CN106768399A - Rectangular laser spot energy distribution rapid detection system and method - Google Patents
Rectangular laser spot energy distribution rapid detection system and method Download PDFInfo
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- CN106768399A CN106768399A CN201611112871.8A CN201611112871A CN106768399A CN 106768399 A CN106768399 A CN 106768399A CN 201611112871 A CN201611112871 A CN 201611112871A CN 106768399 A CN106768399 A CN 106768399A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J11/00—Measuring the characteristics of individual optical pulses or of optical pulse trains
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Abstract
Laser beam the present invention relates to semiconductor laser is sent is radiated on photodetector, drives Precision Lead-Screw motion control to be moved with precise displacement in light beam along two guide rails parallel to leading screw perpendicular to the rectangle shutter of laser beam by the stepper motor in detection platform；Controllor for step-by-step motor needs to control the motion of stepper motor according to the motion of rectangle shutter, to change the spot intensity being radiated on photodetector, triggers the output voltage of opto-electronic conversion to produce change；Voltage signal is gathered and shown by digital storage oscilloscope.The precise displacement that voltage signal and shutter according to gathering are moved, obtains the variation relation between voltage and displacement, realizes detection and demarcation to rectangular laser spot intensity distribution situation.Also it is simultaneously laser transversely deforming measuring system (number of patent application：201610504094.5) demarcation of deformation measurement is provided.The present invention realizes the detection of rectangular laser spot intensity distribution situation and demarcates, and with accuracy of detection higher, may be directly applied to demarcate the measurement of transversely deforming measuring system.
Description
Technical field
The present invention relates to detection technique field, more particularly to a kind of mechanical movement by accurate control influences photodetection
Device receives intensity of illumination to detect the Energy distribution of rectangular laser hot spot.
Background technology
When measuring object transversely deforming using laser transversely deforming measuring system, luminous intensity is relatively vulnerable to environmental factor shadow
Ring, causing laser transversely deforming to measure will be by many such environmental effects.To ensure deformation measurement precision, it is necessary to a kind of simple
Method deformation measuring system is fast and accurately demarcated；What spot intensity was distributed simultaneously homogenizes degree to transversely deforming
Certainty of measurement there is conclusive effect, therefore detection rectangular laser spot intensity the regularity of distribution, determine that light spot energy is even
Change distributed areas, the certainty of measurement to improving laser transversely deforming measuring system is significant.
The light distribution detection method of laser beam mainly has traverse measurement method and the major class of sensor array method two.Its
In, traverse measurement method can be divided into Narrow slit, orifice method, knife-edge method again；Sensor array rule mainly has silicon CCD and CMOS to detect
The camera measurement method of device array.
Narrow slit is to go to block testing laser beam with one piece of baffle plate with a slit so that hot spot to be measured only has slit
The energy of position can reach sensor, by comparing the position of slit and the signal of detector, can just draw laser beam
Cross section spot energy distribution；Aperture rule is that an aperture is opened on baffle plate, and light is obtained by the position of constantly translation aperture
The distribution situation of spot energy, so as to obtain the EDS maps of light spot energy, the certainty of measurement of orifice method generally depends on the size in hole
And mobile distance, Kong Yue great, displacement is bigger, and measuring result error also increases therewith；Knife-edge method uses total saturating
The measuring method of the amount of penetrating, blade is fixed on optical translation platform, is hung down along with direction of beam propagation using the straight edge of a knife of cutting edge
Straight direction cutting beam, is needed in measurement process by slowly adjusting translation stage, and transmission is repeatedly measured using laser power meter
The laser power at cutting edge edge, so as to realize the measurement to spot energy distribution.
Can be conveniently using the camera measurement method detection laser beam transverse intensity distribution.T of silicon CCD and cmos detector array
Acquisition laser profile.Hot spot irradiation is converged in the workspace of detector during measurement, by photoelectric effect, change electricity is produced
Stream, so as to realize measurement to the spot energy distribution for irradiating.
Narrow slit can more easily obtain the discrete energy of local area distribution of laser facula, but can not directly obtain
To the universe EDS maps of whole light spot energy, according to mathematical principle, could be by part only when each local distribution is separate
Distribution reduces the overall two-dimentional EDS maps of glossing up exactly；Orifice method is (referring to a kind of " in site measurement focussed laser spot energy
The device and method of distribution ", application number：As long as 201010124758.8) advantage is that aperture is sufficiently small can be obtained by one
Accurate laser facula Energy distribution situation.But the method time of measuring is long, it is impossible to directly obtain the Energy distribution of overall hot spot,
And in the case where orifice size is certain, the hot spot that size is less than or is in same magnitude therewith cannot be measured.On the whole,
Narrow slit and orifice method are both needed to be recorded by the position of continuous travelling slit or aperture the beam energy of transmission, it is impossible to mould
Intend influence of the transversely deforming after material stress to spot intensity, be not suitable for the demarcation side of laser transversely deforming measuring system
Method.
Common knife-edge method in measurement process, to adjust the laser power through blade edge, it is necessary to pass through spiral micrometer
Device slowly moves optical table, and governing speed is slow, due to lacking accurate mechanical movement control, there is larger manual control
Machine error, meanwhile, the beam energy not blocked is detected by power meter, it is impossible to be quickly obtained the light intensity point of laser beam
Cloth curve, it is impossible to quick to determine that rectangular light spot energy homogenizes distributed areas, limits it in laser transversely deforming measuring system
Fast Calibration application.
Sensor array method generally using area array CCD/cmos device as photo-sensitive cell, with sensitivity very high, when
When time for exposure is certain value, the light intensity at laser beam center easily causes the supersaturation of photosensitive pixel, or even effect of flood week
The normal work of border area domain pixel, while the weaker fringe region of energy is but in under-exposure state, greatly reduces dynamic survey
The scope of amount, have impact on the scope and accuracy of laser facula energy distribution measurement.In addition, because photo-sensitive cell is higher
Sensitiveness, the hardware device for causing sensor array method to be used generally needs to spend the cost higher than other measuring methods.
Other sensor array method cannot simulation material transversely deforming influence, it is difficult to be applied to the mark of laser transversely deforming measuring system
It is fixed.
The content of the invention
Laser transversely deforming measuring system is a kind of new deformation measurement method (number of patent application of recent invention：
201610504094.5), system needs the quick demarcation for measuring precision in practical distortion measurement to ensure certainty of measurement.
The present invention proposes a kind of mechanical movement by accurate control and blocks the rectangular light spot of directive photodetector, so as to change light
The intensity of illumination that electric explorer is received to detect spot energy distribution situation and intensity of illumination and corresponding moving displacement relation,
Detect the uniformity of spot energy distribution.Carry out the transversely deforming of simulation material by the mechanical movement of accurate control, be that deformation is surveyed
Amount provides easily detection and scaling method.
The technical scheme that the present invention solves above-mentioned technical problem is as follows：
The structure of rectangular laser spot energy distribution rapid detection system of the present invention and method is arranged such as Fig. 1 institutes
Show.
Rectangular laser spot energy distribution rapid detection system, including semiconductor laser, square optical fiber, support frame, light
Fine head mounting seat, collimation lens, detection platform (including leading screw, guide rail), shutter, mobile platform, condenser lens, photodetection
Device, BNC connecting lines, digital storage oscilloscope, STP netting twines, computer, 42 stepper motors, control line, controllor for step-by-step motor；
The geometric center of the collimation lens and condenser lens keeps on an axis, and principal plane is parallel to each other；The smooth electrical resistivity survey
Survey device, digital storage oscilloscope and calculate mechatronics；The stepper motor and controllor for step-by-step motor are electrically connected；It is described to block
Plate plane parallel to collimation lens, photodetector principal plane, its direction of motion also with their keeping parallelisms.
The semiconductor laser is used to launch laser, and laser is irradiated to light after square optical fiber and collimation lens are homogenized
Electric explorer；
The square optical fiber and collimation lens are used to homogenize Distribution of laser intensity；
The condenser lens is used for convergent laser beam in the photosensitive region of photodetector；
The laser that the photodetector is used for after collectiong focusing irradiates and perceives light intensity signal, is obtained by opto-electronic conversion
Obtain the corresponding electric signal of light intensity signal；
The detection platform is by controllor for step-by-step motor, 42 stepper motors, guide rail and leading screw, mobile platform and shutter group
Into for laser light spot intensity distribution detection and transversely deforming measurement demarcation；
The controllor for step-by-step motor transports 42 stepping motor smooths by the subdivision combination design program of adjustment driver
Turn, reduce vibration and noise improves running accuracy, and drive leading screw to drive mobile platform and shutter according to specified motion side
Formula precise motion；
42 stepper motor is used to drive the motion of leading screw and mobile platform and shutter；
The guide rail is used for support movable platform and ensures the motion of shutter all the time parallel to collimation lens and light electrical resistivity survey
Survey the principal plane of device；
The leading screw is used to drive mobile platform and the moving displacement of precise control mobile platform and shutter；
The precision actuation that the mobile platform passes through leading screw, for connected shutter provides accurate moving displacement；
The shutter moves to change what photodetector was received with mobile platform edge perpendicular to the direction of laser beam
Rectangular laser spot intensity, detects the Energy distribution situation of laser facula；
The digital storage oscilloscope and computer are used to that electric signal to be calculated and shown.
The beneficial effects of the invention are as follows：Rectangular laser spot energy distribution rapid detection system, it is characterised in that the step
Stepper motor controller passes through to use different control programs to realize control shutter with different movement patterns.Can be with many
Plant different modes inspection rectangular laser light spot energy to homogenize and distribution situation, it is possible to simulate various transversely deforming mode, be horizontal
Quick, accurate and reliable demarcation is provided to deformation measurement；The present invention has accuracy of detection higher, can fast and accurately examine
That surveys spot intensity homogenizes distribution；Simultaneously also can simulation material transversely deforming feature, be that material transversely deforming measurement is carried
For fast and accurately demarcating.
On the basis of above-mentioned technical proposal, the present invention can also do following improvement.
Further, the servo electricity that described 42 stepper motors for driving mobile platform can change the outfit more accurate
Machine, to improve the accuracy of detection of detecting system.
Beneficial effect using above-mentioned further scheme is：The essence of control guide screw movement can be improved using servomotor
Degree, for mobile platform provides more accurately moving displacement control.
Further, the precision of the leading screw determines the precision of mobile platform moving displacement, using the silk of higher precision
Thick stick can improve the accuracy of detection of detection platform.
Beneficial effect using above-mentioned further scheme is：Spot intensity accuracy of detection can be improved, while improving laterally
The precision that deformation measurement is demarcated.
Rectangular laser spot energy distribution method for quick, comprises the following steps：
Step S1, rectangular light spot will be homogenized photodetector will be irradiated to axle；
Step S2, the detection motion feature requirement according to needed for shutter (7), the control of establishment controllor for step-by-step motor (17)
Processing procedure sequence；
Step S3, by controllor for step-by-step motor input instruction, control the rotation of 42 stepper motors；
Step S4, by 42 stepper motors drive leading screw (6- is 2.) move；
Step S5, by leading screw control mobile platform (8) by setting motion feature precise motion, receive photodetector
Intensity of illumination changed due to the motion of shutter；Obtain corresponding before and after luminous intensity changes by opto-electronic conversion
Electric signal；
Step S6, the electric signal exported using digital storage oscilloscope or his measuring method detection photodetector；
Step S7, electric signal is calculated and shown, obtained voltage and shutter moving displacement relation curve.Blocking
Under plate uniform motion or equidistant mobile condition, linear relationship curve explanation rectangular light spot uniform intensity distribution, intensity homogenization
It is ideal；Non-linear relation curve represents rectangular light spot intensity distribution inequality, and intensity homogenizes effect on driving birds is not good.
Brief description of the drawings
Fig. 1 is rectangular laser spot energy distribution rapid detection system of the present invention and method constructional device schematic diagram；
Fig. 2 is rectangular laser spot energy distribution rapid detection system of the present invention and method implementing procedure sketch；
Fig. 3 is the moved furthers such as shutter of the present invention static state occlusion process digital multimeter record output voltage gained voltage position
Move curve map；
Fig. 4 is that the moved further static state such as shutter of the present invention exit occlusion process digital multimeter record output voltage gained electricity
Pressure displacement curve figure；
Fig. 5 is shutter of the present invention at the uniform velocity occlusion process digital storage oscilloscope record output voltage waveform；
Fig. 6 at the uniform velocity exits occlusion process digital storage oscilloscope record output voltage waveform for shutter of the present invention；
Fig. 7 be in digital storage oscilloscope of the present invention and digital multimeter curve obtained figure key point in rectangular light spot middle position
Put distribution map；
In accompanying drawing, the list of parts representated by each label is as follows：
1st, semiconductor laser；2nd, square optical fiber；3rd, support frame；4th, optical fiber head mounting seat；5th, collimation lens；6th, detect flat
Platform；6- 1., guide rail；6- 2., leading screw；7th, shutter；8th, mobile platform；9th, condenser lens；10th, photodetector；11st, BNC connects
Wiring；12nd, digital storage oscilloscope；13rd, STP netting twines；14th, computer；15th, 42 stepper motor；16th, control line；17th, stepping electricity
Machine controller.
Specific embodiment
The method of the present invention, principle and feature are described below in conjunction with accompanying drawing, example is served only for explaining this hair
It is bright, it is not intended to limit the scope of the present invention.
Detection method of the invention is：The laser beam that semiconductor laser sends is radiated on photodetector, is passed through
The mechanical movement of precision control, makes the shutter perpendicular to laser beam be moved with accurate micro-displacement in light beam, to change
Change is radiated at the spot intensity on photodetector, triggers the output voltage of opto-electronic conversion to produce change.Shown by stored digital
Ripple device is gathered and shows voltage signal, according to collection voltage signal and shutter accurate movement displacement, obtain voltage with
Variation relation between displacement, realizes the detection and demarcation to rectangular laser spot intensity distribution situation.
Cleaning Principle of the invention is：During system operation, drive 42 stepper motors by controllor for step-by-step motor and block
Plate progressively blocks laser beam along precise guide rail, and be irradiated to for rectangular light spot by the collimation lens that semiconductor laser passes through to fix
Condenser lens simultaneously converges to the induction zone of photodetector；As laser beam is progressively blocked, cause photodetector because connecing
The illuminating area of receipts reduces and changes output voltage, and the voltage of change transfers signals to stored digital and shows by BNC connecting lines
Ripple device carries out waveform analysis, display and stores, and is sent to computer eventually through STP netting twines and waveform is further analysed.It is logical
The waveform of digital storage oscilloscope capture is crossed, can be analyzed and be existed between photodetector output voltage and shutter displacement
Linear relationship demarcate deformation measurement, and the Energy distribution of rectangular laser hot spot is detected with this, determine that energy homogenizes region.As schemed
2 show rectangular laser spot energy distribution rapid detection system and method implementing procedure sketch.
Characteristics of detection system involved in the present invention and experiment embodiment are described：
(1) composition of detecting system involved in the present invention
Rectangular laser spot energy distribution rapid detection system is main by rectangular laser spot emission system, Electromechanical Control system
System, photo-translating system, the part of Signal Analysis System four composition.
Rectangular laser spot emission system is made up of semiconductor laser, square optical fiber, collimation lens, optical fiber head mounting seat.
Mechatronic control system (is contained and led by 42 stepper motors, control line, controllor for step-by-step motor, support frame, detection platform
Rail, leading screw), mobile platform, shutter composition.
Photo-translating system is made up of condenser lens, photodetector, BNC connecting lines.
Signal Analysis System is made up of digital storage oscilloscope, STP netting twines, computer.
(2) detecting system critical component model involved in the present invention is selected
Rectangular laser spot emission system：Semiconductor laser wavelength is 635nm, output power range 0-500mw；Square light
Fibre core footpath 200um, numerical aperture 0.22；Collimation lens focal length 10mm；Optical fiber head mounting seat is processed by aluminium customization.
Mechatronic control system：42 1.8 ° of stepper motor step angles；Driver uses Leadshine in controllor for step-by-step motor
Company's M420 models, support 128 times of subdivisions, can be by adjusting eight dip-switch packages, setting dynamic duty electric current (totally 8 etc.
Level), static state subtract stream and subdivision accuracy, and provided using RIGOL companies DP1308A power supplys stabilization 24v supply voltages；Branch
Support is built by 20*20mm aluminium section bars；Guide rail, leading screw diameter are 10mm, guide screw lead 2mm；Shutter is high by 1.5mm aluminium sheets
Precision laser cutting is formed.
Photo-translating system：Photodetector uses the PDA8A/M model fixed gain silicon detectors of THORLABS companies,
Its response wave length 320-1000nm, bandwidth 50MHz, noise equivalent power 6.5pW, possess BNC signal outputs.
Signal Analysis System：Digital storage oscilloscope uses RIGOL companies DS4024 model oscillographs, possesses 200MHz moulds
Intend bandwidth, 4 analog channels.
(3) the detection parameter setting of detecting system involved in the present invention
Semiconductor laser power：100mw；Rectangular light spot length：4mm；Shutter pace：0.1mm/ buttons are (quiet
State unique step), 0.25mm/s (dynamic is at the uniform velocity)；Base during digital storage oscilloscope level：2s, when basic mode formula：Y-T patterns, vertically
Voltage：500mv/div, sample mode：High-resolution, the method for operation：Auto；Stepper motor supply voltage：24v；Stepper motor
Controller：8 toggle switch of M420 drivers 1,2,3,6,7 are OFF state, and 4,5,8 is that (2.00A, full stream electric current sets ON states
It is fixed, 64 times of subdivisions, 12800 step numbers/circle).
(4) experiment embodiment analysis
Transversely deforming needs in order to meet simulation material of the invention, for it provides high-precision calibrating, by stepping electricity
Machine controller is input into different control programs to change the motor pattern of shutter；Therefore, involved detecting system and method
In the checking of this experiment embodiment, it has been respectively adopted what digital multimeter collection unique step was moved according to shutter motor message feature
Static Detection signal, the dynamic detection signal that digital storage oscilloscope collection is at the uniform velocity moved.When shutter is moved by unique step
When being positioned at the diverse location of rectangular light spot, the voltage digital universal meter being connected with photodetector easily can directly read
Signal voltage, understands the change of magnitude of voltage；And when shutter uniform motion, digital storage oscilloscope can continuous collecting block
The voltage signal of plate motion, obtains the energy distribution curve of rectangular light spot, quick to determine that intensity homogenizes region.This experiment passes through two
The comparative analysis of kind of collecting method, it is intended to which further illustrating detecting system involved in the present invention and method can realize square
The different detection modes of shape laser light spot intensity distribution situation, have in the measurement of noncontact transversely deforming measuring system is demarcated
Applicability and validity.
1. unique step movement Static Detection digital multimeter interpretation of result
Unique step movement Static Detection records the output voltage of photodetector by BM8300L digital multimeter.Adopt
When being detected with digital multimeter, semiconductor laser power is 100mw, by writing for control program, makes stepper motor each
Button turns over 18 °, and due to using 2mm lead screws, thus button shutter advance 0.1mm every time, and spot length is 4mm,
Output voltage values during 40 diverse locations are thus recorded, and shutter static state unique step is drawn according to the magnitude of voltage for obtaining and blocked
The electric voltage displacement curve (referring to Fig. 3) of hot spot process.When button 40 times, that is, complete the detection of whole spot length；Using same
Mode, then by gradually pressing stepper motor reverse key, and record diverse location output voltage values, draw shutter unique step
Static state exits the electric voltage displacement curve map for blocking hot spot process, as shown in Figure 4.
The area limit point that 4 points of a, b, c, d is added for ease of interpretation of result in Fig. 3, Fig. 4.Fig. 3 display hot spots do not hide
During gear the output voltage of photodetector be 1.10v, rectangular light spot ab sections (left end 0.5mm) and cd sections (right-hand member 0.5mm) (referring to
Fig. 7) light distribution is extremely faint, and output voltage is basically unchanged；As shutter enters bc sections, voltage shows nonlinear change,
Illustrate that light distribution is still uneven；Into voltage and shutter that bc sections of center section (center 1mm distributed areas) are recorded
More obvious linear relationship is showed between moving displacement, illustrates that light intensity homogenizes degree higher；Treat that rectangular light spot is all hidden
During gear, output voltage is reduced to 0.
Fig. 4 is exported by unique step static state is exited when the shutter that occlusion process digital multimeter records is in diverse location
Magnitude of voltage, the precision of checking system mechanical movement.In Fig. 4, electric voltage displacement curve has with Fig. 3 spot intensity distribution curves
Preferable uniformity, dc sections (right-hand member 0.5mm) and ba sections of (left end 0.5mm) light distribution are extremely faint, likewise enter cb sections of electricity
Pressure display nonlinear change, illustrates that light distribution is uneven, and shading is exited in cb sections of center section (center 1mm parts) display
There is more obvious linear relationship between journey shutter moving displacement and output voltage；When shading is exited completely, output electricity
Pressure rises to 1.10v.
Digital multimeter unique step movement Static Detection can easily obtain shutter and be in rectangular light spot diverse location
When photodetector output voltage values.By detecting the magnitude of voltage of diverse location point, the displacement voltage curve of shutter is drawn
The Energy distribution of rectangular light spot can be detected.
2. the at the uniform velocity digital storage oscilloscope interpretation of result of movement dynamically detection
At the uniform velocity movement dynamically detection makes shutter block rectangular light spot with uniform motion by writing control program.Fig. 5 is
The shutter uniform motion occlusion process voltage oscillogram of digital storage oscilloscope record.If block speed being in theory
0.25mm/s is, it is necessary to it is the rectangular light spot of 4mm that the 16s times block length；Fig. 5 results show that the time interval between AD is just
16s, illustrates the degree of accuracy of stepper motor 0.25mm/s speed controls.The at the uniform velocity process of blocking shows, A points crest voltage when not blocking
It is 1.10v, rectangular light spot AB sections (left end 0.5mm) and CD sections of (right-hand member 0.5mm) light distribution are extremely faint, and output voltage is basic
It is constant；And as shutter enters BC section, voltage shows nonlinear change, in BC sections of center section (center 1mm sections) voltage
In obvious linear relationship, treat that all blocking voltage is reduced to 0.
Fig. 6 is the oscillogram that shutter at the uniform velocity exits occlusion process digital storage oscilloscope record, and system is demonstrated again
The precision of mechanical movement, shutter is at the uniform velocity exited and blocked to exiting position A points completely since D points.At the uniform velocity exit and blocked
It is 0 that journey blocks voltage completely in D points, and rectangular light spot DC sections of (right-hand member 0.5mm) output voltage is basically unchanged, and BC sections of initial part
Point, voltage is still in nonlinear change, and only interlude (center 1mm regions) is presented obvious linear relationship；It is to be retired to B points, electricity
Pressure rises to 1.10v, and BA sections of (left end 0.5mm) voltage is basically unchanged, and illustrates that light distribution is extremely faint.
Digital storage oscilloscope uniform motion dynamic detection is by gathering shutter uniform motion in rectangular laser hot spot
When continuous output voltage, showing real-time wave；Electric voltage displacement curve can be accurately and rapidly obtained, rectangular laser light is checked
The energy distribution state of spot.For material transversely deforming measurement provides accurate calibration.
3. two kinds of testing result comparative analyses
Fig. 7 is shutter shading and exits tetra- passes of A, B, C, D of digital storage oscilloscope wave recording in occlusion process
Tetra- key point correspondence position distribution maps in rectangular light spot of a, b, c, d in key point and digital multimeter measured waveform.Table 1 is quiet
The rectangular light spot Energy distribution state verification result that two kinds of method of testings of state and dynamic are obtained.
The digital storage oscilloscope of table 1 and digital multimeter testing result comparative analysis table
The result of table 1 shows, is rectangular light spot shutter (unique step motion under same motor pattern of 4mm for length
Or uniform motion), its occlusion process and to exit the spot energy distribution that occlusion process obtains completely the same demonstrates system mechanics
The precision that mechanism kinematic has；Unique step motion can with the testing result explanation system of both different motions of uniform motion
Effective and accurate detection is carried out to spot energy distribution.
Conclusion：
A.4mm the rectangular light spot energy of length is distributed symmetrically that the Energy distribution of each 0.5mm in left and right is extremely faint, light
Electric explorer does not have energy-sensitive signal；
B.4mm there is obvious linear relationship between the displacement voltage of rectangular light spot central segment (1mm regions), shows the area
Rectangular laser light spot energy homogenizes that degree is higher in domain, and be evenly distributed state.
Controllor for step-by-step motor involved in the present invention can as needed be input into different control programs, be that shutter is carried
For different motor patterns；The present invention can quick detection rectangular light spot Energy distribution, it is determined that homogenizing regional extent, realize square
The detection of shape laser light spot intensity distribution situation and demarcation, with accuracy of detection higher, may be directly applied to demarcate horizontal change
The measurement of shape measuring system.
Claims (4)
1. rectangular laser spot energy distribution rapid detection system, it is characterised in that including the semiconductor laser sequentially put
(1), [including guide rail is 1. for square optical fiber (2), support frame (3), optical fiber head mounting seat (4), collimation lens (5), detection platform (6)
With leading screw 2., shutter (7), mobile platform (8), 42 stepper motors (15), controllor for step-by-step motor (17) etc.], condenser lens
(9), photodetector (10), digital storage oscilloscope (12), computer (14)；The collimation lens (5) and condenser lens (9)
Geometric center keep on an axis, and principal plane is parallel to each other；The photodetector (10), digital storage oscilloscope
(12) electrically connected with computer (14)；42 stepper motor (15) and controllor for step-by-step motor (17) are electrically connected；It is described to block
Plate (7) plane parallel to collimation lens, photodetector principal plane, its direction of motion also with their keeping parallelisms；
The semiconductor laser (1) is shone for launching laser, laser after square optical fiber (2) and collimation lens (5) are homogenized
Penetrate in condenser lens (9)；
The square optical fiber (2) and collimation lens (5) are for homogenizing Distribution of laser intensity；
The condenser lens (9) is for convergent laser beam in the photosensitive region of photodetector (10)；
The photodetector (10) is irradiated for the laser after collectiong focusing and perceives light intensity signal, is obtained by opto-electronic conversion
Obtain the corresponding electric signal of light intensity signal；
The detection platform (6) is by controllor for step-by-step motor (17), 42 stepper motors (15), guide rail (6- is 1.) and leading screw (6-
2.), mobile platform (8) and shutter (7) are constituted, and be distributed detection for laser light spot intensity and transversely deforming measurement is demarcated；
The controllor for step-by-step motor (17) controls 42 stepper motors by the subdivision and design program of adjustment driver
(15) rotation simultaneously drives leading screw (6- is 2.) to drive mobile platform (8) and shutter (7) according to specified motion；
42 stepper motor (15) is for driving the motion of leading screw (6- is 2.) and mobile platform (8) and shutter (7)；
The guide rail (6- is 1.) is used for support movable platform (8) and ensures the motion of shutter (7) all the time parallel to collimation lens
With the principal plane of photodetector；
The leading screw (6- is 2.) is used to drive mobile platform and the moving displacement of precise control mobile platform and shutter；
The precision actuation that the mobile platform (8) passes through leading screw, for connected shutter provides accurate moving displacement；
The shutter (7) is moved to change the square that photodetector is received with mobile platform edge perpendicular to the direction of laser beam
Shape laser light spot intensity, detects the Energy distribution situation of laser facula；
The digital storage oscilloscope (12) and computer (14) are for being calculated electric signal and being shown.
2. rectangular laser spot energy distribution rapid detection system according to claim 1, it is characterised in that the stepping
Electric machine controller (17) is by the subdivision of adjustment driver and uses different control programs to realize control shutter (7) with not
Same movement pattern, can in a multitude of different ways check rectangular laser light spot energy to homogenize and distribution situation, it is possible to
Various transversely deforming mode are simulated, quickly, accurately and is reliably demarcated for transversely deforming measurement is provided.
3. the servo electricity that 42 stepper motors for driving mobile platform according to claim 1 can change the outfit more accurate
Machine, to improve the accuracy of detection of detecting system.
4. rectangular laser spot energy distribution method for quick, it is characterised in that comprise the following steps：
Step S1, rectangular light spot will be homogenized photodetector will be irradiated to axle；
Step S2, the detection motion feature requirement according to needed for shutter (7), the control journey of establishment controllor for step-by-step motor (17)
Sequence；
Step S3, by controllor for step-by-step motor input instruction, control the rotation of 42 stepper motors；
Step S4, by 42 stepper motors drive leading screw (6- is 2.) move；
Step S5, by leading screw control mobile platform (8) by setting motion feature precise motion, make photodetector receive light
Changed due to the motion of shutter according to intensity；Electricity corresponding before and after luminous intensity changes is obtained by opto-electronic conversion
Signal；
Step S6, the electric signal exported using digital storage oscilloscope or other measuring methods detection photodetector；
Step S7, electric signal is calculated and shown, obtained voltage and shutter moving displacement relation curve, it is even in shutter
Under speed motion or equidistant mobile condition, linear relationship curve explanation rectangular light spot uniform intensity distribution, intensity homogenization is more
It is preferable；Non-linear relation curve represents rectangular light spot intensity distribution inequality, and intensity homogenizes effect on driving birds is not good.
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| CN115406544A (en) * | 2022-11-01 | 2022-11-29 | 四川省药品检验研究院(四川省医疗器械检测中心) | Method, device and system for measuring straightness of positioning line of laser positioning light source |
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