CN106769801A - A kind of particle test system visualizes warning device - Google Patents
A kind of particle test system visualizes warning device Download PDFInfo
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- CN106769801A CN106769801A CN201611047410.7A CN201611047410A CN106769801A CN 106769801 A CN106769801 A CN 106769801A CN 201611047410 A CN201611047410 A CN 201611047410A CN 106769801 A CN106769801 A CN 106769801A
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- 239000002245 particle Substances 0.000 title claims abstract description 109
- 238000012360 testing method Methods 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 claims abstract description 20
- 238000001514 detection method Methods 0.000 claims abstract description 18
- 238000012545 processing Methods 0.000 claims abstract description 9
- 230000000007 visual effect Effects 0.000 claims abstract description 9
- 238000012800 visualization Methods 0.000 claims description 7
- 238000010998 test method Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims description 5
- 230000002159 abnormal effect Effects 0.000 description 10
- 239000000428 dust Substances 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 241000894006 Bacteria Species 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001473 noxious effect Effects 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 238000007619 statistical method Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N2015/1024—Counting particles by non-optical means
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- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
- Alarm Systems (AREA)
Abstract
A kind of chip manufacturing clean room particle test system and method, the method includes setting and obtaining multiple particle detector record standard configuration files；Multiple particle detectors of surrounding in toilet are evenly distributed on, separated in time detects the amounts of particles of each particle detector relevant position environment, testing result is remotely sent into host module in real time；Whether host module receives the testing result that multiple particle detectors send, and judges the amounts of particles of the relevant position environment that each point is detected threshold value predetermined more than successively；Testing result according to detection process unit judges whether to need to send alarm signal, if the amounts of particles of certain point threshold value predetermined more than, just sends the alarm signal that corresponding particle detector is detected；After receiving transducer corresponding with each particle detector receives alarm signal, alarm signal is sent；The alarm signal that will be received notifies to start live emergency processing pattern in time using visual warning device.
Description
Technical field
The present invention relates to IC manufacturing field, more particularly to a kind of particle test system visualization warning device.
Background technology
Toilet (Clean Room), also known as dust free room or clean room.Toilet refer to by the range of certain space it
The contaminant exclusion of particulate, noxious air, bacterium in air etc., and by the temperature of interior, cleanliness factor, room pressure, gas
Flow velocity degree gives the room being specifically designed with air flow method, noise vibration and illumination, Electrostatic Control in a certain range of needs
Between.No matter being also how external air conditionses change, its interior can all have maintain original set provisioning request cleanliness factor,
The characteristic of the performance such as humiture and pressure.
Industrial toilet's abbreviation I.C.R, with semiconductor, electronics industry, optical apparatus, precision optical machinery, exquisite application, new
Material and aviation etc. are scope, major control dust particle；Advantage is as follows：
1., improve quality and yield；
2. product man-hour and cost, are saved；
3. maintenance cost, is reduced；Such toilet typically has positive-pressure type clean environment.
For the silicon chip manufacture of semiconductor applications, the attachment of micro dust particle will cause the deformation of vlsi circuitry or short
Road, makes chip lose operational function, therefore the control of micro- pollution sources has turned into the important step that dust free room is managed.That is,
The main effect in toilet is that the cleaning of the air for controlling product (such as silicon chip etc.) to be contacted is subsisted and humiture, makes product
Can be produced in a good environment space, manufactured, this space is we term it toilet.
Fig. 1 is referred to, Fig. 1 uses system host centralized Control by the particle Online Transaction Processing that current industry is used
The mode of operation of each particle test instrument real time sample analysis in system.As shown in figure 1, the particle Online Transaction Processing includes one
Main frame and multiple particle detectors, the plurality of particle detector is evenly distributed on toilet's surrounding, for detecting relevant position ring
The amounts of particles in border, also, these testing results are sent to main frame in real time, judge what each point was detected successively by main frame
Whether the amounts of particles of relevant position environment exceedes some value, if it does, main frame display alarm.
However, all amounts of particles data results and alarm of above-mentioned prior art can only be shown by system host
Device is checked, once alarming, by flow is confirmed at present, scene cannot immediately manifest real-time particle situation, the work of host side
Personnel only send information with lettergram mode, it is impossible to notify associated monitoring personnel to its abnormal treatment immediately, Field Force cannot
The very first time learns there is the potential risk of influence product quality.
Therefore, a set of visual instant alarming device of design is highly desirable to.
The content of the invention
In order to overcome problem above, the present invention is intended to provide a kind of chip manufacturing clean room particle test system and test side
Method, it passes through to reach Realtime Alerts using discrete circuitry module, Field Force is confirmed the regions particulate very first time
Abnormal cause, and effective Disposal Measures are taken according to abnormal cause, the abnormal potential risk produced to product of particle is eliminated in time.
Technical scheme is as follows：
A kind of chip manufacturing clean room particle test system, it includes that multiple particle detectors, host module and scene are held
Row module；Multiple particle detectors are evenly distributed on the surrounding in toilet, and relevant position is detected at regular intervals for
The amounts of particles of environment, and these testing results are remotely sent to host module in real time；Host module includes detection process
Unit and result transmitting element；Detection process unit receives the testing result that the multiple particle detector sends, and sentences successively
The amounts of particles of relevant position environment that each point detects of breaking threshold value whether predetermined more than, as a result transmitting element according to
The testing result of detection process unit judges whether to need to send alarm signal, if the amounts of particles of certain point is pre- more than one
Fixed threshold value, just sends corresponding alarm signal；Live performing module is located at clean outdoor, and it includes multiple receiving transducers
And alarm module, the quantity of multiple receiving transducers is identical with particle detector, and each described particle detector correspondence one connects
Probe is received, for receiving the alarm signal that the result transmitting element sends, alarm module is used for the alarm signal that will be received
Notify to start live emergency processing pattern using visual warning device in time.
Preferably, the host module uses wireless transceiving modes transmission/receive information；The multiple particle detector is adopted
Sent with wireless mode；The live performing module uses wireless mode receive information.
Preferably, the result transmitting element is sent using wireless mode, and the multiple receiving transducer uses wireless mode
Receive.
Preferably, the host module is the Industrial Control Computer with USB interface, and the result transmitting element has wireless
Alarm signal is reached signal projector by transmitter, the detection process unit by USB interface.
Preferably, the alarm module has wireless receiver, and the wireless receiver receives what signal projector sent
Corresponding visualization warning device work is notified after alarm signal, after decoding.
Preferably, the visualization warning device is corresponding indicator lamp.
To reach above-mentioned purpose, it is as follows that the present invention also provides a kind of technical scheme：
A kind of chip manufacturing clean room particle test method, it comprises the following steps：
Step S1：Set and obtain multiple particle detector record standard configuration files, wherein, the configuration file is matched somebody with somebody
Putting item includes particle detector number and predetermined threshold value；
Step S2：Multiple particle detectors of surrounding in toilet are evenly distributed on, separated in time detects each
The amounts of particles of grain detector relevant position environment, and these testing results are remotely sent to host module in real time；
Step S3：Host module receives the testing result that the multiple particle detector sends, and judges each point successively
The amounts of particles of the relevant position environment for detecting threshold value whether predetermined more than；
Step S4：Testing result according to detection process unit judges whether to need to send alarm signal, if certain point
The amounts of particles threshold value predetermined more than, just the alarm signal that corresponding particle detector is detected is sent；
Step S5：After receiving transducer corresponding with particle detector each described receives alarm signal, send described
Alarm signal；
Step S6：The alarm signal that will be received notifies to start live emergency processing in time using visual warning device
Pattern.
From above-mentioned technical proposal as can be seen that after using the present invention, once a certain test of particle real-time monitoring system is pointed out
Existing particle exception, can reach following effect：
1), Field Force can confirm the regions particulate abnormal cause very first time；
2) effective Disposal Measures, are taken according to abnormal cause, the abnormal potential risk produced to product of particle is eliminated in time；
For example：When scene is if any construction, during the activity such as maintenance, it is easier to cause particle exception, visual warning device can be carried effectively
Wake up Field Force；
3) the abnormal main cause of particle, can be found by the statistical analysis to abnormal cause, and is adopted an effective measure, finally
Improve clean chamber particle condition.
Brief description of the drawings
Fig. 1 is used each in system host centralized control system by the particle Online Transaction Processing that current industry is used
The mode of operation of grain tester real time sample analysis
Fig. 2 is the structural representation of embodiment of the present invention chip manufacturing clean room particle test system
Fig. 3 is signal emitting-receiving system block diagram in the embodiment of the present invention
Specific embodiment
Embodying feature of present invention will in detail describe with the embodiment of advantage in the explanation of back segment.It should be understood that of the invention
Can have various changes in different examples, it is neither departed from the scope of the present invention, and it is therein explanation and be shown in
Substantially regard purposes of discussion, and be not used to the limitation present invention.
Below in conjunction with accompanying drawing, by specific embodiment to chip manufacturing clean room particle test system of the invention and test
Method is described further.It should be noted that the problem that the present invention is solved is that real-time reminding Field Force confirms the region
Particle abnormal cause simultaneously takes effective Disposal Measures..
2-3 is described in detail to specific embodiment of the invention below in conjunction with the accompanying drawings.
Fig. 2 is referred to, Fig. 2 is the structural representation of embodiment of the present invention chip manufacturing clean room particle test system.Such as
Shown in figure, a kind of chip manufacturing clean room particle test system of the invention can be included in the multiple particles inspection in toilet
Survey instrument, the host module away from toilet and in clean outdoor live performing module.
Multiple particle detectors are evenly distributed on the surrounding in toilet, and relevant position is detected at regular intervals for
The amounts of particles of environment.In an embodiment of the present invention, each particle that particle detector can be used using current industry is surveyed
The mode of operation of examination instrument real time sample analysis, i.e., be remotely sent to host module by these testing results in real time；It is preferred that should
Testing result transmitting element can be sent using wireless mode, be will not be repeated here.
The host module generally host module is the Industrial Control Computer with USB interface, including detection process unit and
As a result transmitting element；As a result transmitting element has wireless launcher, and detection process unit is reached alarm signal by USB interface
Signal projector, detection process unit receives the testing result that multiple particle detectors send, and judges each point detection successively
Whether the amounts of particles of the relevant position environment for arriving threshold value predetermined more than, as a result transmitting element is according to detection process unit
Testing result judge whether to need to send alarm signal, if the amounts of particles of certain point threshold value predetermined more than, i.e.,
There is particle exception in a certain test point, and alarm signal is reached signal projector, corresponding alarm signal by system host by USB interface
Number just sent in real time.
Live performing module is located at clean outdoor, and it includes multiple receiving transducers and alarm module, multiple receiving transducers
Quantity is identical with particle detector, each particle detector one receiving transducer of correspondence, sends single for receiving the result
The alarm signal that unit sends, the alarm signal that alarm module is used to receive notifies to open in time using visual warning device
Dynamic scene emergency processing pattern.
In an embodiment of the present invention, alarm module has wireless receiver, and wireless receiver receives signal projector hair
Corresponding visualization warning device work is notified after the alarm signal sent, after decoding.In an embodiment of the present invention, the visualization
Warning device is corresponding indicator lamp, i.e., after reception warning device in scene receives alarm signal, indicator lamp does not stop flicker.
Fig. 3 is referred to, Fig. 3 is signal emitting-receiving system block diagram in the embodiment of the present invention.As illustrated, in transmitting terminal
(signal projector), analog signal is changed into data signal through oversampling, quantization and coding, then is sent to by processes such as code fractal transforms
On channel.Receiving terminal (reception alarm) is arrived, pattern inverse transformation has been carried out first, then data signal has been reduced to analog signal,
Indicator lamp can not stop flicker.
After the completion of site disposal, police instruction is eliminated by particle real-time system director.
Benefit using data signal is：Digital Transmission only represents the data of 0 and 1 changing pattern, is compiled with numeral
Code mode carrys out modulation radio carrier wave, and transmitting terminal is modulated according to digital coding rule, and receiving terminal is solved by identical rule
Adjust, obtain number peace code stream, then further decoding, synthesizes original information, and process is more complicated, but as long as can be complete in transmit process
Whole transmission and reception, the raw information obtained after demodulation are substantially undistorted.
The particle on-line testing method in the embodiment of the present invention is illustrated below, the method can include following step
Suddenly：
Step S1：Set and obtain multiple particle detector record standard configuration files, wherein, the configuration file is matched somebody with somebody
Putting item includes particle detector number and predetermined threshold value；
Step S2：Multiple particle detectors of surrounding in toilet are evenly distributed on, separated in time detects each
The amounts of particles of grain detector relevant position environment, and these testing results are remotely sent to host module in real time；
Step S3：Host module receives the testing result that the multiple particle detector sends, and judges each point successively
The amounts of particles of the relevant position environment for detecting threshold value whether predetermined more than；
Step S4：Testing result according to detection process unit judges whether to need to send alarm signal, if certain point
The amounts of particles threshold value predetermined more than, just the alarm signal that corresponding particle detector is detected is sent；
Step S5：After receiving transducer corresponding with particle detector each described receives alarm signal, send described
Alarm signal；
Step S6：The alarm signal that will be received notifies to start live emergency processing in time using visual warning device
Pattern.
Only embodiments of the invention above, embodiment simultaneously is not used to limit scope of patent protection of the invention, therefore
Every equivalent structure change made with specification of the invention and accompanying drawing content, similarly should be included in protection of the invention
In the range of.
Claims (10)
1. a kind of chip manufacturing clean room particle test system, it is characterised in that including：
Multiple particle detectors, are evenly distributed on the surrounding in toilet, and relevant position ring is detected at regular intervals for
The amounts of particles in border, and these testing results are remotely sent to host module in real time；
Host module, it includes：
Detection process unit, receives the testing result that the multiple particle detector sends, and judge that each point is detected successively
Relevant position environment whether predetermined more than one threshold value of amounts of particles；
As a result transmitting element, the testing result according to detection process unit judges whether to need to send alarm signal, if certain
The amounts of particles threshold value predetermined more than of point, just sends corresponding alarm signal；
Live performing module, positioned at clean outdoor, it includes：
Multiple receiving transducers, its quantity is identical with particle detector, each one receiving transducer of the particle detector correspondence,
For receiving the alarm signal that the result transmitting element sends；
Alarm module, the alarm signal for that will receive notifies to start the emergent place in scene in time using visual warning device
Reason pattern.
2. chip manufacturing clean room particle test system according to claim 1, it is characterised in that the host module is adopted
With wireless transceiving modes transmission/receive information；The multiple particle detector is sent using wireless mode；The scene performs mould
Block uses wireless mode receive information.
3. chip manufacturing clean room particle test system according to claim 1, it is characterised in that the result sends single
Unit is sent using wireless mode, and the multiple receiving transducer is received using wireless mode.
4. chip manufacturing clean room particle test system according to claim 3, it is characterised in that the host module is
Industrial Control Computer with USB interface, the result transmitting element has wireless launcher, and the detection process unit passes through
Alarm signal is reached signal projector by USB interface.
5. chip manufacturing clean room particle test system according to claim 4, it is characterised in that the alarm module tool
After thering is wireless receiver, the wireless receiver to receive the alarm signal that signal projector sends, notify accordingly may be used after decoding
Depending on changing warning device work.
6. chip manufacturing clean room particle test system according to claim 1, it is characterised in that the visualization alarm
Device is corresponding indicator lamp.
7. the particle test method of a kind of use claim 1-6 any described chip manufacturing clean room particle test system,
It is characterised in that it includes following steps：
Step S1：Multiple particle detector record standard configuration files are set and obtain, wherein, the configuration item of the configuration file
Including particle detector number and predetermined threshold value；
Step S2：Multiple particle detectors of surrounding in toilet are evenly distributed on, separated in time detects that each particle is examined
Survey the amounts of particles of instrument relevant position environment, and these testing results are remotely sent to host module in real time；
Step S3：Host module receives the testing result that the multiple particle detector sends, and judges each point detection successively
The amounts of particles of the relevant position environment for arriving threshold value whether predetermined more than；
Step S4：Testing result according to detection process unit judges whether to need to send alarm signal, if certain point
The grain number amount threshold value predetermined more than, just sends the alarm signal that corresponding particle detector is detected；
Step S5：After receiving transducer corresponding with particle detector each described receives alarm signal, the alarm is sent
Signal；
Step S6：The alarm signal that will be received notifies to start live emergency processing mould in time using visual warning device
Formula.
8. chip manufacturing clean room particle test method according to claim 1, it is characterised in that the host module is adopted
With wireless transceiving modes transmission/receive information；The multiple particle detector is sent using wireless mode；The scene performs mould
Block uses wireless mode receive information.
9. chip manufacturing clean room particle test method according to claim 8, it is characterised in that the host module is
Industrial Control Computer with USB interface, the result transmitting element has wireless launcher, and the detection process unit passes through
Alarm signal is reached signal projector by USB interface.
10. chip manufacturing clean room particle test method according to claim 9, it is characterised in that the alarm module
With wireless receiver, notify corresponding after the wireless receiver receives the alarm signal that signal projector sends, after decoding
Visualization warning device work.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611047410.7A CN106769801A (en) | 2016-11-22 | 2016-11-22 | A kind of particle test system visualizes warning device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611047410.7A CN106769801A (en) | 2016-11-22 | 2016-11-22 | A kind of particle test system visualizes warning device |
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| CN106769801A true CN106769801A (en) | 2017-05-31 |
Family
ID=58975497
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| CN201611047410.7A Pending CN106769801A (en) | 2016-11-22 | 2016-11-22 | A kind of particle test system visualizes warning device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110851984A (en) * | 2019-11-12 | 2020-02-28 | 长江存储科技有限责任公司 | Data processing method and device |
| CN111665178A (en) * | 2020-07-10 | 2020-09-15 | 安徽马钢矿业资源集团南山矿业有限公司 | Remote detection stope raise dust alarm device |
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| CN203561383U (en) * | 2013-09-26 | 2014-04-23 | 奥星制药设备（石家庄）有限公司 | Clean environment and particle monitoring device based on PLC |
| CN205002306U (en) * | 2015-09-09 | 2016-01-27 | 周东伟 | Indoor air purification system of intelligence |
| CN205608477U (en) * | 2016-04-20 | 2016-09-28 | 江苏姑苏净化科技有限公司 | Ultra -clean toilet with automatic monitoring system |
-
2016
- 2016-11-22 CN CN201611047410.7A patent/CN106769801A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN201756265U (en) * | 2010-07-01 | 2011-03-09 | 苏州工业园区鸿基洁净科技有限公司 | Clean workroom and cleanliness monitoring system |
| CN103310593A (en) * | 2012-03-09 | 2013-09-18 | 上海泰传信息科技有限公司 | Gas alarm device based on wireless transmission and alarm monitoring system of gas alarm device |
| CN203241323U (en) * | 2013-04-03 | 2013-10-16 | 李军 | Indoor air quality monitoring device |
| CN203561383U (en) * | 2013-09-26 | 2014-04-23 | 奥星制药设备（石家庄）有限公司 | Clean environment and particle monitoring device based on PLC |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110851984A (en) * | 2019-11-12 | 2020-02-28 | 长江存储科技有限责任公司 | Data processing method and device |
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| CN111665178A (en) * | 2020-07-10 | 2020-09-15 | 安徽马钢矿业资源集团南山矿业有限公司 | Remote detection stope raise dust alarm device |
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Application publication date: 20170531 |
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