescope can rotate
Axle rotates, and can accurately measure the spectrometer and a kind of measuring method of parallel light tube slight rotation angles degree of the anglec of rotation.
In order to solve the above technical problems, the technical scheme is that:A kind of measurable parallel light tube slight rotation angles degree
Spectrometer, including base is fixed with rotating shaft, telescope, parallel light tube, objective table, dial, the second alidade point on base
It is not connected with rotating shaft, and non-interfering around the shaft can freely rotates;First screw can fix telescope with the second alidade,
3rd screw can fix objective table and dial, and the second alidade can coordinate reading with dial.
Preferably, second alidade is provided with two verniers, and two verniers are separated by 180 degree on the second alidade
Symmetric position.
Preferably, the telescope can be fixed by the second screw and rotating shaft, and objective table can be by the 4th screw and rotating shaft
It is fixed.
Preferably, the first alidade that can be rotated around the axis is additionally provided with the rotating shaft, the 5th screw can be by parallel light tube
Fixed with the first alidade.
Preferably, the elevation angle of the parallel light tube can be adjusted by the second adjusting screw.
Preferably, the front end of the parallel light tube is provided with source of parallel light.
Preferably, the telescope includes object lens, eyepiece stalk, eyepiece focusing wheel and object lens focusing wheel, and the elevation angle of object lens can
Adjusted by the first adjusting screw, lock screw is provided between object lens and eyepiece stalk.
A kind of measuring method of parallel light tube slight rotation angles degree, comprises the following steps:
S1, source of parallel light is arranged on parallel light tube front end, grating is disposed vertically on the center of objective table, school
Quasi- spectrometer, makes telescope be located along the same line with parallel light tube, and grating planar is perpendicular to the straight line;
S2, rotation parallel light tube, make kth order diffraction light be overlapped with the vertical cross hair in the telescope visual field, now directional light
Pipe have rotated θ angles:
Wherein d is grating constant, and the lambda1-wavelength that λ sends for source of parallel light reads the initial reading of the second alidade
α1;
S3, in step S2 rotate parallel light tube direction rotate parallel light tube again, make its deflection one minute angleKth order diffraction light will deviate from vertical cross hair position in the telescope visual field;
S4, against in step S2 rotate parallel light tube direction rotatable stage, make kth order diffraction light again with telescope
Vertical cross hair in the visual field overlaps, and reads the reading α of now the second alidade2, then objective table have rotated α angles:
α=α2-α1,
The minute angle that then parallel light tube is rotated in step S3
Preferably, the S1 comprises the following steps:
S11, by source of parallel light be arranged on parallel light tube front end, adjust telescope pitching, make telescope level;
The object lens focusing wheel of S12, regulation telescope, enables telescope to receive directional light, adjusts eyepiece focusing wheel, makes prestige
See clearly graticle graduation mark in the remote mirror visual field;
S13, grating is disposed vertically on the center of objective table, grating indentation direction is perpendicular to objective table, regulation
The leveling serew of objective table, makes the plane of objective table vertical with central rotating shaft, opens telescope built-in light source, slowly rotates loading
Platform, finds the cross picture reflected from grating planar from telescope, adjusts eyepiece stalk, is clearly reflected back until observing
Point of intersection K in the telescope visual field at horizontal cross hair and vertical cross hair from lower to upper 3/4 of the cross image position come, now looks in the distance
Mirror optical axis is perpendicular to grating surface;
S14, using telescope as benchmark, rotate parallel light tube, make parallel light tube with telescope point-blank, open
Source of parallel light, can now see clearly vertical line picture in telescope, then source of parallel light is rotated by 90 °, and vertical line picture is changed into horizontal
Line picture, adjusts the angle of pitch of parallel light tube, makes most middle horizontal cross hair coincidence in horizontal line picture and the telescope visual field, now looks in the distance
Mirror is coaxial with parallel light tube, source of parallel light is rotated back to origin-location and is fixed;
S15, rotate telescope and make it is observed that zero order diffracted light, and zero order diffracted light is overlapped with vertical cross hair, fixation
Telescope;
S16, rotation objective table make the cross picture that optical grating reflection is returned occur in the telescope visual field, and allow cross image position in prestige
K in the remote mirror visual field, fixation objective table, now telescope be located along the same line with parallel light tube, grating planar perpendicular to
The straight line.
The beneficial effects of the invention are as follows:
1st, the spectrometer of measurable parallel light tube slight rotation angles degree provided by the present invention, parallel light tube can be around the shaft
Rotation, because parallel light tube can be fixedly connected with the first alidade, therefore rotational angle when parallel light tube around the shaft it is larger when
Can be measured by the first alidade and dial and read.
2nd, the measuring method of a kind of parallel light tube slight rotation angles degree of the invention, when the rotational angle of parallel light tube is less than
1 point when cannot be read by the first alidade and dial, can be calculated by measuring the rotational angle α of objective table.When
Right this method can also be used for the measurement of the rotational angle more than 1 timesharing of parallel light tube.
3rd, because parallel light tube can rotate, therefore the external light source needed for spectrometer can be placed directly in parallel light tube
Front end, and external light source can easily be dismantled or be replaced with the light source of other wavelength.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the spectrometer of measurable parallel light tube slight rotation angles degree of the invention.
Fig. 2 is the top view of the spectrometer of measurable parallel light tube slight rotation angles degree of the invention.
Fig. 3 is the schematic diagram of K and cross picture on graticle in the telescope visual field of the present invention.
Fig. 4 is the schematic diagram that grating of the present invention is positioned on the center of objective table.
Fig. 5 is that the present invention is incident light, the grating of 100 lines, the 1st order diffraction light of selection of 546.1nm from wavelength, is obtained
Objective table rotation and the theory curve of parallel light tube rotational angle.
Description of reference numerals:1st, base;2nd, telescope;3rd, parallel light tube;4th, objective table;5th, the first alidade;6th, scale
Disk;7th, the second alidade;8th, the first screw;9th, the 3rd screw;10th, the 4th screw;11st, the 5th screw;12nd, the first regulation spiral shell
Nail;13rd, the second adjusting screw;14th, leveling serew;15th, source of parallel light;16th, the second screw.
Specific embodiment
The present invention is described further with specific embodiment below in conjunction with the accompanying drawings:
As depicted in figs. 1 and 2, the spectrometer of a kind of measurable parallel light tube slight rotation angles degree that the present invention is provided, bag
Base 1 is included, vertical rotating shaft, telescope 2, the parallel light tube 3 with slit, objective table 4, the first vernier are fixed with base 1
Disk 5, the alidade 7 of dial 6 and second are connected with rotating shaft, and non-interfering around the shaft can freely rotate respectively, the He of telescope 2
The rotation of parallel light tube 3 can be adjusted by vernier knob.
Telescope 2 includes object lens, eyepiece stalk, eyepiece focusing wheel and object lens focusing wheel, and the elevation angle of object lens can be by the first regulation
Screw 12 is adjusted, and lock screw is provided between object lens and eyepiece stalk, and release lock screw can manually make eyepiece stalk in object lens
Telescopic moving.It is built-in in telescope 2 can be with the light source of outgoing green cross picture.As shown in figure 3, being provided with the visual field of telescope 2 point
Plate is drawn, the center of graticle is provided with vertical cross hair.
First screw 8 can fix telescope 2 with the second alidade 7, and telescope 2 can be consolidated by the second screw 16 and rotating shaft
It is fixed.
3rd screw 9 can fix objective table 4 with dial 6, and objective table 4 can be fixed by the 4th screw 10 with rotating shaft,
Objective table 4 passes through the leveling of three leveling serews 14.B in the relative position such as Fig. 4 of three leveling serews1、B2、B3It is shown.
5th screw 11 can fix parallel light tube 3 with the first alidade 5, and parallel light tube 3 can be by the 6th screw (in figure
It is not shown) to be fixed with rotating shaft, the elevation angle of parallel light tube 3 can be adjusted by the second adjusting screw 13.The front end of parallel light tube 3 is provided with
Source of parallel light 15, source of parallel light can use a laser pen, can dismantle, change, and be screwed.
First alidade 5, the second alidade 7 and dial 6 carry scale, are used to identify parallel light tube, objective table, prestige
The rotational angle of remote mirror.First alidade 5 is provided with two verniers, and two verniers are separated by 180 degree on the first alidade 5
Symmetric position.Second alidade 7 is provided with two verniers, and two verniers are separated by the symmetrical position of 180 degree on the first alidade 5
Put.Vernier is arranged at the symmetric position for being separated by 180 degree, can effectively eliminate parallel light tube and cause when telescope rotates around the axis
Centering error.
It is 29 points, all 14.5 degree of groove that minimum indexing is portrayed on vernier surface;Minimum point is portrayed in the surface of dial 6
It is 0.5 degree to spend, and whole circle is 360 degree of groove.First alidade 5 can coordinate reading, the second alidade 7 and scale with dial 6
Disk 6 can coordinate reading.
Therefore, once the first screw 8, the 3rd screw 9, the 5th screw 11 are tightened, then the angular coordinate of parallel light tube 3 can lead to
Cross the first alidade 5 and dial 6 to determine, accuracy is 1 point.The angular coordinate of telescope 2 can pass through the He of the second alidade 7
Dial 6 determines that accuracy is 1 point.Therefore once telescope or parallel light tube rotate, then can be by reading respectively
Then the angular coordinate of telescope or parallel light tube seeks difference to calculate the angle value of rotation before and after rotating.
Embodiment one
The present invention provides a kind of measuring method of parallel light tube slight rotation angles degree, uses above-mentioned measurable parallel light tube
The spectrometer of slight rotation angles degree, comprises the following steps:
S1, by the source of parallel light with slit be arranged on parallel light tube front end, grating is disposed vertically in the center of objective table
On position, spectrometer is calibrated, telescope is located along the same line with parallel light tube, grating planar is perpendicular to the straight line.Calibration
Comprise the following steps:
S11, by the source of parallel light with slit be arranged on parallel light tube front end, tightening screw fixes light source;Adjustment is looked in the distance
The pitching of mirror, makes telescope level;
The object lens focusing wheel of S12, regulation telescope, enables telescope to receive directional light, adjusts eyepiece focusing wheel, makes prestige
See clearly graticle graduation mark in the remote mirror visual field, as shown in Figure 3.
S13, grating is disposed vertically on the center of objective table, rectangle show grating, grating indentation side in Fig. 4
To perpendicular to objective table, the leveling serew of objective table is adjusted, make the plane of objective table vertical with central rotating shaft, opened in telescope
Light source is put, objective table is slowly rotated, the cross picture reflected from grating planar is found from telescope, find what is reflected
After cross picture, lock screw regulation eyepiece stalk is unclamped, until observing the cross image position for clearly reflecting in telescope
K in the visual field, objective table is turned over 180 °, if cross picture is still located at K, now telescope optic axis are perpendicular to grating table
Face;K is intersection point in the telescope visual field at horizontal cross hair and vertical cross hair from lower to upper 3/4, as shown in Figure 3.If cross
It is misaligned at picture and K, then should adjust the leveling serew of objective table, then adjust telescope the first adjusting screw make cross image position in
K points.
S14, the telescope of infinite point as benchmark will be had been focused on, rotate parallel light tube and adjust the second regulation spiral shell
Nail, makes parallel light tube with telescope point-blank, opens the source of parallel light with slit, and it is clear now to see in telescope
Vertical line slit image, then source of parallel light is rotated by 90 °, vertical line slit image is changed into horizontal line picture, adjust the pitching of parallel light tube
Angle, makes most middle horizontal cross hair in horizontal line picture and the telescope visual field overlap, and now telescope is coaxial with parallel light tube, parallel
Light source rotates back to origin-location and fixes;
S15, rotate telescope and make it is observed that zero order diffracted light, and zero order diffracted light is overlapped with vertical cross hair, tighten
Second screw rigid telescope;
S16, rotate objective table 180 degree and make occur the cross picture that optical grating reflection is returned in the telescope visual field, and allow cross picture
K in the telescope visual field, tightening the 3rd screw makes objective table be fixed with dial, now telescope and parallel light tube position
In on same straight line, grating planar is perpendicular to the straight line.
S2, rotation parallel light tube, make kth order diffraction light be overlapped with the vertical cross hair in the telescope visual field, now directional light
Pipe have rotated θ angles:
Wherein d is grating constant, and the lambda1-wavelength that λ sends for source of parallel light reads the initial reading of the second alidade
α1, k=0, ± 1, ± 2 ...
S3, in step S2 rotate parallel light tube direction rotate parallel light tube again, make its deflection one minute angleKth order diffraction light will deviate from vertical cross hair position in the telescope visual field;
S4, against in step S2 rotate parallel light tube direction rotatable stage, make kth order diffraction light again with telescope
Vertical cross hair in the visual field overlaps, and reads the reading α of now the second alidade2, then objective table have rotated α angles:
α=α2-α1,
The minute angle that then parallel light tube is rotated in step S3
Fig. 5 is incident light, the grating of 100 lines, the 1st order diffraction light for 546.1nm from wavelength, the objective table rotation for obtaining
Turn the theory curve with parallel light tube rotational angle.If it can be seen that parallel light tube (incident light) has deflected 5 ' angles
Degree, then need about 11 ° of rotation objective table (grating) just to can guarantee that diffraction light also in situ.When the rotational angle of parallel light tube
When cannot be read by the first alidade and dial less than 1 point, can be calculated by measuring the rotational angle α of objective table
Go out.Certain this method can also be used for the measurement of the rotational angle more than 1 timesharing of parallel light tube.
Embodiment two
In order to preferably eliminate the influence of the centering error to test result of instrument, it is micro- that the present invention also provides a kind of parallel light tube
The measuring method of the small anglec of rotation, comprises the following steps:
S1, by the source of parallel light with slit be arranged on parallel light tube front end, grating is disposed vertically in the center of objective table
On position, spectrometer is calibrated, telescope is located along the same line with parallel light tube, grating planar is perpendicular to the straight line.
S2, rotation parallel light tube, make kth order diffraction light be overlapped with the vertical cross hair in the telescope visual field, now directional light
Pipe have rotated θ angles:
Wherein d be grating constant, the lambda1-wavelength that λ sends for source of parallel light, k=0, ± 1, ± 2 ... read second
Alidade is separated by two initial reading of vernier respectively α of 180 degree1And α1′。
S3, in step S2 rotate parallel light tube direction rotate parallel light tube again, make its deflection one minute angleKth order diffraction light will deviate from vertical cross hair position in the telescope visual field;
S4, against in step S2 rotate parallel light tube direction rotatable stage, make kth order diffraction light again with telescope
Vertical cross hair in the visual field overlaps, and the reading for reading now second two verniers of alidade is respectively α2And α2', then objective table disappears
Except have rotated α angles after centering error:
The minute angle that then parallel light tube is rotated in step S3
One of ordinary skill in the art will be appreciated that embodiment described here is to aid in reader and understands this hair
Bright principle, it should be understood that protection scope of the present invention is not limited to such especially statement and embodiment.This area
Those of ordinary skill can according to these technical inspirations disclosed by the invention make it is various do not depart from essence of the invention other are each
Plant specific deformation and combine, these deformations and combination are still within the scope of the present invention.
Claims (9)
1. a kind of spectrometer of measurable parallel light tube slight rotation angles degree, it is characterised in that:Including base (1), on base (1)
Be fixed with rotating shaft, telescope (2), parallel light tube (3), objective table (4), dial (6), the second alidade (7) respectively with rotating shaft
It is connected, and non-interfering around the shaft can freely rotates;First screw (8) can be solid by telescope (2) and the second alidade (7)
Fixed, the 3rd screw (9) can be fixed by objective table (4) and dial (6), and the second alidade (7) can coordinate reading with dial (6)
Number.
2. the spectrometer of measurable parallel light tube slight rotation angles degree according to claim 1, it is characterised in that:Described
Two alidades (7) are provided with two verniers, and two verniers are separated by the symmetric position of 180 degree on the second alidade (7).
3. the spectrometer of measurable parallel light tube slight rotation angles degree according to claim 1, it is characterised in that:The prestige
Remote mirror (2) can be fixed by the second screw (16) with rotating shaft, and objective table (4) can be fixed by the 4th screw (10) with rotating shaft.
4. the spectrometer of measurable parallel light tube slight rotation angles degree according to claim 1, it is characterised in that:Described turn
The first alidade (5) that can be rotated around the axis is additionally provided with axle, the 5th screw (11) can be by parallel light tube (3) and the first alidade
(5) it is fixed.
5. the spectrometer of measurable parallel light tube slight rotation angles degree according to claim 1, it is characterised in that:It is described flat
The elevation angle of row light pipe (3) can be adjusted by the second adjusting screw (13).
6. the spectrometer of measurable parallel light tube slight rotation angles degree according to claim 1, it is characterised in that:It is described flat
The front end of row light pipe (3) is provided with source of parallel light (15).
7. the spectrometer of measurable parallel light tube slight rotation angles degree according to claim 1, it is characterised in that:The prestige
Remote mirror (2) is focused including object lens, eyepiece stalk, eyepiece focusing wheel and object lens and is taken turns, and the elevation angle of object lens can be by the first adjusting screw (12)
Regulation, is provided with lock screw between object lens and eyepiece stalk.
8. a kind of measuring method of parallel light tube slight rotation angles degree, it is characterised in that comprise the following steps:
S1, source of parallel light is arranged on parallel light tube front end, grating is disposed vertically on the center of objective table, calibration point
Photometry, makes telescope be located along the same line with parallel light tube, and grating planar is perpendicular to the straight line;
S2, rotation parallel light tube, make kth order diffraction light be overlapped with the vertical cross hair in the telescope visual field, and now parallel light tube turns
θ angles are moved:
Wherein d is grating constant, and the lambda1-wavelength that λ sends for source of parallel light reads the initial reading α of the second alidade1;
S3, in step S2 rotate parallel light tube direction rotate parallel light tube again, make its deflection one minute angleHope
Kth order diffraction light will deviate from vertical cross hair position in the remote mirror visual field;
S4, against in step S2 rotate parallel light tube direction rotatable stage, make kth order diffraction light again with the telescope visual field
In vertical cross hair overlap, read the reading α of now the second alidade2, then objective table have rotated α angles:
α=α2-α1,
The minute angle that then parallel light tube is rotated in step S3
9. the measuring method of parallel light tube slight rotation angles degree according to claim 8, it is characterised in that the S1 bags
Include:
S11, by source of parallel light be arranged on parallel light tube front end, adjust telescope pitching, make telescope level;
The object lens focusing wheel of S12, regulation telescope, enables telescope to receive directional light, adjusts eyepiece focusing wheel, makes telescope
Clearly graticle graduation mark is seen in the visual field;
S13, grating is disposed vertically on the center of objective table, grating indentation direction adjusts loading perpendicular to objective table
The leveling serew of platform, makes the plane of objective table vertical with central rotating shaft, opens telescope built-in light source, slowly rotates objective table,
The cross picture reflected from grating planar is found from telescope, eyepiece stalk is adjusted, clearly reflected until observing
Point of intersection K in the telescope visual field at horizontal cross hair and vertical cross hair from lower to upper 3/4 of cross image position, now telescope
Optical axis is perpendicular to grating surface;
S14, using telescope as benchmark, rotate parallel light tube, make parallel light tube with telescope point-blank, open parallel
Light source, can now see clearly vertical line picture in telescope, then source of parallel light is rotated by 90 °, and vertical line picture is changed into horizontal line picture,
Adjust the angle of pitch of parallel light tube, most middle horizontal cross hair in horizontal line picture and the telescope visual field is overlapped, now telescope and
Parallel light tube is coaxial, source of parallel light is rotated back to origin-location and is fixed;
S15, rotate telescope and make it is observed that zero order diffracted light, and zero order diffracted light is overlapped with vertical cross hair, fix and look in the distance
Mirror;
S16, rotation objective table make the cross picture that optical grating reflection is returned occur in the telescope visual field, and allow cross image position in telescope
K in the visual field, objective table is fixed, now telescope is located along the same line with parallel light tube, and grating planar is straight perpendicular to this
Line.
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CN109827524A (en) * | 2019-03-22 | 2019-05-31 | 京东方科技集团股份有限公司 | Light angle measuring device and display screen go out the light angle measurement method of light |
CN111640356A (en) * | 2020-04-10 | 2020-09-08 | 赣南师范大学 | Spectrometer for observation by digital camera and adjusting method thereof |
CN111997587A (en) * | 2020-08-31 | 2020-11-27 | 中国石油集团渤海钻探工程有限公司 | Experimental device for detecting measurement accuracy of sensor of card measuring instrument |
CN113514230A (en) * | 2021-07-15 | 2021-10-19 | 中国科学院长春光学精密机械与物理研究所 | Grating diffraction efficiency testing device |
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