CN106762649A - A kind of exhaust structure of dry vacuum pump - Google Patents
A kind of exhaust structure of dry vacuum pump Download PDFInfo
- Publication number
- CN106762649A CN106762649A CN201510824821.1A CN201510824821A CN106762649A CN 106762649 A CN106762649 A CN 106762649A CN 201510824821 A CN201510824821 A CN 201510824821A CN 106762649 A CN106762649 A CN 106762649A
- Authority
- CN
- China
- Prior art keywords
- pump chamber
- valve body
- mandrel
- dry vacuum
- flap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
- F04C29/124—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet with inlet and outlet valves specially adapted for rotary or oscillating piston pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2250/00—Geometry
- F04C2250/10—Geometry of the inlet or outlet
- F04C2250/102—Geometry of the inlet or outlet of the outlet
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention belongs to dry vacuum pump field, specifically a kind of exhaust structure of dry vacuum pump, the dry vacuum pump includes multistage pump chamber, air inlet is provided with one-level pump chamber in multistage pump chamber, exhaust outlet is provided with afterbody pump chamber, emergency vent is provided with the previous stage pump chamber of afterbody pump chamber, safety valve is provided with emergency vent；Safety valve includes valve body, mandrel, sliding sleeve and flap, and valve body is arranged on outside emergency vent, is provided with the mandrel for being cased with sliding sleeve on valve body, and flap is hinged, can be rotated around mandrel with mandrel, flap with valve body in closure state when it is in sealing contact.The previous stage pump chamber of level pump chamber where exhaust outlet of the invention is provided with emergency vent, and safety valve is mounted with emergency vent, when level pump chamber pressure at expulsion where exhaust outlet is excessive, safety valve can be automatically opened up from emergency vent exhaust, it is to avoid because the phenomenon that load excessive causes motor damage or exhaust stage rotor stuck with pump chamber thermal expansion occurs.
Description
Technical field
The invention belongs to dry vacuum pump field, specifically a kind of exhaust of dry vacuum pump
Structure.
Background technology
Dry vacuum pump is the positive displacement vacuum pump sealed without oils (or liquid) in a kind of pump.By
In not needing hydraulic fluid in dry vacuum pump pump chamber, therefore, it is adaptable to semicon industry, change
Learning industry, pharmaceuticals industry and food service industry etc. needs the technique occasion of oil-free vacuum environment.
As semi-conductor industry, electronics industry are surging forward, the requirement for vacuum environment gets over
Come more, more and more stricter.It is true by what is be made up of common oil sealing mechanical pump, diffusion pump
Empty set system is easy to oil is returned in vacuum chamber, and the oil molecule in vacuum chamber can sink on silicon chip crystal
Product, makes silicon crystal turn into waste product.So, such vacuum system is in semi-conductor industry, electronics
Application in industry is restricted.Conversely, because dry vacuum pump does not need lubricating oil to moisten
Sliding sealing, has accomplished oil-free steam contamination, and dust and the water steaming to containing in pumped gas
Gas is insensitive.So, the vacuum system being made up of dry vacuum pump is widely used,
And the effect of promotion is served in semi-conductor industry, the evolution of electronics industry.
Because in practice, vavuum pump is usually under the operating mode in heavy load；Gas flows through multistage
Pump chamber is most discharged through the exhaust outlet of pump afterwards by compressing step by step.Conventional dry vavuum pump is only set
One exhaust outlet, rotor reduces step by step with cavity gap, therefore, can be caused when airborne excessive
Vacuum pump power increases, and causes motor damage or exhaust stage rotor stuck with cavity.
The content of the invention
In order to solve motor damage or exhaust stage when multi-stage dry vacuum pump works under heavy load
Rotor and the stuck problem of pump chamber, it is an object of the invention to provide a kind of row of dry vacuum pump
Depressed structure.
The purpose of the present invention is achieved through the following technical solutions：
Dry vacuum pump of the invention includes multistage pump chamber；One-level pump chamber in the multistage pump chamber
On be provided with air inlet, exhaust outlet is provided with afterbody pump chamber, in the afterbody pump chamber
Emergency vent is provided with previous stage pump chamber, safety valve is provided with the emergency vent.
Wherein：The safety valve includes valve body, mandrel, sliding sleeve and flap, and valve body is arranged on institute
State outside emergency vent, the mandrel for being cased with sliding sleeve, the flap and core are provided with the valve body
Axle is hinged, can be rotated around the mandrel, and the flap is sealed when being in closure state with valve body
Contact；The valve body central aperture, is provided with O-ring seal in hole, the flap is by being somebody's turn to do
O-ring seal is in sealing contact when closure state is in valve body.
Advantages of the present invention is with good effect：
1. present invention previous stage pump chamber of level pump chamber where exhaust outlet is provided with emergency vent,
And safety valve is mounted with emergency vent, the level pump chamber pressure at expulsion where exhaust outlet is excessive
When, safety valve can be automatically opened up from emergency vent exhaust, it is to avoid because load excessive causes electricity
Machine is damaged or the exhaust stage rotor phenomenon stuck with pump chamber thermal expansion occurs.
2. complete valve of the invention is mechanical, and the electric control system of complexity is not related to,
Simple structure, low cost.
Brief description of the drawings
Fig. 1 is the structural representation of dry vacuum pump；
Fig. 2 is structure principle chart of the invention；
Fig. 3 is the structural representation of safety valve of the present invention；
Wherein：1 is motor, and 2 is air inlet, and 3 is exhaust outlet, and 4 is dividing plate, and 5 is one-level
Pump chamber, 6 is two stage pump chamber, and 7 is three-level pump chamber, and 8 is level Four pump chamber, and 9 is Pyatyi pump chamber,
10 is emergency vent, and 11 is safety valve, and 12 is valve body, and 13 is mandrel, and 14 is sliding sleeve,
15 is flap, and 16 is O-ring seal.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
As shown in Figure 1 and Figure 2, multi-stage dry vacuum pump includes multistage pump chamber and positioned at pumps at different levels
Driving shaft, driven shaft, rotor, dividing plate 4 and axle sleeve in chamber, driving shaft are driven by motor 1
Rotation, is intermeshed by rotor on driving shaft and driven shaft, between pump chambers at different levels by every
Plate 4 is divided into independent unit.Air inlet 2 is provided with one-level pump chamber in multistage pump chamber, finally
Exhaust outlet 3 is provided with one-level pump chamber.The present embodiment is divided into Pyatyi pump chamber, respectively one-level pump chamber
5th, two stage pump chamber 6, three-level pump chamber 7, level Four pump chamber 8 and Pyatyi pump chamber 9, one-level pump chamber 5
On be provided with air inlet 2, exhaust outlet 3 is provided with Pyatyi pump chamber 9.In the place level pump of exhaust outlet 3
The previous stage pump chamber (the present embodiment is level Four pump chamber 8) in chamber (the present embodiment is Pyatyi pump chamber 9)
On be provided with emergency vent 10, be provided with safety valve 11 at the emergency vent 10.
Safety valve of the invention is mechanical, without electric control operation.As shown in figure 3, safety valve
11 include valve body 12, mandrel 13, sliding sleeve 14 and flap 15, and wherein valve body 12 is arranged on peace
Outside full exhaust outlet 10, valve body 12 is two cylinders that diameter is not waited, central aperture, hole
O-ring seal 16 is inside installed.In valve body 12 towards being provided with mandrel 13 on the surface in outside,
Sliding sleeve 14 is enclosed within mandrel 13.Flap 15 and mandrel 13 be hinged, can be around 13 turns of mandrel
It is dynamic；Flap 15 is in the form of annular discs, and projection is provided with the middle of inner surface.At flap 15 and valve body 12
It is in sealing contact with valve body 12 by O-ring seal 16 when closure state.
Operation principle of the invention is：
When multi-stage dry vacuum pump works to be operated, flap 15 is with valve body 12 by O-shaped sealing
Circle 16 is sealed.When multi-stage dry vacuum pump load excessive, the place level pump chamber of exhaust outlet 3
Pressure at expulsion is excessive, and flap 15 can be automatic around mandrel in the presence of gas pressure for safety valve 11
13rd, sliding sleeve 14 is rotated, and 11 dozens, safety valve is automatically opened up, and is vented from emergency vent 10.
When multi-stage dry vacuum pump load is small, safety valve 11 is closed, safety valve 11 is arranged safely
The place level pump chamber inner vacuum absorption of gas port 10, in sealing state, does not influence multi-stage dry
The vacuum of vavuum pump.
Claims (3)
1. a kind of exhaust structure of dry vacuum pump, the dry vacuum pump includes multistage pump chamber；
It is characterized in that：Air inlet (2) is provided with one-level pump chamber in the multistage pump chamber, last
Exhaust outlet (3) is provided with level pump chamber, is provided with the previous stage pump chamber of the afterbody pump chamber
Emergency vent (10), emergency vent (10) place is provided with safety valve (11).
2. as described in claim 1 dry vacuum pump exhaust structure, it is characterised in that：Institute
Stating safety valve (11) includes valve body (12), mandrel (13), sliding sleeve (14) and flap (15),
Wherein valve body (12) installed in the emergency vent (10) outward, in the valve body (12)
It is provided with the mandrel (13) for being cased with sliding sleeve (14), the flap (15) and mandrel (13)
It is hinged, can be rotated around the mandrel (13), the flap (15) and valve body (12) place
It is in sealing contact when closure state.
3. as described in claim 2 dry vacuum pump exhaust structure, it is characterised in that：Institute
Valve body (12) central aperture is stated, O-ring seal (16), the flap (15) are installed in hole
It is in sealing contact when with valve body (12) in closure state by the O-ring seal (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510824821.1A CN106762649A (en) | 2015-11-23 | 2015-11-23 | A kind of exhaust structure of dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510824821.1A CN106762649A (en) | 2015-11-23 | 2015-11-23 | A kind of exhaust structure of dry vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106762649A true CN106762649A (en) | 2017-05-31 |
Family
ID=58963610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510824821.1A Pending CN106762649A (en) | 2015-11-23 | 2015-11-23 | A kind of exhaust structure of dry vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106762649A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112594544A (en) * | 2020-12-11 | 2021-04-02 | 宜春市富锐气体有限责任公司 | Filling and exhausting vacuum-pumping equipment for argon production |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2809273Y (en) * | 2003-11-27 | 2006-08-23 | 爱信精机株式会社 | Multi-stage dry type vacuum pump |
| US20070048162A1 (en) * | 2005-08-24 | 2007-03-01 | Kashiyama Industries, Ltd. | Multistage root type pump |
| CN101382137A (en) * | 2007-09-07 | 2009-03-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Multi-stage roots dry vacuum pump discharging directly into atmosphere |
| CN101922573A (en) * | 2010-08-02 | 2010-12-22 | 高东阀门有限公司 | Swing check valve |
| CN102220981A (en) * | 2010-04-19 | 2011-10-19 | 株式会社荏原制作所 | Dry vacuum pump apparatus, exhaust unit and silencer |
| CN203363306U (en) * | 2013-07-03 | 2013-12-25 | 永嘉县鸿一阀门有限公司 | Butt-clamp single disc swing check valve |
-
2015
- 2015-11-23 CN CN201510824821.1A patent/CN106762649A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2809273Y (en) * | 2003-11-27 | 2006-08-23 | 爱信精机株式会社 | Multi-stage dry type vacuum pump |
| US20070048162A1 (en) * | 2005-08-24 | 2007-03-01 | Kashiyama Industries, Ltd. | Multistage root type pump |
| CN101382137A (en) * | 2007-09-07 | 2009-03-11 | 中国科学院沈阳科学仪器研制中心有限公司 | Multi-stage roots dry vacuum pump discharging directly into atmosphere |
| CN102220981A (en) * | 2010-04-19 | 2011-10-19 | 株式会社荏原制作所 | Dry vacuum pump apparatus, exhaust unit and silencer |
| CN101922573A (en) * | 2010-08-02 | 2010-12-22 | 高东阀门有限公司 | Swing check valve |
| CN203363306U (en) * | 2013-07-03 | 2013-12-25 | 永嘉县鸿一阀门有限公司 | Butt-clamp single disc swing check valve |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112594544A (en) * | 2020-12-11 | 2021-04-02 | 宜春市富锐气体有限责任公司 | Filling and exhausting vacuum-pumping equipment for argon production |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170531 |