CN106736996A - Polishing tool and non-spherical element external waviness minimizing technology - Google Patents
Polishing tool and non-spherical element external waviness minimizing technology Download PDFInfo
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- CN106736996A CN106736996A CN201710198817.8A CN201710198817A CN106736996A CN 106736996 A CN106736996 A CN 106736996A CN 201710198817 A CN201710198817 A CN 201710198817A CN 106736996 A CN106736996 A CN 106736996A
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- polishing
- rubber bag
- bag tank
- tool
- tool base
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
Abstract
The present invention provides a kind of polishing tool and non-spherical element external waviness minimizing technology, and polishing tool includes switching part, tool base, viscoelastic medium, flexible media thickness adjusting screw, rubber bag tank and is arranged at the polishing mould layer on the rubber bag tank surface.Polishing tool is connected to Digit Control Machine Tool by switching part, and tool base is annular shape.Flexible media thickness adjusting screw is movably embedded in the tool base, and rubber bag tank is covered on the tool base, makes to form annular seal space between tool base, flexible media adjusting screw and rubber bag tank, the full viscoelastic medium of filling in annular seal space.Non-spherical element external waviness minimizing technology can either make polishing tool be matched with the surface of non-spherical element to be processed by changing the species and thickness of the viscoelastic medium in polishing tool, and non-spherical surface ripple can be removed again.
Description
Technical field
The present invention relates to fabricate technical field, in particular to a kind of polishing tool and non-spherical element surface
Ripple minimizing technology.
Background technology
The optics such as advanced military optical system, large-scale astronomical telescope engineering, extreme ultra violet lithography engineering, light laser engineering
The Mid Frequency phase error of systems for optical element, surface roughness and sub-surface roughness etc. are proposed and much surmount allusion
The requirement of optical system, the limit of their precision index requirements to optical element substantially close to processing.Therefore, based on computer
Control optical surface shapes the various rim of the mouth footpaths of (Computer Controlled Optical Surfacing, CCOS) principle
Polishing technology arises at the historic moment.
Wherein, the rim of the mouth footpath polishing technology based on CCOS principles is compared with traditional hand polish technique, its certainty is high,
Shape convergence in face is fast, and technical merit and experience to technologist does not have dependence substantially.However, rim of the mouth footpath polishing technology is fast
Speed removal surface to be machined low frequency face shape error while, the space scale of error is also often become smaller, so as to cause compared with
Many small yardstick phase errors.
It has been investigated that, " ripple " or periodic structure in the laser beam that is arbitrarily added to, either to light beam vibration amplitude also
It is the disturbance of phase, will all destroys the performance of high power optical system.Especially, the small chi for being introduced by Optical element manufacturing process
The phase perturbation of degree, very big gain will be obtained under the influence of high light nonlinear effect, after long transmission range, conversion
It is big intensity modulated, deteriorates the beam quality of system output, the laser damage of optical element is resulted even in when serious.
At present, it is to introduce intermediate frequency error that research shows in the processing of aperture aspherical element that polishing tool and element are misfitted
One of the reason for, the optimization design of polishing tool is the effective way that can solve the problem that this problem.In addition, ensureing the polishing
In the case that instrument coincide with element, regulation and control instrument rigidity can obtain more preferable ripple removal effect.
The content of the invention
In view of this, it is an object of the invention to provide a kind of polishing tool and non-spherical element external waviness removal side
Method, can both match with the surface of non-spherical element to be processed, and non-spherical surface ripple can be removed again.
In order to achieve the above object, present pre-ferred embodiments provide a kind of polishing tool, and the polishing tool includes turning
Relay part, tool base, viscoelastic medium, flexible media thickness adjusting screw, rubber bag tank and it is arranged at the rubber
The polishing mould layer on capsule surface；
The polishing tool is connected to Digit Control Machine Tool by the switching part；The tool base is removably connected to institute
Switching part is stated, the tool base is annular shape；The flexible media thickness adjusting screw is movably embedded in the work
Tool base, the rubber bag tank is covered on the tool base, make the tool base, flexible media adjusting screw and rubber bag tank it
Between form annular seal space；The full viscoelastic medium of filling in the annular seal space.
Preferably, in above-mentioned polishing tool, the center of the flexible media thickness adjusting screw is provided with inner hexagonal hole,
The outer of the flexible media thickness adjusting screw is provided with the first external screw thread, and the inner peripheral surface of the tool base is provided with and institute
The first internal thread that the first external screw thread agrees with is stated, the flexible media thickness adjusting screw tool base can be screwed in relatively
Or screw out, change the size of the annular seal space；The height change scope of the annular seal space is 0~18mm.
Preferably, in above-mentioned polishing tool, the upper surface of the tool base inner edge is provided with stepped locating part, institute
State rubber bag tank and be covered on the stepped locating part.
Preferably, in above-mentioned polishing tool, the polishing tool also includes rubber bag tank locking nut, the rubber bag tank lock
Tight nut sleeve is located at the rubber bag tank, and the rubber bag tank is fixed on into the tool base.
Preferably, in above-mentioned polishing tool, the outer peripheral face of the tool base sets the second external screw thread, the rubber bag tank
The madial wall of locking nut is provided with the second internal thread mutually agreed with second external screw thread, the rubber bag tank locking screw mother set
Screwed located at the rubber bag tank and with the outer peripheral face of the tool base.
Preferably, in above-mentioned polishing tool, the outer of the rubber bag tank locking nut is provided with multiple draw-in grooves.
Preferably, in above-mentioned polishing tool, the switching part, tool base, flexible media thickness adjusting screw and
Rubber bag tank locking nut is made from aluminum and forms, and the switching part, tool base and flexible media thickness adjusting screw are through loss of weight
Treatment is made.
Preferably, in above-mentioned polishing tool, the polishing mould layer is had the mould system of teflon coatings by surface
Into the mould is the disk for being arranged at intervals with multiple square openings.
Preferably, in above-mentioned polishing tool, the polishing mould layer is made up of polishing pitch.
Present pre-ferred embodiments also provide a kind of non-spherical element external waviness minimizing technology, and methods described includes：
Change the present invention provide polishing tool in viscoelastic medium species and thickness, make the polishing tool with
The surface of non-spherical element to be processed is matched, and non-spherical surface ripple is removed.
Polishing tool provided in an embodiment of the present invention and non-spherical element external waviness minimizing technology, in tool base, soft
Property dielectric thickness adjusting screw and rubber bag tank formed annular seal space in add viscoelastic medium, it is different types of by choosing
Viscoelastic medium and the thickness to viscoelastic medium are adjusted, it is possible to achieve polishing tool and aspheric to be processed
Coincideing for face element surface, can also change the pressure difference existed between non-spherical element external waviness height to be processed, enter
And the removal of non-spherical element external waviness to be processed is realized, finally realize the suppression of non-spherical element intermediate frequency error to be processed.
Brief description of the drawings
Technical scheme in order to illustrate more clearly the embodiments of the present invention, below will be attached to what is used needed for embodiment
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, thus be not construed as it is right
The restriction of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other related accompanying drawings.
Fig. 1 is a kind of structural representation of polishing tool provided in an embodiment of the present invention.
Fig. 2 is a kind of structural representation of switching part provided in an embodiment of the present invention.
Fig. 3 is a kind of structural representation of tool base provided in an embodiment of the present invention.
Fig. 4 is a kind of structural representation of flexible media thickness adjusting screw provided in an embodiment of the present invention.
Fig. 5 is the structural representation of a kind of rubber bag tank provided in an embodiment of the present invention and polishing mould layer.
Fig. 6 is a kind of structural representation of mould provided in an embodiment of the present invention.
Fig. 7 is a kind of structural representation of rubber bag tank locking nut provided in an embodiment of the present invention.
Fig. 8 is the scheme of installation of rubber bag tank locking nut shown in Fig. 7.
Icon：100- polishing tools；110- switching parts；111- disc bodies；1111- bottom surfaces；1112- sides wall；1113-
Projection；The fixing holes of 1114- first；112- Coupling Shafts；120- tool bases；The fixing holes of 121- second；The stepped locating parts of 122-；
130- flexible media thickness adjusting screws；131- inner hexagonal holes；140- rubber bag tanks；141- hollow circuit cylinders；1411- surfaces；1412-
First chamfering；142- annulus；150- polishing mould layers；160- rubber bag tank locking nuts；161- first sides；162- second sides；
The chamferings of 163- second；164- draw-in grooves；200- moulds；210- square openings.
Specific embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is purged, is fully described by, it is clear that described embodiment is
A part of embodiment of the invention, and not all embodiment.Present invention implementation generally described and illustrated in accompanying drawing herein
The component of example can be arranged and designed with a variety of configurations.
Therefore, the detailed description of embodiments of the invention below to providing in the accompanying drawings is not intended to limit claimed
The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiment in the present invention, this area is common
The every other embodiment that technical staff is obtained under the premise of creative work is not made, belongs to the model of present invention protection
Enclose.
It should be noted that：Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then it need not be further defined and explained in subsequent accompanying drawing.
Fig. 1 is referred to, is a kind of polishing tool 100 provided in an embodiment of the present invention.The polishing tool 100 includes switching
Part 110, tool base 120, viscoelastic medium, flexible media thickness adjusting screw 130, rubber bag tank 140 and setting
In the polishing mould layer 150 on the surface 1411 of the rubber bag tank 140.
Wherein, the polishing tool 100 is connected to Digit Control Machine Tool, the tool base 120 by the switching part 110
It is the shape of annulus 142, and is removably attachable to the switching part 110.The flexible media thickness adjusting screw 130 can live
The tool base 120 is embedded in dynamicly, and the rubber bag tank 140 is covered on the tool base 120, makes the tool base
120th, the full viscoelastic of filling in annular seal space, the annular seal space is formed between flexible media adjusting screw and rubber bag tank 140 to be situated between
Matter.
In the present embodiment, the tool base 120 and the flexible media thickness adjusting screw 130 are discoid, institute
State rubber bag tank 140 has circular contour with the polishing mould layer 150, namely along the rubber bag tank 140 and the side of polishing mould layer 150
The curve that edge is drawn is circle.The tool base 120, flexible media thickness adjusting screw 130, rubber bag tank 140 and throwing
Light mold layer 150 is centrally located on same straight line.
It should be appreciated that " being located at same straight line " described herein is not necessarily referring to be strictly on same straight line, when the work
Tool base 120, the horizontal range between flexible media thickness adjusting screw 130, rubber bag tank 140 and the center of polishing mould layer 150
When in the error range that art technology can be received, also should be by the tool base 120, flexible media thickness regulation spiral shell
Nail 130, rubber bag tank 140 is regarded as being located at same straight line with the center of polishing mould layer 150.
Fig. 2 is referred to, is a kind of structural representation of switching part 110 provided in an embodiment of the present invention.Alternatively, it is described
Switching part 110 can include disc body 111 and Coupling Shaft 112, and the Coupling Shaft 112 is perpendicularly fixed at the disc body
111 center of circle position.The disc body 111 includes bottom surface 1111 and encloses side wall located at the bottom surface 1111
1112, the inner side of the side wall 1112 is provided with multiple projections 1113, and each described projection 1113 is parallel with the bottom surface 1111
One side offer the first fixing hole 1114.Wherein, the multiple projection 1113 can be with spaced set, each described projection
1113 is arc along the edge of the ring of the disc body 111, it is possible to which the circumference with the disc body 111 is parallel.
It should be noted that in the present embodiment, the numerical control that the switching part 110 is applied with the polishing tool 100
The specific connected mode and size of the rotating shaft of lathe match, and merely illustrative shown in Fig. 2, the present embodiment is without limitation.
Refer to Fig. 3, a kind of structural representation of tool base 120 provided in an embodiment of the present invention.Alternatively, the work
Tool base 120 can be with column annulus 142, and the inner edge of the tool base 120 can be with the multiple projection 1113 parallel to institute
The edge for stating disc body 111 is equal.The phase of the first fixing hole 1114 on the tool base 120 and projection each described 1113
To position offer with the second fixing hole 121, so, it is possible to use screw is solid through first fixing hole 1114 and second
Determine the fixation that the switching part 110 and tool base 120 are realized in hole 121.
Alternatively, the inner edge upper surface of the tool base 120 is provided with stepped locating part 122, during implementation, the rubber
Capsule 140 is covered on the stepped locating part 122, in this way, the relatively described tool base of the rubber bag tank 140 can be avoided
120 are moved.
Alternatively, Fig. 4 is referred to, is a kind of knot of flexible media thickness adjusting screw 130 provided in an embodiment of the present invention
Structure schematic diagram.The flexible media thickness adjusting screw 130 for discoid, the size of flexible media thickness adjusting screw 130 with
The size of the inner circle of the tool base 120 is mutually agreed with, and the flexible media thickness adjusting screw 130 is actively embedded
In the tool base 120.
Alternatively, the center of the flexible media thickness adjusting screw 130 is provided with inner hexagonal hole 131, flexible Jie
The outer of matter thickness adjusting screw 130 is provided with the first external screw thread, and the inner peripheral surface of the tool base 120 is provided with spiral shell in first
Line, first internal thread mutually agrees with first external screw thread, makes the flexible media thickness adjusting screw 130 can be with respect to institute
Tool base 120 is stated to be threaded in or out.Because the rubber bag tank 140 is constant with the relative position of the tool base 120, pass through
Change the position of the flexible media thickness adjusting screw 130, you can change the size of the annular seal space.Due to the viscoplasticity
The full annular seal space of flexible media filling, thus, the change of the annular seal space height, you can realize the viscoelastic medium
The change of thickness.
Wherein, the change scope of the viscoelastic dielectric thickness is 0~18mm, that is, the height of the annular seal space
Excursion is 0~18mm.
Fig. 5 is referred to, is the structural representation of a kind of rubber bag tank 140 provided in an embodiment of the present invention and polishing mould layer 150.
Alternatively, the rubber bag tank 140 can be pot cover shape, be made up of elastomeric material, and its thickness can be 2mm.The rubber bag tank 140
With the hollow circuit cylinder 141 of one end open, and the annulus 142 of the opening outer can be arranged at, the annulus 142 is opened with described
Plane where mouthful is equal.The hollow circuit cylinder 141 is provided with first and falls away from the edge on the surface 1411 of the tool base 120
Angle 1412, the polishing mould layer 150 is arranged at the surface 1411.The polishing mould layer 150 includes multiple rectangular preiections, the square
Shape bulge clearance is arranged at the surface 1411.
Wherein, the diameter of surface 1411 away from the tool base 120 of the hollow circuit cylinder 141 can be 111mm, institute
The radius for stating the first chamfering 1412 can be for 6mm, the inner chamber of the rubber bag tank 140 depth 10mm.
During implementation, the rubber bag tank 140 is covered on the tool base 120, that is, the annulus 142 is in described
The one side of hollow round column 141 is bonded to each other with the tool base 120.
In the present embodiment, the mould 200 that the polishing mould layer 150 can be as shown in Figure 6 is made.The shaping mould
Tool 200 is the disk for offering multiple square openings 210, and the surface 1411 of the mould 200 can have teflon coatings.
Because the material therefor of the polishing mould layer 150 is pitch, the setting of the teflon coatings can avoid making the polishing being molded
Mold layer 150 is bonded with mould 200, consequently facilitating the polishing mould layer 150 for making shaping is intactly taken off from mould 200
Open.
Alternatively, the polishing tool 100 also includes rubber bag tank locking nut 160.Please refer to Fig. 7 and Fig. 8, Fig. 7
It is a kind of structural representation of rubber bag tank locking nut 160 provided in an embodiment of the present invention, Fig. 8 is rubber bag tank locking nut 160
Scheme of installation.
Alternatively, the rubber bag tank locking nut 160 can include the first side 161 and second side that are connected with each other
162, the first side 161 is mutually perpendicular to the second side 162.The first side 161 is the shape of annulus 142, described
Second side 162 is cylindrical shape, that is, overall shape such as annular angle steel that the first side 161 and second side 162 are constituted.
Wherein, the position that the first side 161 connects with the second side 162 is provided with the second chamfering 163, described
The place circle spacing of second chamfering 163 is provided with multiple draw-in grooves 164, and the multiple draw-in groove 164 can be with spaced set, and its is specific
Quantity can flexibly be set as needed, for example, can be 4, the present embodiment is without limitation.In this way, in dismounting
The rubber bag tank locking nut 160 is easy to be turned.
During implementation, the rubber bag tank locking nut 160 is sheathed on the rubber bag tank 140.The inner edge of the first side 161
Lateral wall 1112 with the hollow circuit cylinder 141 contacts with each other, the second side 162 dorsad the one side of the draw-in groove 164 with
The outer peripheral face of the tool base 120 contacts with each other.According to the actual requirements, the dorsad draw-in groove 164 of the second side 162
The second internal thread can be simultaneously provided with, the outer peripheral face of the tool base 120 can be provided with the second external screw thread, in this way, working as
When the rubber bag tank locking nut 160 is sheathed on the rubber bag tank 140, second internal thread can be with second external screw thread
Mutually screw, so as to the rubber bag tank 140 is fixed on into the tool base 120.
It should be noted that in the present embodiment, the switching part 110, tool base 120, the regulation of flexible media thickness
Screw 130 and rubber bag tank locking nut 160 can be made by aluminum, and the switching part 110, tool base
120 and flexible media thickness adjusting screw 130 can carry out loss of weight treatment, can so mitigate overall weight.
The embodiment of the present invention also provides a kind of non-spherical element external waviness minimizing technology, and methods described includes following step
Suddenly.
Change the species and thickness of viscoelastic medium in the polishing tool 100 that the present invention is provided, make the buffer
Tool is matched with the surface of non-spherical element to be processed, and non-spherical surface ripple is removed.
During implementation, by changing the species and thickness of viscoelastic medium in the polishing tool 100, can make described
Polishing tool 100 is adapted to the low order caused due to aspherical pattern and bent, that is, enable the polishing tool with it is to be processed
The surface of non-spherical element matches.It should be appreciated that in the present embodiment, the non-spherical element external waviness minimizing technology is same
Suitable for the element to be processed with plane or sphere.
Additionally, species and thickness by changing viscoelastic medium in the polishing tool 100, can be with opposite shape
Ripple in error is removed, namely ensures there is pressure difference between the external waviness height of element to be processed.
Wherein, the pressure difference between optical element surface height can be according to calculating formulaCalculated,
PsubThe pressure difference between element surface height to be processed is represented, ε represents ripple amplitude, and L represents the thickness of viscoelastic medium
Degree, E ' represents storage modulus, and δ represents phase angle.
When the use polishing tool 100 is treated machine component and is polished, after certain hour is processed, can calculate
The element surface ripple amplitude variable quantity to be processed, the ripple amplitude variable quantity can be by calculating formula Δ PV=KV
PsubΔ t is calculated, wherein, K is proportionality constant, is had an impact to ripple removal amount in addition to pressure, speed factor for characterizing
Factor.V represents the relative velocity between polishing mould layer 150 and element to be processed, and Δ t represents processing duration.
In sum, polishing tool provided in an embodiment of the present invention 100 and non-spherical element external waviness minimizing technology,
The full viscoelastic of filling in the annular seal space that tool base 120, flexible media thickness adjusting screw 130 and rubber bag tank 140 are formed
Medium, in this way, can realize that the viscoelastic is situated between by changing the position of the flexible media thickness adjusting screw 130
The change of matter thickness, so that the polishing tool 100 matches with the surface 1411 of element to be processed.Additionally, by changing
The thickness of the species of the viscoelastic medium, can also change the pressure between element surface ripple height to be processed
Difference, and then realize element surface ripple removal to be processed, and the externally suppression of machine component intermediate frequency error.
In the description of the invention, it is necessary to explanation, term " on ", D score, the orientation or position of the instruction such as " interior ", " outward "
The relation of putting is or the orientation or position that the invention product is usually put when using based on orientation shown in the drawings or position relationship
Relation is put, the description present invention is for only for ease of and is simplified description, it is necessary rather than the device or element for indicating or imply meaning
With specific orientation, with specific azimuth configuration and operation, therefore it is not considered as limiting the invention.
In the description of the invention, in addition it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ",
" installation ", " connection " should be interpreted broadly, for example, it may be being fixedly connected, or being detachably connected, or integratedly connect
Connect；Can mechanically connect, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can
Being two connections of element internal.For the ordinary skill in the art, above-mentioned term can be understood with concrete condition
Concrete meaning in the present invention.
In the present invention, unless otherwise prescribed, fisrt feature can include first and the on or below second feature
Two feature directly contacts, it is also possible to including the first and second features be not directly contact but by the other spy between them
Levy contact.And, fisrt feature is on second feature, top and above include fisrt feature directly over second feature and tiltedly
Top, or the level height of fisrt feature is merely representative of higher than second feature.Fisrt feature is under second feature, lower section and
Fisrt feature included below is in the underface and obliquely downward of second feature, or is merely representative of the level height of fisrt feature less than the
Two features.
The preferred embodiments of the present invention are the foregoing is only, is not intended to limit the invention, for the skill of this area
For art personnel, the present invention can have various modifications and variations.It is all within the spirit and principles in the present invention, made any repair
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (10)
1. a kind of polishing tool, it is characterised in that the polishing tool includes that switching part, tool base, viscoelastic are situated between
Matter, flexible media thickness adjusting screw, rubber bag tank and it is arranged at the polishing mould layer on the rubber bag tank surface；
The polishing tool is connected to Digit Control Machine Tool by the switching part；The tool base is removably connected to described turning
Relay part, the tool base is annular shape；The flexible media thickness adjusting screw is movably embedded in the instrument bottom
Seat, the rubber bag tank is covered on the tool base, makes shape between the tool base, flexible media adjusting screw and rubber bag tank
Into annular seal space；The full viscoelastic medium of filling in the annular seal space.
2. polishing tool according to claim 1, it is characterised in that the center of the flexible media thickness adjusting screw sets
Be equipped with inner hexagonal hole, the outer of the flexible media thickness adjusting screw is provided with the first external screw thread, the tool base it is interior
Side face is provided with the first internal thread agreed with first external screw thread, makes the flexible media thickness adjusting screw can be with respect to institute
State tool base to be threaded in or out, change the size of the annular seal space；The height change scope of the annular seal space is 0~18mm.
3. polishing tool according to claim 1, it is characterised in that the upper surface of the tool base inner edge is provided with rank
Scalariform locating part, the rubber bag tank is covered on the stepped locating part.
4. polishing tool according to claim 1, it is characterised in that the polishing tool also includes rubber bag tank locking screw
Mother, the rubber bag tank locking nut is sheathed on the rubber bag tank, and the rubber bag tank is fixed on into the tool base.
5. polishing tool according to claim 4, it is characterised in that the outer peripheral face of the tool base sets the second outer spiral shell
Line, the madial wall of the rubber bag tank locking nut is provided with the second internal thread mutually agreed with second external screw thread, the rubber
Capsule locking nut is sheathed on the rubber bag tank and is screwed with the outer peripheral face of the tool base.
6. polishing tool according to claim 4, it is characterised in that the outer of the rubber bag tank locking nut is provided with many
Individual draw-in groove.
7. polishing tool according to claim 1, it is characterised in that the switching part, tool base, flexible media are thick
Degree adjusting screw and rubber bag tank locking nut are made from aluminum and form, and the switching part, tool base and flexible media thickness are adjusted
Section screw is processed through loss of weight and is made.
8. polishing tool according to claim 1, it is characterised in that the polishing mould layer has teflon coatings by surface
Mould be made, the mould is the disk for being arranged at intervals with multiple square openings.
9. polishing tool according to claim 1, it is characterised in that the polishing mould layer is made up of polishing pitch.
10. a kind of non-spherical element external waviness minimizing technology, it is characterised in that methods described includes：
Change the species and thickness of viscoelastic medium in polishing tool described in any one of claim 1~8, make the polishing
Instrument is matched with the surface of non-spherical element to be processed, and non-spherical surface ripple is removed.
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| CN201710198817.8A CN106736996B (en) | 2017-03-29 | 2017-03-29 | Polishing tool and non-spherical element external waviness minimizing technology |
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| CN201710198817.8A CN106736996B (en) | 2017-03-29 | 2017-03-29 | Polishing tool and non-spherical element external waviness minimizing technology |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108312081A (en) * | 2018-04-13 | 2018-07-24 | 中国工程物理研究院激光聚变研究中心 | Cyclic spring polishing tool |
| CN109676469A (en) * | 2019-01-30 | 2019-04-26 | 成都精密光学工程研究中心 | A kind of optical element polishing tool and polishing method |
| CN111015508A (en) * | 2019-12-17 | 2020-04-17 | 中国航空工业集团公司济南特种结构研究所 | Dot-matrix flexible polishing head structure |
| CN113933029A (en) * | 2021-10-15 | 2022-01-14 | 中国工程物理研究院激光聚变研究中心 | Off-axis aspheric element processing detection system and manufacturing method |
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| CN113933029A (en) * | 2021-10-15 | 2022-01-14 | 中国工程物理研究院激光聚变研究中心 | Off-axis aspheric element processing detection system and manufacturing method |
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