CN106772889A - Six-dimensional adjusting support - Google Patents
Six-dimensional adjusting support Download PDFInfo
- Publication number
- CN106772889A CN106772889A CN201710000695.7A CN201710000695A CN106772889A CN 106772889 A CN106772889 A CN 106772889A CN 201710000695 A CN201710000695 A CN 201710000695A CN 106772889 A CN106772889 A CN 106772889A
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- screw
- spring eye
- spring
- screw mandrel
- fixed board
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
Abstract
A kind of six-dimensional adjusting support, is made up of, it is adaptable to various optical elements dynamic plate, fixed board, screw rodb base, screw mandrel and spring etc., including eyeglass or crystal mounting and adjusting.The present invention has that simple structure, process and assemble are convenient, compact conformation is compact, without drive gap, stability is high the characteristics of, with D translation and three-dimensional perspective rotation totally six adjustment frees degree.
Description
Technical field
The present invention relates to adjustment frame, particularly a kind of six-dimensional adjusting support, it is adaptable to various optical elements it is accurate install and
Adjustment.
Background technology
In optical precision optical machinery field, various optical elements, including various eyeglasses and crystal are when being applied to light path, due to it
Pose positioning requirements are very precisely, it is necessary to use various adjustment frames, be more beneficial for convenience regulation dimension adjusts more.Even if in the market
The seldom D translation seen and the six-dimensional adjusting support of three-dimensional perspective adjustment, also angle adjustment of the Chang Youyi bidimensional around XY axles
Frame, a three-dimensional XYZ to translation adjustment frame and an angular adjustment frame about the z axis combine, number of parts is extremely various,
And volume is very huge after combination, stability is also a greater impact, and cost is also higher.
The patent of disclosed six-dimensional adjusting support is less, such as patent of invention six-axial adjustment frame (application number：
200810220685.5) D translation and three-dimensional perspective adjustment, can be realized, but its configuration is also while realizing one by three groups
Individual direction translation is closed with the basic system string that a direction rotates and formed, complex.
The content of the invention
In order to solve above-mentioned the deficiencies in the prior art, there is provided a kind of six-dimensional adjusting support, the six-dimensional adjusting support is fixed board and moves
" two-plate " basic configuration of plate, with simple structure, process and assemble is convenient, compact conformation is compact, without drive gap, stability
The common six-freedom degree of high the characteristics of, also D translation and three-dimensional perspective rotation.
Technical solution of the invention is as follows：
A kind of six-dimensional adjusting support for installing with finely tuning optical element, its feature is to include dynamic plate, fixed board, screw mandrel
Seat, base, the first screw mandrel, the second screw mandrel, the 3rd screw mandrel, the 4th screw mandrel, the 5th screw mandrel, the 6th screw mandrel and many extension springs；
Described dynamic plate is integrally formed by upper flat plate, perpendicular flat board and lower flat board, and vertical section is put down into '] ' shape, the perpendicular of the dynamic plate
The middle part of plate hollows out, for positioning optical element, the lower surface of the lower flat board of described dynamic plate be provided with two it is vertical
1st spring eye and the 2nd spring eye, the left side upper-lower position on the rear surface of perpendicular flat board are provided with the 3rd spring eye of front and rear insertion, the
4 spring eyes, rear surface is provided with sagittal 5th spring eye and the 6th spring eye the bottom of by, and the right flank of lower flat board is provided with the of left-hand
7 spring eyes and the 8th spring eye；
Described fixed board is integrally formed by flat underside and " ┛ " shape riser, and the 9th vertical bullet is set in the forward position of flat underside
Spring hole and the 10th spring eye, are provided with the 1st screw and the 2nd screw on the inside of the 9th described spring eye and the 10th spring eye respectively,
Sagittal 4th screw, the 11st spring eye, the 12nd bullet are set gradually from top to bottom on the right of the L-shaped riser of described fixed board
Spring hole and the 3rd screw, are successively from left to right sagittal 5th screw, the 14th spring in the bottom of " ┛ " shape facade of fixed board
Hole, the 13rd spring eye and the 3rd screw；
The cross section of described screw rodb base is in " ┛ " shape, and there is the 6th screw the centre of the right surface epimere of the screw rodb base, and this
There are the 15th spring eye and the 16th spring eye in the side of 6 screw two respectively；
The flat underside of described fixed board be fixed on it is described with base on, described screw rodb base is fixed by screws in described
Fixed board flat underside right-hand member, in the 9th spring eye and the 10th spring eye inserting spring of the flat underside of described fixed board, in institute
11st spring eye of the facade of the fixed board stated, the 12nd spring eye, the 14th spring eye and the 13rd spring eye inserting spring, described
15th spring eye of screw rodb base and the 16th spring eye inserting spring, described dynamic plate is placed in described fixed board, and is made described
Dynamic plate the 1st spring eye and the 2nd spring eye the alignment described spring eye of fixed board the 9th and the 10th spring eye in spring and cover
Enter, the 3rd spring eye of described dynamic plate, the 4th spring eye, the 5th spring eye and the 6th spring eye successively respectively with described fixed board
Spring alignment in 11st spring eye, the 12nd spring eye, the 13rd spring eye and the 14th spring eye is inserted in, then by described first
Screw mandrel, the second screw mandrel, the 3rd screw mandrel, the 4th screw mandrel, the 5th screw mandrel screw in described the 1st screw, the 2nd screw, the 3rd successively respectively
Screw, the 4th screw and the 5th screw, the 6th described screw mandrel screw in the described screw of screw rodb base the 6th, before making all of screw mandrel
Described dynamic plate is touched at end.
The lower surface of described dynamic plate, rear surface and right flank are mutually perpendicular to.
The bottom surface of described fixed board and facade are mutually perpendicular to；Described the 1st spring eye, the 2nd spring eye, the 1st screw and the 2nd
The center line copline of screw；The center line copline of the 4th screw, the 11st spring eye, the 12nd spring eye and the 3rd screw；5th spiral shell
The center line copline in hole, the 14th spring eye and the 13rd spring eye；Three planes that above-mentioned center line is formed are mutually perpendicular to.
The center line of the 6th screw, the 15th spring eye and the 16th spring eye of described screw rodb base supplies plane；Described screw mandrel
After seat is fixedly connected by screw with described fixed board, the plane and the bottom surface of described fixed board that above three center line is formed are put down
OK.
Described the first screw mandrel, the second screw mandrel, the 3rd screw mandrel, the 4th screw mandrel, the 5th screw mandrel, the front end of the 6th screw mandrel are ball
Face, the sphere is the bulb sphere of the steel ball face or processing inlayed.
Technique effect of the invention is as follows：
Six-dimensional adjusting support structure of the present invention has D translation and three-dimensional perspective rotation six-freedom degree altogether, for various optics
Element, including eyeglass or crystal mounting and adjusting, do not limited by lens shape, thickness, size, weight, be also applied for reflection
Or transmission optical component.
Six-dimensional adjusting support of the present invention is the two-plate structure based on dynamic plate and fixed board, institute simply compact with design of part
Need part few, occupy little space, cost than it is relatively low the characteristics of, be a kind of general optical element adjustment frame.
Brief description of the drawings
Fig. 1 is the front schematic perspective view of six-dimensional adjusting support of the present invention.
Fig. 2 is six-dimensional adjusting support front view of the present invention.
Fig. 3 is six-dimensional adjusting support top view of the present invention.
Fig. 4 is the back side schematic perspective view of six-dimensional adjusting support most preferred embodiment of the present invention.
Fig. 5 is the schematic three dimensional views of the dynamic plate of six-dimensional adjusting support most preferred embodiment of the present invention.
Fig. 6 is the schematic three dimensional views of the fixed board of six-dimensional adjusting support most preferred embodiment of the present invention.
Fig. 7 is the schematic three dimensional views of the screw rodb base of six-dimensional adjusting support most preferred embodiment of the present invention.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings, but should not be limited the scope of the invention with this.
Figure is first referred to, Fig. 1 is the front schematic perspective view of six-dimensional adjusting support most preferred embodiment of the present invention, and Fig. 2 is this hair
Bright six-dimensional adjusting support most preferred embodiment front view, Fig. 3 is six-dimensional adjusting support most preferred embodiment top view of the present invention, and Fig. 4 is this hair
The back side schematic perspective view of bright six-dimensional adjusting support most preferred embodiment, Fig. 5 is the schematic three dimensional views of the dynamic plate of preferred embodiment,
Fig. 6 is the schematic three dimensional views of preferred embodiment fixed board, and Fig. 7 is the three-dimensional signal of preferred embodiment screw rodb base
Figure.As seen from the figure, the present invention is for installing the six-dimensional adjusting support most preferred embodiment with finely tuning optical element, including dynamic plate 1, fixed board
2nd, screw rodb base 3, base 4, the first screw mandrel 11, the second screw mandrel 12, the 3rd screw mandrel 13, the 4th screw mandrel 14, the 5th screw mandrel 15, the 6th
Bar 16 and many extension springs；
Described dynamic plate 1 is integrally formed by upper flat plate, perpendicular flat board and lower flat board, vertical section into '] ' shape, the dynamic plate 1 it is perpendicular
The middle part of straight flat board hollows out, and for positioning optical element 5, two is provided with the lower surface 109 of the lower flat board of described dynamic plate 1
Individual vertical the 1st spring eye 101 and the 2nd spring eye 102, the left side upper-lower position on the rear surface 110 of perpendicular flat board are passed through before and after being provided with
Logical the 3rd spring eye 103, the 4th spring eye 104, rear surface 110 is provided with sagittal 5th spring eye 105 and the 6th bullet the bottom of by
Spring hole 106, the right flank 111 of lower flat board is provided with the 7th spring eye 107 and the 8th spring eye 108 of left-hand；
Described fixed board 2 is integrally formed by flat underside and " ┛ " shape riser, and vertical the is set in the forward position of flat underside 221
9 spring eyes 201 and the 10th spring eye 202, are provided with the inner side of described the 9th spring eye 201 and the 10th spring eye 202 respectively
1 screw 211 and the 2nd screw 212, set gradually sagittal from top to bottom on the right of the L-shaped riser 222 of described fixed board 2
4th screw 214, the 11st spring eye 203, the 12nd spring eye 204 and the 3rd screw 213, at the bottom of " ┛ " the shape facade 222 of fixed board 2
End is successively from left to right sagittal 5th screw 215, the 14th spring eye 206, the 13rd spring eye 205 and the 3rd screw 213；
The cross section of described screw rodb base 3 is in " ┛ " shape, and there is the 6th screw the centre of the epimere of right surface 321 of the screw rodb base 3
There are the 15th spring eye 301 and the 16th spring eye 302 in 311, the 6th 311 liang of sides of screw respectively；
The flat underside 221 of described fixed board 2 be fixed on it is described with base 4 on, described screw rodb base 3 is fixed by screw
In the right-hand member of the flat underside 221 of described fixed board 2, in the 9th spring eye 201 and the 10th bullet of the flat underside 221 of described fixed board 3
Spring hole 202 is respectively implanted the first extension spring 21 and the second extension spring 22, in the 11st bullet of the facade 222 of described fixed board 3
Spring hole 203, the 12nd spring eye 204, the 14th spring eye 206 and the 13rd spring eye 205 are respectively implanted the 5th extension spring the 25, the 6th
Extension spring 26, the 7th extension spring 27, the 8th extension spring 28, in the 15th spring eye 301 and the 16th of described screw rodb base 3
Spring eye 302 is respectively implanted the 3rd extension spring 23, the 4th extension spring 24, and described dynamic plate 1 is placed in into described fixed board 3
On, and the 1st spring eye 101 and the 2nd spring eye 102 of described dynamic plate 1 is directed at the described spring eye 201 of fixed board 3 the 9th and the
The first extension spring 21, the second extension spring 22 in 10 spring eyes 202 are simultaneously inserted in, the 3rd spring eye 103 of described dynamic plate 1,
4th spring eye 104, the 5th spring eye 105 and the 6th spring eye 106 the 11st spring eye 203 successively respectively with described fixed board 3,
The 5th extension spring 25, the 6th extension spring 26 in 12nd spring eye 204, the 13rd spring eye 205 and the 14th spring eye 206,
7th extension spring 27, the 8th extension spring 28 alignment is inserted in, then by the first described screw mandrel 11, the second screw mandrel the 12, the 3rd
Screw mandrel 13, the 4th screw mandrel 14, the 5th screw mandrel 15 screw in described the 1st screw 211, the 2nd screw 212, the 3rd screw successively respectively
213rd, the 4th screw 214 and the 5th screw 215, the 6th described screw mandrel 16 screw in the 6th screw 311 of described screw rodb base 3, make institute
Described dynamic plate 1 is touched in the front end of some screw mandrels.
The lower surface 109 of described dynamic plate 1, rear surface 110 and right flank 111 are mutually perpendicular to.
The bottom surface 221 of described fixed board 2 and facade 222 are mutually perpendicular to；Described the 1st spring eye 101, the 2nd spring eye
102nd, the center line copline of the 1st screw 211 and the 2nd screw 212；4th screw 214, the 11st spring eye 203, the 12nd spring eye
The center line copline of the 204 and the 3rd screw 213；The center line of the 5th screw 215, the 14th spring eye 206 and the 13rd spring eye 205
Copline；Three planes that above-mentioned center line is formed are mutually perpendicular to.
The center line of the 6th screw 311, the 15th spring eye 301 and the 16th spring eye 302 of described screw rodb base 3 supplies plane；
After described screw rodb base 3 is fixedly connected by screw with described fixed board 2, the plane and described that above three center line is formed
Fixed board) bottom surface 221 it is parallel.
Described the first screw mandrel 11, the second screw mandrel 12, the 3rd screw mandrel 13, the 4th screw mandrel 14, the 5th screw mandrel 15, the 6th screw mandrel
16 front end is sphere, and the sphere is the bulb sphere of the steel ball face or processing inlayed.
By the first extension spring 21 and the pulling force of the second extension spring 22, make the screw mandrel of lower surface 109 and first of plate 1
11 and second screw mandrel 12 bulb be in close contact；The pulling force of the 3rd extension spring 23 and the 4th extension spring 24, makes the side table of plate 1
The bulb of the screw mandrel 13 of face 211 and the 3rd is in close contact；5th extension spring 25, the 6th extension spring 26, the 7th extension spring 27
With the pulling force of the 8th extension spring 28, make the screw mandrel 14 of rear surface 210 and the 4th of plate 1 and the 5th screw mandrel 15 and the 6th screw mandrel 16
Bulb be in close contact.The gapless when six-dimensional adjusting support is adjusted, stability is high.All spring eye sides for installing extension spring
Settable pin hole insertion pin is used to pacify hangs extension spring.
The sphere of the first screw mandrel 11 or the second screw mandrel 12, its end is driven to promote dynamic plate to produce around Y-direction rotary motion, while
Two screw mandrels are driven in the same direction, promote dynamic plate to produce the translational motion of Z-direction.The 3rd screw mandrel 13 is driven, promotes dynamic plate to produce X to flat
Shifting movement.Drive the 5th screw mandrel 15 and the 6th screw mandrel 16, dynamic plate produced respectively with respect to fixed board around Z-direction or around X to two dimension angular
Rotate；The 4th screw mandrel 14 of equidirectional driving, the 5th screw mandrel 15 and the 6th screw mandrel 16, move plate and produce Y-direction to translate with respect to fixed board simultaneously
Motion.
Implementation method described above, is a kind of displaying example of structural principle of the present invention, is relatively inexpensive compact implementation
Mode, but embodiments of the present invention are not restricted to the described embodiments, and other are any without departing from general principle institute of the invention
Structural modification, modification, replacement, combination, simplification for doing etc., are regarded as equivalent replacement mode of the invention, should all include
Within the scope of the present invention.
Six-dimensional adjusting support overall structure of the present invention it is simple it is compact, occupy little space, process that part is few and easy, high precision,
Low cost, stability is high, and not only the adjustment of the generally applicable various optical elements in optical precision optical machinery field, applies also for biological sample
More fields such as adjustment of product, with high popularization and actually used value.
Claims (5)
1. a kind of six-dimensional adjusting support, it is characterised in that including moving plate (1), fixed board (2), screw rodb base (3), base (4), the first screw mandrel
(11), the second screw mandrel (12), the 3rd screw mandrel (13), the 4th screw mandrel (14), the 5th screw mandrel (15), the 6th screw mandrel (16) and many drawings
Stretch spring；
Described dynamic plate (1) is integrally formed by upper flat plate, perpendicular flat board and lower flat board, vertical section into '] ' shape, the dynamic plate (1) it is perpendicular
The middle part of flat board hollows out, and for positioning optical element (5), is set in the lower surface (109) of the lower flat board of described dynamic plate (1)
There are two vertical the 1st spring eyes (101) and the 2nd spring eye (102), erect the left side upper-lower position on the rear surface (110) of flat board
The 3rd spring eye (103), the 4th spring eye (104) of front and rear insertion are provided with, rear surface (110) is provided with the sagittal 5th the bottom of by
Spring eye (105) and the 6th spring eye (106), the right flank (111) of lower flat board are provided with the 7th spring eye (107) and the 8th of left-hand
Spring eye (108)；
Described fixed board (2) is integrally formed by flat underside and " ┛ " shape riser, and vertical the is set in the forward position of flat underside (221)
9 spring eyes (201) and the 10th spring eye (202), respectively in the interior of described the 9th spring eye (201) and the 10th spring eye (202)
Side is provided with the 1st screw (211) and the 2nd screw (212), described fixed board (2) L-shaped riser (222) the right from top to bottom
Sagittal 4th screw (214), the 11st spring eye (203), the 12nd spring eye (204) and the 3rd screw (213) are set gradually,
The bottom of " ┛ " shape facade (222) of fixed board (2) is successively from left to right sagittal 5th screw (215), the 14th spring eye
(206), the 13rd spring eye (205) and the 3rd screw (213)；
The cross section of described screw rodb base (3) is in " ┛ " shape, and there is the 6th spiral shell the centre of right surface (321) epimere of the screw rodb base (3)
There are the 15th spring eye (301) and the 16th spring eye (302) in hole (311), the side of the 6th screw (311) two respectively；
The flat underside (221) of described fixed board (2) be fixed on it is described with base (4) on, described screw rodb base (3) is by screw
The right-hand member of the flat underside (221) of described fixed board (2) is fixed on, in the 9th spring of the flat underside (221) of described fixed board (3)
Hole (201) and the 10th spring eye (202) inserting spring, the 11st spring eye (203) in the facade (222) of described fixed board (3),
12nd spring eye (204), the 14th spring eye (206) and the 13rd spring eye (205) inserting spring, in described screw rodb base (3)
15th spring eye (301) and the 16th spring eye (302) inserting spring, described dynamic plate (1) is placed in described fixed board (3),
And make the described spring eye of fixed board (3) the 9th of the 1st spring eye (101) and the 2nd spring eye (102) alignment of described dynamic plate (1)
(201) spring and in the 10th spring eye (202) is simultaneously inserted in, the 3rd spring eye (103), the 4th spring eye of described dynamic plate (1)
(104), the 5th spring eye (105) and the 6th spring eye (106) the 11st spring eye (203) successively respectively with described fixed board (3),
Spring alignment in 12nd spring eye (204), the 13rd spring eye (205) and the 14th spring eye (206) is inserted in, then will be described
First screw mandrel (11), the second screw mandrel (12), the 3rd screw mandrel (13), the 4th screw mandrel (14), the 5th screw mandrel (15) are screwed in successively respectively
Described the 1st screw (211), the 2nd screw (212), the 3rd screw (213), the 4th screw (214) and the 5th screw (215), it is described
The 6th screw mandrel (16) screw in the described screw (311) of screw rodb base (3) the 6th, the front end of all of screw mandrel is touched described dynamic
Plate (1).
2. six-dimensional adjusting support according to claim 1, it is characterised in that lower surface (109), the rear table of described dynamic plate (1)
Face (110) and right flank (111) are mutually perpendicular to.
3. six-dimensional adjusting support according to claim 1, it is characterised in that the bottom surface (221) of described fixed board (2) and facade
(222) it is mutually perpendicular to；Described the 1st spring eye (101), the 2nd spring eye (102), the 1st screw (211) and the 2nd screw (212)
Center line copline；In 4th screw (214), the 11st spring eye (203), the 12nd spring eye (204) and the 3rd screw (213)
Heart line copline；The center line copline of the 5th screw (215), the 14th spring eye (206) and the 13rd spring eye (205)；In above-mentioned
Three planes that heart line is formed are mutually perpendicular to.
4. six-dimensional adjusting support according to claim 1, it is characterised in that the 6th screw (311) of described screw rodb base (3),
The center line of the 15th spring eye (301) and the 16th spring eye (302) supplies plane；Described screw rodb base (3) is by screw and described
Fixed board (2) be fixedly connected after, above three center line formed plane it is parallel with the bottom surface (221) of described fixed board (2).
5. six-dimensional adjusting support according to claim 1, it is characterised in that described the first screw mandrel (11), the second screw mandrel
(12), the 3rd screw mandrel (13), the 4th screw mandrel (14), the 5th screw mandrel (15), the front end of the 6th screw mandrel (16) are sphere, and the sphere is
The steel ball face inlayed or the bulb sphere of processing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710000695.7A CN106772889B (en) | 2017-01-03 | 2017-01-03 | Six-dimensional adjusting support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710000695.7A CN106772889B (en) | 2017-01-03 | 2017-01-03 | Six-dimensional adjusting support |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106772889A true CN106772889A (en) | 2017-05-31 |
| CN106772889B CN106772889B (en) | 2018-11-20 |
Family
ID=58951955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710000695.7A Active CN106772889B (en) | 2017-01-03 | 2017-01-03 | Six-dimensional adjusting support |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106772889B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108646382A (en) * | 2018-03-30 | 2018-10-12 | 中国科学院上海光学精密机械研究所 | Flexible parallel connection Three dimensional rotation support under heavy load and adjustment structure |
| CN108802951A (en) * | 2018-05-31 | 2018-11-13 | 中国科学院半导体研究所 | The method of rectangle plane mirror clamp structure and clamping plane mirror |
| CN113359261A (en) * | 2021-05-12 | 2021-09-07 | 中国科学院微电子研究所 | Vacuum compatible planar optical element adjusting device |
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| CN2728138Y (en) * | 2004-08-26 | 2005-09-21 | 上海幻影显示技术有限公司 | Image conditioning device for back projection large-screen display element |
| WO2009068331A1 (en) * | 2007-11-30 | 2009-06-04 | Airbus Operations Gmbh | Device for height adjustment of an assembly group without tools |
| CN101458438A (en) * | 2008-12-31 | 2009-06-17 | 广东威创视讯科技股份有限公司 | Novel six-axial adjustment frame |
| CN102798954A (en) * | 2012-08-22 | 2012-11-28 | 中国科学院上海光学精密机械研究所 | Five-dimensional adjusting rack |
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2017
- 2017-01-03 CN CN201710000695.7A patent/CN106772889B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2728138Y (en) * | 2004-08-26 | 2005-09-21 | 上海幻影显示技术有限公司 | Image conditioning device for back projection large-screen display element |
| WO2009068331A1 (en) * | 2007-11-30 | 2009-06-04 | Airbus Operations Gmbh | Device for height adjustment of an assembly group without tools |
| CN101458438A (en) * | 2008-12-31 | 2009-06-17 | 广东威创视讯科技股份有限公司 | Novel six-axial adjustment frame |
| CN102798954A (en) * | 2012-08-22 | 2012-11-28 | 中国科学院上海光学精密机械研究所 | Five-dimensional adjusting rack |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108646382A (en) * | 2018-03-30 | 2018-10-12 | 中国科学院上海光学精密机械研究所 | Flexible parallel connection Three dimensional rotation support under heavy load and adjustment structure |
| CN108646382B (en) * | 2018-03-30 | 2020-06-30 | 中国科学院上海光学精密机械研究所 | Flexible parallel three-dimensional rotation supporting and adjusting structure under heavy load |
| CN108802951A (en) * | 2018-05-31 | 2018-11-13 | 中国科学院半导体研究所 | The method of rectangle plane mirror clamp structure and clamping plane mirror |
| CN108802951B (en) * | 2018-05-31 | 2020-05-26 | 中国科学院半导体研究所 | Rectangular plane mirror clamp structure and method for clamping plane mirror |
| CN113359261A (en) * | 2021-05-12 | 2021-09-07 | 中国科学院微电子研究所 | Vacuum compatible planar optical element adjusting device |
| CN113359261B (en) * | 2021-05-12 | 2023-02-28 | 中国科学院微电子研究所 | Vacuum compatible planar optical element adjusting device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106772889B (en) | 2018-11-20 |
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