CN106863015A - A kind of fiber grating micro-displacement sensor and the machine pillar with the sensor - Google Patents
A kind of fiber grating micro-displacement sensor and the machine pillar with the sensor Download PDFInfo
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- CN106863015A CN106863015A CN201710103234.2A CN201710103234A CN106863015A CN 106863015 A CN106863015 A CN 106863015A CN 201710103234 A CN201710103234 A CN 201710103234A CN 106863015 A CN106863015 A CN 106863015A
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- base plate
- fiber
- optical fiber
- fixed station
- ring body
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
- B23Q17/2452—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring features or for detecting a condition of machine parts, tools or workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
- B23Q1/015—Frames, beds, pillars
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a kind of fiber grating micro-displacement sensor, including base plate, two side plates, optical fiber fixed station, latch, ring body, single-mode fiber, fiber grating and thimbles；Two side plates are respectively fixedly disposed at the both sides of base plate, and are vertically arranged with base plate, and one end of base plate is stretched out outside side plate, and connect optical fiber fixed station；Latch is vertical and is rotatably connected on base plate, and the upper end of latch is fixed with ring body, and the one end in ring body near optical fiber fixed station is provided with connecting rod；Side of the middle part of single-mode fiber around ring body away from optical fiber fixed station is set；Machine pillar the invention further relates to carry the sensor.The beneficial effects of the invention are as follows：A kind of fiber grating micro-displacement sensor of the invention and the machine pillar with the sensor, simple structure, reliable operation, severe engineer applied environment can be met, and be easy to carry out seriation production in enormous quantities, and micron order and nano-grade displacement, and the continuous long term monitoring of energy can be measured, with preferable effect temperature compensation.
Description
Technical field
The present invention relates to technical field of optical fiber sensing, more particularly to a kind of fiber grating micro-displacement sensor and with the biography
The machine pillar of sensor.
Background technology
In scientific research and engineering practice, the application of displacement measuring technology is widely, existing continuously to be supervised
The displacement measuring technology of survey is mainly including the electricity class such as condenser type or inductance type displacement measuring technology, laser displacement sensor and laser
The laser displacement measurement technology such as interferometer, the displacement measurement accuracy of these sensors can reach micron order, in scientific research
Played an important role with engineering practice.But the environmental suitability of electric class displacement measuring technology is poor, particularly in forceful electric power
In magnetic radiation environment, its measuring accuracy and signal to noise ratio can be substantially reduced.Laser displacement measurement sensor is expensive, and to environment
Purity requirements it is high, it is impossible to the high-acruracy survey of displacement is realized in the environment such as dust.
Fiber grating is a kind of novel optical fiber sensing passive device, with small volume, lightweight, high precision, corrosion-resistant, anti-
It is quick-fried, to electric insulation, electromagnetism interference, good environmental adaptability the advantages of, and the distributed measurement and length of multiple spot multi-parameter can be realized
Phase remote condition monitoring, therefore be increasingly widely applied in many field of engineering technology.At present, there is substantial amounts of scientific research work
Make personnel and engineers and technicians have developed the fiber grating displacement sensor of multi-form.Smart Fiber companies of Britain
The displacement measurement accuracy of the SmartBridge fiber grating displacement sensors of research and development is only 0.05mm (https://
www.smartfibres.com/FBG-sensors)；The OS5100 type optical fiber of U.S. MOI (Micron optics) company research and development
The displacement measurement accuracy of grating displacement sensor is 0.03mm (http://www.micronoptics.com/)；In fiber grating
On the premise of the demodulation accuracy of (FBG) demodulator is ± 1pm, Changyu Shen et al. have developed two kinds of cantilever beam type fiber grating positions
Displacement sensor, certainty of measurement is respectively ± 20 microns and ± 4 microns of (document " Novel temperature-insensitive
Fiber Bragg grating sensor for displacement measurement ", from periodical " Sensors and
Actuators A：Volume 170,2011 of Physical "；Document " A Displacement Sensor Based on a
Temperature-Insensitive Double Trapezoidal Structure With Fiber Bragg
Grating ", from periodical " IEEE sensors journal " volume 12 the 5th phase, 2012)；Sitong Tao et al. then set
A kind of circular thin-wall fiber-optical grating temperature sensor is counted, certainty of measurement reaches ± 2 microns of (document " Temperature-
insensitive fiber Bragg grating displacement sensor based on a thin-wall
Ring ", from volume 372,2016 of periodical " Optics Communications ").
The patent of invention of Patent No. ZL200910026385.8, discloses a kind of temperature self-compensation fiber grating displacement and passes
Sensor, by spring elongation or compression two fiber gratings (thin metal pipe encapsulation), employ intermediate elastomeric, its sensitivity with
Measuring accuracy is lowered；The patent of invention of Patent No. ZL201010127525.3, discloses a kind of ultra-precise fiber grating position
Displacement sensor, is the tubular fiber grating displacement sensor with parallel leaf spring as guide rail, it is possible to achieve micron order and nanoscale
There is problem in the measurement of displacement, but not temperature compensated measure, and complex structure, long-term reliability.Therefore, a kind of structure is designed
Simply, reliable operation, the high precision optical fiber grating micro-displacement sensor of temperature self-compensation, with meeting severe engineer applied environment
The monitoring reliably and with long-term of micro-displacement is urgently to be resolved hurrily.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of simple structure, and reliable operation can meet severe engineering
Applied environment, and it is easy to carry out the fiber grating micro-displacement sensor and the lathe with the sensor of seriation production in enormous quantities
Column.
The technical scheme that the present invention solves above-mentioned technical problem is as follows：A kind of fiber grating micro-displacement sensor, including bottom
Plate, two side plates, optical fiber fixed station, latch, ring body, single-mode fiber, fiber grating and thimbles；
Two side plates are respectively fixedly disposed at the both sides of base plate, and are vertically arranged with base plate, and side plate is stretched out in one end of base plate
Outward, and optical fiber fixed station is connected, optical fiber fixed station is vertical with one end of base plate to be connected；
Latch is vertical and is rotatably connected on base plate, and latch is rotated with base plate and is connected, and one end of latch is fixed with ring body,
One end in ring body near optical fiber fixed station is provided with connecting rod, and connecting rod be arranged in parallel with base plate, and one end of connecting rod is fixed with ring body and connected
Connect, the other end of connecting rod extends to optical fiber fixed station, and is provided with thimble, one end of thimble fixed company vertical with the other end of connecting rod
Connect, the other end extends to side plate direction, and stretches out outside side plate；
Side of the middle part of single-mode fiber around ring body away from optical fiber fixed station is set, and is fixedly connected with ring body, and it two
Hold and extend to optical fiber fixed station, and be fixedly connected with optical fiber fixed station, single-mode fiber is respectively provided on two sides with fiber grating, single mode
Optical fiber be arranged in parallel with base plate.
The beneficial effects of the invention are as follows：A kind of fiber grating micro-displacement sensor of the invention, simple structure, work can
Lean on, severe engineer applied environment can be met, and be easy to carry out seriation production in enormous quantities, and micron order and nanoscale can be measured
Displacement, and the continuous long term monitoring of energy, with preferable effect temperature compensation.
Further：Two fiber gratings are symmetrical arranged centered on ring body.
The beneficial effect of above-mentioned further scheme is：Detection is accurate.
Further：Base plate is rectangle, and latch is arranged on the center line in floor length direction.
The beneficial effect of above-mentioned further scheme is：Sensor measurement is accurate.
Further：Connecting rod is respectively provided on two sides with spring near optical fiber fixed station one end, and spring be arranged in parallel with base plate, bullet
One end of spring is fixedly connected with connecting rod, and the other end is fixedly connected with corresponding side plate.
The beneficial effect of above-mentioned further scheme is：The stretching of two springs or compressive deformation are identical, and detection is accurate.
Further：The two ends of single-mode fiber are fixedly connected by bonding agent with optical fiber fixed station；The middle part of single-mode fiber leads to
Bonding agent is crossed to be fixedly connected with ring body.
The beneficial effect of above-mentioned further scheme is：Simple structure, stable connection.
Further：Base plate is provided with the bolt hole for facilitating install sensor.
The beneficial effect of above-mentioned further scheme is：Facilitate install sensor.
Further：The other end of thimble is provided with hard gauge head.
The beneficial effect of above-mentioned further scheme is：Detection is reliable.
Further：A kind of machine pillar with the sensor, including machine pillar body, fiber grating micro-displacement sensing
Device and carbon fiber pipe；Machine pillar body is vertically arranged, and fiber grating micro-displacement sensor is fixedly installed on machine pillar body
Thimble in the upper end of side, and fiber grating micro-displacement sensor is set down vertically, the side lower end of machine pillar body
The carbon fiber pipe for setting straight up is provided with, the lower end of carbon fiber pipe is fixedly connected with machine pillar body, upper end is consolidated with thimble
Fixed connection.
The beneficial effect of above-mentioned further scheme is：For on-line measurement machine pillar body under inside and outside Source
Small thermal expansion length, the Thermal Error to lathe in the vertical direction carries out real-Time Compensation, improves the machining accuracy of lathe.
Brief description of the drawings
Fig. 1 is the structural representation of sensor of the invention；
Fig. 2 is the structural representation of sensor of the invention explosive view；
Fig. 3 is the structural representation of machine pillar of the invention.
In accompanying drawing, the list of parts representated by each label is as follows：
1st, base plate, 2, side plate, 3, optical fiber fixed station, 4, latch, 5, ring body, 6, single-mode fiber, 7, thimble, 8, connecting rod, 9,
Fiber grating, 10, spring, 11, bonding agent, 12, hard gauge head, 13, machine pillar body, 14, carbon fiber pipe.
Specific embodiment
Principle of the invention and feature are described below in conjunction with accompanying drawing, example is served only for explaining the present invention, and
It is non-for limiting the scope of the present invention.
As shown in Figure 1 to Figure 3, a kind of 1, two side plates 2, optical fiber of fiber grating micro-displacement sensor, including base plate are fixed
Platform 3, latch 4, ring body 5, single-mode fiber 6, fiber grating 9 and thimble 7；
Two side plates 2 are respectively fixedly disposed at the both sides of base plate 1, and are vertically arranged with base plate 1, and one end of base plate 1 is stretched out
Outside side plate 2, and optical fiber fixed station 3 is connected, optical fiber fixed station 3 is vertical with one end of base plate 1 to be connected；
Latch 4 is vertical and is rotatably connected on base plate 1, and the upper end of latch 4 is fixed with ring body 5, near optical fiber in ring body 5
One end of fixed station 3 is provided with connecting rod 8, and connecting rod 8 be arranged in parallel with base plate 1, and one end of connecting rod 8 is fixedly connected with ring body 5, connecting rod 8
The other end extend to optical fiber fixed station 3, and be provided with thimble 7, one end of thimble 7 is vertical with the other end of connecting rod 8 to be fixedly connected,
The other end extends to the direction of side plate 2, and stretches out outside side plate 2；
Side of the middle part of single-mode fiber 6 around ring body 5 away from optical fiber fixed station 3 is set, and is fixedly connected with ring body 5,
Its two ends extends to optical fiber fixed station 3, and be fixedly connected with optical fiber fixed station 3, and single-mode fiber 6 is respectively provided on two sides with optical fiber light
Grid 9, single-mode fiber 6 be arranged in parallel with base plate 1.
A kind of fiber grating micro-displacement sensor of the invention, simple structure, reliable operation, can meet severe engineering should
With environment, and it is easy to carry out seriation production in enormous quantities, and micron order and nano-grade displacement can be measured, and continuously can supervises for a long time
Survey, with preferable effect temperature compensation.
Two fiber gratings 9 are symmetrical arranged centered on ring body 5；Detection is accurate.
Base plate 1 is rectangle, and latch 4 is arranged on the center line of the length direction of base plate 1；Sensor measurement is accurate.
Connecting rod 8 is respectively provided on two sides with spring 10 near the one end of optical fiber fixed station 3, and spring 10 be arranged in parallel with base plate 1, bullet
One end of spring 10 is fixedly connected with connecting rod 8, and the other end is fixedly connected with corresponding side plate 2；The stretching of two springs 10 or pressure
Contracting deformation is identical, and detection is accurate.
The two ends of single-mode fiber 6 are fixedly connected by bonding agent 11 with optical fiber fixed station 3；The middle part of single-mode fiber 6 passes through
Bonding agent 11 is fixedly connected with ring body 5；Simple structure, stable connection.
Base plate 1 is provided with the bolt hole for facilitating install sensor；Facilitate install sensor.
The other end of thimble 7 is provided with hard gauge head 12；Detection is reliable.
A kind of machine pillar with the sensor, including machine pillar body 13, fiber grating micro-displacement sensor and
Carbon fiber pipe 14；Machine pillar body 13 is vertically arranged, and fiber grating micro-displacement sensor is fixedly installed on machine pillar body
Thimble 7 in the upper end of 13 sides, and fiber grating micro-displacement sensor is set down vertically, the side of machine pillar body 13
Lower end is provided with the carbon fiber pipe 14 for setting straight up, and the lower end of carbon fiber pipe 14 is fixedly connected with machine pillar body 13, on
End is fixedly connected with thimble 7；It is right for small thermal expansion length of the on-line measurement machine pillar body 13 under inside and outside Source
The Thermal Error of lathe in the vertical direction carries out real-Time Compensation, improves the machining accuracy of extra bed.
Principle of the invention is that connecting rod 8 and ring body 5 constitute leverage, and the radius of ring body 5 is r, and what connecting rod 8 was formed has
Effect radius of turn is R, and two respective two ends fixed ranges of fiber grating 9 are L, when thimble 7 produces micro-displacement d, then its
In fiber grating 9 produce strain stress1=rd/RL, another fiber grating 9 produces size identical, and positive and negative opposite compression should
Become ε2=-rd/RL.If the variable quantity of environment temperature is Δ T, shown one of fiber grating 9 and another optical fiber light
The centre wavelength drift delta λ of grid 91With Δ λ2Can be expressed as respectively：
In above formula, λ1And λ2The centre wavelength initial value of respectively one of fiber grating 9 and another fiber grating 9,
αf、ξfAnd PeThermal coefficient of expansion, thermo-optical coeffecient and the valid elastic-optic constants of single-mode fiber 6 are represented respectively, and general value is respectively
0.5x10-6/ DEG C, 7.5x10-6/ DEG C and 0.22.By ε1=rd/RL and ε2=-rd/RL substitutes into above formula respectively, then can obtain：
Therefore, the influence that can exclude variation of ambient temperature Δ T is solved by difference, obtains the accurate size of micro-displacement amount d.
The foregoing is only presently preferred embodiments of the present invention, be not intended to limit the invention, it is all it is of the invention spirit and
Within principle, any modification, equivalent substitution and improvements made etc. should be included within the scope of the present invention.
Claims (8)
1. a kind of fiber grating micro-displacement sensor, it is characterised in that：Including base plate (1), two side plates (2), optical fiber fixed stations
(3), latch (4), ring body (5), single-mode fiber (6), fiber grating (9) and thimble (7)；
Two side plates (2) are respectively fixedly disposed at the both sides of the base plate (1), and are vertically arranged with the base plate (1), institute
The side plate (2) is stretched out outward in the one end for stating base plate (1), and connects optical fiber fixed station (3), the optical fiber fixed station (3) with it is described
One end of base plate (1) vertically connects；
The latch (4) is vertical and is rotatably connected on the base plate (1), and the upper end of the latch (4) is fixed with ring body
(5), the side on the ring body (5) near the optical fiber fixed station (3) is provided with connecting rod (8), the connecting rod (8) and the base plate
(1) it be arranged in parallel, one end of the connecting rod (8) is fixedly connected with the ring body (5), the other end of the connecting rod (8) is to described
Optical fiber fixed station (3) extends, and is provided with thimble (7), and one end of the thimble (7) is vertical with the other end of the connecting rod (8) solid
Fixed connection, the other end extends to the side plate (2) direction, and stretches out the side plate (2) outward；
Side of the middle part of the single-mode fiber (6) around the ring body (5) away from the optical fiber fixed station (3) is set, and with
The ring body (5) is fixedly connected, and its two ends extends to the optical fiber fixed station (3), and fixes company with the optical fiber fixed station (3)
Connect, the single-mode fiber (6) is respectively provided on two sides with fiber grating (9), and the single-mode fiber (6) is parallel with the base plate (1)
Set.
2. a kind of fiber grating micro-displacement sensor according to claim 1, it is characterised in that：Two fiber gratings
(9) it is symmetrical arranged centered on the ring body (5).
3. a kind of fiber grating micro-displacement sensor according to claim 1, it is characterised in that：The base plate (1) is length
Square, the latch (4) is arranged on the center line of the base plate (1) length direction.
4. a kind of fiber grating micro-displacement sensor according to claim 3, it is characterised in that：The connecting rod (8) is close to
Described optical fiber fixed station (3) one end is respectively provided on two sides with spring (10), and the spring (10) is parallel with the base plate (1) sets
Put, one end of the spring (10) is fixedly connected with the connecting rod (8), the other end is fixedly connected with the corresponding side plate (2).
5. a kind of fiber grating micro-displacement sensor according to claim 1, it is characterised in that：The single-mode fiber (6)
Two ends be fixedly connected with the optical fiber fixed station (3) by bonding agent (11)；The middle part of the single-mode fiber (6) is by described
Bonding agent (11) is fixedly connected with the ring body (5).
6. a kind of fiber grating micro-displacement sensor according to claim 1, it is characterised in that：Set on the base plate (1)
There is the convenient bolt hole for installing the sensor.
7. a kind of fiber grating micro-displacement sensor according to claim 1, it is characterised in that：The thimble (7) it is another
One end is provided with hard gauge head (12).
8. a kind of machine pillar with the sensor, it is characterised in that：Including machine pillar body (13), claim 1 to 7
A kind of fiber grating micro-displacement sensor and carbon fiber pipe (14) described in any one；The machine pillar body (13) sets vertically
Put, the fiber grating micro-displacement sensor is fixedly installed on the upper end of machine pillar body (13) side, and the light
The thimble (7) in fine optical grating micro-displacement pickup is set down vertically, the side lower end of the machine pillar body (13)
The carbon fiber pipe (14) for setting straight up is provided with, the lower end of the carbon fiber pipe (14) is solid with the machine pillar body (13)
Fixed connection, upper end is fixedly connected with the thimble (7).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710103234.2A CN106863015B (en) | 2017-02-24 | 2017-02-24 | A kind of fiber grating micro-displacement sensor and the machine pillar with the sensor |
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| CN201710103234.2A CN106863015B (en) | 2017-02-24 | 2017-02-24 | A kind of fiber grating micro-displacement sensor and the machine pillar with the sensor |
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| CN106863015B CN106863015B (en) | 2018-11-23 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844482A (en) * | 2018-08-23 | 2018-11-20 | 北京通为科技有限公司 | The calibration platform of fiber-optic grating sensor |
| CN109916282A (en) * | 2019-04-01 | 2019-06-21 | 南京智慧基础设施技术研究院有限公司 | A kind of malformation device and its detection method based on Fibre Optical Sensor |
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| CN1558183A (en) * | 2004-02-13 | 2004-12-29 | 武汉理工大学 | Non-contact readout type displacement transducer for digital magnetic stripe and grating strip |
| CN2938025Y (en) * | 2006-06-26 | 2007-08-22 | 哈尔滨工业大学 | Fibre-optical raster displacement meter |
| CN101290214A (en) * | 2008-05-23 | 2008-10-22 | 宁波杉工结构监测与控制工程中心有限公司 | Optical fibre displacement transducer |
| CN101788268A (en) * | 2010-03-17 | 2010-07-28 | 合肥工业大学 | Ultra-precise fiber grating displacement sensor |
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2017
- 2017-02-24 CN CN201710103234.2A patent/CN106863015B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1558183A (en) * | 2004-02-13 | 2004-12-29 | 武汉理工大学 | Non-contact readout type displacement transducer for digital magnetic stripe and grating strip |
| CN2938025Y (en) * | 2006-06-26 | 2007-08-22 | 哈尔滨工业大学 | Fibre-optical raster displacement meter |
| CN101290214A (en) * | 2008-05-23 | 2008-10-22 | 宁波杉工结构监测与控制工程中心有限公司 | Optical fibre displacement transducer |
| CN101788268A (en) * | 2010-03-17 | 2010-07-28 | 合肥工业大学 | Ultra-precise fiber grating displacement sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108844482A (en) * | 2018-08-23 | 2018-11-20 | 北京通为科技有限公司 | The calibration platform of fiber-optic grating sensor |
| CN108844482B (en) * | 2018-08-23 | 2024-01-19 | 北京通为科技有限公司 | Calibration platform of fiber grating sensor |
| CN109916282A (en) * | 2019-04-01 | 2019-06-21 | 南京智慧基础设施技术研究院有限公司 | A kind of malformation device and its detection method based on Fibre Optical Sensor |
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| CN106863015B (en) | 2018-11-23 |
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