CN106855389A - The AFM system mechanical drift compensation method of view-based access control model sensing - Google Patents

The AFM system mechanical drift compensation method of view-based access control model sensing Download PDF

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CN106855389A
CN106855389A CN201510958664.3A CN201510958664A CN106855389A CN 106855389 A CN106855389 A CN 106855389A CN 201510958664 A CN201510958664 A CN 201510958664A CN 106855389 A CN106855389 A CN 106855389A
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microballoon
afm
drift
sample surfaces
cantilevered distal
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CN106855389B (en
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王玉亮
李晓来
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Beihang University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention belongs to field of precision measurement, it is related to a kind of AFM system mechanical drift compensation method of view-based access control model sensing, the method on the basis of microballoon position, sets up a kind of AFM system drift compensation algorithm under by image procossing position finding microscope.Influence due to factors such as mechanical oscillation and noise jammings to AFM system, the variable quantity of distance is the cumulative of AFM system drift between cantilevered distal end microballoon and sample surfaces microballoon, according to the distance change amount of measurement, the actuator voltage of platform is so as to adjust microballoon position where adjustment microballoon, distance between cantilevered distal end microballoon and sample surfaces microballoon is set to remain constant, so as to realize compensating AFM system drift value.Compared with current existing AFM system drift compensation method, the method has the advantage for not transforming AFM system hardware, non-cpntact measurement, can in real time compensate AFM system drift.

Description

The AFM system mechanical drift compensation method of view-based access control model sensing
Technical field
The invention belongs to field of precision measurement, and in particular to a kind of AFM system mechanical drift compensation method of view-based access control model sensing.
Background technology
AFM (Atomic Force Microscope, AFM) pattern detection and minute manufacturing processing are carried out by detection probe and sample surfaces interatomic force, now it is widely used in the research field of the nanometer related discipline such as semiconductor, nano-functional material, biology, chemical industry.During AFM works long hours, the factor such as variation of ambient temperature, mechanical shock, electromagnetic interference causes system to there is serious drift, causes object under test feature image distortion distortion and errors in position measurement.
Two major classes are segmented into AFM system drift research research direction at present：One is suppress drift in hardware design, the second is being corrected to drift from algorithm.There are additional sensor, optimization scanning platform and the double cantilever models of foundation in hardware design.Additional sensor is to add aiding sensors in atom Force system, can be used to measure vertical drift or interference, optimization scanning platform is by improving scanning platform rigidity, reduce coupling and drift about so as to reducing in measurement process, set up double cantilever models and introduce reference probe as reference by location, above drift compensation method is limited by AFM system composition structure.Software algorithm offset drift aspect, for the drift of XY directions, off-line correction, the feature of real-time tracking or the position of structure is carried out using continuous afm image sequence, and tracked by atom carries out drift compensation with reference to feedforward control.For the drift of vertical direction, researcher is proposed by controlling environment temperature, to reduce AFM system thermal drift.Above in relation to AFM system drift compensation scheme system drifting is improved, the method high cost of hardware modification and limit by AFM system structure, software algorithm off-line correction etc. method do not have real-time, limit its popularization and application.
The content of the invention
Technology solve problem of the invention is：Overcome the shortcomings of existing AFM system drift compensation method, propose a kind of new AFM system drift compensation method, under conditions of in noncontact mode and not transforming hardware, AFM system is drifted about carries out real-time high-precision compensation.
Technical solution of the invention is：There is provided a kind of AFM system mechanical drift compensation method of view-based access control model sensing, it is characterized in that, the visual sensing part includes an AFM cantilevered distal ends microballoon and a sample surfaces microballoon, measurement by visual sensing technology to distance between AFM cantilevered distal ends microballoon and sample surfaces microballoon, the drift value of AFM system is calculated, is comprised the following steps：
Step one, view-based access control model sensing technology calculate AFM cantilevered distal ends microballoon and sample surfaces microballoon position；
Step 2, distance change amount between the two is calculated according to cantilevered distal end microballoon and sample surfaces microballoon position, so as to obtain AFM system drift value；
Step 3, the drift value calculated according to step 2, the driving voltage of scanning platform where regulation AFM cantilevered distal ends microballoon make between AFM cantilevered distal ends microballoon and sample surfaces microballoon distance in threshold range.
Further, before the step one, distance threshold between setting AFM cantilevered distal ends microballoon and sample surfaces microballoon.
In the step 2, distance change amount is poor to cantilevered distal end microballoon and sample surfaces microballoon location variation between calculating cantilevered distal end microballoon and sample surfaces microballoon position, specifically,
ddrift=d '-d=dcant,drift-dsubs,drift
Wherein, d is initial distance between AFM cantilevered distal ends microballoon and sample surfaces microballoon in AFM system, and d ' is the distance after being drifted about between AFM cantilevered distal ends microballoon and sample surfaces microballoon, dcant,driftIt is AFM cantilevered distal end microballoon drift values, dsubs,driftIt is sample surfaces microballoon drift value.
Described AFM cantilevered distal end microballoon drift values dcant,drift, it is characterised in that dcant,driftObtained by the variable quantity for measuring AFM cantilevered distal end microballoon change in location.
Described sample surfaces microballoon drift value dsubs,drift, it is characterised in that dsubs,driftIt is sample surfaces microballoon location variation.
In the step 3, by PID closed-loop controls, AFM cantilever piezotable driving voltages are adjusted according to drift value, so as to control AFM cantilevered distal end microballoons position, make between cantilevered distal end microballoon and sample surfaces microballoon distance in threshold range.
The described measurement by visual sensing technology to distance between AFM cantilevered distal ends microballoon and sample surfaces microballoon, comprises the following steps：
Step one, a series of microspheres image for gathering known positions, it is radial vector that the microspheres image of every place position is extracted into Feature Conversion, sets up the microspheres image peg model on microballoon positional information；
Microspheres image in the range of step 2, collection calibration position compares with peg model in step one, obtains microballoon position.
Further, microspheres image extracts feature in described step one, it is characterized in that, microballoon center is determined according to gray value intensity center of gravity in image, image is considered as a series of annulus with center as the center of circle, the average value of gray value on each annulus is calculated, a series of gray value average value on annulus is sequentially combined as a radial vector.
Described step two, it is characterised in that the microspheres image of collection is converted into radial vector, compares with the peg model on positional information, and microballoon position is positioned according to nonlinear least square method.
The AFM system mechanical drift compensation method of view-based access control model sensing of the present invention, cantilevered distal end microballoon is measured by view-based access control model sensing technology to be drifted about with sample surfaces microballoon position measurement AFM system, drifted about between direct measurement AFM cantilevers and sample surfaces on the basis of not changing original AFM system, drifting problem can be in real time solved in scanning process, this method can effectively adapt to the drift correction in lengthy scan, have the advantages that to adapt to common sample, automatic, real time correction.
Brief description of the drawings
Fig. 1 is AFM cantilevered distal ends microballoon and sample surfaces microballoon schematic diagram.
In Fig. 1, (1) it is sample substrate slide, (2) it is sample surfaces microballoon, (3) it is AFM cantilevered distal end microballoons, (4) it is micro-cantilever, (5) it is piezoelectric actuator, (6) are cantilever support piece, dotted line is the illustrated position after drift.
Fig. 2 is the AFM system mechanical drift compensation flow chart of view-based access control model sensing positioning.
Fig. 3 is microballoon position fixing process flow chart.Fig. 4 is to carry out drift compensation flow chart according to microballoon position.
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with drawings and Examples, the present invention will be described in further detail.Specific embodiment described herein is only used to explain the present invention, is not intended to limit the present invention.
The inventive method, using visual sensing technology, measures and compensates AFM system drift in real time in a non contact fashion under conditions of AFM system hardware is not transformed.The AFM system mechanical drift compensation method of view-based access control model sensing, it is characterized in that, the visual sensing part includes an AFM cantilevered distal ends microballoon and a sample surfaces microballoon, microballoon is a diameter of 10 μm -50 μm of microballoon, measurement by visual sensing technology to distance between AFM cantilevered distal ends microballoon and sample surfaces microballoon, calculates the drift value of AFM system.
The AFM system mechanical drift compensation method of described view-based access control model sensing specifically includes following steps：
Step one, view-based access control model sensing technology calculate AFM cantilevered distal ends microballoon and sample surfaces microballoon position；
Step 2, distance change amount between the two is calculated according to cantilevered distal end microballoon and sample surfaces microballoon position, so as to obtain AFM system drift value；
Step 3, the drift value calculated according to step 2, the driving voltage of scanning platform where regulation AFM cantilevered distal ends microballoon make between AFM cantilevered distal ends microballoon and sample surfaces microballoon distance in threshold range.
Further, before the step one, distance threshold between setting AFM cantilevered distal ends microballoon and sample surfaces microballoon.
In the step one, the measurement by visual sensing technology to distance between AFM cantilevered distal ends microballoon and sample surfaces microballoon is comprised the following steps：
Step one, a series of microspheres image for gathering known positions, it is radial vector that the microspheres image of every place position is extracted into Feature Conversion, sets up the microspheres image peg model on microballoon positional information；
Microspheres image in the range of step 2, collection calibration position compares with peg model in step one, obtains microballoon position.
Described microspheres image extracts feature, it is characterized in that, microballoon center is determined according to gray value intensity center of gravity in image, image is considered as a series of annulus with center as the center of circle, the average value of gray value on each annulus is calculated, a series of gray value average value on annulus is sequentially combined as a radial vector.
Microspheres image in the range of described collection calibration position compares with peg model, it is characterised in that the microspheres image of collection is converted into radial vector, compares with the peg model on positional information, and microballoon position is positioned according to nonlinear least square method.
In the step 2, calculate distance change amount between cantilevered distal end microballoon and sample surfaces microballoon position be it is poor to cantilevered distal end microballoon and sample surfaces microballoon location variation, specifically, ddrift=d '-d=dcant,drift-dsubs,drift
Wherein, d is initial distance between AFM cantilevered distal ends microballoon and sample surfaces microballoon in AFM system, and d ' is the distance after being drifted about between AFM cantilevered distal ends microballoon and sample surfaces microballoon, dcant,driftIt is AFM cantilevered distal end microballoon drift values, dsubs,driftIt is sample surfaces microballoon drift value.
In conventional AFM system pattern detection, the sample deformation amount theory detected by AFM cantilevered distal end microballoons is, δideal=dpiezo,drive-ddef
Wherein, dpiezo,driveFor piezoelectric actuator drives AFM cantilevered distal end microballoon displacements, ddefIt is due to the displacement that sample and probe Interaction Force cause.
Due to the influence of AFM system drift, actual sample deformation amount is,
δreal=dpiezo,drive+dcant,drift-dsubs,drift-ddef
Wherein, sample surfaces drift can be according to sample surfaces microballoon position dbead2Measurement is obtained, cantilever drift dcant,driftCan be by AFM cantilevered distal end microballoons position dbead1Measurement is obtained, specifically,
dbead1=dpiezo,drive+dcant,drift-ddef
dcant,drift=dbead1-dpiezo,drive+ddef
Described piezoelectric actuator drives AFM cantilevered distal end microballoon displacements dpiezo,drive, and the displacement d caused due to sample and probe Interaction ForcedefDirectly can be measured from AFM system.
In the step 3, the microballoon position offset drift amount in real time according to measurement.By PID closed-loop controls, AFM cantilever piezotable driving voltages are adjusted according to drift value, so as to control AFM cantilevered distal end microballoons position, make between cantilevered distal end microballoon and sample surfaces microballoon distance in threshold range.

Claims (10)

1. a kind of AFM system mechanical drift compensation method of view-based access control model sensing, it is characterized in that, the visual sensing part includes an AFM cantilevered distal ends microballoon and a sample surfaces microballoon, measurement by visual sensing technology to distance between AFM cantilevered distal ends microballoon and sample surfaces microballoon, the drift value of AFM system is calculated, is comprised the following steps：
Step one, view-based access control model sensing technology calculate AFM cantilevered distal ends microballoon and sample surfaces microballoon position；
Step 2, distance change amount between the two is calculated according to cantilevered distal end microballoon and sample surfaces microballoon position, so as to obtain AFM system drift value；
Step 3, the drift value calculated according to step 2, the driving voltage of scanning platform where regulation AFM cantilevered distal ends microballoon make between AFM cantilevered distal ends microballoon and sample surfaces microballoon distance in threshold range.
2. the AFM system mechanical drift compensation method of a kind of view-based access control model sensing according to claims 1, it is characterised in that before the step one, distance threshold between setting AFM cantilevered distal ends microballoon and sample surfaces microballoon.
3. the AFM system mechanical drift compensation method of a kind of view-based access control model sensing according to claims 1, it is characterized in that, in the step 2, it is poor to cantilevered distal end microballoon and sample surfaces microballoon location variation to calculate distance change amount between cantilevered distal end microballoon and sample surfaces microballoon position, specially
ddrift=d '-d=dcant,drift-dsubs,drift
Wherein, d is initial distance between AFM cantilevered distal ends microballoon and sample surfaces microballoon in AFM system, and d ' is the distance after being drifted about between AFM cantilevered distal ends microballoon and sample surfaces microballoon, dcant,driftIt is AFM cantilevered distal end microballoon drift values, dsubs,driftIt is sample surfaces microballoon drift value.
4. the AFM cantilevered distal end microballoon drift values d according to claims 3cant,drift, it is characterised in that dcant,driftObtained by the variable quantity for measuring AFM cantilevered distal end microballoon change in location.
5. the sample surfaces microballoon drift value d according to claims 3subs,drift, it is characterised in that dsubs,driftIt is sample surfaces microballoon location variation.
6. the AFM system mechanical drift compensation method of a kind of view-based access control model sensing according to claims 1, it is characterized in that, the step 3, by PID closed-loop controls, AFM cantilever piezotable driving voltages are adjusted according to drift value, so as to control AFM cantilevered distal end microballoons position, make between cantilevered distal end microballoon and sample surfaces microballoon distance in threshold range.
7. the control AFM cantilevered distal end microballoons position according to claims 6, it is characterised in that control AFM cantilevered distal end microballoons position make its between sample surfaces microballoon distance in threshold range.
8. a kind of AFM system mechanical drift compensation method of view-based access control model sensing according to claims 1, it is characterised in that the described measurement by visual sensing technology to distance between AFM cantilevered distal ends microballoon and sample surfaces microballoon, comprises the following steps：
Step one, a series of microspheres image for gathering known positions, it is radial vector that the microspheres image of every place position is extracted into Feature Conversion, sets up the microspheres image peg model on microballoon positional information；
Microspheres image in the range of step 2, collection calibration position compares with peg model in step one, obtains microballoon position.
9. microspheres image extracts feature in the step one according to claims 8, it is characterized in that, microballoon center is determined according to gray value intensity center of gravity in image, image is considered as a series of annulus with center as the center of circle, the average value of gray value on each annulus is calculated, the average value of gray value is sequentially combined as a radial vector on a series of annulus.
10. the step two according to claims 8, it is characterised in that the microspheres image of collection is converted into radial vector, is compared with the peg model on positional information, microballoon position is positioned according to nonlinear least square method.
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CN110108904A (en) * 2019-05-15 2019-08-09 北京航空航天大学 The real-time drift compensating system of atomic force microscope and method of view-based access control model sensing
CN110631479A (en) * 2019-09-27 2019-12-31 北京航空航天大学 Spatial pose measurement method based on multi-microsphere vision probe
CN111830288A (en) * 2020-07-22 2020-10-27 合肥工业大学 Path planning method for AFM low-drift large-range scanning measurement

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Publication number Priority date Publication date Assignee Title
CN110108904A (en) * 2019-05-15 2019-08-09 北京航空航天大学 The real-time drift compensating system of atomic force microscope and method of view-based access control model sensing
CN110631479A (en) * 2019-09-27 2019-12-31 北京航空航天大学 Spatial pose measurement method based on multi-microsphere vision probe
CN111830288A (en) * 2020-07-22 2020-10-27 合肥工业大学 Path planning method for AFM low-drift large-range scanning measurement
CN111830288B (en) * 2020-07-22 2023-02-28 合肥工业大学 Path planning method for AFM low-drift large-range scanning measurement

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