CN106802276B - Double micro- Scan Architectures of rotating disc type - Google Patents
Double micro- Scan Architectures of rotating disc type Download PDFInfo
- Publication number
- CN106802276B CN106802276B CN201710036106.0A CN201710036106A CN106802276B CN 106802276 B CN106802276 B CN 106802276B CN 201710036106 A CN201710036106 A CN 201710036106A CN 106802276 B CN106802276 B CN 106802276B
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- Prior art keywords
- turntable
- hole
- micro
- slot
- rotating mechanism
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/02—Mechanical
- G01N2201/024—Modular construction
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- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Friction Gearing (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Double micro- Scan Architectures of rotating disc type of the invention belong to micrometering technical field, and in particular to a kind of sweep mechanism in ellipsoid indirect illumination micro-measurement apparatus；The structure includes the first turntable and the second turntable；First turntable is provided with through slot along radial direction, and the second turntable is provided with spiral-shaped through slot, and the combination of the first turntable through slot and the second turntable through slot forms light hole；Second turntable is rotated relative to the first turntable, can change radial light angle；Second turntable and the first turntable unitary rotation, can change axial light angle；The micro- Scan Architecture of double rotating disc types of the invention, for the special construction of ellipsoid indirect illumination micro-measurement apparatus, a kind of sweep mechanism that can be placed in inside micro-measurement apparatus is provided, the scanning range and axial 360 degree of scanning range of radial 30 to 120 degree are realized.
Description
Technical field
Double micro- Scan Architectures of rotating disc type of the invention belong to micrometering technical field, and in particular to one kind is anti-for ellipsoid
Penetrate the sweep mechanism in illumination micro-measurement apparatus.
Background technique
Based on the micro-measurement apparatus of ellipsoidal reflector illumination, using the ellipsoidal reflector of large-numerical aperture, and ellipsoid
The over focus of reflecting mirror is overlapped with the focus of illumination objective lens, lighting source provided herein, and laboratory sample is placed at perifocus
Obtain before to backward large angle illumination.Using ellipsoidal reflector illumination obtain before to backward large angle illumination, can
Efficiently against the deficiency that microscopic system resolving power is limited by numerical aperture, the transverse resolution and axial direction of system are increased substantially
Resolving power has broad application prospects.
In micrometering technical field, the technological means for scanning illumination is widely adopted, ellipsoid indirect illumination micrometering
Device is no exception.Moreover, important component in scanning means or ellipsoid indirect illumination micro-measurement apparatus.Due to
The particularity of ellipsoidal reflector lighting method needs for scanning means to be placed in the inside of micro-measurement apparatus, therefore traditional vibration
The scanning mode outside micro-measurement apparatus, which is arranged in, in mirror or tilting mirror etc. not can be used directly ellipsoid indirect illumination micrometering
In device.
Summary of the invention
Ellipsoid indirect illumination micro-measurement apparatus is not can be used directly in order to solve traditional galvanometer or rotating mirror scanning structure
The problems in, the invention discloses a kind of double micro- Scan Architectures of rotating disc type, for ellipsoid indirect illumination micro-measurement apparatus
Special construction provides a kind of sweep mechanism that can be placed in inside micro-measurement apparatus, realizes sweeping for radial 30 to 120 degree
Retouch range and axial 360 degree of scanning range.
The object of the present invention is achieved like this:
Double micro- Scan Architectures of rotating disc type, including the first turntable and the second turntable；
First turntable is provided with through slot along radial direction, and second turntable is provided with spiral-shaped through slot, the spiral shell
Rotation shape rotates a circle around the center of circle, and beginning and terminal are located at on Radius, the group of the first turntable through slot and the second turntable through slot
It closes, forms light hole；
First turntable and the second turntable are made by magnetic material, and synonyms pole is oppositely arranged；First turntable
It is provided with annular groove with the opposite direction of the second turntable, inside grooves are equipped with ball, and the relative position of the ball is by bracket
It is fixed；Using the principle that there is a natural attraction between the sexes, ball is clamped among the first turntable and the second turntable；
Second turntable is rotated relative to the first turntable, can change radial light angle；Second turntable and the first turntable are whole
Body rotation, can change axial light angle.
The above-mentioned micro- Scan Architecture of double rotating disc types, the second turntable are rotated relative to the first turntable, the second turntable and first turn
Disk unitary rotation, by being realized with flowering structure:
First turntable and the second turntable are placed up and down, and it is the logical of inverted trapezoidal that section is provided among the first turntable
Hole, through-hole inner surface are frosting, and polygonal through hole is provided among the second turntable, and the second turntable bottom symmetrical is provided with two
A telescopic rod, telescopic rod bottom install motor, the shaft connecting steering mechanism of the motor, and the lower end of the rotating mechanism is rib
Cylinder, cross sectional shape is consistent with polygonal through hole cross sectional shape, and upper end is rotary table, matches with the through-hole of the first turntable, described
The side of rotary table is frosting；
When telescopic rod retracts, rotating mechanism is inserted into simultaneously in the through-hole of the first turntable and the second turntable, utilizes rotating machine
Structure lower end and the matching relationship of the second turntable through-hole and the frictional force of rotating mechanism upper end and the first turntable through-hole inner surface,
It realizes and the first turntable and the second turntable is driven to rotate jointly；
When telescopic rod stretches out, rotating mechanism upper end is mutually separated with the first turntable through-hole, rotating mechanism and the first turntable without
Effect is realized and only drives the rotation of the second turntable.
The utility model has the advantages that
The first, the present invention utilizes through slot position on the first turntable and the second turntable by the first turntable of rotation and the second turntable
The combination set changes light passing hole site, and then realizes scanning, provides a kind of completely new scanning technique means.
The second, the present invention and core element only include the first turntable and the second turntable, and number of elements is few, at low cost, adjustment
Simply.
Third, in the micro- Scan Architecture of rotating disc type of the invention double, no matter the first turntable or the second turntable, size it is equal
It is suitable with scanning area, therefore can be realized miniaturization, it is placed in inside micro-measurement apparatus, can be realized radial 30 to 120 and spend
With axial 360 degree of scanning range.
4th, in the micro- Scan Architecture of double rotating disc types of the invention, the first turntable and the second turntable pass through motor control
Rotation, parameter can accurately be controlled using computer, light hole high accuracy positioning be realized, so that it is micro- to improve ellipsoid indirect illumination
The resolution ratio of measuring device.
Detailed description of the invention
Fig. 1 is position signal of the double micro- Scan Architectures of rotating disc type of the invention in ellipsoid indirect illumination micro-measurement apparatus
Figure.
Fig. 2 is the structural schematic diagram of the first turntable.
Fig. 3 is the structural schematic diagram of the second turntable.
Fig. 4 is the structural schematic diagram after the first turntable and the second disk combination.
Fig. 5 is the assembling schematic diagram of the first turntable, the second turntable, ball and bracket.
Fig. 6 is the structural schematic diagram of bracket.
Fig. 7 is the matching relationship schematic diagram of rotating mechanism and the first turntable and the second turntable when telescopic rod retracts.
Fig. 8 is the matching relationship schematic diagram of rotating mechanism and the first turntable and the second turntable when telescopic rod stretches out.
In figure: 1 first turntable, 2 second turntables, 3 balls, 4 brackets, 5 telescopic rods, 6 motors, 7 rotating mechanisms.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
The micro- Scan Architecture of double rotating disc types of the present embodiment, the position in entire ellipsoid indirect illumination micro-measurement apparatus
It sets, as shown in Figure 1.
Double micro- Scan Architectures of rotating disc type, including the first turntable 1 and the second turntable 2；
First turntable 1 is provided with through slot along radial direction, as shown in Figure 2；Second turntable 2 is provided with spiral-shaped
Through slot, it is described it is spiral-shaped rotate a circle around the center of circle, beginning and terminal are located at on Radius, as shown in Figure 3；First turntable 1
The combination of 2 through slot of through slot and the second turntable forms light hole, as shown in Figure 4；
First turntable 1 and the second turntable 2 are made by magnetic material, and synonyms pole is oppositely arranged；First turn
The opposite direction of disk 1 and the second turntable 2 is provided with annular groove, and inside grooves are equipped with ball 3, the relative position of the ball 3
It is fixed by bracket 4；Using the principle that there is a natural attraction between the sexes, ball 3 is clamped among the first turntable 1 and the second turntable 2；First turntable
1, the assembling schematic diagram of the second turntable 2, ball 3 and bracket 4 is as shown in figure 5, the structural schematic diagram of bracket 4 is as shown in Figure 6；
Second turntable 2 is rotated relative to the first turntable 1, can change radial light angle；Second turntable 2 and the first turntable
1 unitary rotation can change axial light angle.
Specific embodiment two
The micro- Scan Architecture of double rotating disc types of the present embodiment further limits second on the basis of specific embodiment one
Turntable 2 is rotated relative to the first turntable 1,1 unitary rotation of the second turntable 2 and the first turntable, by being realized with flowering structure:
First turntable 1 and the second about 2 turntable are placed, and it is inverted trapezoidal that section is provided among the first turntable 1
Through-hole, through-hole inner surface are frosting, and polygonal through hole, the setting of 2 bottom symmetrical of the second turntable are provided among the second turntable 2
There are two telescopic rod 5, motor 6, the shaft connecting steering mechanism 7 of the motor 6, the rotating mechanism 7 are installed in 5 bottom of telescopic rod
Lower end be prism, cross sectional shape is consistent with polygonal through hole cross sectional shape, and upper end is rotary table, the through-hole with the first turntable 1
It matches, the side of the rotary table is frosting；
When telescopic rod 5 retracts, as shown in fig. 7, rotating mechanism 7 is inserted into the through-hole of the first turntable 1 and the second turntable 2 simultaneously
In, it is logical using the matching relationship and 7 upper end of rotating mechanism and the first turntable 1 of 7 lower end of rotating mechanism and 2 through-hole of the second turntable
The frictional force of internal surface of hole is realized and the first turntable 1 and the second turntable 2 is driven to rotate jointly；
When telescopic rod 5 stretches out, as shown in figure 8,7 upper end of rotating mechanism is mutually separated with 1 through-hole of the first turntable, rotating mechanism
7 and first turntable 1 without effect, realize and only drive the rotation of second turntable 2.
It should be noted that when telescopic rod 5 stretches out in the case where the rotation of the second turntable 2, it is ensured that the first turntable 1 is motionless,
It can be realized in such a way that damping is set on the first turntable 1, as long as resistance is greater than the force of rolling friction of ball, the first turntable
1 can be realized and not rotate.Such technical solution very simple to those skilled in the art, the selection of parameter can also be with
It is obtained by limited trials, in this application just without being described in detail.
It should also be noted that, telescopic rod 5, motor 6 and rotating mechanism 7 only occupy intermediate region, scanning is not interfered with
Region.
Claims (1)
1. the micro- Scan Architecture of pair rotating disc type, which is characterized in that including the first turntable (1) and the second turntable (2)；
First turntable (1) is provided with through slot along radial direction, and second turntable (2) is provided with spiral-shaped through slot, described
Spiral-shaped to rotate a circle around the center of circle, beginning and terminal are located at on Radius, the first turntable (1) through slot and the second turntable (2)
The combination of through slot forms light hole；
First turntable (1) and the second turntable (2) are made by magnetic material, and synonyms pole is oppositely arranged；First turn
The opposite direction of disk (1) and the second turntable (2) is provided with annular groove, and inside grooves are equipped with ball (3), the ball (3)
Relative position is fixed by bracket (4)；Using the principle that there is a natural attraction between the sexes, ball (3) is clamped in the first turntable (1) and the second turntable
(2) intermediate；
Second turntable (2) is rotated relative to the first turntable (1), can change radial light angle；Second turntable (2) and first turn
Disk (1) unitary rotation, can change axial light angle；
Second turntable (2) is rotated relative to the first turntable (1), the second turntable (2) and the first turntable (1) unitary rotation, by with
Flowering structure is realized:
First turntable (1) and the second turntable (2) are placed up and down, and it is inverted trapezoidal that section is provided among the first turntable (1)
Through-hole, through-hole inner surface is frosting, is provided with polygonal through hole, the second turntable (2) bottom pair among the second turntable (2)
Claim setting there are two telescopic rod (5), motor (6) are installed in telescopic rod (5) bottom, the shaft connecting steering mechanism of the motor (6)
(7), the lower end of the rotating mechanism (7) is prism, and cross sectional shape is consistent with polygonal through hole cross sectional shape, and upper end is circle
Platform is matched with the through-hole of the first turntable (1), and the side of the rotary table is frosting；
When telescopic rod (5) retract, rotating mechanism (7) is inserted into simultaneously in the through-hole of the first turntable (1) and the second turntable (2), benefit
Matching relationship and rotating mechanism (7) upper end and the first turntable (1) with rotating mechanism (7) lower end and the second turntable (2) through-hole
The frictional force of through-hole inner surface is realized and the first turntable (1) and the second turntable (2) is driven to rotate jointly；
When telescopic rod (5) are stretched out, rotating mechanism (7) upper end is mutually separated with the first turntable (1) through-hole, rotating mechanism (7) and the
One turntable (1) is realized without effect and only drives the second turntable (2) rotation.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710036106.0A CN106802276B (en) | 2017-01-17 | 2017-01-17 | Double micro- Scan Architectures of rotating disc type |
| CN201910050692.3A CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
| CN201910050691.9A CN109580486B (en) | 2017-01-17 | 2017-01-17 | Double-turntable rotating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710036106.0A CN106802276B (en) | 2017-01-17 | 2017-01-17 | Double micro- Scan Architectures of rotating disc type |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910050691.9A Division CN109580486B (en) | 2017-01-17 | 2017-01-17 | Double-turntable rotating method |
| CN201910050692.3A Division CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106802276A CN106802276A (en) | 2017-06-06 |
| CN106802276B true CN106802276B (en) | 2019-04-05 |
Family
ID=58984552
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710036106.0A Expired - Fee Related CN106802276B (en) | 2017-01-17 | 2017-01-17 | Double micro- Scan Architectures of rotating disc type |
| CN201910050692.3A Expired - Fee Related CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
| CN201910050691.9A Expired - Fee Related CN109580486B (en) | 2017-01-17 | 2017-01-17 | Double-turntable rotating method |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910050692.3A Expired - Fee Related CN109540798B (en) | 2017-01-17 | 2017-01-17 | Double-turntable mounting structure and micro-scanning structure with same |
| CN201910050691.9A Expired - Fee Related CN109580486B (en) | 2017-01-17 | 2017-01-17 | Double-turntable rotating method |
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| Country | Link |
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| CN (3) | CN106802276B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108918419B (en) * | 2018-08-20 | 2020-12-18 | 长春理工大学 | Low-irradiance fine adjustment device for solar simulator |
| CN110987468A (en) * | 2019-11-27 | 2020-04-10 | 无为县金顺机动车检测有限公司 | Vehicle chassis central region scanning detector |
| CN112730258A (en) * | 2021-02-03 | 2021-04-30 | 四川广目科技有限公司 | Workpiece thread appearance defect scanning system based on 3D laser scanning and scanning device thereof |
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| JPS4843376Y1 (en) * | 1969-12-13 | 1973-12-14 | ||
| DE2745397A1 (en) * | 1977-10-08 | 1979-04-19 | Leitz Ernst Gmbh | LIGHT CONTROLLER FOR LIGHT GUIDE LUMINAIRES |
| JP2548968B2 (en) * | 1988-05-31 | 1996-10-30 | 旭光学工業株式会社 | Camera aperture / focus adjustment device |
| AU2003900366A0 (en) * | 2003-01-23 | 2003-02-13 | Portland Surgical Products Pty. Ltd | Hypodermic needles and other small diameter components |
| JP2005274656A (en) * | 2004-03-23 | 2005-10-06 | Fuji Photo Film Co Ltd | Display device and display method |
| JP4419705B2 (en) * | 2004-06-24 | 2010-02-24 | カシオ計算機株式会社 | Imaging device, imaging method, and light amount adjustment device |
| JP4632719B2 (en) * | 2004-08-24 | 2011-02-16 | Ｎｅｃディスプレイソリューションズ株式会社 | Illumination device and projection display device |
| WO2009090664A1 (en) * | 2008-01-18 | 2009-07-23 | Johnson & Johnson Limited | An illumination control device in an endoscopic imaging system |
| CN102087542A (en) * | 2009-12-02 | 2011-06-08 | 李伟高 | Line concentration power adapter for notebook computer |
| US8587498B2 (en) * | 2010-03-01 | 2013-11-19 | Holovisions LLC | 3D image display with binocular disparity and motion parallax |
| JP2011237646A (en) * | 2010-05-11 | 2011-11-24 | Panasonic Corp | Three-dimensional imaging apparatus |
| TWI449915B (en) * | 2010-12-15 | 2014-08-21 | Nat Applied Res Laboratoires | Near-field scanning optical microscope |
| CN102818522A (en) * | 2012-07-05 | 2012-12-12 | 哈尔滨工业大学 | Phase conjugate reflection bi-pass lighting confocal microscopic device |
| CN102759328A (en) * | 2012-07-05 | 2012-10-31 | 哈尔滨工业大学 | Two-way lighting differential confocal measurement device and method based on ellipsoid reflection |
| CN202854400U (en) * | 2012-10-17 | 2013-04-03 | 北京机械设备研究所 | Shading plate with adjustable light transmittance |
| JP2014186111A (en) * | 2013-03-22 | 2014-10-02 | Nippon Valqua Ind Ltd | Angle adjustment mechanism and telescope |
| CN103199766A (en) * | 2013-04-23 | 2013-07-10 | 罗阳军 | Omnidirectional freely-moving device |
| CN103424858B (en) * | 2013-07-24 | 2016-01-20 | 麦克奥迪实业集团有限公司 | A kind of coaxial-illuminating microscope of high contrast type |
| JP2016105122A (en) * | 2014-12-01 | 2016-06-09 | パナソニックＩｐマネジメント株式会社 | Illuminating device and video display device |
| CN104819389B (en) * | 2014-12-23 | 2017-04-26 | 深圳市科曼医疗设备有限公司 | Surgical lamp and light spot adjusting device thereof |
-
2017
- 2017-01-17 CN CN201710036106.0A patent/CN106802276B/en not_active Expired - Fee Related
- 2017-01-17 CN CN201910050692.3A patent/CN109540798B/en not_active Expired - Fee Related
- 2017-01-17 CN CN201910050691.9A patent/CN109580486B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN109540798A (en) | 2019-03-29 |
| CN109580486B (en) | 2021-01-22 |
| CN106802276A (en) | 2017-06-06 |
| CN109580486A (en) | 2019-04-05 |
| CN109540798B (en) | 2020-12-29 |
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Granted publication date: 20190405 Termination date: 20210117 |