CN106771374A - A kind of AFM of the sample relative humidity continuously adjustabe of low noise - Google Patents
A kind of AFM of the sample relative humidity continuously adjustabe of low noise Download PDFInfo
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- CN106771374A CN106771374A CN201710126774.2A CN201710126774A CN106771374A CN 106771374 A CN106771374 A CN 106771374A CN 201710126774 A CN201710126774 A CN 201710126774A CN 106771374 A CN106771374 A CN 106771374A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
- G01Q30/12—Fluid environment
Abstract
The present invention relates to AFM field, a kind of AFM of the sample relative humidity continuously adjustabe of low noise is made up of humidity controller connection AFM, the humidity controller mainly includes gas access, gas vent, pipeline threeway, dry gas road flow regulator, moisture road flow regulator, ultrasonic nebulizer, gas mixer chamber, temperature and humidity sensor, isolation damper and vent line, the AFM mainly includes scanning chamber, cantilever and needle point, control circuit, sample, moisture road flow regulator, dry gas road flow regulator is connected with by the motor of computer controls and can control gas flow rate., by producing water saturation gas with ultrasonic nebulizer, the air-flow for being passed through afm scan chamber is more steady, and noise is small for the present invention；The relative humidity and temperature of air-flow are measured respectively in gas mixer chamber I and gas mixer chamber II so that the humidity and temperature of gas and sample surfaces are easier control and precision is higher.
Description
Technical field
It is particularly a kind of for sample under humidity environment the present invention relates to a kind of AFM field of nanostructured
Material surface property research, good stability and a kind of sample relative humidity continuously adjustabe of low noise of low noise atomic force
Microscope.
Background technology
AFM (Atomic Force Microscope, AFM) is using atom, intermolecular interaction
Power observes the instrument of body surface microscopic appearance, and its general principle is：It is fixed on by by the probe of a nano-scale dimension
Can on the micron order elastic cantilever of sensitive manipulation, when needle point and sample closely when, the atom and sample surfaces at needle point tip
Active force between atom can bend the micron order elastic cantilever, deviate original position；Meanwhile, there is beam of laser to irradiate
Onto cantilever, and reflex to laser monitoring device, the bending of elastic cantilever result in the deflection of laser, thus obtain the inclined of hot spot
Shifting amount, according to the side-play amount and its vibration frequency, as feedback signal, is input into computer by specific reponse system,
Computer can rebuild 3-D view with this, so as to obtain the pattern and composition information of sample surfaces.
AFM can be used for the property research of sample surfaces under different humidity environment, for example, using AFM with ring
Border condition studies the similar interaction such as adhesion, friction for the equation of independent variable, shows the change of relative humidity in environment
The difference changed and produce.In order to implement this experiment, sample and scanning probe are all placed in controllable small of independent humidity
In cavity, its relative humidity is controllable, and the conventional method of control humidity has two kinds：One kind is saturated salt solution method, but, due to
The dynamic volatilization process of control saturated solution is needed, the temperature of sample can change in experiment；One kind is mixing dry and wet gas
Method, although relative humidity can continuously change from 0 to saturation, its conventional foaming design can introduce mechanical noise, serious limitation
The measurement of nanoscale.Therefore, how to accomplish for AFM sample humidify while, do not introduce noise and
Do not change sample temperature, be problem in the urgent need to address, a kind of original of the sample relative humidity continuously adjustabe of low noise
Sub- force microscope can solve this problem.
The content of the invention
In order to solve the above problems, a kind of AFM tool of the sample relative humidity continuously adjustabe of low noise
Have the technical characteristic of good stability and low noise, the method by producing water saturation gas with ultrasonic nebulizer, improve with
The preceding method based on boiling.By using water spray as wet gas source continuous flow humidification by mixing of gas machine, while experiment
Change the humidity of sample, and keeping temperature is constant, can continuously data acquisition, can in experimentation precise control sample
Humidity and temperature.
The technical solution adopted in the present invention is：
A kind of AFM of the sample relative humidity continuously adjustabe of low noise, connects former by humidity controller
Sub- force microscope composition, the humidity controller mainly includes gas access I, pipeline threeway I, dry gas road flow regulator, wet
Gas circuit flow regulator, gas access II, gas vent II, the ullrasonic spraying that is made up of splash guard, ultrasound unit, cooler
Device, pipeline threeway II, gas mixer chamber I, gas mixer chamber II, gas vent I, temperature and humidity sensor I, temperature and humidity
Inductor II, gas access III, gas vent III, isolation damper I, isolation damper II and vent line, the atom
Force microscope mainly includes scanning chamber, cantilever and needle point, control circuit, sample, and wherein cantilever and needle point and sample is located at described
In scanning chamber, circuit is controlled to be located at outside the scanning chamber and be connected with cantilever and needle point, sample by cable, the gas access
II, moisture road flow regulator, pipeline threeway I, dry gas road flow regulator, pipeline threeway II, gas vent II are sequentially communicated,
The gas access I connecting pipeline threeways I, moisture road flow regulator, dry gas road flow regulator with by computer control
The motor of system connects and gas flow rate, the gas access II can be controlled to be connected into the ullrasonic spraying with gas vent II
In device；The pipeline threeway II, gas mixer chamber I, gas access III are sequentially communicated, and gas access III is by isolating damping
Device I is connected with the scanning chamber, and the temperature and humidity sensor I are connected to gas mixer chamber I；The gas vent I, gas
Mixing chamber II, gas vent III are sequentially communicated, and gas vent III is connected by isolating damper II with the scanning chamber, institute
State temperature and humidity sensor II is connected to gas mixer chamber II.
The scanning chamber is annular seal space and connects the humidity controller with gas vent III by gas access III.Institute
Isolation damper I, isolation damper II are stated including spring shock absorption, magnetic damping damping, air shock absorption etc., can make to be passed by gas circuit
Mechanical noise to afm scan chamber reduces.The cooler mainly includes a thermal trough and two fans, energy
Enough for ultrasound unit is lowered the temperature, make moisture road gas temperature difference before and after ultrasonic nebulizer is passed through smaller, so that sample temperature is more steady
It is fixed.According to specific research needs, gas can be nitrogen, oxygen, argon gas etc., and liquid can be in the ultrasonic nebulizer
Water, ethanol, methyl alcohol etc..
The operation principle of humidity controller：The pure nitrogen stream of drying is input into and by the pipe by the gas access I
Road threeway I is divided into two-way, respectively enters two gas circuits of dry and wet, and ultrasonic nebulizer is connected with moisture road, is filled in ultrasonic nebulizer
There are liquid, such as water, gas enters ultrasonic nebulizer by gas access II in moisture road, the air-flow on Shi Shi roads is readily wetted by water,
By gas vent II pass-outs, the gas of pass-out is converged, then converged following gas by pipeline threeway II with the air-flow on main line
The air-flow of conjunction can measure the humidity and temperature of air-flow by gas mixer chamber I, the temperature and humidity sensor I, then connect down
Carry out this air-flow and be passed through scanning chamber from gas access III, then gas from gas vent III pass-outs and is passed into gas mixer chamber again
II, temperature and humidity sensor II measure gas humidity and temperature again, and finally, gas is vented to big compression ring by gas vent I
Border.Once opening ultrasound unit, highdensity visible water smoke can be full of in the ultrasonic nebulizer cavity, splash guard can be prevented
Sealing is splashed into the gas access II, the gas vent II of wireway；Cooler is made up of simultaneously a thermal trough and two fans
For the ultrasound unit in cooling work.When open ultrasound unit, in the ultrasonic nebulizer cavity can full of it is highdensity can
The water smoke seen, splash guard can prevent water to be splashed into the gas access II and gas vent II of wireway, isolation damper I and
Isolation damper II can reduce the mechanical noise for passing to afm scan chamber by gas circuit.
The beneficial effects of the invention are as follows：
A kind of AFM of the sample relative humidity continuously adjustabe of the low noise by with ultrasonic nebulizer come
Water saturation gas is produced, is had the advantage that compared to foam-forming method：The air-flow for being passed through afm scan chamber is more steady, noise
It is small；The relative humidity and temperature of air-flow are measured respectively in gas mixer chamber I and gas mixer chamber II, and such dual inductor sets
Meter causes that the humidity and temperature of gas are easier control, so that the humidity and temperature of sample surfaces are easier control, and control essence
Du Genggao.
Brief description of the drawings
Further illustrated with reference to figure of the invention：
Fig. 1 is schematic diagram of the present invention.
In figure, 1. gas access I, 2. pipeline threeway I, 3. dry gas road flow regulator, 4. moisture road flow regulator, 5.
Gas access II, 6. gas vent II, 7. splash guard, 8. ultrasound unit, 9. cooler, 10. ultrasonic nebulizer, 11. pipelines
The gas mixer chamber of threeway II, 12. gas mixer chamber I, 13. II, 14. gas vent I, 15. temperature and humidity sensor I, 16. temperature
Degree and humidity sensor II, 17. scanning chambers, 18. cantilevers and needle point, 19. control circuits, 20. samples, 21. gas access III,
22. gas vent III, 23. isolation damper I, 24. isolation damper II.
Specific embodiment
If Fig. 1 is schematic diagram of the present invention, a kind of atomic force microscopy of the sample relative humidity continuously adjustabe of low noise
Mirror, is made up of humidity controller connection AFM, and the humidity controller mainly includes gas access I 1, pipeline three
Logical I 2, dry gas road flow regulator 3, moisture road flow regulator 4, gas access II 5, gas vent II 6, kept off by splashproof
Plate 7, ultrasound unit 8, ultrasonic nebulizer 10, the pipeline threeway II 11, gas mixer chamber I 12, gas mixing of the composition of cooler 9
Room II 13, gas vent I 14, temperature and humidity sensor I 15, temperature and humidity sensor II 16, gas access III
21st, gas vent III 22, isolation damper I 23, isolation damper II 24 and vent line, the AFM master
To include scanning chamber 17, cantilever and needle point 18, control circuit 19, sample 20, wherein cantilever and needle point 18 and sample 20 is located at institute
State in scanning chamber 17, control circuit 19 is located at outside the scanning chamber 17 and is connected with cantilever and needle point 18, sample 20 by cable,
The gas access II 5, moisture road flow regulator 4, pipeline threeway I 2, dry gas road flow regulator 3, pipeline threeway II
11st, gas vent II 6 is sequentially communicated, the connecting pipeline threeway I 2 of the gas access I 1, moisture road flow regulator 4,
Dry gas road flow regulator 3 is connected with by the motor of computer controls and can control gas flow rate, the gas access II 5
Connected in the ultrasonic nebulizer 10 with gas vent II 6；The pipeline threeway II 11, gas mixer chamber I 12, gas
Body entrance III 21 is sequentially communicated, and gas access III 21 is connected by isolating damper I 23 with the scanning chamber 17, institute
State temperature and humidity sensor I 15 is connected to gas mixer chamber I 12；The gas vent I 14, gas mixer chamber II 13,
Gas vent III 22 is sequentially communicated, and gas vent III 22 is connected by isolating damper II 24 with the scanning chamber 17,
The temperature and humidity sensor II 16 are connected to gas mixer chamber II 13.
The scanning chamber 17 is annular seal space and connects the humidity with gas vent III 22 by gas access III 21
Controller.The isolation damper I 23, isolation damper II 24 including spring shock absorption, magnetic damping damping, air shock absorption etc.,
Can reduce the mechanical noise that afm scan chamber 17 is passed to by gas circuit.The cooler 9 mainly includes one
Thermal trough and two fans, can lower the temperature for ultrasound unit 8, and the temperature difference is more before and after ultrasonic nebulizer 10 is passed through to make moisture road gas
It is small, so that sample temperature is more stable.According to specific research needs, gas can be nitrogen, oxygen, argon gas etc., described super
Liquid can be water, ethanol, methyl alcohol etc. in sound sprayer 10.
The operation principle of humidity controller：The pure nitrogen stream of drying is input into and by described by the gas access I 1
Pipeline threeway I 2 is divided into two-way, respectively enters two gas circuits of dry and wet, and ultrasonic nebulizer, ultrasonic nebulizer are connected with moisture road
In be equipped with liquid, such as water, in moisture road gas by gas access II 5 enter ultrasonic nebulizer 10, the air-flow quilt on Shi Shi roads
Water is moistened, and, by the pass-outs of gas vent II 6, the gas of pass-out is by pipeline threeway II 11 and the air-flow on main line for following gas
Converge, the air-flow for then converging can measure air-flow by gas mixer chamber I 12, the temperature and humidity sensor I 15
Humidity and temperature, next this air-flow be passed through scanning chamber 17 from gas access III 21, then gas is again from gas vent III
22 pass-outs are simultaneously passed into gas mixer chamber II 13, and temperature and humidity sensor II measure gas humidity and temperature again, finally,
Gas is vented to atmospheric environment by gas vent I 14.When ultrasound unit 8 is opened, can be full of in the cavity of the ultrasonic nebulizer 10
Highdensity visible water smoke, splash guard 7 can prevent water to be splashed into the gas access II 5 and gas vent II of wireway
6。
Claims (6)
1. a kind of AFM of the sample relative humidity continuously adjustabe of low noise, is shown by humidity controller connection atomic force
Micro mirror constitute, the humidity controller mainly include gas access I (1), pipeline threeway I (2), dry gas road flow regulator (3),
Moisture road flow regulator (4), gas access II (5), gas vent II (6), by splash guard (7), ultrasound unit (8), cold
But device (9) composition ultrasonic nebulizer (10), pipeline threeway II (11), gas mixer chamber I (12), gas mixer chamber II (13),
Gas vent I (14), temperature and humidity sensor I (15), temperature and humidity sensor II (16), gas access III (21), gas
Body exports III (22), isolation damper I (23), isolation damper II (24) and vent line, and the AFM is main
Including scanning chamber (17), cantilever and needle point (18), control circuit (19), wherein sample (20), cantilever and needle point (18) and sample
(20) in the scanning chamber (17), control circuit (19) positioned at the scanning chamber (17) outward and by cable and cantilever and pin
Sharp (18), sample (20) are connected, it is characterized in that：The gas access II (5), moisture road flow regulator (4), pipeline threeway I
(2), dry gas road flow regulator (3), pipeline threeway II (11), gas vent II (6) are sequentially communicated, the gas access I (1)
Connecting pipeline threeway I (2), moisture road flow regulator (4), dry gas road flow regulator (3) with by computer controls
Motor is connected and can control gas flow rate, and the gas access II (5) is connected into the ultrasound spray with gas vent II (6)
In day with fog (10)；The pipeline threeway II (11), gas mixer chamber I (12), gas access III (21) are sequentially communicated, and gas
Entrance III (21) is connected by isolating damper I (23) with the scanning chamber (17), the temperature and humidity sensor I (15)
It is connected to gas mixer chamber I (12)；The gas vent I (14), gas mixer chamber II (13), gas vent III (22) are successively
Connection, and gas vent III (22) is connected by isolating damper II (24) with the scanning chamber (17), the temperature and humidity
Inductor II (16) is connected to gas mixer chamber II (13).
2. the AFM of the sample relative humidity continuously adjustabe of a kind of low noise according to claim 1, it is special
Levying is：The scanning chamber (17) connects the humidity for annular seal space and by gas access III (21) with gas vent III (22)
Controller.
3. the AFM of the sample relative humidity continuously adjustabe of a kind of low noise according to claim 1, it is special
Levying is：It is described isolation damper I (23), isolation damper II (24) including spring shock absorption, magnetic damping damping, air shock absorption etc.,
Can reduce the mechanical noise that afm scan chamber (17) is passed to by gas circuit.
4. the AFM of the sample relative humidity continuously adjustabe of a kind of low noise according to claim 1, it is special
Levying is：The cooler (9) mainly includes a thermal trough and two fans, can lower the temperature for ultrasound unit (8), makes moisture road
Gas temperature difference before and after ultrasonic nebulizer (10) is passed through is smaller, so that sample temperature is more stable.
5. the AFM of the sample relative humidity continuously adjustabe of a kind of low noise according to claim 1, it is special
Levying is：According to specific research needs, gas can be nitrogen, oxygen, argon gas etc..
6. the AFM of the sample relative humidity continuously adjustabe of a kind of low noise according to claim 1, it is special
Levying is：According to specific research needs, liquid can be water, ethanol, methyl alcohol etc. in the ultrasonic nebulizer (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710126774.2A CN106771374A (en) | 2017-02-24 | 2017-02-24 | A kind of AFM of the sample relative humidity continuously adjustabe of low noise |
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| CN201710126774.2A CN106771374A (en) | 2017-02-24 | 2017-02-24 | A kind of AFM of the sample relative humidity continuously adjustabe of low noise |
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| CN106771374A true CN106771374A (en) | 2017-05-31 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111257596A (en) * | 2020-02-25 | 2020-06-09 | 西南交通大学 | Scanning probe microscope narrow and small experiment chamber environment atmosphere accurate control device |
| CN112577885A (en) * | 2020-11-27 | 2021-03-30 | 南京大学 | Humidity control in-situ microscopic infrared characterization method for micro plastic |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101722063A (en) * | 2009-12-04 | 2010-06-09 | 河南科技大学 | Environmental humidity control method and device for sealed cavity |
| CN103760383A (en) * | 2014-01-09 | 2014-04-30 | 西南交通大学 | Atmosphere control system for atomic force microscope |
| CN106353535A (en) * | 2016-10-10 | 2017-01-25 | 中国科学院深圳先进技术研究院 | In-situ photoelectric multifunctional coupling atomic force microscope testing system |
| CN206710460U (en) * | 2017-02-24 | 2017-12-05 | 金华职业技术学院 | A kind of AFM of the sample relative humidity continuously adjustabe of low noise |
-
2017
- 2017-02-24 CN CN201710126774.2A patent/CN106771374A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101722063A (en) * | 2009-12-04 | 2010-06-09 | 河南科技大学 | Environmental humidity control method and device for sealed cavity |
| CN103760383A (en) * | 2014-01-09 | 2014-04-30 | 西南交通大学 | Atmosphere control system for atomic force microscope |
| CN106353535A (en) * | 2016-10-10 | 2017-01-25 | 中国科学院深圳先进技术研究院 | In-situ photoelectric multifunctional coupling atomic force microscope testing system |
| CN206710460U (en) * | 2017-02-24 | 2017-12-05 | 金华职业技术学院 | A kind of AFM of the sample relative humidity continuously adjustabe of low noise |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111257596A (en) * | 2020-02-25 | 2020-06-09 | 西南交通大学 | Scanning probe microscope narrow and small experiment chamber environment atmosphere accurate control device |
| CN111257596B (en) * | 2020-02-25 | 2021-09-14 | 西南交通大学 | Scanning probe microscope narrow and small experiment chamber environment atmosphere accurate control device |
| CN112577885A (en) * | 2020-11-27 | 2021-03-30 | 南京大学 | Humidity control in-situ microscopic infrared characterization method for micro plastic |
| CN112577885B (en) * | 2020-11-27 | 2021-12-17 | 南京大学 | Humidity control in-situ microscopic infrared characterization method for micro plastic |
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