CN106835264A - A kind of seedholder - Google Patents
A kind of seedholder Download PDFInfo
- Publication number
- CN106835264A CN106835264A CN201710092804.2A CN201710092804A CN106835264A CN 106835264 A CN106835264 A CN 106835264A CN 201710092804 A CN201710092804 A CN 201710092804A CN 106835264 A CN106835264 A CN 106835264A
- Authority
- CN
- China
- Prior art keywords
- seedholder
- seed crystal
- screw
- main body
- contiguous block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims abstract description 96
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000002360 preparation method Methods 0.000 abstract description 3
- 238000004064 recycling Methods 0.000 abstract description 3
- 238000004140 cleaning Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 11
- 229910052594 sapphire Inorganic materials 0.000 description 9
- 239000010980 sapphire Substances 0.000 description 9
- 238000010899 nucleation Methods 0.000 description 8
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 7
- 238000005231 Edge Defined Film Fed Growth Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 208000037656 Respiratory Sounds Diseases 0.000 description 2
- 239000010431 corundum Substances 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010437 gem Substances 0.000 description 2
- 229910001751 gemstone Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- 206010000372 Accident at work Diseases 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 229910052571 earthenware Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/34—Edge-defined film-fed crystal-growth using dies or slits
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
Abstract
A kind of seedholder, is related to artificial lens preparation field, and seedholder main body is by shaft end contiguous block in the present invention（1）, seedholder upper body（6）, seedholder front body（7）With seedholder sub-body（14）Composition, shaft end contiguous block is connected with seedholder upper body, by means of connector by seed crystal（9）It is clamped between seedholder upper body, seedholder front body and seedholder sub-body, seedholder of the invention can realize fast quick-detach, cleaning, assembling, replacing.The recycling rate of waterused of seed crystal can also be improved, extends the service life of seed crystal, reduce production cost.Compared with existing cluster seedholder, can not only avoid the loosening of seed crystal from dropping and then cause accident, be also greatly reduced operation difficulty, enable the use that seed crystal is safe and reliable.
Description
【Technical field】
The present invention relates to artificial lens preparation field, and in particular to seed crystal during a kind of use EFG farads of multi-disc gem crystal processed
Clamper.
【Background technology】
Sapphire (Sapphire) is a kind of aluminum oxide (α A1203) monocrystalline, be also called corundum.Corundum crystal has excellent
Good optics, electrical and mechanical performance, its hardness is only second to diamond.With high mechanical strength, high temeperature chemistry stable performance, heat conduction
The features such as good, high-insulativity of property, small coefficient of friction.Sapphire is widely used in semiconductor devices, opto-electronic device, laser
Device, vacuum device, precision optical machinery etc..Particularly contain Ti4+Sapphire, is excellent solid wide-band tuning laser material, can be made
Superpower femtosecond magnitude tunable laser.High-quality gem crystal it is artificial synthesized be people research key areas.
It is artificial prepare sapphire crystal material at present oneself have a variety of methods, mainly have:Kyropoulos（Kyropolous, letter
Claim Ky methods), EFG technique (i.e. Edge Defined Film-fed Growth techniques, abbreviation EFG methods), heat
Exchange process (i.e. Heat Exchange Method, abbreviation HEM are stained with), czochralski method（Czochralski), Bridgman method
CBridgman), Bridgman-Stockbarger method etc..By taking EFG methods as an example, manufacture method approximately as：Alumina raw material is loaded into tungsten earthenware
In crucible, heating melting is put into specific mould inside crucible, and mould is provided with hole or the groove of proper width.Due to aluminum oxide with
There is wellability between mould, therefore under capillary action, solution can rise to die tip, and form one layer thin in die top
Film.
The shaft end connecting device of seedholder is connected with seed shaft, and seed crystal is fixed in seedholder main body, mobile
Seed shaft makes the seed crystal of seedholder lower end be contacted with the aluminum oxide film of mould upper surface.Seed crystal is by seed shaft with certain
Speed is lifted, constantly lifted upwards, and after it departs from high-temperature area, crystal is that crystallization forms solid crystals.By capillarity
It is capable of achieving to continue feed, is achieved in continuous crystal and draws.
As can be seen here, in the preparation process of sapphire single-crystal material, seedholder is important part.It is brilliant drawing
During body, seed crystal needs to remain relatively accurate position, while also needing to ensure the crystal in the pulling process of crystal
Will not fall off, it is to avoid because crystal drops the production accident for causing.
It is cluster seedholder that seedholder is more common at present, and seed crystal is cuboid, in the side of cuboid
Open a gap, seed crystal is partly embedded in seedholder lower end, and seed crystal is fixed on seedholder with tungsten-rhenium wire.This binding
Formula seedholder has the disadvantage that：
A, due to tungsten-rhenium wire it is relatively hard, be difficult to tighten in seed crystal during binding, carrying out seeding operate when its space bit
Put and be difficult to determine；
B, due to being bundled using tungsten-rhenium wire, it is a tightening state in cold conditions, but after it enters high-temperature area, with temperature
The rising tungsten-rhenium wire of degree can loosen, and then loosen seed crystal, or even come off.If come off during crystalline substance long, can be formed more
Big industrial accident；
C, due to being bundled using tungsten-rhenium wire, be broken using tungsten-rhenium wire after once, need to tie again again when being used for the second time
Tie up, operation is relative complex, while it cannot be guaranteed that the uniformity of operation；
D, due to being bundled using tungsten-rhenium wire, itself and seed crystal directly contact are easily caused not during firmly bundling to seed crystal
Hold very much detectable dark crackle, influence the intensity of seed crystal, and then cause the seed crystal during seeding or crystalline substance long to be broken, formed big
Production accident, while declining the recycling rate of waterused of seed crystal.
Therefore, in the urgent need to designing a kind of new seedholder.
【The content of the invention】
In view of it is not enough present in background technology, the invention provides a kind of brand-new seedholder, to solve existing seed crystal
Clamper installs the problem of inconvenient and stability difference.
Seedholder of the invention is adopted the following technical scheme that：
A kind of seedholder, the seedholder has a seedholder main body, and the seedholder main body is by shaft end
Contiguous block, seedholder upper body, seedholder front body and seedholder sub-body composition, by connection
Part by seed crystal be clamped in seedholder upper body, seedholder front body and seedholder sub-body it
Between, shaft end contiguous block is connected with seedholder upper body.
In above-mentioned seedholder, described connector can be stud and screw, by connecting stud, nut and
With shaft end contiguous block be connected described seedholder upper body by spacer.
In above-mentioned seedholder, the upper end of shaft end contiguous block is connected with main shaft by lock-screw.
It is by upper trip bolt that seedholder upper body and seedholder is anterior in above-mentioned seedholder
Main body is connected.
In above-mentioned seedholder, by lower trip bolt by seedholder upper body and seedholder bottom
Main body is connected.
In above-mentioned seedholder, one or more seed crystals clamping position is provided with the seedholder main body,
The seed crystal above-below direction lock-screw that limitation seed crystal is freely up and down spent is provided with above each seed crystal clamping position, position is clamped in seed crystal
Side be provided with the seed crystal left and right directions lock-screw of limitation seed crystal or so the free degree.
In above-mentioned seedholder, the side of the upper end of seed crystal is provided with groove, constitutes limited step, seedholder master
The side of body is provided with the boss with the groove match.
In above-mentioned seedholder, seed crystal above-below direction lock-screw and seed crystal left and right directions lock-screw and seed crystal
Between set seed crystal interval piece.
In above-mentioned seedholder, several seed crystals clamping position is set, each station can edge in seedholder main body
Straight line is arranged.
Due to using above-mentioned technical proposal, the present invention to have the advantages that：
Seedholder of the invention can realize fast quick-detach, cleaning, assembling, replacing.Can guarantee that seed crystal is used safely simultaneously, keep away
Exempt from seed crystal fracture.The recycling rate of waterused of seed crystal can also be improved, extends the service life of seed crystal, reduce production cost.With it is existing
Cluster seedholder compare, can not only avoid the loosening of seed crystal from dropping and then cause accident, be also greatly reduced behaviour
Make difficulty, enable the use that seed crystal is safe and reliable.
【Brief description of the drawings】
Fig. 1 is the dimensional structure diagram of a preferred embodiment of the invention；
Fig. 2 is the left view structural representation of above preferred embodiment of the present invention；
Fig. 3 is the main structure diagram of above preferred embodiment of the present invention；
Label in accompanying drawing is with the corresponding relation of component names：
1st, shaft end contiguous block；2nd, connecting stud；3rd, nut；4th, spacer sleeve；5th, seed crystal above-below direction lock-screw；6th, seed crystal clamping
Device upper body；7th, seedholder front body；8th, seed crystal interval piece；9th, seed crystal；10th, lock-screw；11st, upper fastening spiral shell
Nail；12nd, seed crystal left and right directions lock-screw；13rd, lower trip bolt；14th, seedholder sub-body.
【Specific embodiment】
1-3 elaborates to a preferred embodiment of seedholder of the present invention below in conjunction with the accompanying drawings.In this embodiment
Each critical piece is to realize connection by stud, screw.It is obvious also possible to using other connectors of the prior art to seed
Critical piece in brilliant clamper is attached, such as draw-in groove or snap ring etc..
As shown in Figure 1, by means of lock-screw 10 by shaft end contiguous block 1 and upper axle（It is not shown）Connection.
Realize that seedholder upper body 6 is connected with shaft end contiguous block 1 by connecting stud 2.
The fastening of connecting stud 2 is realized by nut 3.
The effect of spacer sleeve 4 is that shaft end contiguous block 1 and seedholder upper body 6 are spaced apart to as on seed crystal
The fastening of lower direction lock-screw 5 and unscrew offer operating space.Can be to seed crystal 9 by means of seed crystal above-below direction lock-screw 5
Freely up and down degree be adjusted.
Seedholder front body 7 is connected with seedholder upper body 6 by upper trip bolt 11.
Seedholder sub-body 14 is connected with seedholder upper body 6 by lower trip bolt 13.
Can be by seed crystal 9 and seed crystal above-below direction lock-screw 5 and seed crystal left and right directions lock-screw using seed crystal interval piece 8
12 are spaced apart, the seed crystal interval piece 8 made of exotic materials such as tungstens, can both play heat-insulated between seed crystal and screw
Effect, can protect seed crystal not injured by stress, it is to avoid to cause dark crackle again.
Seedholder sub-body 14 is used to position seed crystal 9.
Two examples that crystal draws sapphire crystal in stove are drawn the following is using seedholder of the invention：
1st, many 8 thickness 16mm, the sapphire crystal of width 100mm are drawn simultaneously in stove.Can be accurate during seeding
True arrival mold center position, smoothly makes the success of seed crystal seeding, is finished up after drawing length 600mm, put off, cooling down.
This seedholder ensure that accurate seeding and normal drawing.Find that each seed crystal is normal after tearing stove open, through checking single seed crystal
4 kilograms of load-bearing is completely normal.After with wire cutting, seed crystal is cut away, through checking the seed crystal to comply fully with the condition for reusing.This
Case verification can be accomplished to be accurately positioned in the case where a plurality of brilliant plate draws, while single seed crystal can 4 kilograms of load-bearing.
2nd, many 100 thickness 1mm, the sapphire crystal of width 90mm are drawn simultaneously in stove.The energy during seeding
It is enough accurately to reach mold center position, smoothly make the success of seed crystal seeding, finished up after drawing length 800mm, put off, lower the temperature it is cold
But.This seedholder ensure that the accurate seeding of seed crystal and normal drawing.This case verification energy in the case where a plurality of brilliant plate draws
It is enough to accomplish accurate positioning, the normal drawing of crystal is realized, after seed crystal is cut away with wire cutting, by detecting that the seed crystal is accorded with completely
The condition that conjunction is reused.
Claims (10)
1. a kind of seedholder, the seedholder has a seedholder main body, it is characterised in that：The seed crystal is clamped
Device main body is by shaft end contiguous block（1）, seedholder upper body（6）, seedholder front body（7）And seedholder
Sub-body（14）Composition, shaft end contiguous block（1）With seedholder upper body（6）It is connected, by means of connector by seed
It is brilliant（9）It is clamped in seedholder upper body（6）, seedholder front body（7）And seedholder sub-body
（14）Between.
2. seedholder as claimed in claim 1, it is characterised in that：Described connector is stud and screw.
3. seedholder as claimed in claim 2, it is characterised in that：By connecting stud（2）, nut（3）And spacer sleeve
（4）By described seedholder upper body（6）With shaft end contiguous block（1）It is connected.
4. seedholder as claimed in claim 2, it is characterised in that：By lock-screw（10）By shaft end contiguous block（1）
Upper end be connected with main shaft.
5. seedholder as claimed in claim 2, it is characterised in that：By upper trip bolt（11）By on seedholder
Portion's main body（6）With seedholder front body（7）It is connected.
6. seedholder as claimed in claim 2, it is characterised in that：By lower trip bolt（13）By on seedholder
Portion's main body（6）With seedholder sub-body（14）It is connected.
7. seedholder as claimed in claim 2, it is characterised in that：Be provided with the seedholder main body one or
Multiple seed crystals clamp position, and the seed crystal above-below direction locking that limitation seed crystal is freely up and down spent is provided with above each seed crystal clamping position
Screw（5）, the seed crystal left and right directions lock-screw of limitation seed crystal or so the free degree is provided with the side of seed crystal clamping position（12）.
8. seedholder as claimed in claim 7, it is characterised in that：Seed crystal（9）The side of upper end be provided with groove, constitute
Limited step, the side of seedholder main body is provided with the boss with the groove match.
9. seedholder as claimed in claim 2, it is characterised in that：Seed crystal above-below direction lock-screw（5）And seed crystal
Left and right directions lock-screw（12）With seed crystal（9）Between set seed crystal interval piece（8）.
10. seedholder as claimed in claim 1, it is characterised in that：Several seeds are provided with seedholder main body
Crystalline substance clamping position, each station is arranged along straight line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710092804.2A CN106835264A (en) | 2017-02-21 | 2017-02-21 | A kind of seedholder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710092804.2A CN106835264A (en) | 2017-02-21 | 2017-02-21 | A kind of seedholder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106835264A true CN106835264A (en) | 2017-06-13 |
Family
ID=59133777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710092804.2A Pending CN106835264A (en) | 2017-02-21 | 2017-02-21 | A kind of seedholder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106835264A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109576778A (en) * | 2018-12-25 | 2019-04-05 | 内蒙古中环光伏材料有限公司 | A method of reducing the impurity content that CZ method prepares monocrystalline |
| CN114836819A (en) * | 2022-03-29 | 2022-08-02 | 徐州鑫晶半导体科技有限公司 | Seed crystal pulling device and crystal growth equipment |
| CN115449896A (en) * | 2022-09-27 | 2022-12-09 | 南通大学 | Seed crystal fixing method for growing silicon carbide single crystal by vapor phase method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2409640A1 (en) * | 1974-02-28 | 1975-09-11 | Siemens Ag | Optical orientation of seed crystals - in crystallographic directions other than the (111) direction |
| JPS5523017A (en) * | 1978-08-02 | 1980-02-19 | Toshiba Corp | Seed crystal holding device |
| US5851287A (en) * | 1996-03-01 | 1998-12-22 | Shin-Etsu Handotai Co., Ltd. | Seed crystal holder |
| CN2503077Y (en) * | 2001-09-18 | 2002-07-31 | 中国科学院福建物质结构研究所 | Seed rod centering controller |
| CN204125563U (en) * | 2014-08-25 | 2015-01-28 | 内蒙古京晶光电科技有限公司 | The seed crystal clamping device that a kind of centering is adjustable |
-
2017
- 2017-02-21 CN CN201710092804.2A patent/CN106835264A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2409640A1 (en) * | 1974-02-28 | 1975-09-11 | Siemens Ag | Optical orientation of seed crystals - in crystallographic directions other than the (111) direction |
| JPS5523017A (en) * | 1978-08-02 | 1980-02-19 | Toshiba Corp | Seed crystal holding device |
| US5851287A (en) * | 1996-03-01 | 1998-12-22 | Shin-Etsu Handotai Co., Ltd. | Seed crystal holder |
| CN2503077Y (en) * | 2001-09-18 | 2002-07-31 | 中国科学院福建物质结构研究所 | Seed rod centering controller |
| CN204125563U (en) * | 2014-08-25 | 2015-01-28 | 内蒙古京晶光电科技有限公司 | The seed crystal clamping device that a kind of centering is adjustable |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109576778A (en) * | 2018-12-25 | 2019-04-05 | 内蒙古中环光伏材料有限公司 | A method of reducing the impurity content that CZ method prepares monocrystalline |
| CN114836819A (en) * | 2022-03-29 | 2022-08-02 | 徐州鑫晶半导体科技有限公司 | Seed crystal pulling device and crystal growth equipment |
| CN114836819B (en) * | 2022-03-29 | 2023-06-13 | 中环领先(徐州)半导体材料有限公司 | Seed crystal pulling device and crystal growth equipment |
| CN115449896A (en) * | 2022-09-27 | 2022-12-09 | 南通大学 | Seed crystal fixing method for growing silicon carbide single crystal by vapor phase method |
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Application publication date: 20170613 |