CN106854758A - The method of pipeline cleaning plant and cleaning pipeline - Google Patents
The method of pipeline cleaning plant and cleaning pipeline Download PDFInfo
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- CN106854758A CN106854758A CN201510896338.4A CN201510896338A CN106854758A CN 106854758 A CN106854758 A CN 106854758A CN 201510896338 A CN201510896338 A CN 201510896338A CN 106854758 A CN106854758 A CN 106854758A
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- powder
- vacuum line
- reception pipe
- cleaning
- clearance
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Abstract
The present invention provides a kind of pipeline cleaning plant, and it includes cleaning tool, powder reception pipe and dust catcher.The present invention also provides a kind of method for clearing up pipeline, and it is comprised the steps of：(1) pump is closed, vacuum line for clearance and work table is disconnected；(2) powder reception pipe is connected in vacuum line tail end for clearance, powder reception pipe is connected to dust catcher；(3) powder on the inwall of vacuum line for clearance is made to drop in powder reception pipe using cleaning tool；(4) dust catcher is opened, the powder that will fall off in powder reception pipe is extracted out；(5) after powder is cleaned out, vacuum line is restored.Pipeline cleaning plant and its method for cleaning pipeline that the present invention is provided can effectively clear up the softer and hard powder of vacuum line inwall, and not be vacuum lines straight, with turning suitable for cleaning.
Description
Technical field
The present invention relates to a kind of pipeline cleaning plant and the method for cleaning pipeline.
Background technology
Aumospheric pressure cvd (Atmospheric Pressure Chemical Vapor Deposition,
) and plasma enhanced chemical vapor deposition (Plasma Enhance Chemical Vapor APCVD
Deposition, PECVD) applied widely in chip manufacturing field.The principle of APCVD is：
The reaction mechanism of APCVD is mainly the concentration between primary air and chip surface by reacting gas
Difference, chip surface is delivered to by reacting gas from the primary air of reactor in the way of spreading, and has one
Partial reaction gas will be attracted to chip surface, when the reactant for participating in reaction is met on surface,
By the energy of chip surface, deposition act will occur, after the completion of deposition reaction, the by-product of reaction
Thing and part have neither part nor lot in the reacting gas of reaction, will together be pulled out reative cell.APCVD can be used
To prepare usg film and bpsg film.The principle of PECVD is：Reacting gas is decomposed using radio frequency
Into ion, atom or atom base, being partially formed plasma, and plasma chemistry activity is very strong,
It is easy to react, can make to be deposited on is carried out less than in a low temperature of metal level fusing point.PECVD
Can be used to prepare PEOX, SION, PSG, SIN film.
During APCVD and PECVD, working machine is remained in due to having some powdered products
In the vacuum line of platform, after long-time is accumulated, the powder of vacuum line inwall can be vacuum line
Block.Powder blocking pipeline, can cause board vavuum pump speed of evacuation exception.Accordingly, it would be desirable in time
Cleaning vacuum line.But it is not straight due to vacuum line, from main frame you to attached machine you
Between have bent angle, whole pipeline cannot be cleaned out with hammer, with straight steel brush brush.
Further, since the difference of APCVD and PECVD principles, the work table of both types
The powder properties of vacuum line inwall also have certain difference：The powder of PECVD vacuum line inwalls
End (mainly SiO2Nx、SiO2、P2O5、SiNx:H it is) very hard, and APCVD vacuum tubes
Powder (the mainly SiO of road inwall2、P2O5、B2O3) relatively soft, adhesiveness is stronger.
The content of the invention
In order to solve the above technical problems, the present invention provides a kind of pipeline cleaning plant and a kind of cleaning pipe
The method on road, its powder that can effectively clear up vacuum line inwall.
In order to realize foregoing invention purpose, the technical solution adopted in the present invention is as follows：
According to the present invention, there is provided a kind of pipeline cleaning plant, it is used to clear up positioned at the true of work table
Powder on the inwall on blank pipe road, comprising cleaning tool, powder reception pipe and dust catcher, wherein
The cleaning tool is used to make the powder of the vacuum line inwall fall the powder reception pipe
In；
Vacuum line tail end for clearance connects the powder reception pipe, and the powder reception pipe connects institute
State dust catcher.
Further, the cleaning tool be upper end connection steel cable iron hammer and/or top and bottom all
Connect the brush of steel cable.
Further, the powder reception pipe has birdsmouth and dust suction interface, the powder reception pipe
The vacuum line tail end of the work table is connected by the birdsmouth and is connect by the dust suction
The mouth connection dust catcher.
According to the present invention, there is provided a kind of method of cleaning pipeline, it is suitable to cleaning positioned at work table
Powder on the inwall of vacuum line, it is characterised in that comprise the steps of：
(1) pump is closed, vacuum line for clearance and work table is disconnected；
(2) powder reception pipe is connected in vacuum line tail end for clearance, by the powder reception pipe
It is connected to dust catcher；
(3) drop to the powder on the inwall of the vacuum line for clearance using cleaning tool
In the powder reception pipe；
(4) dust catcher is opened, the powder that will fall off in the powder reception pipe is extracted out；
(5) after powder is cleaned out, the vacuum line is restored.
Further, the cleaning tool be upper end connection steel cable iron hammer and/or top and bottom all
Connect the brush of steel cable.
Further, the step (3) is further comprising repeatedly by the iron of the connection steel cable
Hammer into shape and throw lower from vacuum line top for clearance and retract with described for clearance by iron hammer shock
Vacuum line the inwall so that the powder on the inwall drops to the powder reception pipe
In.
Further, the step (3) further includes and puts the brush of the connection steel cable
In the vacuum line, the steel cable of the brush top and bottom is located at described treating clearly respectively
The vacuum line top of reason and tail end, by pulling the steel cable of the brush top and bottom, make institute
Brush is stated to move back and forth inside the vacuum line so that the powder on the inwall drops to institute
In stating powder reception pipe.
Further, the step (3) is further included first repeatedly by the connection steel cable
Iron hammer throw lower from vacuum line top for clearance and retract and treated with described in being clashed into by the iron hammer
The inwall of the vacuum line of cleaning is so that the powder on the inwall drops to the powder and connects
In closed tube, then the brush of the connection steel cable is placed in the vacuum line, on the brush
The steel cable of end and lower end is located at the vacuum line top for clearance and tail end respectively, passes through
Pull the steel cable of the brush top and bottom, make the brush inside the vacuum line back and forth
Movement is so that the powder on the inwall is dropped in the powder reception pipe.
Further, the step (2) further includes to connect the birdsmouth of the powder reception pipe
The vacuum line tail end for clearance is connected to, and the dust suction interface of the powder reception pipe is connected
To the dust catcher.
The beneficial effects of the invention are as follows pipeline cleaning plant and its side of cleaning pipeline that the present invention is provided
Method can effectively clear up the softer and hard powder of vacuum line inwall, and suitable for cleaning
It is not vacuum line straight, with turning.
Brief description of the drawings
Fig. 1 is the annexation schematic diagram of the work table of semi-conductor manufacturing system；
Fig. 2 is the state diagram when vacuum line of the work table of Fig. 1 is cleared up；
Reference
1 work table
2 first flexible pipes
3 vacuum lines
4 second flexible pipes
5 exhaust gas processors
6 powder reception pipes
61 birdsmouths
62 dust suction interfaces
7 cleaning tools
8 dust catchers
Specific embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with the accompanying drawings
And embodiment, the present invention will be described in further detail.It should be appreciated that described herein specific
Embodiment is only used to explain the present invention, is not intended to limit the present invention.
Fig. 1 shows the annexation schematic diagram of the work table of semi-conductor manufacturing system.Such as Fig. 1 institutes
Show, during normal work, work table 1 passes through the first flexible pipe 2, vacuum line 3, the second flexible pipe 4
Exhaust gas processor 5 is connected to, wherein the first flexible pipe 2 and the second flexible pipe 4 are detachable.
State diagram when Fig. 2 shows that the vacuum line of the work table of Fig. 1 is cleared up.
With reference to the detailed process of Fig. 1 and Fig. 2 description cleaning pipelines.When vacuum line 3 needs clearly
During reason, proceed as follows：The first step, closes pump (not shown in fig 1 and 2), removes the
One flexible pipe 2 and the second flexible pipe 4, by vacuum line 3 for clearance and work table 1 and exhaust-gas treatment
Machine 5 disconnects.In addition, because the cleaning pipeline time is more long, it is stuck in order to prevent pump from shutting down for a long time, need
Pump is opened manually, pump is dallied.Second step, for the powder for preventing from being fallen down after cleaning
Cause (not shown in fig 1 and 2) alarm of dust detector, in the tail of vacuum line 3 for clearance
Portion connects powder reception pipe 6, the powder for falling down all is stayed in powder reception pipe 6.Powder
Reception pipe 6 has birdsmouth 61 and dust suction interface 62, and powder reception pipe 6 is connected by birdsmouth 61
To the tail end of vacuum line 3 for clearance, and dust catcher 8 is connected to by dust suction interface 62.3rd
Step, is made the powder on the inwall of vacuum line 3 for clearance drop to powder using cleaning tool 7 and connect
In closed tube 6；4th step, opens dust catcher 8, and the powder that will fall off in powder reception pipe 6 is suctioned out,
Wherein dust suction interface is 2 cun of interfaces；5th step, after powder is cleaned out, connects the first flexible pipe again
2 and second flexible pipe 4, the pipeline of PECVD workbench is restored.
Embodiment 1
According to an aspect of the invention, there is provided a kind of cleaning pipeline inner wall that is suitable to contains hard powder
The pipeline cleaning plant and method for cleaning at end.Illustrated as a example by clearing up PECVD work tables.
When the vacuum line 3 of PECVD work tables needs cleaning, the specific steps of the 3rd step are such as
Under：By steel cable connection iron hammer composition cleaning tool 7, iron hammer is pushed up from vacuum line 3 for clearance
Under end inwall is thrown, steel cable one end is located at vacuum line top for clearance, gravity of the iron hammer at itself
The inwall of vacuum line 3 for clearance is clashed into in the presence of throwing power, so that vacuum line for clearance
Powder on 3 inwall is dropped in powder reception pipe 6, when iron hammer falls vacuum line for clearance
Tail end when, iron hammer is withdrawn into by the steel cable positioned at vacuum line top for clearance for clearance
Vacuum line top, again throw under, retract, aforesaid operations are repeated, until vacuum line
The powder of inwall is pounded down completely.Because steel cable can bend, therefore can preferably clear up vacuum
Turning in pipeline 3.
The pipeline cleaning plant and method for cleaning that the present invention is provided can effectively clear up vacuum line
The hard powder of inwall, and be not vacuum line straight, with turning suitable for cleaning.
Embodiment 2
According to another aspect of the present invention, there is provided one kind is suitable to cleaning pipeline inner wall and contains adhesiveness
The pipeline cleaning plant and method for cleaning of stronger softer powder.To clear up APCVD working machines
Illustrated as a example by platform.
When the Severe blockage of vacuum line 3 of APCVD work tables needs cleaning, the tool of the 3rd step
Body step is as follows：First, by steel cable connection iron hammer composition cleaning tool 7, by iron hammer from for clearance
The top inwall of vacuum line 3 throw under, steel cable one end is located at vacuum line top for clearance, iron
Hammer clashes into the inwall of vacuum line 3 for clearance in the gravity of itself and in the presence of throwing power, so that treating
Powder on the inwall of the vacuum line 3 of cleaning is dropped in powder reception pipe 6, is fallen when iron hammer and treated
During the tail end of the vacuum line of cleaning, by the steel cable positioned at vacuum line top for clearance by iron
Hammer is withdrawn into the top of vacuum line for clearance, under throwing again, retracts, and aforesaid operations are repeated,
Until the powder of vacuum line inwall is pounded down completely substantially.Then, distinguish in brush top and bottom
Steel cable is connected to constitute cleaning tool 7.Brush is placed in vacuum line 3 for clearance, makes brush
The steel cable of sub- upper end is located at vacuum line top for clearance, and the steel cable of brush lower end connects from powder
The dust suction interface 62 of closed tube 6 stretches out, and by pulling the steel cable of top and bottom, is treating brush
Move back and forth up and down in the vacuum line 3 of cleaning, so that on the inwall of vacuum line 3 for clearance
Powder drop in powder reception pipe 6.Because steel cable can bend, therefore can be preferably clear
Turning in reason vacuum line 3.
The pipeline cleaning plant and method for cleaning that the present invention is provided can effectively clear up vacuum line
The stronger softer powder of the adhesiveness of inwall, and be not straight, with turning suitable for cleaning
Vacuum line.
Embodiment 3
According to another aspect of the present invention, there is provided one kind is suitable to cleaning pipeline inner wall and contains adhesiveness
The pipeline cleaning plant and method for cleaning of stronger softer powder.To clear up APCVD working machines
Illustrated as a example by platform.
When the vacuum line 3 of APCVD work tables is slightly blocked needs cleaning, the tool of the 3rd step
Body step is as follows：Connect steel cable respectively to constitute cleaning tool 7 in brush top and bottom.Will brush
Son is placed in vacuum line 3 for clearance, the steel cable of brush upper end is located at vacuum tube for clearance
Road top, the steel cable of brush lower end stretches out from the dust suction interface 62 of powder reception pipe 6, by drawing
The steel cable of dynamic top and bottom, makes brush move back and forth up and down in vacuum line 3 for clearance,
So that the powder on the inwall of vacuum line 3 for clearance is dropped in powder reception pipe 6.Due to
Steel cable can bend, therefore the turning that can preferably clear up in vacuum line 3.
The pipeline cleaning plant and method for cleaning that the present invention is provided can effectively clear up vacuum line
The stronger softer powder of the adhesiveness of inwall, and be not straight, with turning suitable for cleaning
Vacuum line.
Embodiment described above only expresses embodiments of the present invention, and its description is more specific and detailed
Carefully, but can not therefore and be interpreted as the limitation to the scope of the claims of the present invention.It should be pointed out that right
For one of ordinary skill in the art, without departing from the inventive concept of the premise, can also do
Go out some deformations and improvement, these belong to protection scope of the present invention.Therefore, patent of the present invention
Protection domain should be determined by the appended claims.
Claims (9)
1. a kind of pipeline cleaning plant, its inwall for being used to clear up the vacuum line positioned at work table
Powder, it is characterised in that comprising cleaning tool, powder reception pipe and dust catcher, wherein
The cleaning tool is used to make the powder of the vacuum line inwall fall the powder reception pipe
In；
Vacuum line tail end for clearance connects the powder reception pipe, and the powder reception pipe connects institute
State dust catcher.
2. pipeline cleaning plant according to claim 1, it is characterised in that the cleaning tool
It is that upper end connects the iron hammer of steel cable and/or top and bottom all connect the brush of steel cable.
3. pipeline cleaning plant according to claim 1 and 2, it is characterised in that the powder
Reception pipe has birdsmouth and dust suction interface, and the powder reception pipe connects described by the birdsmouth
The vacuum line tail end of work table and the dust catcher is connected by the dust suction interface.
4. it is a kind of clear up pipeline method, its be suitable to cleaning positioned at work table vacuum line inwall
On powder, it is characterised in that comprise the steps of：
(1) pump is closed, vacuum line for clearance and work table is disconnected；
(2) powder reception pipe is connected in vacuum line tail end for clearance, by the powder reception pipe
It is connected to dust catcher；
(3) drop to the powder on the inwall of the vacuum line for clearance using cleaning tool
In the powder reception pipe；
(4) dust catcher is opened, the powder that will fall off in the powder reception pipe is extracted out；
(5) after powder is cleaned out, the vacuum line is restored.
5. it is according to claim 4 cleaning pipeline method, it is characterised in that the fettler
Tool is the brush that the iron hammer of upper end connection steel cable and/or top and bottom all connect steel cable.
6. it is according to claim 5 cleaning pipeline method, it is characterised in that the step (3)
Further comprising repeatedly by the iron hammer of the connection steel cable under vacuum line top throwing for clearance
With retract the inwall to clash into the vacuum line for clearance by the iron hammer so that institute
The powder on inwall is stated to drop in the powder reception pipe.
7. it is according to claim 5 cleaning pipeline method, it is characterised in that the step (3)
Further include and the brush of the connection steel cable is placed in the vacuum line, the brush upper end
The vacuum line top for clearance and tail end are located at respectively with the steel cable of lower end, by drawing
The steel cable of the brush top and bottom is moved, makes the brush inside the vacuum line to move back
Move so that the powder on the inwall is dropped in the powder reception pipe.
8. it is according to claim 5 cleaning pipeline method, it is characterised in that the step (3)
Further comprising first repeatedly by the iron hammer of the connection steel cable from vacuum line top for clearance
Throw it is lower and retract with the inwall of the vacuum line for clearance is clashed into by the iron hammer so as to
The powder on the inwall is set to drop in the powder reception pipe, then by the connection steel cable
Brush is placed in the vacuum line, and the steel cable of the brush top and bottom is located at institute respectively
Vacuum line top and tail end for clearance is stated, by the wirerope for pulling the brush top and bottom
Rope, makes the brush move back and forth inside the vacuum line so that the powder on the inwall falls
In falling the powder reception pipe.
9. according to any one of claim 4-8 cleaning pipeline method, it is characterised in that
The step (2) further includes to be connected to the birdsmouth of the powder reception pipe described for clearance
Vacuum line tail end, and the dust suction interface of the powder reception pipe is connected to the dust catcher.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510896338.4A CN106854758A (en) | 2015-12-08 | 2015-12-08 | The method of pipeline cleaning plant and cleaning pipeline |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510896338.4A CN106854758A (en) | 2015-12-08 | 2015-12-08 | The method of pipeline cleaning plant and cleaning pipeline |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106854758A true CN106854758A (en) | 2017-06-16 |
Family
ID=59131732
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510896338.4A Pending CN106854758A (en) | 2015-12-08 | 2015-12-08 | The method of pipeline cleaning plant and cleaning pipeline |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106854758A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1882398A (en) * | 2003-11-17 | 2006-12-20 | 英国氧气集团有限公司 | Exhaust gas treatment |
| US20070089253A1 (en) * | 2005-10-26 | 2007-04-26 | Cree, Inc. | Methods and apparatus for reducing buildup of deposits in semiconductor processing equipment |
| CN201676859U (en) * | 2010-05-21 | 2010-12-22 | 北京京东方光电科技有限公司 | Vacuum line cleaning device and system |
| CN204294587U (en) * | 2014-07-24 | 2015-04-29 | 中华映管股份有限公司 | Cleaning equipment of vertical type pipeline and cutting jig thereof |
-
2015
- 2015-12-08 CN CN201510896338.4A patent/CN106854758A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1882398A (en) * | 2003-11-17 | 2006-12-20 | 英国氧气集团有限公司 | Exhaust gas treatment |
| US20070089253A1 (en) * | 2005-10-26 | 2007-04-26 | Cree, Inc. | Methods and apparatus for reducing buildup of deposits in semiconductor processing equipment |
| CN201676859U (en) * | 2010-05-21 | 2010-12-22 | 北京京东方光电科技有限公司 | Vacuum line cleaning device and system |
| CN204294587U (en) * | 2014-07-24 | 2015-04-29 | 中华映管股份有限公司 | Cleaning equipment of vertical type pipeline and cutting jig thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170616 |
|
| RJ01 | Rejection of invention patent application after publication |