CN106814416B - Long-travel grating rose engine and its cutting tool assembly - Google Patents
Long-travel grating rose engine and its cutting tool assembly Download PDFInfo
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- CN106814416B CN106814416B CN201710017948.1A CN201710017948A CN106814416B CN 106814416 B CN106814416 B CN 106814416B CN 201710017948 A CN201710017948 A CN 201710017948A CN 106814416 B CN106814416 B CN 106814416B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
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Abstract
The invention discloses a kind of cutting tool assemblies of long-travel grating rose engine, including for connecting delineation mobile device and can be along delineating the tool rest bracket that moves of direction, multiple icking tools vertically downward are installed below the tool rest bracket, multiple icking tools are successively uniformly arranged along step direction.The cutting tool assembly for being provided with multiple icking tools is installed on long-travel grating rose engine, makes full use of the long stroke advantage of long-travel grating rose engine, the synchronous delineation of muti-piece small area grating is realized, improves the delineation efficiency and stability of small area grating.In addition, the synchronous delineation of muti-piece small area grating only can be realized by replacing cutting tool assembly, does not change other major mechanical structures of long-travel grating rose engine, simplify installation and adjustment program.The invention also discloses a kind of long-travel grating rose engines including above-mentioned cutting tool assembly.
Description
Technical field
The present invention relates to grating ruling fields, more particularly to a kind of cutting tool assembly of long-travel grating rose engine.In addition,
The invention further relates to a kind of long-travel grating rose engines including above-mentioned cutting tool assembly.
Background technique
Long-travel grating rose engine is the precision machinery device for making large area ruled grating.It is held by stepping workbench
The grating substrate for carrying metal-plated membrane layer realizes step direction movement, and the icking tool with step direction orthogonal motion is on metallic diaphragm
Extruding forms grating flute profile, rows at once dynamic.The movement travel of stepping workbench determines optical grating graduating machine vertical raster cutting
The maximum raster size that direction can make, the movement travel of icking tool determine that optical grating graduating machine can be made along grating cutting direction
The maximum raster size of work, has been made large-area grating.
But sometimes for the grating of production small area, small area grating can be made with long-travel grating rose engine.It adopts
Large-area grating production is carried out with large-area grating substrate, after the completion of preparing grating, after carrying out mechanical dissection to large-area grating
Form small area grating, this method to the processing of the long-term working stability and large-area grating substrate of optical grating graduating machine, point
It cuts and proposes higher requirement.Or small area grating is directly delineated using small area grating substrate, efficiency is lower.
Therefore, how a kind of long-travel grating rose engine can be used in the synchronous delineation of muti-piece small area grating substrate is provided
Cutting tool assembly, improve job stability and working efficiency and be a technical problem that technical personnel in the field need to solve at present.
Summary of the invention
The object of the present invention is to provide a kind of cutting tool assemblies of long-travel grating rose engine, can be used in muti-piece small area light
The synchronous delineation of grid, improves job stability and working efficiency.It include above-mentioned cutter it is a further object of the present invention to provide one kind
The long-travel grating rose engine of assembly.
In order to solve the above technical problems, the present invention provides a kind of cutting tool assembly of long-travel grating rose engine, including it is used for
Connection delineation mobile device can be simultaneously equipped with multiple vertical below the tool rest bracket that delineation direction is moved, the tool rest bracket
Downward icking tool, multiple icking tools are successively uniformly arranged along step direction.
Preferably, the tool rest bracket includes the tool guide extended along step direction, is installed on the tool guide simultaneously
The adjustable plate that can be moved along the tool guide extending direction and the adjusting driving device for driving the adjustable plate, it is multiple
The icking tool is installed on adjustable plate.
Preferably, multiple icking tool tops are connected separately with multiple mounting racks, are provided on the adjustable plate along stepping
The sliding slot that direction extends, multiple mounting racks are installed on the sliding slot, and can move along the sliding slot extending direction, described
The connecting element for fixing the installation rack position is provided at the top of mounting rack.
Preferably, the sliding slot there are two being symmetrical arranged on the adjustable plate, the both ends on the mounting rack top are respectively provided with
There is the connecting element.
Preferably, the adjusting driving device includes piezoelectric ceramics and flexible hinge, one end connection of the piezoelectric ceramics
The tool rest bracket, the other end of the piezoelectric ceramics connect one end of the flexible hinge, the other end of the flexible hinge
Connect the adjustable plate.
Preferably, the connecting element is specially to tighten bolt.
Preferably, including two icking tools.
Preferably, further include detection device for detecting cutting position deviation amount.
Preferably, the detection device includes that the interferometer set gradually along step direction, reference mirror and measurement are anti-
Mirror is penetrated, the interferometer is opposite with the reference mirror and the measurement reflecting mirror respectively, and the icking tool is set to described dry
It relates between meter and the reference mirror, the interferometer is fixedly installed in the tool rest bracket, and the reference mirror is fixed
In the adjustable plate, the measurement reflecting mirror is fixedly installed in the stepping workbench of the long-travel grating rose engine.
The present invention provides a kind of long-travel grating rose engine, including delineates mobile device and be installed on the delineation movement
The knife rest of device, the cutting tool assembly are specially cutting tool assembly described in above-mentioned any one.
The cutting tool assembly of long-travel grating rose engine provided by the invention, including tool rest bracket and multiple icking tools, knife rest bottom
For seat for connecting delineation mobile device and can move along delineation direction, multiple icking tools vertically downward and are installed on tool rest bracket
Lower section, and multiple icking tools are successively uniformly arranged along step direction.The cutting tool assembly for being provided with multiple icking tools is installed on big stroke
Optical grating graduating machine makes full use of the long stroke advantage of long-travel grating rose engine, realizes the synchronous delineation of muti-piece small area grating,
Improve the delineation efficiency and stability of small area grating.In addition, muti-piece small area only can be realized by replacing cutting tool assembly
The synchronous delineation of grating, does not change other major mechanical structures of long-travel grating rose engine, simplifies installation and adjustment program.
The present invention also provides a kind of long-travel grating rose engines including above-mentioned cutting tool assembly, since above-mentioned cutting tool assembly has
There is above-mentioned technical effect, above-mentioned long-travel grating rose engine should also have same technical effect, no longer be discussed in detail herein.
Detailed description of the invention
Fig. 1 is a kind of side of specific embodiment of long-travel grating rose engine provided by the present invention and its cutting tool assembly
Depending on schematic diagram;
Fig. 2 is a kind of master of specific embodiment of long-travel grating rose engine provided by the present invention and its cutting tool assembly
Depending on schematic diagram.
Specific embodiment
Core of the invention is to provide a kind of cutting tool assembly of long-travel grating rose engine, can be used in muti-piece small area light
The synchronous delineation of grid, improves job stability and working efficiency.It includes above-mentioned cutter that another core of the invention, which is to provide a kind of,
The long-travel grating rose engine of assembly.
In order to enable those skilled in the art to better understand the solution of the present invention, with reference to the accompanying drawings and detailed description
The present invention is described in further detail.
Fig. 1 and Fig. 2 are please referred to, Fig. 1 is one kind of long-travel grating rose engine provided by the present invention and its cutting tool assembly
The schematic side view of specific embodiment;Fig. 2 is the one of long-travel grating rose engine provided by the present invention and its cutting tool assembly
The schematic front view of kind specific embodiment.
The long-travel grating rose engine that the specific embodiment of the invention provides, including pedestal 1, stepping workbench 2, delineation shifting
Dynamic device and cutting tool assembly, stepping workbench 2 are installed on pedestal 1 and can move along step direction, delineation mobile device installation
In pedestal 1, cutting tool assembly is installed on delineation mobile device and can move along delineation direction.It is equipped on stepping workbench 2 more
A fixture for fixed grating substrate, multiple fixtures are successively uniformly arranged along step direction.Multiple grating substrates are placed in
Stepping workbench 2 is delineated simultaneously using multiple icking tools.
Wherein cutting tool assembly includes tool rest bracket 6 and multiple icking tools, and tool rest bracket 6 is for connecting delineation mobile device and energy
Enough to move along delineation direction, multiple icking tools vertically downward and are installed on 6 lower section of tool rest bracket, and multiple icking tools are along step direction
Successively uniformly arrangement.Step direction is vertical with delineation direction, and delineation direction is icking tool prolonging in grating substrate ruled grating cutting
Stretch direction, step direction in horizontal direction perpendicular to delineation direction.
Specifically, delineation mobile device includes delineation pedestal 3, the gentle slick and frivolous set 5 of air-float guide rail 4, and delineation pedestal 3 is installed on
Pedestal 1, air-float guide rail 4 are installed on delineation pedestal 3 and extend along delineation direction, and two delineation pedestals 3, air-float guide rail can be set
4 are set between two delineation pedestals 3, and air bearing sliding sleeve 5 is installed on air-float guide rail 4 and can move along 4 extending direction of air-float guide rail
Dynamic, tool rest bracket 6 is removably mounted to air bearing sliding sleeve 5.Air bearing sliding sleeve 5 be able to drive tool rest bracket 6 along delineation direction move with
Delineation is completed, gear and rack teeth mechanism can also be used and realize driving, it is within the scope of the present invention.Tool rest bracket 6 simultaneously
It is detachably connected with air bearing sliding sleeve 5, is conveniently replaceable cutting tool assembly.
The cutting tool assembly for being provided with multiple icking tools is installed on long-travel grating rose engine, long-travel grating is made full use of to carve
The long stroke advantage for the machine of drawing realizes the synchronous delineation of muti-piece small area grating, improves the delineation efficiency of small area grating and steady
It is qualitative.In addition, the synchronous delineation of muti-piece small area grating only can be realized by replacing cutting tool assembly, long-travel grating quarter is not changed
Other major mechanical structures for the machine of drawing, simplify installation and adjustment program.
In the cutting tool assembly that the specific embodiment of the invention provides, tool rest bracket 6 includes tool guide 7, adjustable plate 10
With adjusting driving device, tool guide 7 extends along step direction, and adjustable plate 10 is installed on tool guide 7 and can lead along knife rest
7 extending direction of rail is mobile, and multiple icking tools are installed on adjustable plate 10, adjusts driving device for driving adjustable plate 10.It can pass through
Adjustable plate 10 drives icking tool to move along step direction and is finely adjusted to icking tool position.
Adjustable plate 10 and icking tool have a variety of connection types, can be fixedly connected, other connection types can also be used, such as exist
Multiple icking tool tops are separately connected multiple mounting racks, and the sliding slot 11, Duo Gean extended along step direction is provided on adjustable plate 10
It shelves and is installed on sliding slot 11, and can move 11 extending directions along the chute, be provided at the top of mounting rack for fixing and mounting bracket position
The connecting element 12 set.It is provided with mounting rack on i.e. each icking tool, connecting element 12 is provided on mounting rack, is connected to adjustable plate
Sliding slot 11 on 10 11 can slide along the chute to adjust the position of icking tool according to the needs of actual conditions, after position determines,
It is fastened by connecting element 12, fixes position.Wherein sliding slot 11 can be the various shapes such as long rectangular channel or oval-shaped slot, even
Connecing element 12 can be to tighten bolt, tighten screw or fixation clip etc., within the scope of the present invention.Specifically,
Sliding slot 11 there are two being symmetrical arranged on adjustable plate 10, the both ends on mounting rack top are provided with connecting element 12.Connected by increasing
The quantity for connecing element 12 improves the stability of icking tool.
In the cutting tool assembly that the specific embodiment of the invention provides, adjusting driving device includes piezoelectric ceramics 8 and flexibility
Hinge 9, one end of piezoelectric ceramics 8 connect tool rest bracket 6, and one end of the other end connection flexible hinge 9 of piezoelectric ceramics 8 is flexible
The other end of hinge 9 connects adjustable plate 10.Piezoelectric ceramics 8 can be used for micro-displacement adjustment, and it is accurate to improve displacement by flexible hinge 9
Property, spring structure can also be used instead of flexible hinge 9.
Two icking tools can be set, be correspondingly arranged two mounting racks, while delineating to two grating substrates, specially
First icking tool 18 and the second icking tool 19, the first mounting rack 13 and the second mounting rack 14, the first grating substrate 20 and the second grating base
Bottom 21.
On the basis of the cutting tool assembly that above-mentioned each specific embodiment provides, detection cutting position may be provided for
The detection device of departure.Specifically, detection device includes the interferometer 16 set gradually along step direction, reference mirror 15
With measurement reflecting mirror 17, interferometer 16 is opposite with reference mirror 15 and measurement reflecting mirror 17 respectively, and icking tool is set to interferometer
Between 16 and reference mirror 15, interferometer 16 is fixedly installed in tool rest bracket 6, and reference mirror 15 is fixedly installed in adjustable plate
10, measurement reflecting mirror 17 is fixedly installed in the stepping workbench 2 of long-travel grating rose engine.
The reference light and measurement light of interferometer 16 need to be incident on respectively on reference mirror 15 and measurement reflecting mirror 17, because
This mounting rack needs light passing.Light hole is set on mounting rack, current cutting position deviation amount is obtained by interferometer 16, is adjusted
The position of adjustable plate 10 can compensate.
In addition to above-mentioned cutting tool assembly, a specific embodiment of the invention also provides a kind of big row including above-mentioned cutting tool assembly
Journey optical grating graduating machine, refer to the prior art for the structure of other each sections of the long-travel grating rose engine, and repeats no more herein.
Long-travel grating rose engine provided by the present invention and its cutting tool assembly are described in detail above.Herein
Apply that a specific example illustrates the principle and implementation of the invention, the explanation of above example is only intended to help
Understand method and its core concept of the invention.It should be pointed out that for those skilled in the art, not taking off
, can be with several improvements and modifications are made to the present invention under the premise of from the principle of the invention, these improvement and modification also fall into this
In invention scope of protection of the claims.
Claims (8)
1. a kind of cutting tool assembly of long-travel grating rose engine, including for connecting delineation mobile device and can be along delineating direction
Mobile tool rest bracket (6), which is characterized in that multiple icking tools vertically downward are installed below the tool rest bracket (6), it is multiple
The icking tool is successively uniformly arranged along step direction;
The tool rest bracket (6) includes the tool guide (7) extended along step direction, is installed on the tool guide (7) and energy
Enough along the mobile adjustable plate (10) of the tool guide (7) extending direction and for driving the adjusting of the adjustable plate (10) to drive
Device, multiple icking tools are installed on adjustable plate (10);
Multiple icking tool tops are connected separately with multiple mounting racks, are provided on the adjustable plate (10) and extend along step direction
Sliding slot (11), multiple mounting racks are installed on the sliding slot (11), and can be mobile along the sliding slot (11) extending direction,
The connecting element (12) for fixing the installation rack position is provided at the top of the mounting rack.
2. cutting tool assembly according to claim 1, which is characterized in that institute there are two being symmetrical arranged on the adjustable plate (10)
It states sliding slot (11), the both ends on the mounting rack top are provided with the connecting element (12).
3. cutting tool assembly according to claim 2, which is characterized in that the adjusting driving device includes piezoelectric ceramics (8)
With flexible hinge (9), one end of the piezoelectric ceramics (8) connects the tool rest bracket (6), the piezoelectric ceramics (8) it is another
End connects one end of the flexible hinge (9), and the other end of the flexible hinge (9) connects the adjustable plate (10).
4. cutting tool assembly according to claim 3, which is characterized in that the connecting element (12) is specially to tighten bolt.
5. cutting tool assembly according to claim 1, which is characterized in that including two icking tools.
6. cutting tool assembly according to any one of claims 1 to 4, which is characterized in that further include for detecting cutting position
Set the detection device of departure.
7. cutting tool assembly according to claim 6, which is characterized in that the detection device includes successively setting along step direction
Interferometer (16), reference mirror (15) and measurement reflecting mirror (17) set, the interferometer (16) is respectively with described with reference to anti-
Penetrate mirror (15) and the measurement reflecting mirror (17) relatively, the icking tool is set to the interferometer (16) and the reference mirror
(15) between, the interferometer (16) is fixedly installed in the tool rest bracket (6), and the reference mirror (15) is fixedly installed in
The adjustable plate (10), measurement reflecting mirror (17) are fixedly installed in the stepping workbench of the long-travel grating rose engine
(2)。
8. a kind of long-travel grating rose engine including delineation mobile device and is installed on the knife rest for delineating mobile device,
It is characterized in that, the cutting tool assembly is specially cutting tool assembly described in claim 1 to 7 any one.
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CN201710017948.1A CN106814416B (en) | 2017-01-11 | 2017-01-11 | Long-travel grating rose engine and its cutting tool assembly |
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CN106814416B true CN106814416B (en) | 2019-05-21 |
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US6325576B1 (en) * | 1997-03-09 | 2001-12-04 | Electro Scientific Industries, Inc. | High throughput hole forming system with multiple spindles per station |
CN103257384A (en) * | 2013-06-03 | 2013-08-21 | 中国科学院长春光学精密机械与物理研究所 | Cutter frame system of grating ruling engine |
CN104678889A (en) * | 2014-12-25 | 2015-06-03 | 中国科学院长春光学精密机械与物理研究所 | Laser interference control method for grating mechanical ruling engine |
CN105388545A (en) * | 2015-12-14 | 2016-03-09 | 中国科学院长春光学精密机械与物理研究所 | Multi-grating ruling tool parallel interference type grating ruling method |
CN106019442A (en) * | 2016-08-09 | 2016-10-12 | 中国科学院长春光学精密机械与物理研究所 | Dual-rail-based multi-grating ruling tool type grating ruling tool rest system |
CN106066502A (en) * | 2016-08-09 | 2016-11-02 | 中国科学院长春光学精密机械与物理研究所 | Optical grating graduating machine and scoring system thereof |
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2017
- 2017-01-11 CN CN201710017948.1A patent/CN106814416B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6325576B1 (en) * | 1997-03-09 | 2001-12-04 | Electro Scientific Industries, Inc. | High throughput hole forming system with multiple spindles per station |
CN103257384A (en) * | 2013-06-03 | 2013-08-21 | 中国科学院长春光学精密机械与物理研究所 | Cutter frame system of grating ruling engine |
CN104678889A (en) * | 2014-12-25 | 2015-06-03 | 中国科学院长春光学精密机械与物理研究所 | Laser interference control method for grating mechanical ruling engine |
CN105388545A (en) * | 2015-12-14 | 2016-03-09 | 中国科学院长春光学精密机械与物理研究所 | Multi-grating ruling tool parallel interference type grating ruling method |
CN106019442A (en) * | 2016-08-09 | 2016-10-12 | 中国科学院长春光学精密机械与物理研究所 | Dual-rail-based multi-grating ruling tool type grating ruling tool rest system |
CN106066502A (en) * | 2016-08-09 | 2016-11-02 | 中国科学院长春光学精密机械与物理研究所 | Optical grating graduating machine and scoring system thereof |
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