CN106756896A - The continuous growth apparatus of vertical graphite alkene volume to volume - Google Patents
The continuous growth apparatus of vertical graphite alkene volume to volume Download PDFInfo
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- CN106756896A CN106756896A CN201710186735.1A CN201710186735A CN106756896A CN 106756896 A CN106756896 A CN 106756896A CN 201710186735 A CN201710186735 A CN 201710186735A CN 106756896 A CN106756896 A CN 106756896A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
Abstract
Being capable of improve production efficiency, reducing energy consumption the invention discloses one kind, it is ensured that the vertical graphite continuous growth apparatus of alkene volume to volume of product quality.The vertical graphite continuous growth apparatus of alkene volume to volume, including vacuum feeding room, high-temperature technology chamber, vacuum material extracting chamber, drive device；The vacuum feeding room and vacuum material extracting chamber are provided with vavuum pump；Nonstorage calorifier is provided with the high-temperature technology chamber；The vacuum feeding room is located at the lower end of high-temperature technology chamber, and the vacuum material extracting chamber is arranged on the upper end of high-temperature technology chamber；The two ends of the high-temperature technology chamber are provided with quickly cooling device；The tension detecting apparatus for detecting graphene film tension force are provided with the vacuum feeding room, the speed detector for detecting graphene film linear velocity is provided with the vacuum material extracting chamber.Product quality can be improved using the vertical graphite continuous growth apparatus of alkene volume to volume, production cost is saved.
Description
Technical field
The present invention relates to a kind of growth apparatus of Graphene, especially a kind of vertical graphite alkene volume to volume, continuously growth sets
It is standby.
Background technology
It is well-known：Graphene is due to its superpower heat endurance, chemical stability, mechanical stability and printing opacity high
The advantages of property and electron mobility, thus be considered as to prepare one of optimal material of conducting membrane material.
Chemical meteorology deposition method CVD:
CVD is a kind of most common method of controllable preparation large-area graphene.Its cardinal principle is to utilize plane
Metal is passed through a certain amount of carbon source presoma and hydrogen, in gold after interaction as substrate and catalyst in hot environment
Metal surface is deposited and obtains Graphene.
CVD tube furnaces：Equipment is simple, and operation is easy, but reaction temperature is high, and the time is more long, and consuming energy is larger, by stone
The diameter and flat-temperature zone effect length of English tube furnace cannot prepare the Graphene of large area；Further, since base material is not pressed
Power/tension force, film growth easily forms fold, reduces flatness.
The diameter and body of heater constant temperature section length of prior art conventional CVD tube furnaces growth Graphene by quartz tube furnace
Influence, graphene growth size of foundation base is limited, high additionally, due to graphene growth technological temperature, therefore technological process is：Metal
Paillon foil is pre-processed, fills sample, vacuumize, heat, lead to protective gas, logical process gas, be warming up to 1000 degrees centigrades, and insulation is given birth to
Long, logical protective gas, is cooled to room temperature, sampling.
Existing production technology has the disadvantage that：1) efficiency is low；2) consume energy high；3) exterior quality is poor；4) quality control
Difficulty is high.
The content of the invention
The technical problems to be solved by the invention are to provide one kind being capable of improve production efficiency, reducing energy consumption, it is ensured that product
The vertical graphite continuous growth apparatus of alkene volume to volume of quality.
The technical solution adopted for the present invention to solve the technical problems is：It is right the invention provides a kind of vertical graphite alkene volume
Roll up continuous growth apparatus, including vacuum feeding room, high-temperature technology chamber, vacuum material extracting chamber, drive device；The vacuum feeding room
Graphene growth substrate emptying roller is inside provided with, graphene-based bottom material receiving roller is provided with the vacuum material extracting chamber and rewinding is led
To roller；The vacuum feeding room and vacuum material extracting chamber are provided with vavuum pump；The graphene growth substrate emptying roller and stone
Mertenyl bottom material receiving roller drives and rotates by drive device；Nonstorage calorifier is provided with the high-temperature technology chamber；
The high-temperature technology chamber is arranged between vacuum feeding room and vacuum material extracting chamber；The vacuum feeding room is located at height
The lower end of warm processing chamber, the vacuum material extracting chamber is arranged on the upper end of high-temperature technology chamber；The two of the high-temperature technology chamber
End is provided with quickly cooling device；
The tension detecting apparatus for detecting graphene film tension force are provided with the vacuum feeding room, the vacuum takes
Material interior is provided with the speed detector for detecting graphene film linear velocity.
Further, the drive device includes first driving means and the second drive device；Described first drives dress
Put and be connected with graphene growth substrate emptying roller；Second drive device is connected with graphene-based bottom material receiving roller.
Further, the rotating shaft that the graphene growth substrate emptying roller has passes through vacuum feeding room, and by clutch
Device is connected with first driving means；The rotating shaft that the graphene-based bottom material receiving roller has passes through vacuum material extracting chamber, and passes through
Clutch and the second drive device are connected.
Further, to be provided with vacuum moving between the rotating shaft of the graphene growth substrate emptying roller and vacuum feeding room close
Seal apparatus；Vacuum dynamic seal device is provided between the rotating shaft of the graphene-based bottom material receiving roller and vacuum material extracting chamber.
Preferably, the first driving means and the second drive device use servomotor acceleration and deceleration device；Preferably,
Clutch selects magnetic powder cluth.
Further, it is provided with blowing guide bars in the vacuum feeding room；Stone on graphene growth substrate emptying roller
Black alkene film bypasses tension detecting apparatus, blowing guide bars into high-temperature technology chamber successively.
Further, the described vertical graphite continuous growth apparatus of alkene volume to volume, also including processor, the processor point
Do not electrically connected with tension detecting apparatus and first driving means, and the processor, tension detecting apparatus and first drive
Device forms feedback closed loop.
Further, the processor is electrically connected with speed detector and the second drive device respectively, and the place
Reason device, speed detector and first driving means form feedback closed loop.
Further, nature is provided with the rewinding guide roller in the vacuum material extracting chamber to hang down and graphene growth substrate
The boot segment of substrate web connection on emptying roller.
Further, the quickly cooling device is detachably connected with high-temperature technology chamber.
The beneficial effects of the invention are as follows：The continuous growth apparatus of vertical graphite alkene volume to volume of the present invention, with following
Advantage：
1st, efficiency high：In the absence of frequently blow-on sampling/setting-out, the action, continuous volume to volume growth such as vacuumize；
2nd, consume energy low：In the absence of frequently heating/cooling procedure, consume energy low；
3rd, due to being provided with the tension detecting apparatus for detecting graphene film tension force, therefore energy in vacuum feeding room
The enough tension force to graphene film is controlled, so that product appearance quality is high, it is to avoid fold occur；
4th, because the growth technique environment experienced with a roll growth base material is identical, therefore Graphene quality batch stabilization can
Lean on.
Brief description of the drawings
Fig. 1 be in the embodiment of the present invention vertical graphene roll to rolling up the structural representation of continuous growth apparatus；
Fig. 2 be in the embodiment of the present invention vertical graphene roll to rolling up the side view of continuous growth apparatus；
Indicated in figure：1- vacuum feedings room, 2- graphene growth substrate emptying rollers, 3- tension detecting apparatus, 4- blowings are led
To rod, 5- quickly cooling devices, 6- nonstorage calorifiers, 7- high-temperature technology chambers, 8- vacuum material extracting chamber, 9- is received at graphene-based bottom
Material roller, 10- rewinding guide rollers, 11- speed detectors, 12- first driving means, 13- clutches, 14- vacuum dynamic seals dress
Put, the drive devices of 15- second, 16- graphene films, 17- installing plates.
Specific embodiment
The present invention is further described with reference to the accompanying drawings and examples.
As depicted in figs. 1 and 2, the continuous growth apparatus of vertical graphite alkene volume to volume of the present invention, including vacuum feeding
Room 1, high-temperature technology chamber 7, vacuum material extracting chamber 8, drive device；Graphene growth substrate is provided with the vacuum feeding room 1
Graphene-based bottom material receiving roller 9 and rewinding guide roller 10 are provided with emptying roller 2, the vacuum material extracting chamber 8；The vacuum feeding
Room 1 and vacuum material extracting chamber 8 are provided with vavuum pump；The graphene growth substrate emptying roller 2 and graphene-based bottom material receiving roller 9
By drive device, drive and rotate；Nonstorage calorifier 6 is provided with the high-temperature technology chamber 7；
The high-temperature technology chamber 7 is arranged between vacuum feeding room 1 and vacuum material extracting chamber 8；The vacuum feeding room 1
In the lower end of high-temperature technology chamber 7, the vacuum material extracting chamber 8 is arranged on the upper end of high-temperature technology chamber 7；The high-temperature technology chamber
The two ends of room 7 are provided with quickly cooling device 5；
The tension detecting apparatus 3 for detecting the tension force of graphene film 16 are provided with the vacuum feeding room 1, it is described true
The speed detector 11 for detecting the linear velocity of graphene film 16 is provided with empty material extracting chamber 8.
The Main Function of the nonstorage calorifier 6 is to realize the heating to high-temperature technology chamber 7 so that high-temperature technology chamber
Temperature in room 7 can reach the temperature of technological requirement.The nonstorage calorifier 6 can use resistance heater, in order to just
In the maintenance of high-temperature technology chamber 7, a kind of preferred embodiment is specifically, the nonstorage calorifier 6 uses retractable heating
Stove, at least dual temperature area are controlled.
The Main Function of the quickly cooling device 5 is to realize the quick cooling to graphene film 16, specifically, described
Quickly cooling device 5 can include outer water jacket and inner water sleeve flange using cold water jacket, the cooling device 5, and outer water jacket is sleeved on
On high-temperature technology chamber 7, inner water sleeve flange is arranged on high-temperature technology chamber 7 with vacuum feeding room 1 and the company of vacuum material extracting chamber 8
Meet place.
The high-temperature technology chamber 7 is arranged between vacuum feeding room 1 and vacuum material extracting chamber 8；The vacuum feeding room 1
In the lower end of high-temperature technology chamber 7, the vacuum material extracting chamber 8 is arranged on the upper end of high-temperature technology chamber 7；The high-temperature technology chamber
The two ends of room 7 are provided with quickly cooling device 5.Specifically, vacuum feeding room 1, vacuum material extracting chamber 8 and high-temperature technology chamber 7
The quickly cooling device 5 of junction, is connected using the flange with water cooling plant.Specifically, the high-temperature technology chamber 7 is typically adopted
Use quartz ampoule.
During use：
Tinsel is pre-processed and enters first and then in vacuum feeding room 1 and vacuum material extracting chamber 8 luggage sample, dress sample is complete
Vacuumized into the rear vavuum pump by vacuum feeding room 1 and vacuum material extracting chamber 8；Then by fast on high-temperature technology chamber 7
Fast heater is heated, while lead to protective gas and be passed through process gas, until temperature is warming up in high-temperature technology chamber 7
1000 degrees centigrades；Start graphene-based bottom material receiving roller 9 and batch graphene film 16；Due at the two ends of high-temperature technology chamber 7
Quickly cooling device 5 is provided with, therefore, it is possible to ensure that graphene film 16 arrives vacuum material extracting chamber 8 so as to high-temperature technology chamber 7
Temperature is reduced to normal temperature, and combination is sampled.
In sum, the continuous growth apparatus of vertical graphite alkene volume to volume of the present invention, due to during production
Frequently blow-on sampling/setting-out need not be carried out, the action such as vacuumizes such that it is able to realize the continuous growth of volume to volume, thus it is raw
Produce efficiency high；Simultaneously in the absence of frequently heating/cooling procedure, therefore it is low to consume energy.Secondly as being set in vacuum feeding room 1
Be equipped with the tension detecting apparatus 3 for detecting graphene film tension force, simultaneously because the vacuum material extracting chamber 8 in be provided with for
The speed detector 11 of the linear velocity of graphene film 16 is detected, therefore can accurately be detected by speed detector 11
The linear velocity of graphene film 16, so as to realize collecting graphene film 16 precise control of speed, speed is collected by control
Degree can control Tensity size, be controlled therefore, it is possible to the tension force to graphene film, so that product appearance quality is high,
Avoid the occurrence of fold；And because the growth technique environment experienced with a roll growth base material is identical, therefore Graphene quality batch
It is reliable and stable.
Further, for the ease of to being passed through process gas in high-temperature technology chamber 7, being set in high-temperature technology chamber 7
No less than two process gas connectors, being passed through on pipeline for external process gas has flowmeter to monitor.
For the ease of detecting the growing environment of graphene film, further, there is pressure to examine in high-temperature technology chamber 7
Survey, temperature-detecting device.
The Main Function of the drive device is to drive graphene growth substrate emptying roller 2 and graphene-based bottom material receiving roller 9
Rotate；For the ease of the independent control to graphene growth substrate emptying roller 2 and the graphene-based rotating speed of bottom material receiving roller 9, further
, the drive device includes the drive device 15 of first driving means 12 and second；The first driving means 12 and graphite
Alkene growth substrate emptying roller 2 is connected；Second drive device 15 is connected with graphene-based bottom material receiving roller 9.
For the ease of quick despatch substrate or coiled material, without driving or stopping drive device, further, the graphite
The rotating shaft that alkene growth substrate emptying roller 2 has passes through vacuum feeding room 1, and is driven with first driving means 12 by clutch 13
Connection；The rotating shaft that the graphene-based bottom material receiving roller 9 has passes through vacuum material extracting chamber 8, and is driven by clutch 13 and second
Device 15 is connected.
In order to avoid between the rotating shaft of graphene growth substrate emptying roller 2 and vacuum feeding room 1 and graphene-based bottom is received
Expect occur leaking out between the rotating shaft of roller 9 and vacuum material extracting chamber 8, further, the rotating shaft of the graphene growth substrate emptying roller 2
Vacuum dynamic seal device 14 is provided between vacuum feeding room 1；The rotating shaft of the graphene-based bottom material receiving roller 9 and vacuum feeding
Vacuum dynamic seal device 14 is provided between room 8.
For the ease of the rotating speed control to graphene growth substrate emptying roller 2 and graphene-based bottom material receiving roller 9, it is preferred that
The drive device 15 of first driving means 12 and second uses servomotor acceleration and deceleration device；Preferably, clutch 13 selects magnetic
Powder clutch.
For the ease of the guiding of graphene film 16, further, blowing guide bars is provided with the vacuum feeding room 1
4；Graphene film 16 on graphene growth substrate emptying roller 2 bypasses tension detecting apparatus 3, blowing guide bars 4 and enters successively
High-temperature technology chamber 7.
In order to realize the Aulomatizeted Detect of the tension force of graphene film 16, while by graphene growth substrate emptying roller 2
Rotating speed realizes the Automated condtrol to tension force, and further, the described vertical graphite continuous growth apparatus of alkene volume to volume also include
Processor, the processor is electrically connected with tension detecting apparatus 8 and first driving means respectively, and the processor, tension force
Detection means 8 and first driving means 12 form feedback closed loop.Tension detecting apparatus 8 detect the data feedback that obtains to processing
Device, the processor can use CPU or single-chip microcomputer, and the rotating speed of first driving means 12 is then controlled by processor, from
And realize the automation regulation of tension force.
In order to realize the graphene-based rotating speed of bottom material receiving roller 9 automation adjust, further, the processor respectively with speed
The degree drive device 15 of detection means 11 and second is electrically connected, and the processor, speed detector 11 and first drive
Device 15 forms feedback closed loop.
Safeguard and change, further, the quickly cooling device 5 and high-temperature technology for the ease of high-temperature technology chamber 7
Chamber 7 is detachably connected.
For the ease of charging and discharging, specifically, being provided with nature on rewinding guide roller 10 in the vacuum material extracting chamber 8
Hang down the boot segment being connected with substrate web on graphene growth substrate emptying roller 2.
Claims (10)
1. the continuous growth apparatus of vertical graphite alkene volume to volume, including vacuum feeding room (1), high-temperature technology chamber (7), vacuum feeding
Room (8), drive device；Graphene growth substrate emptying roller (2), the vacuum feeding are provided with the vacuum feeding room (1)
Graphene-based bottom material receiving roller (9) and rewinding guide roller (10) are provided with room (8)；The vacuum feeding room (1) and vacuum take
Material room (8) is provided with vavuum pump；The graphene growth substrate emptying roller (2) and graphene-based bottom material receiving roller (9) lead to
Over-driving device, drives and rotates；Nonstorage calorifier (6) is provided with the high-temperature technology chamber (7)；
It is characterized in that：The high-temperature technology chamber (7) is arranged between vacuum feeding room (1) and vacuum material extracting chamber (8)；It is described
Vacuum feeding room (1) is arranged on high-temperature technology chamber (7) positioned at the lower end of high-temperature technology chamber (7), the vacuum material extracting chamber (8)
Upper end；The two ends of the high-temperature technology chamber (7) are provided with quickly cooling device (5)；
The tension detecting apparatus (3) for detecting graphene film (16) tension force are provided with the vacuum feeding room (1), it is described
The speed detector (11) for detecting graphene film (16) linear velocity is provided with vacuum material extracting chamber (8).
2. continuous growth apparatus of vertical graphite alkene volume to volume as claimed in claim 1, it is characterised in that：The drive device bag
Include first driving means (12) and the second drive device (15)；The first driving means (12) are put with graphene growth substrate
Material roller (2) drive connection；Second drive device (15) is connected with graphene-based bottom material receiving roller (9).
3. continuous growth apparatus of vertical graphite alkene volume to volume as claimed in claim 2, it is characterised in that：The graphene growth
The rotating shaft that substrate emptying roller (2) has passes through vacuum feeding room (1), and is passed by clutch (13) and first driving means (12)
Dynamic connection；The rotating shaft that the graphene-based bottom material receiving roller (9) has pass through vacuum material extracting chamber (8), and by clutch (13) with
Second drive device (15) is connected.
4. continuous growth apparatus of vertical graphite alkene volume to volume as claimed in claim 3, it is characterised in that：The graphene growth
Vacuum dynamic seal device (14) is provided between the rotating shaft of substrate emptying roller (2) and vacuum feeding room (1)；The graphene-based bottom
Vacuum dynamic seal device (14) is provided between the rotating shaft of material receiving roller (9) and vacuum material extracting chamber (8).
5. vertical graphite continuous growth apparatus of alkene volume to volume as described in claim 2,3 or 4, it is characterised in that：Described first
Drive device (12) and the second drive device (15) use servomotor acceleration and deceleration device.
6. continuous growth apparatus of vertical graphite alkene volume to volume as claimed in claim 1, it is characterised in that：The vacuum feeding room
(1) blowing guide bars (4) is provided with；Graphene film (16) in graphene growth substrate emptying roller (2) is bypassed successively to be opened
Force checking device (3), blowing guide bars (4) enter high-temperature technology chamber (7).
7. continuous growth apparatus of vertical graphite alkene volume to volume as claimed in claim 6, it is characterised in that：Also include processor,
The processor is electrically connected with tension detecting apparatus (8) and first driving means respectively, and the processor, tension force detection dress
Put (8) and first driving means (12) form feedback closed loop.
8. vertical graphite continuous growth apparatus of alkene volume to volume as described in claim 2,3 or 4, it is characterised in that：The treatment
Device is electrically connected with speed detector (11) and the second drive device (15) respectively, and the processor, speed detector
(11) and first driving means (15) formed feedback closed loop.
9. continuous growth apparatus of vertical graphite alkene volume to volume as claimed in claim 1, it is characterised in that：The vacuum material extracting chamber
(8) nature is provided with the rewinding guide roller (10) in hangs down and be connected with substrate web in graphene growth substrate emptying roller (2)
Boot segment.
10. continuous growth apparatus of vertical graphite alkene volume to volume as claimed in claim 1, it is characterised in that：The quick cooling
Device (5) is detachably connected with high-temperature technology chamber (7).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710186735.1A CN106756896A (en) | 2017-03-27 | 2017-03-27 | The continuous growth apparatus of vertical graphite alkene volume to volume |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710186735.1A CN106756896A (en) | 2017-03-27 | 2017-03-27 | The continuous growth apparatus of vertical graphite alkene volume to volume |
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| CN106756896A true CN106756896A (en) | 2017-05-31 |
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ID=58967378
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| CN201710186735.1A Pending CN106756896A (en) | 2017-03-27 | 2017-03-27 | The continuous growth apparatus of vertical graphite alkene volume to volume |
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Cited By (6)
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| CN107236938A (en) * | 2017-07-11 | 2017-10-10 | 江苏星特亮科技有限公司 | A kind of continous way membrane production equipment |
| CN107557761A (en) * | 2017-08-23 | 2018-01-09 | 中国科学院过程工程研究所 | A kind of volume to volume device and its control method for being used for the serialization growth two-dimensional material on ribbon wire material |
| CN109680259A (en) * | 2019-02-18 | 2019-04-26 | 合肥百思新材料研究院有限公司 | A kind of roll-to-roll graphene film growth apparatus of vertical continuous P E enhancing |
| CN110684958A (en) * | 2018-07-06 | 2020-01-14 | 南开大学 | Apparatus and method for preparing graphene-coated three-dimensional metal product and graphene structure |
| CN111072020A (en) * | 2020-01-14 | 2020-04-28 | 烯旺新材料科技股份有限公司 | Efficient graphene roll-to-roll continuous growth equipment and preparation method |
| CN113613474A (en) * | 2021-08-23 | 2021-11-05 | 德州宇航派蒙石墨烯科技有限责任公司 | Preparation method of heat-conducting film |
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| CN107236938A (en) * | 2017-07-11 | 2017-10-10 | 江苏星特亮科技有限公司 | A kind of continous way membrane production equipment |
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| CN109680259A (en) * | 2019-02-18 | 2019-04-26 | 合肥百思新材料研究院有限公司 | A kind of roll-to-roll graphene film growth apparatus of vertical continuous P E enhancing |
| CN109680259B (en) * | 2019-02-18 | 2023-11-03 | 安徽贝意克设备技术有限公司 | Vertical continuous PE reinforcing roll-to-roll graphene film growth equipment |
| CN111072020A (en) * | 2020-01-14 | 2020-04-28 | 烯旺新材料科技股份有限公司 | Efficient graphene roll-to-roll continuous growth equipment and preparation method |
| CN113613474A (en) * | 2021-08-23 | 2021-11-05 | 德州宇航派蒙石墨烯科技有限责任公司 | Preparation method of heat-conducting film |
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Application publication date: 20170531 |