CN106842828B - A kind of fixed device of optical tunnel - Google Patents
A kind of fixed device of optical tunnel Download PDFInfo
- Publication number
- CN106842828B CN106842828B CN201710217092.2A CN201710217092A CN106842828B CN 106842828 B CN106842828 B CN 106842828B CN 201710217092 A CN201710217092 A CN 201710217092A CN 106842828 B CN106842828 B CN 106842828B
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- China
- Prior art keywords
- hole
- optical tunnel
- contact
- fixed device
- supported hole
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
- Light Guides In General And Applications Therefor (AREA)
Abstract
The invention discloses a kind of fixed devices of optical tunnel, belong to direct write exposure machine technical field.The fixed device of the optical tunnel includes the soft supporter for offering through-hole, and the soft supporter hardness is shore hardness 50-80；Whole length or partial-length are cylindrical contact supported hole to the through-hole in the axial direction, and the aperture of the contact supported hole, which is less than, installs fixed optical tunnel cross section circumscribed circle diameter.The present invention solve the installation of prior art optical tunnel it is fixed when easily there is light leakage, lead to that light passing rate is low, optical uniformity is poor, optical tunnel damage easily occur when also solving the problems, such as in the prior art using rigidity installation.
Description
Technical field
The present invention relates to a kind of fixed devices of optical tunnel, belong to direct write exposure machine technical field.
Background technique
Optical tunnel is a kind of optical glass device of rectangular section, and effect is the total reflection principle using light, and light is in light
Passing through multiple reflections inside stick, every secondary reflection can all form virtual light source picture, and multiple reflections form two-dimensional virtual light source matrix,
So that light is more uniform, make the light by itself, achievees the effect that homogenization in exit.
Optical tunnel is a kind of small-sized, frangible glass devices, and due to the limitation of its working principle, it is desirable that when work its
As much as possible therefore ingress of air, has on the installation of optical tunnel is fixed and specifically wants to obtain maximum light passing rate for side
It asks, has not only required the mounting stability of optical tunnel, but also its installation fixation is required to be not easy to damage optical tunnel, more require optical tunnel
It is as small as possible with the contact area of fixed device, to reduce light leakage, propose high energy light rate.
The mounting means of the optical tunnel of the prior art is mostly that screw briquetting is used to fix, fixed device and optical tunnel contact surface
Compare it is more, in use, due to optical tunnel four sides and feature contacts position it is more, light is unable to shape on the contact surface
At total reflection, even light effect is not only influenced, and cause optical energy loss；It is rigid contact between fixed device and optical tunnel,
During the work time, since optical tunnel and fixed device receive laser irradiation for a long time, temperature, which has, largely to be changed,
In the case where expanding with heat and contract with cold, very big stress can be generated between fixed device and optical tunnel, be easy to cause the damage of optical tunnel；
Screw installation torque is not easily controlled, and be easy to cause optical tunnel to damage, even light action just fails.
Therefore, it is necessary to develop a kind of new technology, to solve problems of the prior art.
Summary of the invention
To solve the above-mentioned problems, the present invention provides a kind of fixed device of optical tunnel, the fixed device packets of the optical tunnel
The soft supporter for offering through-hole is included, the soft supporter hardness is shore hardness 50-80；The through-hole is in the axial direction
On be all or part of cylindrical contact supported hole, contact supported hole, which plays optical tunnel, directly supports fixed function, described
The aperture of contact supported hole, which is less than, installs fixed optical tunnel cross section circumscribed circle diameter.
In one embodiment of the invention, it is described contact supported hole aperture by installation fixation optical tunnel it is transversal
0.99-0.995 times of face circumscribed circle diameter.
In one embodiment of the invention, the area of space of the through-hole includes whole space regions of contact supported hole
The whole in domain and the wider space region in through-hole length range in the axial direction of contact supported hole.
In one embodiment of the invention, the length of the through-hole is equal to the length of optical tunnel, the contact support
The one or both ends in hole are provided with orifice chamfer, and the chamfer angle is 30 ° -45 °.
In one embodiment of the invention, the soft supporter includes 1 through-hole, be provided in through-hole 1 or
Multiple contact supported holes, for the interior contact supported hole of the through-hole with outer portion for non-contact hole, the non-contact hole is cylindrical hole,
Coaxial with contact supported hole, aperture, which is greater than, installs fixed optical tunnel cross section circumscribed circle diameter.
In one embodiment of the invention, the soft supporter is cylindrical body, and through-hole is located in soft supporter
The heart, the contact supported hole in through-hole are coaxial with soft supporter；The soft supporter cross circular section diameter is contact supported hole
2-3 times of aperture.
In one embodiment of the invention, the fixed device of the optical tunnel further includes external support structure, outside branch
Support structure material is hard material, such as aluminium alloy, stainless steel；The soft supporter is located inside external support structure.
In one embodiment of the invention, the external support structure is cylindrical body, and soft supporter is connected to outer
It is coaxial with external support structure in portion's support construction；
In one embodiment of the invention, the connection type of the external support structure and soft supporter is to inlay
Connection, threaded connection or flanged joint.
In one embodiment of the invention, connecting flange is provided on the external support structure.
In one embodiment of the invention, the material of the soft supporter is poly- four that shore hardness is 55-65
Vinyl fluoride.
In one embodiment of the invention, the through-hole both ends are contact supported hole, middle section is non-contact hole.
In one embodiment of the invention, it is contact supported hole, the non-contact hole of the other end that the through-hole, which is one end,.
In one embodiment of the invention, the contact supported hole aperture is is installed outside fixed optical tunnel cross section
Connect 0.993 times of circular diameter.
In one embodiment of the invention, the round degree in section of the contact supported hole is not more than 2, the contact branch
The verticality for supportting hole is less than 0.05mm.
Advantages of the present invention and effect:
The fixed device of a kind of optical tunnel provided by the invention:
1, at work, optical tunnel pushes away the fixed device of optical tunnel of the invention along the contact supported hole of soft supporter through-hole
Enter, since contact support bore dia is slightly less than optical tunnel cross section circumscribed circle diameter, and soft material is under external force, has
Naturally the characteristic sprung back, so optical tunnel is embedded just；The shore hardness of soft supporter is 50-80, especially Shao
When family name's hardness is the polytetrafluoroethylene material of 55-65, both guaranteed that material there are enough strength support optical tunnels, and be allowed to be fixed on spy
Fixed position, and optical tunnel will not be damaged under stress.
2, the contact supported hole of the fixed device of optical tunnel is designed using circular hole, is connect so that optical tunnel is located exactly in insertion
Touch supported hole center, it is ensured that optical tunnel installs accurate positioning；After optical tunnel insertion, the contact surface with fixed device is only four ribs
Angle, 99% or more area of optical tunnel are directly contacted with air, and light is not easy to leak, and light passing rate is up to 95% or more, while illumination is equal
3%-5% can be improved in evenness.
3, the experimental results showed that, contact support bore dia be installation fixation optical tunnel cross section circumscribed circle diameter
At 0.99-0.995 times, installation effect is best, has not only guaranteed the stability of optical tunnel, but also can obtain biggish air contact surfaces
Product, and install easy to operate.
4, the angled orifice chamfer for being 30 ° -45 °, this chamfering angle is arranged in the contact supported hole of the fixed device of optical tunnel
Degree is not only more easier the push-in of optical tunnel, but also since shape limits, optical tunnel is slided into automatically in push-on process and connect
The middle position for touching supported hole, ensure that the accuracy of installation.
5, external support structure is set as the hard materials such as aluminium alloy, is unlikely to deform, and plays packet to internal soft supporter
The connection support for wrapping up in formula, can be connected and fixed outside by flange and relevant device.
6, through-hole uses partial-length when for contact supported hole, other parts being the design of non-contact hole, and optical tunnel is entire
In length, only partial-length and soft supporter have contact, and most of length is directly vacantly to contact with air, further
The air contact area of optical tunnel is improved, light leakage is reduced, improves passband and optical uniformity.
7, soft supporter cross circular section diameter is 2-3 times of supported hole aperture of contact, is supporter in contact supported hole
Partial wall thickness is 0.5-1 times of aperture, and under the conditions of this ratio, soft supporter produces optical tunnel due to natural shrinking
The raw dynamics of being fixedly clamped be it is most suitable, both too loose installation fixation will not be caused unstable, will not be because of too tight and to even
Optical wand damages or influences the air contact rate of optical tunnel.
8, soft supporter material is polytetrafluoroethylene (PTFE), so that soft supporter is insensitive to laser, high temperature resistant, is not easy oxygen
Change, be not easy flaking, long service life, and the round degree in the section for limiting contact supported hole is not more than 2, the contact supported hole
Verticality be less than 0.05mm, can to avoid due to contact the irregular bring unbalanced stress of supported hole, cause optical tunnel to damage
The case where.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of optical tunnel of the present invention fixation device, wherein 1 soft supporter, 2 through-holes, 5 apertures fall
Angle, 6 external support structures, 7 connecting flanges, 8 optical tunnels.
Fig. 2 is the floor map of optical tunnel of the present invention fixation device, wherein 1 soft supporter, 2 through-holes, 5 apertures fall
Angle, 6 external support structures, 8 optical tunnels.
Fig. 3 is a kind of via design structural schematic diagram of optical tunnel of the present invention fixation device, wherein 1 soft supporter, 3 connecing
Touch supported hole, 4 non-contact holes, 5 orifice chamfers, 6 external support structures, 7 connecting flanges, 8 optical tunnels.
Fig. 4 is a kind of via design structural schematic diagram of the fixed device of optical tunnel of the present invention, wherein 1 soft supporter, 3
Contact supported hole, 4 non-contact holes, 5 orifice chamfers, 6 external support structures, 7 connecting flanges, 8 optical tunnels.
Specific embodiment
The technical solution of invention is described in detail with reference to the accompanying drawing:
Light passing rate is the ratio that optical tunnel exports laser power and entrant laser power, and laser power passes through OPHIR brand,
Model: the thermosensitive laser power meter measurement of NOVAII DISPLAY obtains；
Uniform illumination degree is the ratio of laser average shot power Yu maximum illumination power of different zones on shadow surface,
Specific measuring method is that coplanar laser illumination is equally divided into 64 regions, passes through OPHIR brand, model: NOVAII DISPLAY
Thermosensitive laser power meter measure the illumination power in each region, obtain its average light according to power WIt is averageWith maximum power Wmax, light
According to the uniformity=WIt is average/Wmax* 100%.
1 optical tunnel of embodiment fixes device
The fixed device of the optical tunnel of invention is illustrated as shown in Figure 1 and Figure 2.
The fixed device of a kind of optical tunnel provided by the invention, as shown in Figure 1 and Figure 2, including offering the soft of 1 through-hole 2
Supporter 1, through-hole 2 is generally cylindrical, and aperture is consistent from the beginning to the end, i.e. generally one contact supported hole 3 of through-hole, soft
The shape of matter supporter 1 is cylindrical body, coaxial with through-hole 2, and the cross-sectional diameter of soft supporter 1 is 13mm, soft supporter 1
Material is the polytetrafluoroethylene (PTFE) of shore hardness 55-65, and the length of through-hole 2 is equal to the length of optical tunnel 8, aperture 4.65mm, institute
The circumscribed circle diameter for installing fixed 8 cross section of optical tunnel is 4.68mm, and the both ends of through-hole are equipped with orifice chamfer 5, chamfer angle
It is 30 °.
External support structure 6 is provided with outside the fixed device of optical tunnel, external support structure 6 is in cylindrical body, soft support
Body 1 is embedded in external support structure 6, coaxial with external support structure 6, and 6 material of external support structure is aluminium alloy, outside
It is provided with connecting flange 7.
At work, optical tunnel is pushed into the fixed device of the optical tunnel along the through-hole of soft supporter, since through-hole diameter omits
Less than optical tunnel cross section circumscribed circle diameter, and soft material is under external force, the characteristic for having nature to spring back, so even light
Stick is embedded just；The polytetrafluoroethylene material of soft supporter had both guaranteed that material had enough strength support optical tunnels,
It is allowed to be fixed on specific position, and optical tunnel will not be damaged under stress.
The through-hole that the fixed device of optical tunnel uses uses cylinder design, so that optical tunnel is located exactly at through-hole in insertion
Center, it is ensured that optical tunnel installs accurate positioning；After optical tunnel insertion, the contact surface with fixed device is only four corner angle, and 99%
The above area is directly contacted with air, and light is not easy to leak, and light passing rate is up to 95% or more, while uniform illumination degree can be improved
3%-5%.
Through-hole aperture is 4.65mm, when the circumscribed circle diameter for installing constant cross-section is the optical tunnel of 4.68mm, is both protected
The stability of optical tunnel is demonstrate,proved, and biggish air contact area can be obtained, and is installed easy to operate.
The angled orifice chamfer for being 30 ° is arranged in through-hole one end, and this chamfer angle not only makes the push-in of optical tunnel more
It is easy, and since shape limits, optical tunnel is slipped to the middle position of through-hole automatically in push-on process, ensure that installation
Accuracy.
External support structure is set as aluminum alloy materials, is unlikely to deform, and the company of packaging type is played to internal soft supporter
Support is connect, outside can be connected and fixed by flange and relevant device.
Soft supporter cross circular section diameter is 13mm, is 2.8 times of through-hole aperture, soft under the conditions of this ratio
The dynamics of being fixedly clamped that supporter is generated due to natural shrinking and to optical tunnel be it is most suitable, both too loose installation will not be caused solid
It is fixed unstable, the air contact rate of optical tunnel will not be damaged or influenced on optical tunnel because of too tight.
2 optical tunnel of embodiment fixes device
The fixed device of a kind of optical tunnel provided by the invention, as shown in Figure 1-Figure 3, including offering the soft of 1 through-hole 2
1 contact supported hole 3 is respectively arranged in supporter 1,2 both ends of through-hole, and 2 middle section of through-hole is cylindrical non-contact hole 4, non-contact
Hole 4 is coaxial with contact supported hole 3；The shape of soft supporter 1 is cylindrical body, coaxial with contact supported hole 3, soft supporter 1
Cross-sectional diameter be 13mm, soft 1 material of supporter is the polytetrafluoroethylene (PTFE) of shore hardness 55-65, and the length of through-hole 2 is equal to
The length of optical tunnel 8, contact 3 aperture of supported hole are 4.65mm, and the circumscribed circle diameter for installing fixed 8 cross section of optical tunnel is
4.68mm, non-contact 4 aperture of hole are 5mm, and 1 end of contact supported hole 3 is equipped with orifice chamfer 5, and chamfer angle is 45 °.
External support structure 6 is provided with outside the fixed device of optical tunnel, external support structure 6 is in cylindrical body, soft support
Body 1 is embedded in external support structure 6, coaxial with external support structure 6, and 6 material of external support structure is stainless steel, outside
It is provided with connecting flange 7.
Under this design condition, the shape of through-hole is two end in contact supported holes, rest part is non-contact hole, optical tunnel
When being fixed on wherein, only both ends branch contacts with soft supporter, and partial-length broad in the middle is outer in absolute hanging
State further increases the air contact area of optical tunnel, and light passing rate is up to 97% or more, while uniform illumination degree is also obtained into one
Step improves.
3 optical tunnel of embodiment fixes device
The fixed device of a kind of optical tunnel provided by the invention, as shown in Figure 1, Figure 2 and Figure 4, including offers 1 through-hole 2
Soft supporter 1,2 one end of through-hole be arranged 1 contact supported hole 3, the other end be cylinder non-contact hole 4, non-contact hole 4
It is coaxial with contact supported hole 3；The shape of soft supporter 1 is cylindrical body, coaxial with contact supported hole 3, the cross of soft supporter 1
Diameter of section is 13mm, and soft 1 material of supporter is the polytetrafluoroethylene (PTFE) of shore hardness 55-65, and the length of through-hole 2 is equal to even light
The length of stick 8, contact 3 aperture of supported hole are 4.65mm, and the circumscribed circle diameter for installing fixed 8 cross section of optical tunnel is
4.68mm, non-contact 4 aperture of hole are 5mm, and 1 end of contact supported hole 3 is equipped with orifice chamfer 5, and chamfer angle is 40 °.
External support structure 6 is provided with outside the fixed device of optical tunnel, external support structure 6 is in cylindrical body, soft support
Body 1 is embedded in external support structure 6, coaxial with external support structure 6, and 6 material of external support structure is aluminium alloy, outside
It is provided with connecting flange 7.
Under this design condition, through-hole one end is contact supported hole, and the other end is non-contact hole, and optical tunnel installation is fixed
When wherein, only one end can be contacted with soft supporter, and the other end is outer in absolute vacant state, further increase optical tunnel
Air contact area, light passing rate is up to 97% or more, while uniform illumination degree is also further enhanced；In addition, this design
For soft supporter compared to the fixed device of optical tunnel in embodiment 2, shape design is easier to produce and process.
Although the present invention has been described by way of example and in terms of the preferred embodiments, it is not intended to limit the invention, any to be familiar with this skill
The people of art can do various change and modification, therefore protection model of the invention without departing from the spirit and scope of the present invention
Enclosing subject to the definition of the claims.
Claims (7)
1. a kind of fixed device of optical tunnel, which is characterized in that the soft supporter including offering through-hole, the soft supporter
Material be polytetrafluoroethylene (PTFE) that shore hardness is 55-65；The through-hole in the axial direction be all or part of cylinder
Contact supported hole, contact supported hole plays optical tunnel and directly supports fixed function, and the aperture of the contact supported hole is less than
Fixed optical tunnel cross section circumscribed circle diameter is installed；The soft supporter includes 1 through-hole, is provided with 1 in through-hole
Or multiple contact supported holes, for the interior contact supported hole of the through-hole with outer portion for non-contact hole, the non-contact hole is cylinder
Hole, coaxial with contact supported hole, aperture, which is greater than, installs fixed optical tunnel cross section circumscribed circle diameter；The length of the through-hole
Equal to the length of optical tunnel, the one or both ends of the contact supported hole are provided with orifice chamfer, and the chamfer angle is 30 °-
45°；The soft supporter cross circular section diameter is 2-3 times of supported hole aperture of contact；The section of the contact supported hole is round
Degree is not more than 2, and the verticality of the contact supported hole is less than 0.05mm.
2. the fixed device of optical tunnel according to claim 1, which is characterized in that the aperture of the contact supported hole is is pacified
Fill 0.99-0.995 times of fixed optical tunnel cross section circumscribed circle diameter.
3. the fixed device of optical tunnel according to claim 1 or 2, which is characterized in that the area of space of the through-hole includes
Contact whole area of space of supported hole and the wider space region in through-hole length range in the axial direction of contact supported hole
Whole.
4. the fixed device of optical tunnel according to claim 1 to 3, which is characterized in that the soft supporter is cylinder
Body, the through-hole are located at soft supporter center, and the contact supported hole in through-hole is coaxial with soft supporter.
5. the fixed device of optical tunnel according to claim 1 to 4, which is characterized in that the fixed device of the optical tunnel is also
Including external support structure, external support structure material is hard material, such as aluminium alloy or stainless steel；The soft support position
Inside external support structure.
6. -5 any fixed device of the optical tunnel according to claim 1, which is characterized in that the through-hole both ends are contact branch
Support hole, middle section is non-contact hole.
7. -5 any fixed device of the optical tunnel according to claim 1, which is characterized in that the through-hole is that one end is contact
The non-contact hole of supported hole, the other end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710217092.2A CN106842828B (en) | 2017-04-05 | 2017-04-05 | A kind of fixed device of optical tunnel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710217092.2A CN106842828B (en) | 2017-04-05 | 2017-04-05 | A kind of fixed device of optical tunnel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106842828A CN106842828A (en) | 2017-06-13 |
| CN106842828B true CN106842828B (en) | 2019-09-03 |
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ID=59142367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710217092.2A Active CN106842828B (en) | 2017-04-05 | 2017-04-05 | A kind of fixed device of optical tunnel |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08227034A (en) * | 1995-02-21 | 1996-09-03 | Seiko Instr Inc | Supporting mechanism for rod integrator |
| CN1672242A (en) * | 2002-07-25 | 2005-09-21 | 浜松光子学株式会社 | Light conducting device |
| KR20050122457A (en) * | 2004-06-24 | 2005-12-29 | 엘지전자 주식회사 | Integrator of projection system |
| US8113661B2 (en) * | 2008-07-01 | 2012-02-14 | Mitsubishi Electric Corporation | Projection-type display apparatus |
-
2017
- 2017-04-05 CN CN201710217092.2A patent/CN106842828B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08227034A (en) * | 1995-02-21 | 1996-09-03 | Seiko Instr Inc | Supporting mechanism for rod integrator |
| CN1672242A (en) * | 2002-07-25 | 2005-09-21 | 浜松光子学株式会社 | Light conducting device |
| KR20050122457A (en) * | 2004-06-24 | 2005-12-29 | 엘지전자 주식회사 | Integrator of projection system |
| US8113661B2 (en) * | 2008-07-01 | 2012-02-14 | Mitsubishi Electric Corporation | Projection-type display apparatus |
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| Publication number | Publication date |
|---|---|
| CN106842828A (en) | 2017-06-13 |
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