CN106767962A - Differential type photoelectric encoder and position judging method - Google Patents
Differential type photoelectric encoder and position judging method Download PDFInfo
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- CN106767962A CN106767962A CN201611165099.6A CN201611165099A CN106767962A CN 106767962 A CN106767962 A CN 106767962A CN 201611165099 A CN201611165099 A CN 201611165099A CN 106767962 A CN106767962 A CN 106767962A
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- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000007373 indentation Methods 0.000 claims abstract description 56
- 238000001514 detection method Methods 0.000 claims abstract description 45
- 239000011159 matrix material Substances 0.000 claims abstract description 3
- 238000000926 separation method Methods 0.000 claims abstract description 3
- 108091029480 NONCODE Proteins 0.000 claims description 4
- 230000033001 locomotion Effects 0.000 description 9
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
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- 238000003672 processing method Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
Abstract
Differential type photoelectric encoder and position judging method, encoder is made up of photoelectric detection system and code-disc, include code channel A, the code channel B and tri- code channels of code channel C that are loaded on code-disc matrix in the concentric circumferences of different-diameter on the code-disc, code-disc is separated into some sectors with by the code-disc radius of each center of indentation of code channel A, all sectors that separation is obtained do not have any two sector identical.Here identical refers to the identical of sector shapes and indent locations contained thereon and kerf width or shape, or be explained further as photoelectric detection system detects each sector when code-disc is at the uniform velocity to rotate, any two sector an edge leaves produced by photoelectric detection system into photoelectric detection system to the sector other edge respectively photosignal or light electrical waveform are all incomplete same, code channel A can be in the outside of code channel B, code channel B can also can be in the outside of code channel C in the outside of code channel A, code channel A.
Description
Technical field
The present invention relates to photoelectric encoder technical field, more particularly to a kind of differential type photoelectric encoder and differential type position
Put determination methods.
Background technology
Encoder（encoder）It is by signal（Such as bit stream）Or data are worked out, are converted to and may be used to communicate, transmit
With the equipment of the signal form of storage.Angular displacement or straight-line displacement are converted into electric signal by encoder, and the former is referred to as code-disc, the latter
Referred to as yardstick.Can be divided into contact and contactless two kinds according to playback mode encoder, it is contactless including photoelectric coding
Device and magnetic coder；Increment type and the class of absolute type two can be divided into according to operation principle encoder at present.Incremental encoder be by
Displacement is converted into periodic electric signal, then this electric signal is transformed into count pulse, and displacement is represented with the number of pulse
Size.One digital code of determination of each position correspondence of absolute type encoder.
Photoelectric encoder, is a kind of the geometry of machinery displacement on output shaft to be converted into pulse or number by opto-electronic conversion
The sensor of word amount.This is to apply most sensors at present, and photoelectric encoder is by code-disc (also known as grating disc) and light electric-examination
Survey device composition.Code-disc is that some light and dark regions are processed on the plectane of certain diameter, usual these regions be
The indentation processed on code-disc material（Hereinafter referred to as carve in the light and shade region that no matter which kind of processing method is processed for convenience of description
Trace）, indentation can be carved to lead to can not also carve logical, grating of these indentations composition on code channel.Due to code-disc and rotating mechanism
Coaxially, code-disc rotates at the same speed with rotating mechanism during rotation, through the electronic components such as light emitting diode and light-sensitive element and optics
The photoelectric detection system some pulses of detection output of composition or waveform signal, pulse is exported by calculating photoelectric encoder per second
Number or waveform just can reflect the information such as the rotating speed of current code-disc.Additionally, to judge direction of rotation, photoelectric detection system detection code
Two-way pulse or the waveform signal of phase difference 90o are may also provide during disk.
Transmission type photoelectric encoder code disc contains data code channel, and code channel replaces shape by a series of clear areas and opacity
Into.When on the encoder code disc data code channel in light projection to movement, the region between indentation or indentation on code channel will serve as
One sect so that a part of luminous energy is passed through from gap, and hinder another part light to pass through.A series of this company of encoder code disc
Mobile shade is produced on the photodiode that continuous action can in a detector（Pulse）.Then, photodiode will produce output
Or signal.Encoder code disc is used for rotary motion.
The material of encoder code disc has glass, metal, a plastics, glass code-disc be in the very thin groove of deposition on glass, its
Heat endurance is good, high precision, and metal code disk is non-friable directly with logical and obstructed groove, but because metal has certain thickness, essence
Degree is just restricted, and its heat endurance will be than poor an order of magnitude of glass, and plastics code-disc is Eco-power, its low cost, but
Precision, heat endurance, life-span are less better.
Resolution ratio-encoder provides how many logical or dark groove referred to as resolution ratio, also referred to as parsing point to be often rotated by 360 °
Degree directly claims how many line, typically indexes 5 ~ 10000 lines at every turn.
The content of the invention
In order to solve the above problems, it is exhausted that the present invention proposes a kind of relatively simple realization in the motion of small range of structure
To a kind of differential type encoder and position judging method of position judgment.
In order to realize purpose of looking like, the technical solution adopted in the present invention is.
Differential type photoelectric encoder and position judging method method.
Differential type photoelectric encoder, is made up of photoelectric detection system and code-disc, includes being loaded in code-disc matrix on the code-disc
Code channel A, code channel B and tri- code channels of code channel C in the concentric circumferences of upper different-diameter, with by each indentation of code channel A just
Code-disc is separated into some sectors by the code-disc radius at center, and all sectors that separation is obtained do not have the complete phase in any two sector
Together.Here identical refers to identical, the Huo Zhejin of sector shapes and indent locations contained thereon and kerf width or shape
Photoelectric detection system detects each sector when one step is construed to code-disc at the uniform velocity to rotate, and an edge enters respectively for any two sector
Enter photoelectric detection system and leave photosignal or light electrical waveform produced by photoelectric detection system not to the sector other edge
Identical, code channel A can be in the outside of code channel B, and code channel B can also can be in the outer of code channel C in the outside of code channel A, code channel A
Side, code channel C can also be in the outside of code channel A, and when the encoder from Transmissive versions, the indentation on code-disc is transmission region,
It is alternatively non-transparent region not have impressed region.
Above-mentioned differential type photoelectric encoder, the code channel A or code channel B is congruent for impressed shape and all indentations
The equal code channel of spacing.It is equidistantly one and is easy to code-disc processing, is also easy to the technical side of photoelectric detection system contraposition detection
Case, code channel A the shape such as indentation equidistantly, Photoelectric Detection part inspection when the shape such as the indentation of code channel B is also is equidistant
The difference of the signal that more stable two code channels of signal for measuring are detected is also easier to contrast, and the indentation on usual code-disc is all square
Shape, sector, round rectangle and fillet are fan-shaped.
The difference of above-mentioned differential type photoelectric encoder, the indentation bar number of the code channel A and the indentation bar number of code channel B is greater than
The integer of the factor of the zero non-code channel A indentations bar number also factor of non-code channel b indentations bar number, and the indentation bar number of code channel A and
The difference of the indentation bar number of code channel B does not have the common factor more than 1 with the indentation bar number of code channel A or the indentation bar number of code channel B.Such code
The indentation of road A and code channel B can be as few as possible appearance relative position relation repeat, especially on code channel A and code channel B meet respectively
Above-mentioned indentation bar number difference limitation ensure that the quarter of code channel A and code channel B when stating knurl congruence and indentation spacing congruence
Trace position relationship rotates a circle in code-disc and all occurs without repetition.
Above-mentioned differential type photoelectric encoder, the indentation bar number of the code channel A and the indentation bar number difference 1 of code channel B.This is
Differential type coding method most easy to use, because the mistake that at this moment the signal difference spacing of code channel A and code channel B rotates a circle in code-disc
Only occur a mechanical periodicity in journey, and be conducive to maximized utilization code-disc area increase indentation to improve resolution.
Above-mentioned differential type photoelectric encoder, the indentation bar number of the code channel A and the indentation bar number difference 2 of code channel B.Generally
This coded system is selected when the indentation number of code channel A and the indentation number of code channel B are all odd numbers.
Above-mentioned differential type photoelectric encoder, the indentation bar number of the code channel C is 2 integer multiple.Code channel C is by code-disc etc.
Point, when pulse or wavelength peak occurs in each code channel C, corresponding code channel A and code channel B shows the phase difference after decile,
It is more beneficial for the judgement and correction of code-disc absolute position.
Above-mentioned differential type photoelectric encoder, the indentation bar number of the code channel A or code channel B is more than 8.In order to distinguish only two
The static absolute position encoder of the straight binary mode of circle, the purpose of differential type encoder of the invention is with less
Code channel number and simpler photoelectric detection system calculate absolute position in dynamic, so the indentation number of encoder of the invention leads to
Can often select to do more indentations in the range of code-disc size and technique are allowed.
Above-mentioned differential type photoelectric encoder, the photoelectric detection system is the light electric-examination at least containing three tunnel signal acquisitions
Survey device.Because code-disc has three code channels, photoelectric detection system must possess three road photoelectric detecting signal collections, so
The relative signal in three tunnels can be exported.
Above-mentioned differential type photoelectric encoder, the photoelectric detection system is transmission-type photoelectric sensor or reflecting light
Electric transducer or two kinds of combination.Transmission-type photoelectric sensor light source and light-sensitive device are respectively toward to the two sides of code-disc, reflective
Against the same face of code-disc, the code-disc that two kinds of photoelectric sensors are used also differs the light source and light-sensitive device of photoelectric sensor,
Because there is three code channels on the code-disc of differential type photoelectric encoder of the invention, it may occur that to different code channels using not
With the situation of photoelectric detection system, at this moment the indentation mode of two code channels would also vary from.
The position judging method of above-mentioned differential type photoelectric encoder, when code-disc is rotated, the photoelectric detection system can
To obtain one group of three road signal comprising detection code channel A, code channel B and code channel C, by the contrast to three signals and rotation process
The change of middle signal contrasts the absolute position angle current to calculate code-disc.This method can be in the angular movement model of very little
Absolute position is obtained by relatively simple coder structure in enclosing, while absolute position can constantly be calibrated during exercise.
Extraneous processor should judge that code-disc is according to signal when using differential type encoder and its position judging method
It is no with uniform motion, data characteristics when certain part of code-disc is by photoelectric detection system when signal meets uniform motion
When, you can judge the absolute position of code-disc, motor control signal can be again coordinated in practical application to whether uniform motion does
Go out auxiliary judgment, at the uniform velocity detection is one kind of detection algorithm, processor can be according to its accuracy of detection to letter in practical application
Whether number meet a certain position of code-disc carries out increasingly complex accurate judgement computing by the feature of photoelectric detection system, especially when
When there is multipurpose rotary, can preferably by real-time three tunnels signal authentication code-disc position, it is to avoid signal bounce is caused
Error in reading, and differential type encoder need not additionally increase zero-bit and judge a little, but the change for passing through differential signal judges
Absolute position and zero-bit.
Processor can certainly be integrated into differential type encoder, such encoder can direct output processor
The positional information for arriving.
In order to preferably describe inventive point of the invention, concealed in description and part accompanying drawing or eliminate housing and fixation
The various parts and the axle or code-disc fixed component through code-disc of connection, all can be according to this as persons skilled in the art
The part of the non-inventive point of the technical scheme that the description of patent is implemented, can be by persons skilled in the art voluntarily in reality
Selected during applying and added, be not described in narration of the invention and be not intended that the present invention lacks these this area general technologies
Personnel do not need the technical characteristic that creative thinking or work just can voluntarily be selected or added, and the "or" in this patent term is to patrol
Volume or.
Brief description of the drawings
A kind of code channel A and code channel B indentation bar numbers of Fig. 1 differential type encoders differ from 1, and code channel C shows for the code-disc of zero-bit code channel
It is intended to.
A kind of code channel A and code channel B indentation bar numbers of Fig. 2 differential type encoders differ from 2, and code channel C is 4 indentations of 90 degree of difference
Code-disc schematic diagram.
A kind of code channel A and code channel B indentation bar numbers of Fig. 3 differential type encoders differ from 2, and code channel C is 4 indentations of 90 degree of difference
Code-disc region separate schematic diagram.
But a kind of equal kerf width of indentation bar number and the unequal schematic diagram of spacing of Fig. 4 differential type encoders.
The schematic diagram of code-disc and photoelectric detection system when Fig. 5 differential types encoder uses transmission type photoelectric detection means.
Mark implication as follows in figure：1, code channel A；2, code channel B；3, code channel C；4, code-disc；5, photoelectric detection system.
Specific embodiment
Example is proposed to specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1, as shown in Figure 2 and Figure 5, used as preferred scheme of the invention, the present embodiment selects metal code disk, transmission
Formula photoelectric detection system, the code channel A and code channel B and code channel C, code channel A that code-disc is machined with through hole as shown in Figure 1 has 20 in outside
The fan-shaped pylone of individual equidistant equal in width, code channel B is machined with 19 fan-shaped pylones of equidistant equal in width, code on the inside of code channel A
Road C is machined with 4 and the equidistant fan-shaped pylone of equal in width, from three road transmission-type photoelectric sensors as light in most inner side
The position relationship of electric detection means, code-disc and photoelectric sensor is as shown in Figure 4.Photoelectric detection system can obtain one group comprising code
The three road signals of road A, code channel B and code channel C, when code-disc is rotated, the signal of the signal, the signal of code channel B and code channel C of code channel A
The waveform or phase difference of change can be produced, when code channel C has waveform or peak value of pulse, the signal of code channel A and the signal phase of code channel B
Potential difference is respectively 0 degree, 90 degree, 180 degree and 270 degree, the present embodiment not integrated processor, simply by three tunnels of photoelectric detection system
Signal output.Extraneous processor can constantly judge whether three resulting road signals meet the signal spy of code-disc uniform motion
Levy, when signal meets uniform motion code-disc certain a part by photoelectric detection system when data characteristics when, you can judge
Go out the absolute position of code-disc, at the uniform velocity detection is one kind of detection algorithm, processor can be according to its detection essence in practical application
Whether degree meets signal a certain position of code-disc carries out increasingly complex accurate judgement computing by the feature of photoelectric detection system.
Claims (10)
1. differential type photoelectric encoder, it is characterized in that：It is made up of photoelectric detection system and code-disc, includes being loaded in code on the code-disc
Code channel A, code channel B and tri- code channels of code channel C on disk matrix in the concentric circumferences of different-diameter, with by each quarter of code channel A
Code-disc is separated into some sectors by the code-disc radius of the center of trace, and all sectors that separation is obtained do not have any two sector
It is identical.
2. differential type photoelectric encoder according to claim 1, it is characterized in that：The code channel A or code channel B is all indentations
Shape congruence and the equal code channel of impressed spacing.
3. differential type photoelectric encoder according to claim 1, it is characterized in that：The indentation bar number and code channel B of the code channel A
Indentation bar number difference be greater than zero non-code channel A indentations bar number the factor also factor of non-code channel b indentations bar number integer, and
And the difference of the indentation bar number of the indentation bar number and code channel B of code channel A does not have with the indentation bar number of code channel A or the indentation bar number of code channel B
Common factor more than 1.
4. differential type photoelectric encoder according to claim 1, it is characterized in that：The indentation bar number and code channel B of the code channel A
Indentation bar number difference be 1.
5. differential type photoelectric encoder according to claim 1, it is characterized in that：The indentation bar number and code channel B of the code channel A
Indentation bar number difference be 2.
6. differential type photoelectric encoder according to claim 1, it is characterized in that：The indentation bar number of the code channel C be 2 it is whole
Several times number.
7. differential type photoelectric encoder according to claim 1, it is characterized in that：The indentation bar number of the code channel A or code channel B
More than 8.
8. differential type photoelectric encoder according to claim 1, it is characterized in that:The photoelectric detection system is at least to contain
The photoelectric detection system of three tunnel signal acquisitions.
9. differential type photoelectric encoder according to claim 1, it is characterized in that：The photoelectric detection system is transmission-type light
Electric transducer or reflective photoelectric sensor or two kinds of combination.
10. a kind of position judging method of the differential type photoelectric encoder being applied to described in claim 1, it is characterized in that, work as code
When disk is rotated, the photoelectric detection system can obtain one group and include detection code channel A, the three road signals of code channel B and code channel C, lead to
Cross and the absolute position angle current to calculate code-disc is contrasted to signal intensity in the contrast of three signals and rotation process.
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| CN201611165099.6A CN106767962A (en) | 2016-12-16 | 2016-12-16 | Differential type photoelectric encoder and position judging method |
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| CN201611165099.6A CN106767962A (en) | 2016-12-16 | 2016-12-16 | Differential type photoelectric encoder and position judging method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108106646A (en) * | 2017-12-11 | 2018-06-01 | 连云港杰瑞电子有限公司 | A kind of reflective absolute value optoelectronic encoding device |
| CN108731710A (en) * | 2018-07-11 | 2018-11-02 | 上海市雷智电机有限公司 | A kind of encoder |
| CN110044395A (en) * | 2018-01-02 | 2019-07-23 | 大银微系统股份有限公司 | Optical encoding sensing device |
| CN111279158A (en) * | 2019-04-23 | 2020-06-12 | 大族激光科技产业集团股份有限公司 | Grating disc and feedback system |
| US11396361B2 (en) * | 2017-07-31 | 2022-07-26 | Commercial Aircraft Corporation of China, Ltd. | Flap slat control lever |
-
2016
- 2016-12-16 CN CN201611165099.6A patent/CN106767962A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11396361B2 (en) * | 2017-07-31 | 2022-07-26 | Commercial Aircraft Corporation of China, Ltd. | Flap slat control lever |
| CN108106646A (en) * | 2017-12-11 | 2018-06-01 | 连云港杰瑞电子有限公司 | A kind of reflective absolute value optoelectronic encoding device |
| CN110044395A (en) * | 2018-01-02 | 2019-07-23 | 大银微系统股份有限公司 | Optical encoding sensing device |
| CN108731710A (en) * | 2018-07-11 | 2018-11-02 | 上海市雷智电机有限公司 | A kind of encoder |
| CN111279158A (en) * | 2019-04-23 | 2020-06-12 | 大族激光科技产业集团股份有限公司 | Grating disc and feedback system |
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Application publication date: 20170531 |