CN106848086B - Organic Light Emitting Diode and preparation method thereof, display device - Google Patents

Organic Light Emitting Diode and preparation method thereof, display device Download PDF

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Publication number
CN106848086B
CN106848086B CN201710262182.3A CN201710262182A CN106848086B CN 106848086 B CN106848086 B CN 106848086B CN 201710262182 A CN201710262182 A CN 201710262182A CN 106848086 B CN106848086 B CN 106848086B
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layer
planarization layer
electrode
hole
electrode layer
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CN106848086A (en
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张建业
李伟
孙宏达
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BOE Technology Group Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The present invention relates to a kind of Organic Light Emitting Diode (OLED) and its manufacturing method and a kind of display devices including the OLED.The OLED includes:Substrate;Planarization layer is formed on the substrate;First electrode layer is formed on the planarization layer;Organic luminous layer is formed in the first electrode layer;And the second electrode lay, it is formed on the organic luminous layer, wherein the part at the edge corresponding to the planarization layer of the first electrode layer has through-hole.The present invention is capable of providing a kind of structure of dark trepanning, can efficiently solve the case where inside contracting, and will not increase the process complexity in manufacturing process.

Description

Organic Light Emitting Diode and preparation method thereof, display device
Technical field
The present invention relates to display technology field, more specifically to a kind of Organic Light Emitting Diode and preparation method thereof, And the display device including the Organic Light Emitting Diode.
Background technology
During preparing Organic Light Emitting Diode (OLED) display device, in order to reduce cost and improve production effect Rate includes usually test technology several times in preparation process.
Wherein, life test unit LTC (Life Test Cell) structure as effective means of testing, can be very good Verify the tests such as subsequent cell experiment and the luminescent lifetime of OLED, and whole product flow (EN, i.e. Evaluation Notice) test evaluation.Therefore, include to prepare that there is LTC structures in the manufacturing process of many OLED displays The step of backboard.The LTC structures that etching stopping layer ESL (Etch Stop Layer) fabric backplanes are arranged in pairs or groups at present are subsequent It is susceptible to light-emitting zone in reliability evaluation (RA, i.e. reliability test) and inside contracts serious phenomenon, to influence to produce Product yield.
Invention content
In order to solve defect existing in the prior art, each aspect of the present invention provide a kind of Organic Light Emitting Diode and Preparation method, and the display device including the Organic Light Emitting Diode.
According to an aspect of the present invention, a kind of Organic Light Emitting Diode (OLED) includes:Substrate;Planarization layer is formed in In the substrate;First electrode layer is formed on the planarization layer;Organic luminous layer is formed in the first electrode layer; And the second electrode lay, it is formed on the organic luminous layer, wherein the first electrode layer corresponds to the planarization layer Edge part have through-hole, the position of the through-hole in the plan view is located in the region other than the organic luminous layer.
Optionally, the slope angle of the marginal portion of the planarization layer is less than or equal to 45 degree.
Optionally, the planarization layer includes silicon-based resin material.
Optionally, the thickness of the planarization layer is 1.5 μm to 2.5 μm.
Optionally, Organic Light Emitting Diode further includes:Pixel confining layer is formed in the second electrode lay and described first Between electrode layer, and surround the organic luminous layer.
According to another aspect of the present invention, a kind of display device, including:Display panel, including according to of the invention arbitrary real Apply the Organic Light Emitting Diode (OLED) described in example;Scanner driver provides scanning signal to the display panel;And data Driver provides data-signal to the display panel.
According to another aspect of the invention, a method of Organic Light Emitting Diode is prepared, including:It is formed in substrate flat Smoothization layer;First electrode layer is formed on the planarization layer;Correspond to the planarization layer in the first electrode layer The part at edge forms through-hole;Organic luminous layer is formed in the first electrode layer;Is formed on the organic luminous layer Two electrode layers, wherein the through-hole be formed so that the position of the through-hole in the plan view be located at the organic luminous layer with In outer region.
Optionally, the slope angle of the marginal portion of the planarization layer is less than or equal to 45 degree.
Optionally, the planarization layer includes silicon-based resin material, and thickness is 1.5 μm to 2.5 μm.
Optionally, this method further includes:Before forming the organic luminous layer, pixel limit is formed in first electrode layer Given layer, the organic luminous layer are formed in the pixel confining layer.
OLED according to the present invention includes:Substrate;Planarization layer is formed on the substrate;First electrode layer is formed in On the planarization layer;Organic luminous layer is formed in the first electrode layer;The second electrode lay is formed in organic hair On photosphere, wherein the part at the edge corresponding to the planarization layer of the first electrode layer has through-hole.Therefore, it is possible to A kind of structure of dark trepanning is provided, the case where inside contracting can be efficiently solved, and it is multiple to increase the technique in manufacturing process Miscellaneous degree.
Description of the drawings
Attached drawing is to be used to provide further understanding of the present invention, an and part for constitution instruction, with following tool Body embodiment is used to explain the present invention together, but is not construed as limiting the invention.In the accompanying drawings:
Fig. 1 is the schematic cross sectional views according to the OLED of a comparative example of the invention;
Fig. 2 is the schematic cross sectional views of OLED according to an embodiment of the invention;
Fig. 3 to Fig. 7 is the schematic cross sectional views in each stage in the preparation method of OLED according to an embodiment of the present invention.
Specific implementation mode
To make those skilled in the art more fully understand the technical solution of the disclosure, below in conjunction with the accompanying drawings and it is embodied A kind of Organic Light Emitting Diode and preparation method thereof that mode provides the disclosure, and including the Organic Light Emitting Diode Display device is described in further detail.
Fig. 1 is the schematic cross sectional views according to the OLED of a comparative example of the invention.Referring to Fig.1, according to one of the invention The OLED 100 of comparative example includes:Substrate 110;Planarization layer 120 is formed in the substrate 110;First electrode layer 130, shape At on the planarization layer 120;Organic luminous layer 140 is formed in the first electrode layer 130;The second electrode lay 150, It is formed on the organic luminous layer 140.
As shown in Figure 1, LTC structures can be formed according to the OLED of the comparative example, therefore LTC can be carried out on this basis Test.
In addition, as shown in fig. 1, which can also include pixel confining layer 160, second electricity can be formed in Between pole layer 150 and the first electrode layer 130, and surround the organic luminous layer 140.Pixel confining layer 160 can be used In the light-emitting zone for limiting OLED.That is, could be formed with organic luminous layer 140 by the region that pixel confining layer 160 surrounds, therefore Corresponding to the light-emitting zone of the OLED.
Fig. 2 is the schematic cross sectional views of OLED according to an embodiment of the invention.With reference to Fig. 2, according to one of the invention The OLED 200 of comparative example includes:Substrate 210;Planarization layer 220 is formed in the substrate 210;First electrode layer 230, shape At on the planarization layer 220;Organic luminous layer 240 is formed in the first electrode layer 230;The second electrode lay 250, It is formed on the organic luminous layer 240.As shown in Fig. 2, the OLED 100 of OLED 200 and comparative example according to the present invention it Between difference essentially consist in:The part at the edge corresponding to the planarization layer 220 of the first electrode layer 230 has through-hole 235。
Through-hole 235 is formed in the marginal portion of planarization layer 220, therefore on the one hand can be formed in LTC structures dark On the other hand trepanning can avoid trepanning from generating destruction to the luminous zone of LTC to solve the problems, such as that light emitting structure inside contracts.
In addition, through-hole 235 is formed in the marginal portion of planarization layer 220, therefore, when observation in the plan view is (that is, edge Direction observation in Fig. 2 from the top down) when, the position of through-hole 235 is located in the region other than organic luminous layer 240.
In one embodiment of the invention, the slope angle of the marginal portion of planarization layer 220 is less than or equal to 45 degree.By Slope angle in the marginal portion of planarization layer is smaller (for example, being less than 45 degree), therefore can obtain longer slope surface.Such as Fig. 2 institutes Show, the slope angle of the marginal portion of planarization layer 220 indicates between the inclined marginal portion of planarization layer and bottom surface place plane Angle.In this case, it can aid in formation through-hole 235 in the first electrode layer 230 corresponding to the marginal portion.
In a preferred embodiment, planarization layer 220 can be formed by resin material.It is, for example, possible to use silicon substrate tree Fat material is forming planarization layer 220.Compared with planarization layer material (such as JEM608) commonly used in the prior art, use The planarization layer that silicon-based resin material is formed can be more easily formed smaller slope angle, for example, can be more easily formed small In or equal to 45 degree of slope angle.
More specifically, in one embodiment, planarization layer 220 is formed with about 2 μm of thickness.In this feelings Under condition, the technological parameter of planarization layer 220 is formed by adjusting, such as adjusts ultraviolet bleaching (UV bleaching) parameter, it can Easily the slope angle of silicone layer to be formed as in the range of 26 degree to 88 degree.In contrast, for example traditional In the case of JEM608, when planarization layer 220 being equally formed with about 2 μm of thickness, by adjusting technological parameter, The slope angle of planarization layer 220 can be only formed as in the range of 40 degree to 88 degree.
Therefore, according to this embodiment, planarization layer 220 is formed using silicone, slope angle can be more easily formed Planarization layer less than or equal to 45 degree.
Although it should be noted that form the planarization layer 220 that thickness is about 2 μm in the above-described embodiments, The invention is not limited thereto, and the thickness of planarization layer can change according to actual needs.For example, other implementations according to the present invention Example, planarization layer 220 can be with about 1.5 μm to about 2.5 μm of thickness.
In addition, as shown in Figure 2, OLED 200 can also include pixel confining layer 260, can be formed in described second Between electrode layer 250 and the first electrode layer 230, and surround the organic luminous layer 240.Pixel confining layer 260 can be with Light-emitting zone for limiting OLED.That is, organic luminous layer 240 could be formed with by the region that pixel confining layer 260 surrounds, because This corresponds to the light-emitting zone of the OLED.
According to another embodiment of the present invention, OLED 200 can be formed on Organic Light Emitting Diode (OLED) display In device.Specifically, in this embodiment, OLED display may include:Display panel, including such as aforementioned arbitrary implementation OLED described in example;Scanner driver provides scanning signal to display panel;And data driver, it is provided to display panel Data-signal.
In this embodiment, OLED display may include various types of OLED displays, such as FPD Device, flexible display apparatus etc..And the OLED display can be integrated into having in other devices and show image The component or submodule of function.For example, the OLED display can be such as display, television set, mobile phone, notebook The various display devices such as computer, e-book, tablet computer, smartwatch, wearable device, VR equipment.
Describe the preparation method of OLED 200 according to the ... of the embodiment of the present invention in detail below with reference to Fig. 3 to Fig. 7.Fig. 3 It is the schematic cross sectional views in each stage in the preparation method of OLED according to an embodiment of the present invention to Fig. 7.
With reference to Fig. 3, first, planarization layer 220 is formed in substrate 210.
Substrate 210 can be substrate, such as substrate of glass, plastic-substrates, flexible substrates etc. commonly used in the art, substrate Silica (SiOx), silicon nitride (SiNx) etc. can be utilized to form passivation layer on 210, however the invention is not limited thereto.Base Bottom 210 can also be the underlying structure for including other structures, for example, substrate 210 can also include being formed with the circuits knot such as TFT The array substrate of structure could be formed with passivation layer so that TFT structure is separated with OLED on TFT circuit structures.Correspondingly, base It can also include other circuit structures or board structure in bottom 210, will not be described in detail further herein.
The slope angle of the marginal portion of planarization layer 220 is less than or equal to 45 degree.In a preferred embodiment, planarization layer 220 can be formed by resin material.It is, for example, possible to use silicon-based resin material is forming planarization layer 220.With in the prior art Common planarization layer material (such as JEM608) is compared, and the planarization layer formed using silicon-based resin material can be more easily Smaller slope angle is formed, for example, the slope angle less than or equal to 45 degree can be more easily formed.
The more specific description of planarization layer 220 can participate in retouching to planarization layer 220 in the embodiment with reference to Fig. 2 It states, therefore will not be repeated again herein.
With reference to Fig. 4, first electrode layer 230 is formed in substrate 210 and planarization layer 220.First electrode layer 230 can be by Transparent conductive oxide (TCO) formed, it is, for example, possible to use tin indium oxide (ITO) forms first electrode layer 230.However The invention is not limited thereto, and other common electrode materials can also be used to form first electrode layer 230.
With reference to Fig. 5, through-hole is formed in the part at the edge corresponding to the planarization layer 220 of first electrode layer 230 235.Through-hole 235 is formed in the marginal portion of planarization layer 220, therefore dark trepanning on the one hand can be formed in LTC structures, To solve the problems, such as that light emitting structure inside contracts, trepanning on the other hand can be avoided to generate destruction to the luminous zone of LTC.
In addition, through-hole 235 is formed in the marginal portion of planarization layer 220, therefore, when observation in the plan view is (that is, edge Direction observation in Fig. 5 from the top down) when, the position of through-hole 235 be located at organic luminous layer (will be formed in subsequent step) with In outer region.
Through-hole 235 can be formed by different methods.For example, in one embodiment, can be formed using photoetching process Through-hole 2 35.Specifically, then photomask can be utilized to photic by coating photoresist in first electrode layer 230 Resist is exposed, develop after, form the photoengraving pattern corresponding to through-hole 2 35.Then, first electrode layer 230 is lost It carves, to remove the part corresponding to through-hole 2 35 of first electrode layer 230, first through hole is formed in first electrode layer 230 235.It should be appreciated that above-mentioned photoetching process can be the photoetching process being individually performed, can also be the work with the other patterns of formation The photoetching process executed together during skill.
In addition, in another embodiment, through-hole 2 35 can also be formed using other techniques.For example, forming the After one electrode layer 230, can remove first electrode layer 230 using techniques such as laser cuttings corresponds to through-hole 235 Part, to form through-hole 235 in first electrode layer 230.
Although it will be appreciated by those skilled in the art that illustrating only two through-holes 235 in attached drawing, the present invention is simultaneously unlimited The quantity of through-hole 235 processed as needed, can also form 1 or more through-hole 235 in other embodiments.
Optionally, with reference to Fig. 5, pixel confining layer 260 can be formed in first electrode layer 230, pixel confining layer 260 can For limiting the light-emitting zone of OLED.That is, organic luminous layer could be formed with by the region that pixel confining layer 260 surrounds, because This corresponds to the light-emitting zone of the OLED.In addition, as shown in figure 5, when forming pixel confining layer 260 after forming through-hole 235 When, the material of pixel confining layer 260 can be filled into through-hole 235.It will be appreciated by those skilled in the art that pixel confining layer 260 are not essential, and other embodiments according to the present invention can not also form pixel confining layer 260.
With reference to Fig. 6, organic luminous layer 240 is formed in first electrode layer 230.Organic luminous layer 240 includes organic light emission Material, when voltage is applied to organic luminous layer 240, organic luminous layer can send out the light with specific wavelength.It can lead to The mode for crossing vapor deposition forms organic luminous layer 240 in first electrode layer 230, however the invention is not limited thereto.
As shown in Figure 6, when being formed with pixel confining layer 260 in first electrode layer 230, organic luminous layer 240 can be with It is formed in the region surrounded by pixel confining layer 260, to form the light-emitting zone of the OLED.
With reference to Fig. 7, the second electrode lay 250 is formed on organic luminous layer 240.As shown in fig. 7, through the above steps, shape At the OLED with LTC structures, therefore the OLED can be tested in LTC tests.
Although in addition, it will be appreciated by those skilled in the art that not being expressly recited in the present invention, for LTC test conjunctions The OLED 200 of lattice may also pass through the techniques such as encapsulation and be ultimately formed into the product that can be dispatched from the factory.
It should be noted that OLED according to the ... of the embodiment of the present invention and its preparation has been described in detail with reference to the appended drawings Method and display device including the OLED, however the concrete structure of the OLED of the present invention is not limited to specifically show in attached drawing The structure gone out, those skilled in the art according to actual needs, can be in the range of present inventive concepts to the concrete structure of OLED And the specific implementation of preparation method is adjusted.Therefore, attached drawing is only exemplary, and is not intended in any way Limit the specific implementation of the present invention.
According to the present invention, a kind of OLED is provided, including:Substrate;Planarization layer is formed on the substrate;First electricity Pole layer, is formed on the planarization layer;Organic luminous layer is formed in the first electrode layer;The second electrode lay is formed in On the organic luminous layer, wherein the part at the edge corresponding to the planarization layer of the first electrode layer has through-hole. Therefore, it is possible to provide a kind of structure of dark trepanning, the case where inside contracting can be efficiently solved, and will not increase in manufacturing process Process complexity.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses Mode, however the present invention is not limited thereto.For those skilled in the art, in the essence for not departing from the present invention In the case of refreshing and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.

Claims (8)

1. a kind of Organic Light Emitting Diode, including:
Substrate;
Planarization layer is formed on the substrate;
First electrode layer is formed on the planarization layer;
Organic luminous layer is formed in the first electrode layer;And
The second electrode lay is formed on the organic luminous layer,
Wherein, the part at the edge corresponding to the planarization layer of the first electrode layer has through-hole, and the through-hole is flat Position in the figure of face is located in the region other than the organic luminous layer,
Wherein, the slope angle of the marginal portion of the planarization layer is less than or equal to 45 degree, and the through-hole is formed in the slope angle In first electrode layer in slope surface.
2. Organic Light Emitting Diode according to claim 1, wherein the planarization layer includes silicon-based resin material.
3. Organic Light Emitting Diode according to claim 2, wherein the thickness of the planarization layer is 1.5 μm to 2.5 μ m。
4. Organic Light Emitting Diode according to claim 1, further includes:
Pixel confining layer is formed between the second electrode lay and the first electrode layer, and surrounds the organic light emission Layer.
5. a kind of display device, including:
Display panel includes the Organic Light Emitting Diode according to any one of claim 1-4;
Scanner driver provides scanning signal to the display panel;And
Data driver provides data-signal to the display panel.
6. a kind of method preparing Organic Light Emitting Diode, including:
Planarization layer is formed in substrate;
First electrode layer is formed on the planarization layer;
Through-hole is formed in the part at the edge corresponding to the planarization layer of the first electrode layer;
Organic luminous layer is formed in the first electrode layer;
The second electrode lay is formed on the organic luminous layer,
Wherein, the through-hole is formed so that the area that the position of the through-hole in the plan view is located at other than the organic luminous layer In domain,
Wherein, the slope angle of the marginal portion of the planarization layer is less than or equal to 45 degree, and the through-hole is formed in the slope angle In first electrode layer in slope surface.
7. according to the method described in claim 6, wherein, the planarization layer includes silicon-based resin material, and thickness is 1.5 μm To 2.5 μm.
8. according to the method described in claim 6, further including:
Before forming the organic luminous layer, pixel confining layer is formed in first electrode layer, the organic luminous layer is formed In the pixel confining layer.
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