CN106841106B - A kind of bi-component trace gas concentration measuring device based on Research on Cavity Ring Down Spectroscopy - Google Patents
A kind of bi-component trace gas concentration measuring device based on Research on Cavity Ring Down Spectroscopy Download PDFInfo
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- CN106841106B CN106841106B CN201611140479.4A CN201611140479A CN106841106B CN 106841106 B CN106841106 B CN 106841106B CN 201611140479 A CN201611140479 A CN 201611140479A CN 106841106 B CN106841106 B CN 106841106B
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- hysteroscope
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/391—Intracavity sample
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/04—Batch operation; multisample devices
- G01N2201/0407—Batch operation; multisample devices with multiple optical units, e.g. one per sample
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/068—Optics, miscellaneous
Abstract
The present invention provides a kind of bi-component trace gas concentration measuring device based on Research on Cavity Ring Down Spectroscopy, including the first tunable continuous wave laser, the second tunable continuous wave laser, first mode matching system, second mode matching system, resonant cavity, the first condenser lens, the second condenser lens, the first narrow band filter, the second narrow band filter, the first photodetector, the second photodetector, laser controller and signal processing and analysis control system；The components such as optoisolator, laser bundling device, optical splitter are saved while realizing that bi-component trace gas concentration synchronizes on-line measurement by using four mirror annular stable cavity of high-fineness, it is compact-sized, and cost is relatively low.
Description
Technical field
It is the present invention relates to trace gas concentration field of measuring technique, in particular to a kind of double based on Research on Cavity Ring Down Spectroscopy
Component trace gas concentration measuring device.
Background technique
Trace gas concentration measuring technique has in numerous areas such as environmental monitoring, resource exploration, medical diagnosis answers extensively
With.Research on Cavity Ring Down Spectroscopy is 1) a kind of direct absorption-type spectroscopy technology has the advantage that compared to other detection methods
The technology directly measured quantities are the time, to reduce by light source intensity fluctuating bring measurement error；2) high-fineness is utilized
Gas concentration measurement effective light path is expanded 10 by stable resonator, the technology3~105Times, compared to traditional directly absorption-type light
Spectral technology has higher sensitivity, is suitble to trace gas concentration measurement；3) technology is indirect compared to fluorescence, acousto-optic etc.
Absorption-type spectroscopy technology has the advantage for exempting from calibration.
Research on Cavity Ring Down Spectroscopy is typically considered single-wavelength light spectral technology, measures according to broad spectrum light source, then
It needs using labyrinths such as grating spectrograph or spectrophotometers.On the other hand, the common trace of the technology development and production is utilized
Measure gas concentration measuring apparatus, it will usually use optoisolator, acousto-optic or electrooptical switching, piezoelectric ceramics displacement controller (PZT)
Equal components.Although the use of these components increases to measurement accuracy and stability, increased costs, structure are multiple
The drawbacks such as miscellaneous, volume increases, power consumption increases are unfavorable for the technology and its measuring device and use under some specific environments.
Summary of the invention
In view of this, it is an object of the invention to propose that one kind can synchronize two kinds of trace gas concentrations of on-line measurement, and
It is compact-sized, the lower-cost novel bi-component trace gas concentration measuring device based on Research on Cavity Ring Down Spectroscopy.
Based on above-mentioned purpose, it is dense that the embodiment of the present invention provides a kind of bi-component trace gas based on Research on Cavity Ring Down Spectroscopy
Spend measuring device, comprising:
First tunable continuous wave laser, the second tunable continuous wave laser, first mode matching system, second mode
Match system, resonant cavity, the first condenser lens, the second condenser lens, the first narrow band filter, the second narrow band filter, the first light
Electric explorer, the second photodetector, laser controller and signal processing and analysis control system；
The resonant cavity includes the first hysteroscope, the second hysteroscope, third hysteroscope and the 4th hysteroscope；
The laser that the first tunable continuous wave laser issues enters described humorous after the first mode matching system
Shake chamber, through after first hysteroscope after second hysteroscope and the reflection of third hysteroscope successively through the 4th hysteroscope, the
One condenser lens and the first narrow band filter are ultimately incident upon first photodetector；
The laser that the second tunable continuous wave laser issues enters described humorous after the second mode matching system
Shake chamber, through after second hysteroscope after first hysteroscope and the reflection of the 4th hysteroscope successively through the third hysteroscope, the
Two condenser lenses and the second narrow band filter are ultimately incident upon second photodetector；
First photodetector and second photodetector respectively with the signal processing and analysis control system
Electrical connection, the signal processing and analysis control system connect with the laser controller, the laser controller respectively with
The first tunable continuous wave laser and the second tunable continuous wave laser electrical connection.
Further, the normal of first hysteroscope and the 4th hysteroscope is overlapped, and is directed toward the center of the resonant cavity, described
The normal of second hysteroscope and third hysteroscope is overlapped, and is directed toward the center of the resonant cavity.
Further, first hysteroscope, the second hysteroscope, third hysteroscope and the 4th hysteroscope normal direction are directed toward in resonant cavity
The mirror surface of the heart plates high-reflecting film, and another side plates anti-reflection film.
Further, the first mode matching system and the second mode matching system all use Galilean telescope
Structure.
Further, first photodetector and second photodetector have the high speed of response, and spectrum
Response range covers under test gas characteristic absorption wavelength.
Further, the first mode matching system and eyeglass and the first focusing in second mode matching system
Lens and the second condenser lens are coated with the anti-reflection film of corresponding under test gas characteristic absorption wavelength.
From the above it can be seen that the bi-component trace gas concentration provided by the invention based on Research on Cavity Ring Down Spectroscopy
Measuring device, including the first tunable continuous wave laser, the second tunable continuous wave laser, first mode matching system, second
Pattern matching system, resonant cavity, the first condenser lens, the second condenser lens, the first narrow band filter, the second narrow band filter,
First photodetector, the second photodetector, laser controller and signal processing and analysis control system.By using high-precision
Four mirror annular stable cavity of fineness, while realizing the synchronous on-line measurement of bi-component trace gas concentration, save optoisolator,
The components such as laser bundling device, optical splitter, it is compact-sized, and cost is relatively low.
Detailed description of the invention
Fig. 1 is the knot of the bi-component trace gas concentration measuring device based on Research on Cavity Ring Down Spectroscopy of the embodiment of the present invention
Structure schematic diagram；
Fig. 2 is individually to decline to swing event hollow cavity state and non-cavity state ring-down time instrumentation plan；
Fig. 3 is that multiple decline swings event ring-down time instrumentation plan.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction in the embodiment of the present invention
Attached drawing, technical solution in the embodiment of the present invention further progress understands, completely, describe in detail, it is clear that it is described
Embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field
Those of ordinary skill's every other embodiment obtained, shall fall within the protection scope of the present invention.
It should be noted that all statements for using " first " and " second " are for differentiation two in the embodiment of the present invention
The non-equal entity of a same names or non-equal parameter, it is seen that " first " " second " only for the convenience of statement, does not answer
It is interpreted as the restriction to the embodiment of the present invention, subsequent embodiment no longer illustrates this one by one.
The embodiment of the present invention provides a kind of bi-component trace gas concentration measuring device based on Research on Cavity Ring Down Spectroscopy, packet
It includes:
First tunable continuous wave laser, the second tunable continuous wave laser, first mode matching system, second mode
Match system, resonant cavity, the first condenser lens, the second condenser lens, the first narrow band filter, the second narrow band filter, the first light
Electric explorer, the second photodetector, laser controller and signal processing and analysis control system；
The resonant cavity includes the first hysteroscope, the second hysteroscope, third hysteroscope and the 4th hysteroscope；
The laser that the first tunable continuous wave laser issues enters described humorous after the first mode matching system
Shake chamber, through after first hysteroscope after second hysteroscope and the reflection of third hysteroscope successively through the 4th hysteroscope, the
One condenser lens and the first narrow band filter are ultimately incident upon first photodetector；
The laser that the second tunable continuous wave laser issues enters described humorous after the second mode matching system
Shake chamber, through after second hysteroscope after first hysteroscope and the reflection of the 4th hysteroscope successively through the third hysteroscope, the
Two condenser lenses and the second narrow band filter are ultimately incident upon second photodetector；
First photodetector and second photodetector respectively with the signal processing and analysis control system
Electrical connection, the signal processing and analysis control system connect with the laser controller, the laser controller respectively with
The first tunable continuous wave laser and the second tunable continuous wave laser electrical connection.
The bi-component trace gas concentration measuring device based on Research on Cavity Ring Down Spectroscopy of the embodiment of the present invention, by using
Four mirror annular stable cavity of high-fineness, while realizing the synchronous on-line measurement of bi-component trace gas concentration, save light every
It is compact-sized from components such as device, laser bundling device, optical splitters, and cost is relatively low.
In an embodiment of the present invention, the normal of first hysteroscope and the 4th hysteroscope is overlapped, and is directed toward the resonant cavity
Center, the normal of second hysteroscope and third hysteroscope is overlapped, and is directed toward the center of the resonant cavity.Further, described
The mirror surface that first hysteroscope, the second hysteroscope, third hysteroscope and the 4th hysteroscope normal direction are directed toward resonant cavity center plates high-reflecting film, another
Plate anti-reflection film in face.Further, the first mode matching system and the second mode matching system all use Galileo to hope
Remote mirror structure.Further, first photodetector and second photodetector have the high speed of response, and spectrum
Response range covers under test gas characteristic absorption wavelength.Further, the first mode matching system and second mode matching
Eyeglass and the first condenser lens and the second condenser lens in system are coated with the anti-reflection of corresponding under test gas characteristic absorption wavelength
Film.
As shown in Figure 1, for the bi-component trace gas concentration measurement based on Research on Cavity Ring Down Spectroscopy of the embodiment of the present invention
The structural schematic diagram of device.It can be seen from the figure that the bi-component trace gas based on Research on Cavity Ring Down Spectroscopy of the present embodiment
Apparatus for measuring concentration, comprising: the first tunable continuous wave laser 1, the second tunable continuous wave laser 2, first mode matching system
System 3, second mode matching system 4, resonant cavity 5, the first condenser lens 7, the second condenser lens 6, the first narrow band filter 9, the
Two narrow band filters 8, the first photodetector 11, the second photodetector 10, laser controller 12 and signal processing and analysis
Control system 13；
The resonant cavity includes the first hysteroscope 501, the second hysteroscope 502, third hysteroscope 503 and the 4th hysteroscope 504；
The laser that the first tunable continuous wave laser 1 issues enters described after the first mode matching system 3
Resonant cavity 5, it is described through successively being penetrated after second hysteroscope 502 and third hysteroscope 503 reflect after first hysteroscope 501
4th hysteroscope 504, the first condenser lens 7 and the first narrow band filter 9 are ultimately incident upon first photodetector 11；
The laser that the second tunable continuous wave laser 2 issues enters described after the second mode matching system 4
Resonant cavity 5, it is described through successively being penetrated after first hysteroscope 501 and the reflection of the 4th hysteroscope 504 after second hysteroscope 502
Third hysteroscope 503, the second condenser lens 6 and the second narrow band filter 8, are ultimately incident upon second photodetector 10；
First photodetector 11 and second photodetector 10 are controlled with the signal processing and analysis respectively
System 13 is electrically connected, and the signal processing and analysis control system 13 is connect with the laser controller 12, the laser control
Device 12 processed is electrically connected with the described first tunable continuous wave laser 1 and the second tunable continuous wave laser 2 respectively.
In the present embodiment, the described first tunable continuous wave laser 1 and the second tunable continuous wave laser 2 are preferably
There is output wavelength easily to adjust by DFB-LD (distributed feedback type semiconductor laser), DFB-LD (can be by automatically controlled or temperature control tune
Section), line width (the features such as representative value is several MHz), small in size, at low cost.It is close that majority of gas can be provided using the light source
Infrared signature absorbing wavelength, and the spectral resolution of measurement can be improved in narrow linewidth.
Pattern matching system uses Galilean telescope structure, while guaranteeing incident light and resonant cavity spatial match,
Reduce structure length as far as possible.
Resonant cavity is designed using four mirror annular stable cavity of high-fineness.Eyeglass is coated under test gas characteristic absorption wavelength on one side
Anti-reflection film, another side is coated with the high-reflecting film of its wavelength, and reflectivity should be higher than that 99.9%, and reflectivity is higher, and measurement sensitivity is got over
It is high.The characteristic absorption wavelength of various ingredients should have high reflectance in the reflection characteristic of high reflective mirror plated film spectrum.In non-resonance
In the case where, high reflective mirror can prevent incident light from entering resonant cavity, and make it along backtracking laser.In CRDS, this light
It feeds back and is affected for the light characteristic that goes out of laser, especially to the higher laser of this efficiency of DFB-LD.Compared to line
Shape chamber, annular chamber can effectively reduce light feedback, so that reflected light is deviateed incident direction, therefore can save optoisolator；Another party
Face, since annular chamber will not be eliminated in intracavitary formation standing wave because peak power density is possible non-linear at node
Effect.Compared to common three eyeglass annular chambers allow since four mirror chambers can make hysteroscope placed angle more flexible on the market at present
Incident, reflection occurs in hysteroscope with low-angle (such as 2 ° or 3 °) for light, to reduce hysteroscope plated film requirement.In the present invention,
Two light sources can be incident from different hysteroscopes, declines and swings signal and can receive two beams by the photodetector of two different hysteroscopes
Optical propagation direction is not on the contrary, cause unnecessary influence between each other, convenient for the detection of detector.It is synchronized in realization bi-component
While line measures, the components such as laser bundling device, optical splitter are saved.
Photodetector uses the InGaAs detector of the high speed of response, and spectral response range can cover under test gas feature
Absorbing wavelength, and narrow band filter is placed in detector inlet, so that declining for detectable signal one-component is swung signal.Due to height
The detector of the speed of response usually has lesser photosurface, needs to be focused transmitted light.
Pattern matching system and condenser lens are coated with the anti-reflection film to gas characteristic absorbing wavelength to be measured, to reduce device
Interior optical interference effect.
As shown in Fig. 2, swinging event hollow cavity state and non-cavity state ring-down time instrumentation plan individually to decline.
DFB-LD controller is adjusted by temperature and current regulation, makes the same laser wave of DFB-LD1 and DFB-LD2 output phase
It is long.Output of laser wavelength should deviate the characteristic absorption wavelength of two kinds of under test gas (it is assumed that gas A and gas B), and export laser
Wavelength should be located in resonant cavity 5 in the high reflectance spectrum of high reflective mirror, and wherein gaseous spectrum data can pass through HITRAN database
It is inquired.
DFB-LD1 and DFB-LD2 output laser pass through respectively first mode matching system and second mode matching system into
Enter in resonant cavity, completes the spatial match of incident light and resonant cavity at this time.DFB-LD controller is scanned by fast current, is made
DFB-LD1 and DFB-LD2 Output of laser wavelength can carry out longitudinal mode matching with resonant cavity during the scanning process.
Resonance endovenous laser is exported by hysteroscope, focuses on the respectively through the first condenser lens and the focusing of the second condenser lens
At the photosurface of one photodetector and the second photodetector.When the laser of input resonator does not realize longitudinal mode with resonant cavity
The optical signal that timing, the first photodetector and the second photodetector detect is extremely faint, even lower than detection limit.When defeated
When entering the laser of resonant cavity and realizing that longitudinal mode matches with resonant cavity, light that the first photodetector and the second photodetector detect
The enhancing of signal moment.By signal processing and analysis control system to DFB-LD controller realize feedback regulation, realize DFB-LD1 and
DFB-LD2 output laser rapidly switches off.Ring-down time T1=t1-t0.
DFB-LD controller is adjusted on the basis of before by temperature, and the characteristic absorption wave of DFB-LD1 output gas A is made
It is long, make the characteristic absorption wavelength of DFB-LD2 output gas B.Realize longitudinal mode matching when, the first photodetector collect via
The event of swinging that declines for the gas A that second narrow band filter obtains, as shown in Fig. 2 (B), ring-down time T2=t2-t0.First photoelectricity is visited
The event of swinging that declines that device collects the gas B obtained via the first narrow band filter is surveyed, as shown in Fig. 2 (C), ring-down time T3=t3-
t0。
Later, continuously adjusting by DFB-LD controller, repeats the above process, obtains multiple events of swinging that decline,
As shown in Figure 3.Fig. 3 show multiple decline and swings event ring-down time instrumentation plan.It is right in signal processing and analysis control system
Ring-down time carries out error analysis and carries out data processing, obtains the average ring-down time T of gas A2' and being averaged for gas B decline
Swing time T3’。
Finally, obtaining the concentration N of gas A using langbobier lawAWith the concentration N of gas BBIt is expressed as
Wherein c is the light velocity；σ(λA) and σ (λB) absorption cross-section size under gases used characteristic absorption wavelength is measured respectively,
Time quantum measured amount for before.
Double groups are being realized by using four mirror annular stable cavity of high-fineness by means of above-mentioned technical proposal of the invention
While dividing trace gas concentration to synchronize on-line measurement, the components such as optoisolator, laser bundling device, optical splitter are saved, are made
Structure is simplified, and volume is reduced.
It should be understood by those ordinary skilled in the art that: the discussion of any of the above embodiment is exemplary only, not
It is intended to imply that the scope of the present disclosure (including claim) is limited to these examples；Under thinking of the invention, above embodiments
Or can also be combined between the technical characteristic in different embodiments, step can be realized with random order, and be existed such as
Many other variations of the upper different aspect of the invention, for simplicity, they are not provided in details.
In addition, to simplify explanation and discussing, and in order not to obscure the invention, it can in provided attached drawing
It is connect with showing or can not show with the well known power ground of integrated circuit (IC) chip and other components.Furthermore, it is possible to
Device is shown in block diagram form, to avoid obscuring the invention, and this has also contemplated following facts, i.e., about this
The details of the embodiment of a little block diagram arrangements be height depend on will implementing platform of the invention (that is, these details should
It is completely within the scope of the understanding of those skilled in the art).Elaborating that detail (for example, circuit) is of the invention to describe
In the case where exemplary embodiment, it will be apparent to those skilled in the art that can be in these no details
In the case where or implement the present invention in the case that these details change.Therefore, these descriptions should be considered as explanation
Property rather than it is restrictive.
Although having been incorporated with specific embodiments of the present invention, invention has been described, according to retouching for front
It states, many replacements of these embodiments, modifications and variations will be apparent for those of ordinary skills.Example
Such as, discussed embodiment can be used in other memory architectures (for example, dynamic ram (DRAM)).
The embodiment of the present invention be intended to cover fall into all such replacements within the broad range of appended claims,
Modifications and variations.Therefore, all within the spirits and principles of the present invention, any omission, modification, equivalent replacement, the improvement made
Deng should all be included in the protection scope of the present invention.
Claims (6)
1. a kind of bi-component trace gas concentration measuring device based on Research on Cavity Ring Down Spectroscopy characterized by comprising
First tunable continuous wave laser, the second tunable continuous wave laser, first mode matching system, second mode matching system
System, resonant cavity, the first condenser lens, the second condenser lens, the first narrow band filter, the second narrow band filter, the first photoelectricity are visited
Survey device, the second photodetector, laser controller and signal processing and analysis control system；
The resonant cavity includes the first hysteroscope, the second hysteroscope, third hysteroscope and the 4th hysteroscope；
The laser that the first tunable continuous wave laser issues enters the resonant cavity after the first mode matching system,
Through successively transmission the 4th hysteroscope, first focus after second hysteroscope and the reflection of third hysteroscope after first hysteroscope
Lens and the first narrow band filter are ultimately incident upon first photodetector；
The laser that the second tunable continuous wave laser issues enters the resonant cavity after the second mode matching system,
Through successively the transmission third hysteroscope, second focus after first hysteroscope and the reflection of the 4th hysteroscope after second hysteroscope
Lens and the second narrow band filter are ultimately incident upon second photodetector；
First photodetector and second photodetector are electrically connected with the signal processing and analysis control system respectively
Connect, the signal processing and analysis control system is connect with the laser controller, the laser controller respectively with it is described
First tunable continuous wave laser and the second tunable continuous wave laser electrical connection.
2. the bi-component trace gas concentration measuring device according to claim 1 based on Research on Cavity Ring Down Spectroscopy, special
Sign is, the normal of first hysteroscope and the 4th hysteroscope is overlapped, and is directed toward the center of the resonant cavity, second hysteroscope and
The normal of third hysteroscope is overlapped, and is directed toward the center of the resonant cavity.
3. the bi-component trace gas concentration measuring device according to claim 2 based on Research on Cavity Ring Down Spectroscopy, special
Sign is that first hysteroscope, the second hysteroscope, third hysteroscope and the 4th hysteroscope normal direction are directed toward the mirror surface plating at resonant cavity center
High-reflecting film, another side plate anti-reflection film.
4. the bi-component trace gas concentration measuring device according to claim 1 based on Research on Cavity Ring Down Spectroscopy, special
Sign is that the first mode matching system and the second mode matching system all use Galilean telescope structure.
5. the bi-component trace gas concentration measuring device according to claim 1 based on Research on Cavity Ring Down Spectroscopy, special
Sign is that first photodetector and second photodetector have the high speed of response, and spectral response range is covered
Lid under test gas characteristic absorption wavelength.
6. the bi-component trace gas concentration measuring device according to claim 1 based on Research on Cavity Ring Down Spectroscopy, special
Sign is, the first mode matching system and eyeglass and the first condenser lens and second in second mode matching system
Condenser lens is coated with the anti-reflection film of corresponding under test gas characteristic absorption wavelength.
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