CN106747408B - A kind of TiO2The preparation method of base low-pressure pressure-sensitive ceramic material - Google Patents
A kind of TiO2The preparation method of base low-pressure pressure-sensitive ceramic material Download PDFInfo
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Abstract
The invention discloses a kind of TiO2The preparation method of base low-pressure pressure-sensitive ceramic material, by TiO2、Nb2O5And Bi2O3It is put into after mixing in polyester tank, carries out wet ball-milling, then by dry, grinding, obtain mixed powder;Mixed powder is granulated, is then suppressed, biscuit is obtained;Biscuit is sintered after dumping, room temperature is furnace-cooled to, obtains TiO2Voltage-sensitive ceramic;By TiO2Voltage-sensitive ceramic is polished, and is heat-treated to obtain after cleaning, drying.TiO of the present invention2The preparation method of base low-pressure pressure-sensitive ceramic material, with TiO2For raw material, Nb is added2O5And Bi2O3, TiO is prepared using easy preparation process2Voltage-sensitive ceramic, then in H2Or sample is heat-treated in vacuum low oxygen partial pressure atmosphere, TiO can be made2Lattice Oxygen volatilization, oxygen vacancy concentration increase, and the number of semiconducting crystal grain increases, and barrier height reduces and width is thinned, and pressure sensitive voltage significantly reduces.
Description
Technical field
The invention belongs to sensitive material preparation technical fields, and in particular to a kind of TiO2The system of base low-pressure pressure-sensitive ceramic material
Preparation Method.
Background technique
Voltage-sensitive ceramic refers to that the semiconductive ceramic device of nonlinear change is presented with the variation of voltage for resistance value, microcosmic
Structure is usually made of semiconducting crystal grain and insulating crystal boundary, and voltage-sensitive ceramic is protected because of its good nonlinear characteristic as voltage
Protective material is widely used among various circuits, wherein what is studied and be most widely used is ZnO varistor, outstanding
Advantage is that nonlinear factor is larger, but its pressure sensitive voltage is higher, it is difficult to be applied to the integrated of low pressure as semiconductor components and devices
In circuit.
TiO2Base voltage-sensitive ceramic has the performance advantages such as excellent volt-ampere nonlinear characteristic, high dielectric constant, while its
Simple production process, TiO similar with ZnO pressure sensitive2Base voltage-sensitive ceramic is also a kind of with the more of typical crystal boundary electrical properties
Brilliant ceramic material is expected to realize low pressure to it.
Summary of the invention
The object of the present invention is to provide a kind of TiO2The preparation method of base low-pressure pressure-sensitive ceramic material, the method achieve
TiO2The low pressure of base voltage-sensitive ceramic.
The technical scheme adopted by the invention is that a kind of TiO2The preparation method of base low-pressure pressure-sensitive ceramic material, including such as
Lower step:
Step 1, by TiO2、Nb2O5And Bi2O3Be put into after mixing in polyester tank, carry out wet ball-milling, then by it is dry,
Grinding, obtains mixed powder;
Step 2, the mixed powder of step 1 is granulated, is then suppressed, obtain biscuit;
Step 3, biscuit step 2 obtained is sintered after dumping, is furnace-cooled to room temperature, obtains TiO2Voltage-sensitive ceramic;
Step 4, TiO step 3 obtained2Voltage-sensitive ceramic is polished, and is heat-treated after cleaning, drying, and TiO is obtained2
Base low-pressure pressure-sensitive ceramic material.
The features of the present invention also characterized in that
TiO in step 12, Nb2O5, Bi2O3Mass ratio be 120~301:1:1.75~3.5.
TiO in step 12Granularity be 200nm~300nm.
The concrete mode of wet ball-milling is as follows in step 1:
Ratio by mixed raw material and zirconia ball and dehydrated alcohol with mass ratio for 1:1:1.5 is placed in polyester tank, with
8~12h of revolving speed ball milling of 350r/min~450r/min.
Drying is carried out in baking oven in step 1, and drying temperature is 60 DEG C~70 DEG C, and drying time is 10h~14h.
The PVA solution that mass fraction is 5% is added dropwise in step 2 into mixed powder, crosses 20 meshes and is granulated, then use
Plastic bag sealing is placed for 24 hours, and re-compacted molding obtains biscuit.
In step 3 dumping be by biscuit in 550 DEG C~600 DEG C of Muffle furnace dumping 1.5h~2h;
Sintering is to be placed in the biscuit after dumping in electric furnace in a manner of burying burning in step 3, with 4 DEG C/min~6 DEG C/min
Heating rate be warming up to 1360 DEG C~1410 DEG C, keep the temperature 2.5h~4h.
Heat treatment is in carrying out in vacuum tube furnace, in H in step 42Under atmosphere or vacuum atmosphere environment, with 4 DEG C/
Min~6 DEG C/min heating rate is warming up to 500 DEG C~600 DEG C, keeps the temperature and is cooled to 200 with the rate of 10 DEG C/min after 3h
DEG C, then furnace cooling.
When in H2When being handled in atmosphere, partial pressure of oxygen 10-2Pa;When being handled in vacuum atmosphere environment, partial pressure of oxygen
It is 10-4Pa。
The invention has the advantages that TiO of the present invention2The preparation method of base low-pressure pressure-sensitive ceramic material, with TiO2For original
Material adds Nb2O5And Bi2O3, TiO is prepared using easy preparation process2Voltage-sensitive ceramic, then in H under certain temperature2Or it is true
Sample is heat-treated in empty low oxygen partial pressure atmosphere, TiO can be made2Lattice Oxygen volatilization, oxygen vacancy concentration increase, and semiconducting is brilliant
The number of grain increases, and barrier height reduces and width is thinned, and pressure sensitive voltage significantly reduces.
Detailed description of the invention
Fig. 1 is TiO of the present invention2The preparation method flow diagram of base low-pressure pressure-sensitive ceramic material;
Fig. 2 is gained TiO after sintering2The XRD spectrum of voltage-sensitive ceramic sample;
Fig. 3 is TiO2Voltage-sensitive ceramic sample before sintering after SEM figure;
Fig. 4 is the TiO being heat-treated under different atmosphere2The I-V curve of voltage-sensitive ceramic.
Specific embodiment
The following describes the present invention in detail with reference to the accompanying drawings and specific embodiments.
TiO of the present invention2The preparation method of base low-pressure pressure-sensitive ceramic material, as shown in Figure 1, including the following steps:
Step 1, according to TiO2, Nb2O5, Bi2O3Mass ratio be 120~301:1:1.75~3.5 weigh TiO respectively2,
Nb2O5, Bi2O3, wherein TiO2Granularity be 200nm~300nm;
Step 2, by TiO2、Nb2O5And Bi2O3Mixing after with zirconia ball and dehydrated alcohol with mass ratio be 1:1:1.5
Ratio be placed in polyester tank, with revolving speed 8~12h of ball milling of 350r/min~450r/min, then at 60 DEG C~70 DEG C do
Dry 10h~14h, grinding, obtain mixed powder;
Step 3, the PVA solution that mass fraction is 5% is added dropwise into the mixed powder that step 2 obtains, crosses 20 meshes
It is granulated, is then placed for 24 hours with plastic bag sealing, re-compacted molding obtains biscuit;
Step 4, biscuit step 3 obtained dumping 1.5h~2h in 550 DEG C~600 DEG C of Muffle furnace, then to bury
The mode of burning is placed in electric furnace, is warming up to 1360 DEG C~1410 DEG C with 4 DEG C/min~6 DEG C/min heating rate, is kept the temperature 2.5h
~4h, is furnace-cooled to room temperature, obtains TiO2Voltage-sensitive ceramic;
Step 5, TiO step 4 obtained2Voltage-sensitive ceramic is polished, cleaning, drying, then in vacuum tube furnace,
In H2Under atmosphere or vacuum atmosphere environment, 500 DEG C~600 DEG C are warming up to 4 DEG C/min~6 DEG C/min heating rate,
200 DEG C are cooled to 10 DEG C/min rate after heat preservation 3h, then furnace cooling is (when in H2When being handled in atmosphere, partial pressure of oxygen
It is 10-2Pa;When being handled in vacuum atmosphere environment, partial pressure of oxygen 10-4Pa), TiO is obtained2Base low-pressure pressure-sensitive ceramic material.
TiO of the present invention2The preparation method of base low-pressure pressure-sensitive ceramic material, with TiO2For raw material, Nb is added2O5And Bi2O3,
TiO is prepared using easy preparation process2Voltage-sensitive ceramic, then in H under certain temperature2Or it is right in vacuum low oxygen partial pressure atmosphere
Sample is heat-treated, and TiO can be made2Lattice Oxygen volatilization, oxygen vacancy concentration increase, and the number of semiconducting crystal grain increases, potential barrier
Height reduces and width is thinned, and pressure sensitive voltage significantly reduces.
Preparation method of the present invention, prepares TiO by doping way first2Voltage-sensitive ceramic, then again to semiconductor grain
Heat preservation heat treatment is carried out to realize intra-die semiconductor transformation and influence grain boundary features, finally significantly reduces pressure sensitive voltage.In this way
Realization voltage-sensitive ceramic low pressure belong to innovation of the invention, change the mode of traditional pressure sensitive ceramics low pressure, to pressure
Quick ceramics low pressure provides another important channel.
Due to Bi2O3Fusing point be 824 DEG C, be far below TiO2Equal high-melting-point substances, so Bi during the sintering process2O3Itself
First melting formation liquid phase wraps up TiO2And Nb2O5Equal particles, as sintering temperature increases and progressively reaches sintering temperature, Bi2O3
It will be with TiO2、Nb2O5Deng the physical-chemical reaction that complexity occurs, a certain amount of congruent melting liquid phase is formed.The liquid formed under these high temperature
Phase promotes the discharge of gas and the reduction of grain spacing with type of flow mass transfer, accelerates the densification process of sintering, together
When promote TiO2Crystal grain is grown up.In this way, when reaching sintering temperature, in TiO2Between particle will filling thickness it is uniform
Melt thin layer of liquid.In cooling procedure, Bi2O3It is precipitated from liquid phase and forms the second phase, remaining melting liquid phase component is not analysed
Crystalline substance, in the form of glass in the presence of come, form the higher grain boundary layer of resistance value, assign crystal boundary insulation performance, form effective gesture
It builds, makes material that there is voltage-sensitive effect.
The present invention mixes Nb2O5Afterwards, the Nb of minor radius5+Easily enter lattice, as donor impurity, Nb5+Part Ti will be replaced4+
And it is solid-solubilized in TiO2In, promote grain semiconducting;On the other hand, Nb is mixed2O5Afterwards in grain boundaries, so that interface state density increases,
The increase for being conducive to grain boundary layer resistance value improves the height of boundary barrier potential, influences TiO2The electrical behavior of varistor.Moreover, this
Invention is in TiO2Middle donor doping Nb2O5On the basis of, sintered TiO is handled by reducing atmosphere2Voltage-sensitive ceramic, can be into
One step promotes its N-shaped semiconducting.For the sample handled under the atmosphere, there is following reaction:
Nb2O5Into lattice:
Lattice Oxygen volatilization:
The low oxygen partial pressure effect formed under hydrogen and high vacuum, can promote Lattice Oxygen to volatilize, balance is made to move right, increase
The number of oxygen vacancy concentration and semiconducting crystal grain is added, so that crystal boundary bound charges reduce, pressure sensitive voltage is decreased.
TiO2It is typical non-stoichiometric compound, will form Lacking oxygen in crystal grain in airWith titanous grain
SonEtc. point defects.Heat treatment can cause the variation of concentration of oxygen atoms in environment in different atmosphere, thus lead to TiO2Crystal grain
Different degrees of diffusion occurs for internal oxygen atom.Crystal boundary is the express passway of Ion transfer, and concentration of oxygen atoms becomes in environment
When change, grain boundaries can change therewith.In vacuum, hydrogen, is conducive to oxygen in lattice and volatilizees, intra-die and grain boundaries defect are dense
Degree increases, lattice oxygen loss, and the position that trivalent titanium particle occupies tetravalence titanium particle forms defectTi content remains unchanged, therefore
The Ti/O value of the sample being heat-treated under high vacuum state and hydrogen atmosphere, intra-die and crystal boundary is larger;Since oxygen atom is in crystalline substance
Intragranular portion diffusion velocity is lower than grain boundaries, therefore the oxygen loss amount of grain boundaries is bigger, and Ti/O value is larger.
It is further described combined with specific embodiments below.
Embodiment 1
It is 200nm~300nm, the TiO that purity is 99.5% with granularity2For raw material (Degussa AG), with Nb2O5(AR,
And Bi 99.99%)2O3(AR, 99.99%) is additive, TiO used2、 Nb2O5、Bi2O3It is commercial product.According to quality
Compare TiO2: Nb2O5: Bi2O3=301:2:5 weighs ingredient, is then with mass ratio with zirconia ball and dehydrated alcohol by batch
The ratio of 1:1:1.5 is placed in polyester tank, with the revolving speed ball milling 10h of 400r/min, gained slurry is taken out after the completion of ball milling, then will
Slurry dry 12h in 70 DEG C of baking oven excludes dehydrated alcohol, then ground 325 mesh, then into the powder after sieving by
It is added dropwise to the PVA solution that appropriate mass fraction is 5% to be uniformly mixed into powder, crosses 20 meshes and be granulated, put with plastic bag sealing
It sets for 24 hours;It by powder pressing at diameter is about 15mm under the pressure of 250MPa, the disk that thickness is about 1mm, in 600 DEG C of horse
Not dumping 2h in furnace;Biscuit is placed in electric furnace in a manner of burying burning, rises to 1400 DEG C with the heating rate of 5 DEG C/min, heat preservation
4h is furnace-cooled to room temperature and obtains TiO2Voltage-sensitive ceramic sample.Then sample is beaten with the sand paper of 400 mesh and 1500 mesh respectively
It grinds, it is spare after cleaning, drying.Above-mentioned sample is placed in H again2Atmosphere processing is carried out under atmosphere, sample is placed in very by when processing
In empty tube furnace, control partial pressure of oxygen is 10-2Pa rises to 600 DEG C with the heating rate of 5 DEG C/min, keeps the temperature 3h, after the completion of processing,
Furnace atmosphere is kept, 200 DEG C is cooled to according to the 10 DEG C/min of cooling process set, is then shut off system, allows sample with furnace
It is cooling, etc. after temperature lower, close breather valve, complete TiO2The preparation of base low-pressure pressure-sensitive ceramic material.
In order to test electric property, to all TiO2Sample disk two sides coats silver electrode, keeps the temperature 30min at 550 DEG C
It is allowed to be firmly combined.
In the present embodiment, using Brucker D8X x ray diffractometer x to gained TiO after sintering2Voltage-sensitive ceramic sample into
Row material phase analysis, TiO after gained sintering2The XRD spectrum of voltage-sensitive ceramic sample is as shown in Fig. 2.According to Fig.2, it is marked with PDF
After quasi- card is compareed, discovery sintering after sample principal crystalline phase be rutile, in addition, 2 θ of the angle of diffraction 33.19 °,
47.25 °, 58.49 ° there are three ebbs be Bi2O3Diffraction maximum, show to be precipitated in the sample being sintered at 1400 DEG C a small amount of
Bi2O3。
Using Philip ESEM X30 scanning electron microscope to gained TiO after sintering2Voltage-sensitive ceramic sample carries out microscopic appearance
Observation.Simultaneously using after dumping be sintered before biscuit microscopic appearance as compare.Fig. 3 is TiO2Voltage-sensitive ceramic sample is being sintered
The SEM of front and back schemes.SEM figure of a of Fig. 3 for the biscuit before sintering after dumping, biscuit Central Plains before being sintered it can be seen from a of Fig. 3
Material particle is ellipsoid, and partial size is between 200nm-300nm, even size distribution, and particle is mutually agglomerated into big a few to tens of
The aggregate of micron, contact tightness degree is poor between aggregate, inside aggregate and between there are certain amount scale sizes
The scale of different hole, these holes is much larger than feed particles.The b of Fig. 3 is gained TiO after sintering2Voltage-sensitive ceramic sample
SEM figure, TiO after being sintered it can be seen from the b of Fig. 32Crystallite dimension is much larger than TiO in 5-18 μ m2Raw material particle size;It is brilliant
Interface is clear between grain, is completely embedded, grain boundary layer is relatively thin and thickness is uniform;Hole is uniformly distributed between crystal grain, pore-size
Much smaller than crystal grain, shared volume is relatively small.It can also be seen that rutile crystal grain has growed by the b of Fig. 3, grain size
Gap is obvious, and little crystal grain is distributed between the crystal boundary of big crystal grain.
In the experimentation of the present embodiment, without any after being sintered using the detection of CJ1001 varistor DC parameter instrument
The TiO of heat treatment2The voltage-dependent characteristic of voltage-sensitive ceramic sample (as untreated standard specimen), while detecting through embodiment 1 in H2Atmosphere
The TiO being finally prepared is heat-treated under environment2The voltage-dependent characteristic of base low-pressure pressure-sensitive ceramic material.And in other experiment items
In the case that part is constant, change after being sintered to TiO2The atmosphere that voltage-sensitive ceramic sample is heat-treated carries out voltage-dependent characteristic
The control of detection, specifically, to carry out heat preservation heat treatment, partial pressure of oxygen 10 under oxygen atmosphere environment-2Pa.It is handled under different atmosphere
TiO2The results are shown in Table 1 for the pressure-sensitive parameter detecting of voltage-sensitive ceramic.
TiO under 1 different atmosphere of table2The pressure-sensitive parameter of voltage-sensitive ceramic
It can be seen that compared with untreated samples from the detection data of table 1, TiO after being heat-treated in vacuum and hydrogen2Examination
The nonlinear factor and pressure sensitive voltage of sample, which have, significantly to be declined, wherein the parameter ratio of heat treatment sample is under hydrogen in a vacuum
Range of decrease degree is bigger;And the nonlinear factor of sample and pressure sensitive voltage increase after being heat-treated in oxygen.Under vacuum and hydrogen
The voltage-sensitive ceramic leakage current of processing has a degree of reduction compared with untreated sample, illustrates under vacuum and hydrogen
The more untreated standard specimen of insulation performance of the voltage-sensitive ceramic sample of processing is good.
In the experimentation of the present embodiment, in order to preferably study atmosphere to TiO2The shadow of voltage-sensitive ceramic electric property
It rings, in experimentation of the present invention, TiO obtained by the present embodiment is tested using the comprehensive physical property measuring system of VersLab2Base low-pressure pressure-sensitive
Ceramic material is (to sintered TiO2Voltage-sensitive ceramic sample carries out obtained by the heat treatment under hydrogen atmosphere environment) I-V it is bent
Line, while in the case where other experiment conditions are constant, change after being sintered to TiO2The gas that voltage-sensitive ceramic sample is heat-treated
Atmosphere environment carries out the control of voltage-dependent characteristic detection, specifically, respectively with (partial pressure of oxygen 10 under oxygen atmosphere environment-2Pa), vacuum
(partial pressure of oxygen 10 under atmosphere-4Pa heat preservation heat treatment) is carried out.The TiO being heat-treated under different atmosphere2The I-V of voltage-sensitive ceramic is bent
Line is as shown in Figure 4.From fig. 4, it can be seen that three groups of VA characteristic curves show nonlinear characteristic.In low current area, curve is oblique
Rate be almost greatly very much it is vertical, show what varistor showed almost to insulate.As the increase of voltage enters limited proportionality, electricity
Resistance strongly reduces, and electric current increased dramatically, and produces pressure-sensitive character, and at this moment, voltage leads to electric current in a small-scale variation
Change across multiple orders of magnitude.Illustrate that crystal boundary is breakdown, crystal boundary becomes electric conductivity good conductor by original insulator, assumes responsibility for
Effect in circuit as protection device.As seen in Figure 4, the sample handled by hydrogen and vacuum atmosphere its for
Voltage generate jump reaction it is more obvious, and pass through oxygen atmosphere processing sample its be to have one for the reaction of voltage threshold
A reaction process, the variation of Cong Tuzhong slope of a curve can be seen that.
Embodiment 2
It is 200nm~300nm, the TiO that purity is 99.5% with granularity2For raw material (Degussa AG), with Nb2O5(AR,
And Bi 99.99%)2O3(AR, 99.99%) is additive, TiO used2、 Nb2O5、Bi2O3It is commercial product.According to quality
Compare TiO2: Nb2O5: Bi2O3=301:2:5 weighs ingredient, is then with mass ratio with zirconia ball and dehydrated alcohol by batch
The ratio of 1:1:1.5 is placed in polyester tank, with the revolving speed ball milling 12h of 350r/min, gained slurry is taken out after the completion of ball milling, then will
Slurry dry 14h in 60 DEG C of baking oven excludes dehydrated alcohol, then ground 325 mesh, then into the powder after sieving by
It is added dropwise to the PVA solution that appropriate mass fraction is 5% to be uniformly mixed into powder, crosses 20 meshes and be granulated, put with plastic bag sealing
It sets for 24 hours;It by powder pressing at diameter is about 15mm under the pressure of 250MPa, the disk that thickness is about 1mm, in 580 DEG C of horse
Not dumping 2h in furnace;Biscuit is placed in electric furnace in a manner of burying burning, rises to 1360 DEG C with the heating rate of 5 DEG C/min, heat preservation
4h is furnace-cooled to room temperature and obtains TiO2Voltage-sensitive ceramic sample.Then sample is beaten with the sand paper of 400 mesh and 1500 mesh respectively
It grinds, it is spare after cleaning, drying.Above-mentioned sample is placed under vacuum atmosphere environment progress atmosphere processing again, sample is placed in by when processing
In vacuum tube furnace, control partial pressure of oxygen is 10-4Pa rises to 600 DEG C with the heating rate of 5 DEG C/min, keeps the temperature 3h, and processing is completed
Afterwards, keep furnace atmosphere, be cooled to 200 DEG C according to the 10 DEG C/min of cooling process set, be then shut off system, allow sample with
Furnace is cooling, etc. after temperature lower, close breather valve, complete TiO2The preparation of base low-pressure pressure-sensitive ceramic material.
Embodiment 3
It is 200nm~300nm, the TiO that purity is 99.5% with granularity2For raw material (Degussa AG), with Nb2O5(AR,
And Bi 99.99%)2O3(AR, 99.99%) is additive, TiO used2、 Nb2O5、Bi2O3It is commercial product.According to quality
Compare TiO2: Nb2O5: Bi2O3=601:4:7 weighs ingredient, is then with mass ratio with zirconia ball and dehydrated alcohol by batch
The ratio of 1:1:1.5 is placed in polyester tank, with the revolving speed ball milling 10h of 380r/min, gained slurry is taken out after the completion of ball milling, then will
Slurry dry 10h in 70 DEG C of baking oven excludes dehydrated alcohol, then ground 325 mesh, then into the powder after sieving by
It is added dropwise to the PVA solution that appropriate mass fraction is 5% to be uniformly mixed into powder, crosses 20 meshes and be granulated, put with plastic bag sealing
It sets for 24 hours;It by powder pressing at diameter is about 15mm under the pressure of 250MPa, the disk that thickness is about 1mm, in 600 DEG C of horse
Not dumping 1.5h in furnace;Biscuit is placed in electric furnace in a manner of burying burning, 1380 DEG C is risen to the heating rate of 5 DEG C/min, protects
Warm 3h is furnace-cooled to room temperature and obtains TiO2Voltage-sensitive ceramic sample.Then sample is carried out with the sand paper of 400 mesh and 1500 mesh respectively
It polishes, it is spare after cleaning, drying.Above-mentioned sample is placed in H again2Atmosphere processing is carried out under atmosphere, sample is placed in by when processing
In vacuum tube furnace, control partial pressure of oxygen is 10-4Pa rises to 500 DEG C with the heating rate of 5 DEG C/min, keeps the temperature 3h, and processing is completed
Afterwards, keep furnace atmosphere, be cooled to 200 DEG C according to the 10 DEG C/min of cooling process set, be then shut off system, allow sample with
Furnace is cooling, etc. after temperature lower, close breather valve, complete TiO2The preparation of base low-pressure pressure-sensitive ceramic material.
Embodiment 4
It is 200nm~300nm, the TiO that purity is 99.5% with granularity2For raw material (Degussa AG), with Nb2O5(AR,
And Bi 99.99%)2O3(AR, 99.99%) is additive, TiO used2、 Nb2O5、Bi2O3It is commercial product.According to quality
Compare TiO2: Nb2O5: Bi2O3=240:2:5 weighs ingredient, is then with mass ratio with zirconia ball and dehydrated alcohol by batch
The ratio of 1:1:1.5 is placed in polyester tank, with the revolving speed ball milling 11h of 400r/min, gained slurry is taken out after the completion of ball milling, then will
Slurry dry 12h in 65 DEG C of baking oven excludes dehydrated alcohol, then ground 325 mesh, then into the powder after sieving by
It is added dropwise to the PVA solution that appropriate mass fraction is 5% to be uniformly mixed into powder, crosses 20 meshes and be granulated, put with plastic bag sealing
It sets for 24 hours;It by powder pressing at diameter is about 15mm under the pressure of 250MPa, the disk that thickness is about 1mm, in 550 DEG C of horse
Not dumping 2h in furnace;Biscuit is placed in electric furnace in a manner of burying burning, rises to 1390 DEG C with the heating rate of 4 DEG C/min, heat preservation
3.5h is furnace-cooled to room temperature and obtains TiO2Voltage-sensitive ceramic sample.Then sample is beaten with the sand paper of 400 mesh and 1500 mesh respectively
It grinds, it is spare after cleaning, drying.Above-mentioned sample is placed under vacuum atmosphere environment progress atmosphere processing again, sample is placed in by when processing
In vacuum tube furnace, control partial pressure of oxygen is 10-4Pa rises to 580 DEG C with the heating rate of 4 DEG C/min, keeps the temperature 3h, and processing is completed
Afterwards, keep furnace atmosphere, be cooled to 200 DEG C according to the 10 DEG C/min of cooling process set, be then shut off system, allow sample with
Furnace is cooling, etc. after temperature lower, close breather valve, complete TiO2The preparation of base low-pressure pressure-sensitive ceramic material.
Embodiment 5
It is 200nm~300nm, the TiO that purity is 99.5% with granularity2For raw material (Degussa AG), with Nb2O5(AR,
And Bi 99.99%)2O3(AR, 99.99%) is additive, TiO used2、 Nb2O5、Bi2O3It is commercial product.According to quality
Compare TiO2: Nb2O5: Bi2O3=602:2:7 weighs ingredient, is then with mass ratio with zirconia ball and dehydrated alcohol by batch
The ratio of 1:1:1.5 is placed in polyester tank, with the revolving speed ball milling 8h of 450r/min, gained slurry is taken out after the completion of ball milling, then will
Slurry dry 12h in 70 DEG C of baking oven excludes dehydrated alcohol, then ground 325 mesh, then into the powder after sieving by
It is added dropwise to the PVA solution that appropriate mass fraction is 5% to be uniformly mixed into powder, crosses 20 meshes and be granulated, put with plastic bag sealing
It sets for 24 hours;It by powder pressing at diameter is about 15mm under the pressure of 250MPa, the disk that thickness is about 1mm, in 600 DEG C of horse
Not dumping 2h in furnace;Biscuit is placed in electric furnace in a manner of burying burning, rises to 1410 DEG C with the heating rate of 6 DEG C/min, heat preservation
2.5h is furnace-cooled to room temperature and obtains TiO2Voltage-sensitive ceramic sample.Then sample is beaten with the sand paper of 400 mesh and 1500 mesh respectively
It grinds, it is spare after cleaning, drying.Above-mentioned sample is placed in H again2Atmosphere processing is carried out under atmosphere, sample is placed in very by when processing
In empty tube furnace, control partial pressure of oxygen is 10-4Pa rises to 550 DEG C with the heating rate of 6 DEG C/min, keeps the temperature 3h, after the completion of processing,
Furnace atmosphere is kept, 200 DEG C is cooled to according to the 10 DEG C/min of cooling process set, is then shut off system, allows sample with furnace
It is cooling, etc. after temperature lower, close breather valve, complete TiO2The preparation of base low-pressure pressure-sensitive ceramic material.
Claims (7)
1. a kind of TiO2The preparation method of base low-pressure pressure-sensitive ceramic material, which comprises the steps of:
Step 1, by TiO2、Nb2O5And Bi2O3It is put into after mixing in polyester tank, carries out wet ball-milling, then pass through dry, grinding,
Obtain mixed powder;
Step 2, the mixed powder of step 1 is granulated, is then suppressed, obtain biscuit;
Step 3, biscuit step 2 obtained is sintered after dumping, is furnace-cooled to room temperature, obtains TiO2Voltage-sensitive ceramic;
In step 3 dumping be by biscuit in 550 DEG C~600 DEG C of Muffle furnace dumping 1.5h~2h;
Sintering is to be placed in the biscuit after dumping in electric furnace in a manner of burying burning in step 3, with 4 DEG C/min~6 DEG C/min liter
Warm rate is warming up to 1360 DEG C~1410 DEG C, keeps the temperature 2.5h~4h;
Step 4, TiO step 3 obtained2Voltage-sensitive ceramic is polished, and is heat-treated after cleaning, drying, and TiO is obtained2Base is low
Press pressure-sensitive ceramic material;
Heat treatment is in carrying out in vacuum tube furnace, in H in step 42Under atmosphere or vacuum atmosphere environment, with 4 DEG C/min~
The heating rate of 6 DEG C/min is warming up to 500 DEG C~600 DEG C, keeps the temperature and is cooled to 200 DEG C with the rate of 10 DEG C/min after 3h, then
Furnace cooling.
2. TiO according to claim 12The preparation method of base low-pressure pressure-sensitive ceramic material, which is characterized in that in step 1
TiO2, Nb2O5, Bi2O3Mass ratio be 120~301:1:1.75~3.5.
3. TiO according to claim 12The preparation method of base low-pressure pressure-sensitive ceramic material, which is characterized in that in step 1
TiO2Granularity be 200nm~300nm.
4. TiO according to claim 12The preparation method of base low-pressure pressure-sensitive ceramic material, which is characterized in that wet in step 1
The concrete mode of formula ball milling is as follows:
Ratio by mixed raw material and zirconia ball and dehydrated alcohol with mass ratio for 1:1:1.5 is placed in polyester tank, with 350r/
8~12h of revolving speed ball milling of min~450r/min.
5. TiO according to any one of claims 1 to 42The preparation method of base low-pressure pressure-sensitive ceramic material, which is characterized in that step
Drying is carried out in baking oven in rapid 1, and drying temperature is 60 DEG C~70 DEG C, and drying time is 10h~14h.
6. TiO according to claim 12The preparation method of base low-pressure pressure-sensitive ceramic material, which is characterized in that in step 2 to
The PVA solution that mass fraction is 5% is added dropwise in mixed powder, crosses 20 meshes and is granulated, then placed with plastic bag sealing
For 24 hours, re-compacted molding, obtains biscuit.
7. TiO according to claim 12The preparation method of base low-pressure pressure-sensitive ceramic material, which is characterized in that when in H2Gas
When being handled in atmosphere environment, partial pressure of oxygen 10-2Pa;When being handled in vacuum atmosphere environment, partial pressure of oxygen 10-4Pa。
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CN102424577A (en) * | 2011-09-20 | 2012-04-25 | 桂林电子科技大学 | Low voltage varistor ceramic material and preparation method thereof |
CN102584210A (en) * | 2012-02-07 | 2012-07-18 | 上海海事大学 | Preparation method for high-voltage TiO2 ring varistor |
CN103058648A (en) * | 2013-01-04 | 2013-04-24 | 河南科技大学 | La2O3-SnO2-Zn2SnO4 varistor-capacitor bifunctional ceramic material and preparation method thereof |
CN104744029A (en) * | 2015-03-10 | 2015-07-01 | 河南科技大学 | Bi2O3-SnO2-Zn2SnO4 voltage sensitive-capacitance dual-function ceramic material and preparation method thereof |
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CN102424577A (en) * | 2011-09-20 | 2012-04-25 | 桂林电子科技大学 | Low voltage varistor ceramic material and preparation method thereof |
CN102584210A (en) * | 2012-02-07 | 2012-07-18 | 上海海事大学 | Preparation method for high-voltage TiO2 ring varistor |
CN103058648A (en) * | 2013-01-04 | 2013-04-24 | 河南科技大学 | La2O3-SnO2-Zn2SnO4 varistor-capacitor bifunctional ceramic material and preparation method thereof |
CN104744029A (en) * | 2015-03-10 | 2015-07-01 | 河南科技大学 | Bi2O3-SnO2-Zn2SnO4 voltage sensitive-capacitance dual-function ceramic material and preparation method thereof |
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