CN106842822A - The laser interference nanometer lithography system of one step texturing modified titanium alloy implant surface - Google Patents
The laser interference nanometer lithography system of one step texturing modified titanium alloy implant surface Download PDFInfo
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- CN106842822A CN106842822A CN201710033379.XA CN201710033379A CN106842822A CN 106842822 A CN106842822 A CN 106842822A CN 201710033379 A CN201710033379 A CN 201710033379A CN 106842822 A CN106842822 A CN 106842822A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
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Abstract
The invention discloses a kind of laser interference nanometer lithography system of step texturing modified titanium alloy implant surface, including high power laser, beam splitting system, wave plate and polarizer, it is characterized in that laser interference nanometer lithography system is by two beam light interferences, according to the difference of implantation position, control interfering beam parameter, the direct machining titanium alloy implant surface of groove pattern produced using the interference of two beam lasers, formation characteristic size is 100nm to 20 μm of adjustable groove structure, change the geometrical morphology and roughness of material surface, improve the bio-mechanical binding ability of titanium alloy implant and bone, guiding Gegenbaur's cell chemotactic, improve the biocompatibility of planting body, realize a step texturing modified titanium alloy implant surface.
Description
Technical field
The present invention relates to a kind of system of step texturing modified titanium alloy implant surface, received using laser interference
Rice photoetching technique directly prepares micron to nano grade surface texture on titanium alloy implant surface, changes implant surface geometric form
Looks and roughness, improve the bioconjugation ability of planting body-bone, improve the biocompatibility of planting body.
Background technology
At present, planting body achieves certain effect in being implanted in clinic, but still in the presence of failure and the risk of complication,
Such as planting body release, bone regeneration around implant inflammation, bone regeneration around implant bone loss and allergic reaction.The main original for causing plantation to fail
Because being that metal implants body can not realize good Bone Ingrowth with the bone tissue around implant site.The mid-50, sends out through research
Existing titanium has excellent biocompatibility, and cheap, therefore titanium alloy is widely used as planting body material, but
Titanium alloy implant still suffers from some problems during clinical practice, and such as bioactivity is poor, lack bone inductive effect and week
Enclose that poor bone tissue binding ability, Metal ion release, Bone Ingrowth time is long and corrosion-resistant etc..Therefore titanium conjunction how is improved
The synosteosis ability and quality of golden planting body, are more and more paid close attention to by industry.Current titanium alloy implant surface is modified,
Through as the effective way for improving Osseointegrated implants ability, its research is widely used.Titanium alloy implant surface texture
The modified synosteosis ability that can improve planting body-osseous tissue interface, promotes conduction of the bite stress to surrounding tissue, reduces the two
Relative motion and fibr tissue grow into.As titanium alloy implant is widely used in clinic, scholars have attempted various changing
Kind method, the wherein surface of titanium alloy implant are modified to play an important role to improving plantation success rate, at present conventional surface
Method of modifying mainly includes：Chemical treatment method, physical method, and biological method etc..Because planting body is located at multiple differences
Different surface textures may be needed in anatomical structure, therefore on a planting body, is planted in addition to metal material factor in itself
The design of implant such as geometry, diameter and length and material surface structure can all influence the success of endosteal implant.Plantation
Body surface texture is broadly divided into two classes, i.e. smooth surface and rough surface.In machining, Sa≤1 μm is considered as light
It is sliding, and 1 μm of Sa ＞ are considered as rough surface (Sa is surface roughness), cell goes out different lifes in different Ra values surface exhibits
Thing behavior.In fact, on multistage micron and the same surface of nanoscale structures, the biological behaviour of total population, even if
The collective surface of equal Ra values, it is also different.Therefore, surface roughness and unreliable is weighed with Ra values merely.Research discovery,
Rough surface planting body is all higher than the planting body of smooth surface with the bonded area and bond strength of bone tissue, and Gegenbaur's cell is to micro-
Rice is sensitive to nanoscale structures, size, surface micro-structure such as groove, projection, cavity etc., energy that diameter matches with biotic component
Enough inducing osteoblasts are produced and the completely different biologically of smooth surface, so that inducing osteoblast adhesion and orientation point
Change.Research confirms that coarse implant surface can increase by 20 times or so of its synosteosis surface area.Research has shown that, cell more holds
Easily grown along the implant surface of the ultra microstructures such as groove and ridge with micron to nano grade, increase micron to nano grade surface
Structure can increase the contact area and binding ability of planting body-bone.Long-term clinical confirms that the rough surface of non-spraying is more favourable
In guiding Gegenbaur's cell chemotactic, increase planting body-bone structure surface product, be conducive to improving planting body-synosteosis ability, can keep away
Exempt from the degraded of sprayed coating or strip off.
The PRELIMINARY RESULTS of research shows that laser interference nanometer lithography has other at the modified aspect of surface-texturing both at home and abroad
Technology irreplaceable potentiality and advantage.Laser interference beam energy density is high, and action time is short, to non-laser irradiated site almost
Without influence, i.e., heat affected area is small, materials hot deformation can by the control of processing technology, reach lesser extent.In addition, laser
The controllability of beam is good, can accurately realize that material part and the surface of specific position are modified, and the surface for planting body is modified
There is its peculiar advantage.The technology is directly added using the pattern (the spatially Energy distribution of multicycle) that multi-beam laser interference is produced
Work or modification material surface (thread surface or curved surface) form the high accuracy micro-nano compound structure corresponding with pattern, are had
The material surface of specific physical and chemical characteristic.Surface and interface is the window for realizing material function, surface micro-nano composite junction
Constructing for structure has very important meaning to the performance of material.Except macrostructure, the performance of material surface largely takes
Certainly in the micro nano structure on surface, while the surface property such as the surface roughness of implant, wetability, chemical composition is to biofacies
Capacitive has a direct impact.Constructing for surface micronano structure is the weight for regulating and controlling surface wettability and realizing functionalizing material surface
Want means.
The principle of laser interference nanometer lithography is the light intensity that interference figure array is produced using two beams or multiple laser interference
Energy distribution and material interact and obtain the micro nano structure on surface.Interference figure is not only point, line in two dimensional surface,
The multicycle structure of complexity can also be constructed.There is the technology characteristic size, shape and cycle continuously may be used from nanometer to micron order
The advantage of tune, in atmosphere, cycle minimum accessible 1/2 wavelength.Laser interference possess large area manufacture three-dimensional periodic or
The potentiality of quasi periodic nanostructured.Using nanosecond high energy laser beam, (energy density is about 108w/cm2) irradiation metal surface, make
Certain thickness skin-material instant melting, then by low temperature matrix by molten bath chilling, promotes spontaneous nucleation, increases nucleus number
Amount, so that crystal grain thinning.Because fine grain is subject to external force that plastic deformation occurs to be dispersed in being carried out in more crystal grain, plasticity becomes
Shape is more uniform, and stress concentration is smaller；Crystal grain is thinner, and grain boundary area is bigger, and crystal boundary is more tortuous, is more unfavorable for the extension of crackle.Material
Material intensity diminishing with crystal grain and strengthening, and varies widely material surface tissue, reaches the modified purpose in surface, while obtaining
Micro-nano compound structure surface corresponding with laser interference pattern and with bio-compatible.The formation of surface micronano structure will be to rubbing
The stress produced during wiping is discharged in microcell, and the wear-resistant energy on joint prosthesis surface is lifted in terms of physics and chemistry two
Power, while the surface property such as the roughness of surface micronano structure, wetability, surface energy also has direct shadow to biocompatibility
Ring.
The content of the invention
It is an object of the invention to overcome the deficiencies in the prior art, there is provided a kind of step modified titanium alloy implant surface
Laser interference nanometer lithography system, manufacturing technology is interfered using multi-wavelength high-peak power nanosecond laser, is broken through conventional spray paint and is changed
Property technique yoke, obtain biocompatible surface micro-nano compound structure, so as to change implant surface mechanical performance, enhancing plantation
The bio-mechanical binding ability of body-bone, improves the biocompatibility of planting body.
The laser interference nanometer lithography system of a step modified titanium alloy implant surface of the invention includes：Laser, light splitting
System, wave plate and polarizer microscope group, beam splitting system include spectroscope and high reflective mirror：The beam of laser that laser sends, through light splitting
System is divided into two beam coherent beams, by designing the position and angle of spectroscope and high reflective mirror in beam splitting system, makes incidence angle θ1
=θ2=θ, Space AngleBy wave plate and polarizer microscope group, the light intensity energy of each coherent beam is controlled
Density and polarization state, make light intensity energy density ratio be 1:1, polarization state is TE-TE, and two coherent beams are realized interference, directly existed
Titanium alloy implant surface etch goes out characteristic size for 100nm to 20 μm of adjustable groove structure.
Principle of the invention is：Beam of laser is sent by laser, laser beam is divided into two beam coherent lights by beam splitting system
Beam, by designing the position and angle of spectroscope and high reflective mirror in beam splitting system, obtains the relevant of specific incidence angle and Space Angle
Light beam, by wave plate and polarizer microscope group, controls the light intensity energy density and polarization state of each coherent beam, directly in material surface
The surface textures such as the micron to nano grade of groove pattern are etched, changes material surface pattern and roughness, improve planting body-bone
Bioconjugation ability, improve planting body biocompatibility.
Optical maser wavelength is 1064nm, and frequency is 10HZ, and the pulse duration is 7ns.Wave plate and the control of polarizer microscope group are every
The light intensity energy density of beam interferometer light, determines the boundary condition that the distribution of pulse laser interference energy interacts with titanium alloy, directly
It is connected on titanium alloy surface etching structure.
The titanium alloy implant surface is simple column, screw thread column, root shape surface.
Directly the time in titanium alloy implant surface etch is 40s-60s.
The parameter of incident coherent light beam is controlled, including：Number of light beams, incidence angle, Space Angle, the angle of polarization, position phase, optical path difference
And etch period, determine the combination condition of two beam interference composite patterns and coherent beam, obtain and modulate light with two beam interferences
The corresponding groove surfaces structure of field distribution.
Groove, pit in different characteristic size and raised dot matrix surface texture cultured osteoblast-like cells in vitro, control micron is to receiving
Technological parameter prepared by meter level structure, changes titanium alloy material surface roughness and biocompatibility, obtains enhancing titanium alloy kind
The surface texture of implant-synosteosis ability.
Present invention advantage compared with prior art is：
(1) laser interference nanometer lithography system of the present invention, the groove pattern produced using the interference of two beam lasers is directly added
The pure column of work order, screw thread column, root shape titanium alloy implant surface, form the high accuracy corresponding with pattern micron to receiving
Meter level structure, changes the geometrical morphology and roughness of material surface, improves the bio-mechanical binding ability of planting body-bone, guiding
Gegenbaur's cell chemotactic, improves the biocompatibility of planting body.
(2) present invention utilizes laser interference nanometer lithography system, realizes two beam interferences, enters on titanium alloy implant surface
Row etching, obtains micron to nano grade surface texture, by controlling incidence angle, Space Angle, the angle of polarization, position phase, optical path difference and quarter
The erosion time, determine the combination condition of two beam interference composite patterns and coherent beam, obtain relative with two-beam interference optical field distribution
The micro-nano surface structure answered.In the surface texture cultured osteoblast-like cells in vitro of different characteristic size, micron to nano grade structure is controlled
Preparation technological parameter, change titanium alloy material surface roughness and biocompatibility, obtain enhancing titanium alloy implant-bone
The surface texture of binding ability.
Brief description of the drawings
Fig. 1 is Three-beam Interfere etching system.1 is high power laser, and 2,3,5,6,8 is high reflective mirror, and 4,7 is light splitting
Mirror, 9,10,11 is wave plate and polarizer microscope group；
Fig. 2 is the pit lattice structure that Three-beam Interfere etching system is formed in titanium alloy surface, and the cycle is 5 μm；
Fig. 3 is two beam interference etching systems.1 is high power laser, and 2,3,5,6 is high reflective mirror, and 4 is spectroscope, 9,
10 is wave plate and polarizer microscope group；
Fig. 4 is the groove surfaces structure that two beam laser interference lithography systems are formed in titanium alloy surface, and the cycle is 20 μm.
Specific embodiment
Embodiment 1
Three-beam Interfere pattern is simulated using Matlab, the multiple-beam interference of theoretical and experimental study modulation obtains many
The micro-nano mixed structure of reset cycle.Be analyzed based on EM theory, set up mathematics physics model, and using software simulation with
Actual photoetching is combined, the interference mechanism of modulation phenomenon under the conditions of analysis special parameter, by precise control pulsed laser energy,
The acquisition micron order modulation period consistent with model configuration and the micro-nano mixed structure of nanoscale features size.Based on theoretical and real
The result of analysis is tested, Three-beam Interfere etching system is built, as shown in Figure 1.Laser 1 send beam of laser by high reflective mirror 2,
High reflective mirror 3, spectroscope 4 and high reflective mirror 5, arrival interference field are light path I；By high reflective mirror 2, high reflective mirror 3, spectroscope 4, spectroscope
7 and high reflective mirror 6, arrival interference field is light path II；By high reflective mirror 2, high reflective mirror 3, spectroscope 4, spectroscope 7 and high reflective mirror 8, arrive
It is light path III up to interference field.In system, incidence angle is set to θ1=θ2=θ3=θ0=8 °, Space Angle is set toThe angle of polarization is set to ψ1=ψ2=ψ3=90 °, three light beam light intensity energy density ratios
It is 1:1:1, by wave plate and the light intensity energy density and polarization angle of each light beam of precise control of polarizer microscope group 9,10,11, make
Light intensity energy density per Shu Guang is mutually all 0.5Jcm-2-, polarization state is respectively TE-TE-TE, and the cycle of obtaining is 5 μm of pit point
Battle array structure.Respectively MG63 Gegenbaur's cells, the growing state and adhesiving effect of cell are cultivated on the pit dot matrix surface that the cycle is 5 μm
It is better than untreatment surface.Fig. 2 is the interference structure surface topography scanning electron microscopic picture in embodiment, if shown, three light beams
Interfere and form the pit lattice structure that average period is 5 μm in titanium alloy surface.
Embodiment 2
Two beam interference patterns, theory analysis and experimental study interference light and material phase interaction are simulated first with Matlab
With mechanism, determine the photoetching threshold value of material and realize quantitative nano photoetching.The given material of research is relative to given laser specific
Interference lithography threshold value under environment, sets up the mathematics physics models such as Dan Wen, dual temperature, molecular dynamics to interference light and solid material
Between non-equilibrium heat transfer process studied.Ensure that interference lithography pattern is tied with simulation by precise control pulsed laser energy
The uniformity of structure.Based on the theoretical result with experimental analysis, two beam interference etching systems are built, as shown in Figure 3.Laser 1
Beam of laser is sent by high reflective mirror 2, high reflective mirror 3, spectroscope 4 and high reflective mirror 5, arrival interference field is light path I；By high reflective mirror
2nd, high reflective mirror 3, spectroscope 4 and high reflective mirror 6, arrival interference field are light path II.In system, incidence angle is set to θ1=θ2=θ=
1.5 °, Space Angle is set toThe angle of polarization is set to ψ1=ψ2=90 °, two light beam light intensity energy density ratios are
1:1, by wave plate and the light intensity energy density and polarization angle of each light beam of precise control of polarizer microscope group 9 and 10, make every Shu Guang
Light intensity energy density be mutually all 0.5Jcm-2, polarization state is TE-TE, and the cycle of obtaining is 20 μm of groove structure.It is 20 in the cycle
μm groove structure surface culture MG63 Gegenbaur's cells, growing state and adhesiving effect are better than bowl configurations surface.Fig. 4 is implementation
The scanning electron microscopic picture of the interference structure surface topography in example, is illustrated in figure 4 the interference of two beam lasers in titanium alloy surface shape
Into the groove structure that average period is 20 μm.
Above example is provided just for the sake of the description purpose of the present invention, and is not intended to limit the scope of the present invention.This
The scope of invention is defined by the following claims.The various equivalents that do not depart from spirit and principles of the present invention and make and repair
Change, all should cover within the scope of the present invention.
Claims (4)
1. the laser interference nanometer lithography system of a step texturing modified titanium alloy implant surface, it is characterised in that：Including swashing
Light device, beam splitting system, wave plate and polarizer microscope group, beam splitting system include spectroscope and high reflective mirror：It is a branch of sharp that laser sends
Light, two beam coherent beams are divided into through beam splitting system, by designing the position and angle of spectroscope and high reflective mirror in beam splitting system, are made
Incidence angle θ1=θ2=θ, Space AngleBy wave plate and polarizer microscope group, each coherent beam is controlled
Light intensity energy density and polarization state, make light intensity energy density ratio be 1:1, polarization state is TE-TE, and two coherent beams are realized doing
Relate to, directly go out characteristic size for 100nm to 20 μm of adjustable groove structure in titanium alloy implant surface etch.
2. the laser interference nanometer lithography system of a step texturing modified titanium alloy implant surface according to claim 1,
It is characterized in that：The laser sends optical maser wavelength for 1064nm, and frequency is 10HZ, and the pulse duration is 7ns.
3. the laser interference nanometer lithography system of a step texturing modified titanium alloy implant surface according to claim 1,
It is characterized in that：The titanium alloy implant surface is simple column, screw thread column, root shape surface.
4. the laser interference nanometer lithography system of a step texturing modified titanium alloy implant surface according to claim 1,
It is characterized in that：Directly the time in titanium alloy implant surface etch is 40s-60s.
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