CN106711762B - 一种可调谐垂直腔面发射激光器的制备方法 - Google Patents
一种可调谐垂直腔面发射激光器的制备方法 Download PDFInfo
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- CN106711762B CN106711762B CN201710045602.2A CN201710045602A CN106711762B CN 106711762 B CN106711762 B CN 106711762B CN 201710045602 A CN201710045602 A CN 201710045602A CN 106711762 B CN106711762 B CN 106711762B
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- 238000002360 preparation method Methods 0.000 title claims abstract description 29
- 239000010410 layer Substances 0.000 claims description 154
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 38
- 238000001259 photo etching Methods 0.000 claims description 36
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 31
- 229910052751 metal Inorganic materials 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 27
- 238000007254 oxidation reaction Methods 0.000 claims description 25
- 239000012790 adhesive layer Substances 0.000 claims description 22
- 230000007797 corrosion Effects 0.000 claims description 22
- 238000005260 corrosion Methods 0.000 claims description 22
- 230000003647 oxidation Effects 0.000 claims description 20
- 238000002347 injection Methods 0.000 claims description 18
- 239000007924 injection Substances 0.000 claims description 18
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 12
- 239000013110 organic ligand Substances 0.000 claims description 12
- 230000001590 oxidative effect Effects 0.000 claims description 11
- 238000005516 engineering process Methods 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 9
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000004528 spin coating Methods 0.000 claims description 6
- 238000000151 deposition Methods 0.000 claims description 5
- 229910001258 titanium gold Inorganic materials 0.000 claims description 5
- 239000012528 membrane Substances 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 claims 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims 1
- 239000005977 Ethylene Substances 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 125000002524 organometallic group Chemical group 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 31
- 238000004519 manufacturing process Methods 0.000 abstract description 20
- 238000011017 operating method Methods 0.000 abstract description 6
- 238000001020 plasma etching Methods 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 229910052681 coesite Inorganic materials 0.000 description 8
- 229910052906 cristobalite Inorganic materials 0.000 description 8
- 239000004744 fabric Substances 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 235000012239 silicon dioxide Nutrition 0.000 description 8
- 229910052682 stishovite Inorganic materials 0.000 description 8
- 229910052905 tridymite Inorganic materials 0.000 description 8
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 5
- 238000013467 fragmentation Methods 0.000 description 5
- 238000006062 fragmentation reaction Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 229960002415 trichloroethylene Drugs 0.000 description 5
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 5
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- 238000004090 dissolution Methods 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/185—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL]
- H01S5/187—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL] using Bragg reflection
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
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CN201710045602.2A CN106711762B (zh) | 2017-01-20 | 2017-01-20 | 一种可调谐垂直腔面发射激光器的制备方法 |
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CN201710045602.2A CN106711762B (zh) | 2017-01-20 | 2017-01-20 | 一种可调谐垂直腔面发射激光器的制备方法 |
Publications (2)
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CN106711762A CN106711762A (zh) | 2017-05-24 |
CN106711762B true CN106711762B (zh) | 2019-08-09 |
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Families Citing this family (1)
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CN110829179A (zh) * | 2019-12-11 | 2020-02-21 | 长春中科长光时空光电技术有限公司 | 一种垂直腔面发射激光器及其制作方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101022208A (zh) * | 2006-02-15 | 2007-08-22 | 中国科学院半导体研究所 | 长波长垂直腔面发射激光器的结构和制作方法 |
CN101987930A (zh) * | 2009-07-30 | 2011-03-23 | 富士胶片株式会社 | 喷墨油墨组合物、油墨组和图像形成方法 |
CN202027563U (zh) * | 2011-01-28 | 2011-11-09 | 浙江大学 | 一种基于干涉光谱相位信息的光谱标定系统 |
CN102570301A (zh) * | 2010-12-30 | 2012-07-11 | 北京工业大学 | 双片集成可调谐垂直腔面发射激光器结构及制备方法 |
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2017
- 2017-01-20 CN CN201710045602.2A patent/CN106711762B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101022208A (zh) * | 2006-02-15 | 2007-08-22 | 中国科学院半导体研究所 | 长波长垂直腔面发射激光器的结构和制作方法 |
CN101987930A (zh) * | 2009-07-30 | 2011-03-23 | 富士胶片株式会社 | 喷墨油墨组合物、油墨组和图像形成方法 |
CN102570301A (zh) * | 2010-12-30 | 2012-07-11 | 北京工业大学 | 双片集成可调谐垂直腔面发射激光器结构及制备方法 |
CN202027563U (zh) * | 2011-01-28 | 2011-11-09 | 浙江大学 | 一种基于干涉光谱相位信息的光谱标定系统 |
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