CN106679608B

CN106679608B - Galvanometer motor deflects detection method in place and device in galvanometer scanning system

Info

Publication number: CN106679608B
Application number: CN201710107529.7A
Authority: CN
Inventors: 冯伟; 李言
Original assignee: Beijing Han Hua Global Science And Technology Development Co Ltd
Current assignee: Beijing Han Hua Global Science And Technology Development Co Ltd
Priority date: 2017-02-27
Filing date: 2017-02-27
Publication date: 2019-05-31
Anticipated expiration: 2037-02-27
Also published as: CN106679608A

Abstract

This application provides galvanometer motors in a kind of galvanometer scanning system to deflect detection method and device in place, wherein the detection method includes: after application controller sends motor deflection command to motor driver, galvanometer motor deflects into the inner loop control signal of level detecting apparatus motor in real time driver, wherein motor deflection command reflects the current motion state of galvanometer motor for controlling motor driver driving galvanometer motor deflection predetermined angle, inner loop control signal；Galvanometer motor deflects into level detecting apparatus and judges whether galvanometer motor deflects in place according to inner loop control signal, if galvanometer motor deflection is in place, galvanometer motor deflects into level detecting apparatus and sends feedback signal in place to application controller；Application controller sends switch control signal to laser according to feedback signal in place, starts or stops transmitting laser to control laser.The technical solution of the application can be improved the scanning speed of galvanometer scanning system.

Description

Galvanometer motor deflects detection method in place and device in galvanometer scanning system

Technical field

This application involves the inspection of galvanometer motor deflection in place in vibration mirror scanning field more particularly to a kind of galvanometer scanning system Survey method and apparatus.

Background technique

Galvanometer scanning system can deflect the scanning angle of laser, and the multiple spot of working region is etched or burnt to realize It burns；Based on above-mentioned characteristic, galvanometer scanning system is widely used in the fields such as industrial lasers mark and medical dot matrix treatment.It is logical Often, the scanning angle of laser is realized by the deflecting action of galvanometer motor.In galvanometer scanning system as shown in Figure 1, galvanometer electricity The rotor of machine 1 is fixedly connected with scanning mirror 11, will scanning before laser 2 emits laser by the rotation of galvanometer motor 1 Mirror 11 deflects into predetermined angular, so that laser can project workspace under the action of scanning mirror 11 with certain deflection angle In domain, to form the indentation of regular shape.

Known to the structure of galvanometer scanning system as shown in connection with fig. 1: in order to enable laser to throw with certain deflection angle It is mapped in working region, before laser emits laser, galvanometer motor needs to deflect predetermined angular.To realize above process, phase Ying Di, as shown in Fig. 2, the internal structure of closed loop galvanometer scanning system includes: galvanometer motor 1, laser 2,3 and of motor driver Application controller 4.The course of work of galvanometer scanning system is as follows: firstly, application controller 4 is generated and sent out to motor driver 3 Power transmission machine deflection command；Then, motor driver 3 is inclined according to motor by 31 sample motor angle of motor angle sampling module Turn instruction and the motor angle sampled, deflected based on closed loop control mode driving galvanometer motor 1, and then drives galvanometer motor 1 Deflect into predetermined position；Finally, when galvanometer motor 1 starts to deflect or deflect into predetermined position, the Xiang Jiguang again of application controller 4 Device 2 sends switch control signal and power control signal, to control the laser that laser 2 exports predetermined power.

The motor deflection command that application controller issues mainly includes two kinds of forms of step signal and continuous signal；The former is more Applied to lattice scanning mode, i.e., after galvanometer motor deflection in place, laser transmitting laser is scanned；The latter is applied to more Continuous scanning mode, i.e., during galvanometer motor deflects, laser transmitting laser is scanned.When motor deflection command is When step signal form, galvanometer motor is to the dynamic response of different amplitude step signals as shown in Figure 3 (assuming that motor angle senses Device export ratio: 1 volt/degree): t0 moment application controller sends the step signal of different amplitudes to motor driver；Work as step When the amplitude of signal is 1V, the time that galvanometer motor reaches stable state (i.e. galvanometer motor deflects in place) is t1；When step signal When amplitude is 2V, the time that galvanometer motor reaches stable state is t2；Time interval between two moment is Δ t, and Δ t ≠ 0.Work as electricity When machine deflection command is continuous signal form, galvanometer motor is as shown in Figure 4 to the dynamic response of continuous signal: although galvanometer motor By closed-loop control, motor rotational angle can accurately track motor deflection command, but galvanometer motor is to continuous signal form There are time lags for the response of motor deflection command.Application controller starts to send to motor driver and continuously refer at the t3 moment It enables, motor begins to respond to instruct at the t4 moment, and starts to control motor deflection according to instruction, and the lag time of galvanometer motor is Δ t₁, and Δ t₁≠0。

Due to prolonging from issuing continuous signal to galvanometer motor and beginning to respond to exist when motor deflection command is continuous signal When；When motor deflection command is step signal, reach stable state in the presence of delay from step signal to galvanometer motor is issued；Therefore exist During laser marking, in the case where that can not know whether motor deflects in place, application controller in lift pen, start to write and pen Laser opening and closing is controlled when picture jumps all there is delay；Similarly, during dot matrix is treated, application controller controls laser Opening and closing is also required to carry out jumping delay.Further, the presence of delay reduces the overall scan speed of galvanometer scanning system.

For the lift pen in continuous scanning mode and latency issue of starting to write, when usually delay is set as fixed in the prior art Between, however, the time that the different loads of the difference of motor performance and same motor institute band can respond motor dynamics causes shadow It rings, if unified delay longer time, will necessarily reduce the scanning speed of device；Therefore in use, different galvanometers are swept The lift delay value for retouching system is required to separately adjustable can be only achieved preferable effect, but answering which increase user's use device Miscellaneous degree.Latency issue is jumped in lattice scanning mode and continuous scanning mode, due to by galvanometer motor closed-loop control system The limitation of regiment commander's width and motor manufacturing technology, dynamic responding speed not to the utmost phase of the different motors to different amplitude step command signals Together, therefore in the prior art it is usually all step command signals being likely to occur under traversal applications scene, and finds step width It is worth maximum command signal.Longest needed for being tested by the command signal and obtaining galvanometer motor deflection in place stablizes delay, The longest, which is finally stablized delay as application controller, waits the fixation of galvanometer motor deflection in place to jump delay, then by applying Controller sends switch control signal to laser.Such method can guarantee can be partially when galvanometer motor responds the instruction of all steps Go to position.However, due to the waiting time for stablizing delay process all instructions signal using longest, such mode obviously drops The low scanning speed of system.

Apply for content

The purpose of the application is to provide a kind of technical solution of the detection of galvanometer motor deflection in place in galvanometer scanning system, Scanning speed to solve the problems, such as galvanometer scanning system in the prior art described in background technique is low.

In order to solve the above-mentioned technical problem, the application provides the following technical solutions:

According to a first aspect of the present application, the detection side of galvanometer motor deflection in place in a kind of galvanometer scanning system is provided Method, the galvanometer scanning system include that application controller, motor driver, galvanometer motor deflect into level detecting apparatus, galvanometer motor And laser；The detection method includes:

After application controller sends motor deflection command to motor driver, galvanometer motor deflects into level detecting apparatus reality When acquire the inner loop control signal of motor driver, wherein the motor deflection command is driven for controlling the motor driver Dynamic galvanometer motor deflects predetermined angle, and the inner loop control signal reflects the current operating conditions of the galvanometer motor；

The galvanometer motor deflects into level detecting apparatus and whether judges the galvanometer motor according to the inner loop control signal In place, if galvanometer motor deflection is in place, the galvanometer motor deflects into level detecting apparatus to the application control for deflection Device sends feedback signal in place, wherein the feedback signal in place is used to notify the galvanometer motor to the application controller Deflection is in place；

The application controller sends switch control signal to laser according to the feedback signal in place, described in control Laser starts or stops transmitting laser.

Preferably, the inner loop control signal characterize the galvanometer motor current yaw angle degree and the predetermined angle it Between misalignment angle；The galvanometer motor deflects into level detecting apparatus and judges the galvanometer motor according to the inner loop control signal Whether deflect in place, comprising:

The galvanometer motor deflects into level detecting apparatus, and to judge whether the absolute value of the misalignment angle is less than or equal to pre- If misalignment angle threshold value；

If the absolute value of the misalignment angle is less than or equal to the predetermined deviation angle threshold, the galvanometer motor is inclined It goes to level detecting apparatus and determines the galvanometer motor deflection in place, Xiang Suoshu application controller sends feedback signal in place.

Preferably, the motor deflection command is continuous signal, the method also includes:

The galvanometer motor deflects into level detecting apparatus and judges working as the galvanometer motor according to the inner loop control signal Whether preceding deflection angle changes；

If the current yaw angle degree of the galvanometer motor changes, the galvanometer motor deflect into level detecting apparatus to The application controller sends deflection feedback signal；

The application controller opens control signal to laser transmission according to the deflection feedback signal, wherein It is described open control signal for control the laser start emit laser.

Preferably, the motor deflection command is continuous signal, and the motor deflection command includes that motor deflection terminates to refer to It enables；The galvanometer motor deflects into level detecting apparatus and judges whether the galvanometer motor deflects into according to the inner loop control signal Position, comprising:

The galvanometer motor deflects into level detecting apparatus and whether judges the galvanometer motor according to the inner loop control signal Deflect into the specified continuous scanning end position of the motor deflection END instruction；

Determine that the galvanometer motor deflects into the continuous scanning and terminates when the galvanometer motor deflects into level detecting apparatus When position, the galvanometer motor deflects into level detecting apparatus and feeds back subsignal in place to application controller transmission first, In, described first feeds back subsignal for notifying the application controller controls the laser to stop transmitting laser in place.

Preferably, the motor deflection command is step signal, and the motor deflection command includes that motor deflection starting refers to It enables；The galvanometer motor deflects into level detecting apparatus and judges whether the galvanometer motor deflects according to the inner loop control signal number In place, comprising:

The galvanometer motor deflects into level detecting apparatus and whether judges the galvanometer motor according to the inner loop control signal Deflect into the specified continuous scanning initial position of the motor deflection initial order；

Determine that the galvanometer motor deflects into the continuous scanning starting when the galvanometer motor deflects into level detecting apparatus When position, the galvanometer motor deflects into level detecting apparatus and feeds back subsignal in place to application controller transmission second, In, described second feeds back subsignal for notifying the application controller to start to send continuous letter to the motor driver in place The motor deflection command of number form.

According to a second aspect of the present application, the detection of galvanometer motor deflection in place in a kind of galvanometer scanning system is additionally provided Device, wherein the galvanometer scanning system includes application controller, motor driver, galvanometer motor and laser, the detection Device includes:

Signal condition sampling module is used for after application controller sends motor deflection command to motor driver, in real time Acquire the inner loop control signal of motor driver, wherein the motor deflection command is for controlling the motor driver driving Galvanometer motor deflects predetermined angle, and the inner loop control signal reflects the current operating conditions of the galvanometer motor；

Judgment module in place, for judging whether the galvanometer motor deflects in place according to the inner loop control signal, if The galvanometer motor deflection in place, then sends feedback signal in place to the application controller, wherein the feedback signal in place For notifying the galvanometer motor deflection in place to the application controller；

The application controller is also used to send switch control signal to laser according to the feedback signal in place, with It controls the laser and starts or stops transmitting laser.

Preferably, the inner loop control signal characterize the galvanometer motor current yaw angle degree and the predetermined angle it Between misalignment angle；The judgment module in place, comprising:

Misalignment angle judging submodule, for judging whether the absolute value of the misalignment angle is less than or equal to predetermined deviation Angle threshold；

Feedback signal sending submodule in place, if the absolute value for the misalignment angle is less than or equal to described preset partially When poor angle threshold, the galvanometer motor deflection is determined in place, Xiang Suoshu application controller sends feedback signal in place, otherwise, Signal in place will be sent not to application controller.

Preferably, the motor deflection command is continuous signal, described device further include:

Deflection angle changes judgment module, for judging the current inclined of the galvanometer motor according to the inner loop control signal Whether gyration changes；

Deflection feedback signal sending module, if the current yaw angle degree for the galvanometer motor changes, to institute It states application controller and sends deflection feedback signal；

The application controller is also used to open control letter to laser transmission according to the deflection feedback signal Number, wherein it is described open control signal for control the laser start emit laser.

Preferably, the motor deflection command is continuous signal, and the motor deflection command includes that motor deflection terminates to refer to It enables；The judgment module in place, comprising:

Continuous scanning end position judging submodule, for judging that the galvanometer motor is according to the inner loop control signal It is no to deflect into the specified continuous scanning end position of the motor deflection END instruction；

First feeds back subsignal sending submodule in place, for deflecting into the continuous scanning when the determining galvanometer motor When end position, Xiang Suoshu application controller sends first and feeds back subsignal in place, wherein described first feeds back subsignal in place For notifying the application controller controls the laser to stop transmitting laser.

Preferably, the motor deflection command is step signal, and the motor deflection command includes that motor deflection starting refers to It enables；The judgment module in place, comprising:

Continuous scanning initial position judging submodule, for judging that the galvanometer motor is according to the inner loop control signal It is no to deflect into the specified continuous scanning initial position of the motor deflection initial order；

Second feeds back subsignal sending submodule in place, for if it is determined that the galvanometer motor deflects into the continuous scanning When initial position, the galvanometer motor deflects into level detecting apparatus, and to application controller transmission second, feedback is believed in place Number, wherein described second feeds back subsignal for notifying the application controller to start to send to the motor driver in place The motor deflection command of continuous signal form.

The detection scheme of galvanometer motor deflection in place in galvanometer scanning system provided by the present application, has following technology effect Fruit:

The detection scheme of galvanometer motor deflection in place, can adopt in real time in galvanometer scanning system provided by the embodiments of the present application The inner loop control signal for collecting motor driver, since the signal is able to reflect the operating status of galvanometer motor, interior according to this Ring control signal can accurate judgement galvanometer motor whether deflect in place, when determine galvanometer motor deflection in place when, application control Device sends switch control signal to laser according to feedback signal in place, so that controlling laser starts or stops reflection laser. The technical solution of the application, the deflection arrival time of galvanometer motor can be accurately detected by inner loop control signal, and then is passed through What this was accurately detected sends the time of motor deflection command in place to galvanometer motor deflection slave application controller, shortens application control Device control laser starts or stops the waiting delay of transmitting laser, improves the scanning speed of galvanometer scanning system.

Detailed description of the invention

In order to more clearly explain the technical solutions in the embodiments of the present application, make required in being described below to embodiment Attached drawing is briefly described, it should be apparent that, for those of ordinary skills, do not making the creative labor Under the premise of property, it can also be obtained according to these attached drawings other attached drawings.

Fig. 1 is a kind of structural schematic diagram of galvanometer scanning system shown in the prior art；

Fig. 2 is a kind of schematic diagram of internal structure of galvanometer scanning system shown in embodiment illustrated in fig. 1；

Fig. 3 is a kind of dynamic response schematic diagram of galvanometer motor to different amplitude step signals；

Fig. 4 is a kind of dynamic response schematic diagram of galvanometer motor to continuous signal；

Fig. 5 is the structural schematic diagram of the first galvanometer scanning system shown in one exemplary embodiment of the application；

Fig. 6 is the structural schematic diagram of second of galvanometer scanning system shown in one exemplary embodiment of the application；

Fig. 7 is the structural schematic diagram of the third galvanometer scanning system shown in one exemplary embodiment of the application；

Fig. 8 is the structural schematic diagram of the 4th kind of galvanometer scanning system shown in one exemplary embodiment of the application；

Fig. 9 is the structural schematic diagram of the 5th kind of galvanometer scanning system shown in one exemplary embodiment of the application；

Figure 10 is the instruction of motor deflection command during a kind of laser marking shown in one exemplary embodiment of the application The time variation diagram of amplitude and motor deflection angle；

Figure 11, which is that a kind of feedback signal in place shown in one exemplary embodiment of the application is corresponding with motor deflection command, to close The flow diagram of system；

Figure 12 is that galvanometer motor deviation is in place in the first galvanometer scanning system shown in one exemplary embodiment of the application Detection method flow diagram；

Figure 13 is that galvanometer motor deflection is in place in second of galvanometer scanning system shown in one exemplary embodiment of the application Detection method flow diagram；

Figure 14 is that galvanometer motor deflection is in place in the third galvanometer scanning system shown in one exemplary embodiment of the application Detection method flow diagram；

Figure 15 is that galvanometer motor deflection is in place in the 4th kind of galvanometer scanning system shown in one exemplary embodiment of the application Detection method flow diagram.

Specific embodiment

The technical solution of the detection of galvanometer motor deflection in place, solves in galvanometer scanning system provided by the embodiments of the present application The low problem of the scanning speed of galvanometer scanning system in the prior art described in background technique.

In order to make those skilled in the art more fully understand the technical solution in the embodiment of the present application, and keep the application real The above objects, features, and advantages for applying example can be more obvious and easy to understand, with reference to the accompanying drawing to the technology in the embodiment of the present application Scheme is described in further detail.

Attached drawing 5 is please referred to, Fig. 5 is a kind of structural representation of galvanometer scanning system shown in one exemplary embodiment of the application Figure.As shown in figure 5, galvanometer scanning system provided by the embodiments of the present application includes:

Galvanometer motor 1 and laser 2, motor driver 3, application controller 4 and galvanometer motor deflect into level detecting apparatus 5.Application controller 4 is electrically connected with laser 2 and motor driver 3 respectively, and motor driver 3 is also electrically connected with galvanometer motor 1. Galvanometer motor deflects into level detecting apparatus 5 and is electrically connected respectively with motor driver 3 and application controller 4, for being driven according to motor The inner loop control signal that dynamic device 3 returns sends feedback signal in place to application controller 4, so that application controller 4 controls laser Device 2 starts or stops transmitting laser.

Application controller 4 includes application control module 41, positioning instruction computing module 42,43 and of positioning instruction generation module Laser control module 44；The concrete function of the modules of application controller 4 is as follows:

Application control module 41: using feedback signal in place, control signal and output control signal are calculated to galvanometer motor 1 Deflection positioning and the output of laser 2 carry out coordinated control；Positioning instruction computing module 42: it receives application control module 41 and exports Calculating control signal, according to the actual demand of application scenarios generate galvanometer motor 1 needed for deflection angle；Positioning instruction generates Module 43: the coordinate or angle that positioning instruction computing module 42 is exported, be converted into motor driver 3 can received motor it is inclined Turn instruction, which can be analog signal form and digital signal form；Laser control module 44: according to answering The output control signal issued with control module 41 passes through function to 2 transmitting power control signal of laser and switch control signal Rate controls signal and switch control signal control laser 2 with specified power and the work of specified laser output time.

Motor driver 3 includes: position ring control module 31, current loop control module 32 and power amplifier module 33 etc. Structure, the motor deflection command that application controller issues successively are passed through at the signal of above-mentioned module and related closed loop control module Reason, final output control galvanometer motor 1 and deflect to galvanometer motor 1.

In addition, the galvanometer scanning system that embodiment illustrated in fig. 5 provides, the basis of existing galvanometer scanning system shown in Fig. 2 On improve, be added to be driven by motor device 3 to application controller 4 feed back its working condition signal path, i.e., galvanometer electricity Machine deflects into level detecting apparatus 5.Galvanometer scanning system provided in this embodiment realizes application controller 4 and motor driver 3 Closed-loop control, change existing galvanometer scanning system only exist from application controller 4 to motor driver 3 send motor deflection The single direction control structure of instruction.Galvanometer motor added by the embodiment of the present application deflects into level detecting apparatus 5 by electricity The real-time acquisition and judgement of machine operating status, generate motor feedback signal in place, and so that the application controller 4 on upper layer is utilized should Indication signal realizes the optimal coordinated control to galvanometer motor 1 and laser 2 in place, and then can thoroughly eliminate system and wait The additional delay of motor deflection in place, effectively improves the scanning speed of system；Simultaneously according to motor feedback signal in place, continuous The stroke end time can also be accurately determined when scanning, the complexity for reducing galvanometer scanning system debugging and using.

The structure that galvanometer motor deflects into level detecting apparatus refers to attached drawing 5, as shown in figure 5, in the galvanometer scanning system Galvanometer motor deflects into level detecting apparatus 5

Signal condition sampling module 51 is used for after application controller 4 sends motor deflection command to motor driver 3, The inner loop control signal of motor in real time driver 3, wherein motor deflection command is for controlling the driving vibration of motor driver 3 Mirror motor 1 deflects predetermined angle, and inner loop control signal reflects the current operating conditions of galvanometer motor 1.Signal condition sampling module After the inner loop control signal of 51 acquisition motor drivers 3, additionally it is possible to be improved the inner loop control signal, be smoothed to and sentence in place The disconnected acceptable form of module 52.In addition, specifically, signal condition sampling module 51 can drive in application controller 4 to motor When dynamic device 3 sends motor deflection command, the inner loop control signal of motor in real time driver 3 immediately.

Inner loop control signal is the signal that motor driver 3 generates, and is able to reflect the current operating conditions of galvanometer motor 1, Such as the misalignment angle for the deflection predetermined angle specified in the current yaw angle degree of galvanometer motor 1 and motor deflection command.Usually electricity Machine driver 3 uses closed-loop control, and by position ring control module 31, current loop control module 32 and power amplifier module 33 The signal processing of equal various structures, the inner loop control signal that can be generated includes that position loop error signal and motor angle are adopted The signal of the diversified forms such as sample signal.

As shown in connection with fig. 5 in embodiment motor driver 3 structure it is found that motor driver 3 include: position ring control mould Block 31, current loop control module 32, power amplifier module 33, motor angle sampling module 34 and coil current sampling module 35 Etc. multiple modules.For motor driver 3 after receiving motor deflection command, the deflection for including according to motor deflection command first is default Angle, θ_refObtained motor angle sampled signal θ is sampled with motor angle sampling module 34_rotator, position loop is calculated Error signal θ_err；Then position ring control module 31 passes through position loop error signal θ_err, to current loop control module 32 Output position ring control module output signal I_ref；Further according to position ring control module output signal I_ref, adopted through coil current The coil current sampling module output signal I that the sampling of egf block 35 and 36 integral operation of approximate integration module obtain_coil, Yi Ji electricity Machine angular samples module 34 samples the sampled signal angular speed for obtaining and differentiating by approximate differential module 37 ω_rotator, current loop error signal I is calculated_err；Current loop control module 32 is according to the current loop error signal I_err, export current loop control module output signal u_con；Secondly, power amplifier module 33 is exported according to the current loop control module Signal u_con, power amplifier module output signal u is calculated_out；Finally, power amplifier module 33 is defeated by the power amplifier module Signal u out_outIt is input to the coil current input terminal of galvanometer motor 1, control galvanometer motor 1 itself deflection.Further, galvanometer electricity Machine 1 exports its deflection angle signal from angle signal output end.

To sum up, inner loop control signal can include: position loop error signal θ_err, current loop error signal I_err, motor Angular samples signal θ_rotator, position ring control module output signal I_ref, coil current sampling module output signal I_coil, electric current Ring control module output signal u_conAnd power amplifier module output signal u_outAny one or more of combination.

It further includes judgment module 52 in place that galvanometer motor, which deflects into level detecting apparatus 5, for being sentenced according to inner loop control signal Whether disconnected galvanometer motor 1 deflects in place, if the deflection of galvanometer motor 1 is in place, sends feedback signal in place to application controller 4, Wherein, feedback signal is used to notify the deflection of galvanometer motor 1 in place to application controller 4 in place.

It, can according to inner loop control signal due to the current operating conditions of inner loop control signal reflection galvanometer motor 1 Whether accurate judgement galvanometer motor 1 deflects into the position of the preset deflection angle degree of motor deflection command defined.When galvanometer motor 1 Deflection in place when, send feedback signal in place to application controller 4, application controller 4 can according to this in place feedback signal and When to 2 output switch control signal of laser, to control the opening and closing of laser 2 in time, and then accurately control from application control Device 4 sends the time that motor deflection command starts or stops transmitting laser to laser 2, and can be avoided unknown galvanometer motor 1 is In the case where no deflection in place, the low problem of scan efficiency caused by delay opening and closing laser 2 improves galvanometer scanning system Scanning speed.

Embodiment as one preferred, the inner loop control signal that signal condition sampling module 51 acquires can characterize galvanometer Misalignment angle between the current yaw angle degree and predetermined angle of motor；The current yaw angle degree and predetermined angle of the galvanometer motor Between misalignment angle be above-mentioned position loop error signal θ_err.As shown in fig. 6, the judgment module in place in the present embodiment 52 include:

Whether misalignment angle judging submodule 5201, the absolute value for judgment bias angle are less than or equal to predetermined deviation Angle threshold；If the absolute value of misalignment angle is less than or equal to predetermined deviation angle threshold, feedback signal hair in place is executed Send the content of submodule 5202；If the absolute value of misalignment angle is greater than predetermined deviation angle threshold, sent out to application controller 4 It send and feedback signal or does not execute any operation in place.

The exhausted angle value of misalignment angle between the current yaw angle degree and predetermined angle of galvanometer motor is equal to 0 degree or close to 0 When spending, illustrate the deflection of galvanometer motor 1 in place, however, due to the presence of sampling error and interference signal, even if in galvanometer motor 1 The closed-loop control system in portion reaches stable state, and the misalignment angle between current yaw angle degree and predetermined angle is also difficult to exactly equal to 0 Degree can be only maintained near 0 degree in a lesser neighborhood, therefore predetermined deviation angle threshold can be set as the side in the neighborhood Dividing value, such as 0.1 degree or 0.3 degree.In addition, the feedback signal Out in place that misalignment angle judging submodule 5201 exports, represents vibration The state in place of mirror motor 1；When defining Out signal output 1, galvanometer motor 1 is deflected in place；When OUT signal output is 0, generation Table galvanometer motor 1 is non deflected in place.To sum up, the data formula of the judgment basis of misalignment angle judging submodule 5201 is as follows:

Wherein, Out represents feedback signal in place, θ_errRepresent position loop error letter Number, that is, characterize the misalignment angle between the current yaw angle degree and predetermined angle of galvanometer motor 1, θ_threholdRepresent predetermined deviation angle Spend threshold value.

Feedback signal sending submodule 5202 in place determines the deflection of galvanometer motor 1 in place, is sent to application controller 4 Position feedback signal.

The content of embodiment is it is found that as a kind of optional embodiment as shown in connection with fig. 6, and feedback signal sends submodule in place Block 5202 sends feedback signal in place to the application control module 41 of application controller 4, such as sends the feedback letter in place of Out=1 Number so that application control module 41 according to this in place feedback signal control laser control module 44 to laser 2 transmission open control Signal processed, so that laser 2 emits the laser signal of certain power.

By determining that the absolute value of misalignment angle is less than or equal to predetermined deviation angle in misalignment angle judging submodule 5201 When spending threshold value, send feedback signal in place to application controller 4, can be issued according to the slave motor deflection command accurately measured to The start and stop that the time of the deflection of galvanometer motor 1 in place accurately controls laser 2 can contract compared to the scheme in background technique It is short to send motor deflection command to the waiting delay of control 2 start and stop of laser of application controller 4 from application controller 4, improve vibration The scanning speed of mirror motor 1.

In addition, as described above, since inner loop control signal includes: position loop error signal θ_err, current loop error Signal I_err, motor angle sampled signal θ_rotator, position ring control module output signal I_ref, coil current sampling module output Signal I_coil, current loop control module output signal u_conAnd power amplifier module output signal u_outAny one of equal signals Or therefore several combinations by Theory of Automatic Control and related mathematical definition, can obtain each inner ring control as shown in Table 1 Signal processed is corresponding to judge whether galvanometer motor 1 deflects the standard for (entering stable state) in place:

Table 1 is loop stability judgment variable and standard

	Inner loop control signal	Deflect criterion in place
			1	Position loop error signal θ_ref	\|θ_ref\| < θ_threholdOr \| d θ_ref/ dt \| < θ_threhold
2	Current loop error signal I_err	\|I_err\| < I_threholdOr \| dI_err/ dt \| < I_threhold
			3	Motor angle sampled signal θ_rotator	\|dθ_rotator\| dt \| < θ_threhold
4	Position ring control module output signal I_ref	\|I_ref\| < I_threholdOr \| dI_ref/ dt \| < I_threhold
			5	Coil current sampling module output signal I_coil	\|I_coil\| < I_threholdOr \| dI_coil/ dt \| < I_threhold
6	Current loop control module output signal u_con	\|u_con\| < u_threholdOr \| du_con/ dt \| < u_threhold
			7	Power amplifier module output signal u_out	\|u_out\| < u_threholdOr \| du_ou/_tDt \| < u_threhold

Wherein, this table only lists representational inner loop control signal, other loops in practical galvanometer motor scanning system In variable also can be used as motor deflection judgment variable in place；Determine in place in addition, this table only lists representational deflection The mathematical equivalent variable of standard, each standard also can be used as criterion, similarly, due to depositing for sampling error and interference signal , each inner loop control signal or its derivative are difficult to exactly equal to 0, it can only be maintained near 0 degree in a lesser neighborhood, because This, the corresponding judgment threshold of specific criterion can be set as the boundary value of the neighborhood.

Application controller 4 is also used to send switch control signal to laser 2 according to feedback signal in place, be swashed with controlling Light device 2 starts or stops transmitting laser.

Galvanometer motor deflects into level detecting apparatus in galvanometer scanning system provided by the embodiments of the present application, can acquire in real time The inner loop control signal of motor driver 3, since the signal is able to reflect the operating status of galvanometer motor 1, interior according to this Ring control signal can accurate judgement galvanometer motor whether deflect in place, when determine galvanometer motor 1 deflection in place when, application control Device 4 sends switch control signal to laser 2 according to feedback signal in place, swashs to control laser 2 and start or stop reflection Light.Technical solution provided by the embodiments of the present application can accurately detect the deflection of galvanometer motor 1 in place by inner loop control signal Time, so by this accurately detect slave application controller 4 send motor deflection command to galvanometer motor 1 deflection in place when Between, shorten application controller 4 and control the waiting delay that laser 2 starts or stops transmitting laser, improves galvanometer scanning system Scanning speed.

In addition, according to background technique: if motor deflection command is continuous signal, galvanometer scanning system is in continuous scanning There is lift pen delay in the process, i.e., at the end of this continuous scanning, due to that can not determine the time of the deflection of galvanometer motor 1 in place, Therefore motor deflection END instruction to laser 2 is issued from application controller 4 stop there is delay between transmitting laser.Existing skill The time of the deflection of galvanometer motor 1 in place is determined due to being difficult in art, generallys use the fixed mode control for extending the predetermined time Laser processed stops transmitting laser, and such mode reduces the scan efficiency of galvanometer scanning system.

To solve the above-mentioned problems to improve the scan efficiency of galvanometer scanning system, as a kind of optional embodiment, when Motor deflection command is continuous signal, and motor deflection command includes motor deflection END instruction.As shown in fig. 7, implementing shown in Fig. 5 The judgment module in place 52 that example provides further includes with lower module:

Continuous scanning end position judging submodule 5203, for whether judging galvanometer motor 1 according to inner loop control signal Deflect into the specified continuous scanning end position of motor deflection END instruction.

Motor deflection END instruction include during this continuous scanning the continuous scanning to be deflected into of galvanometer motor 1 terminate Position.Since after application controller 4 sends motor deflection END instruction to motor driver 3, galvanometer motor is deflected in place The inner loop control signal of 5 motor in real time driver 3 of detection device, inner loop control signal are able to reflect working as galvanometer motor 1 Preceding operating status, therefore continuous scanning end position judging submodule 5203 can accurately judge to shake according to the inner loop control signal Whether mirror motor 1 deflects into the specified continuous scanning end position of motor deflection END instruction, further accurate to control from sending Motor deflects the delay that END instruction stops transmitting laser to laser 2, improves the scanning speed of galvanometer scanning system.

First feeds back subsignal sending submodule 5204 in place, for deflecting into continuous scanning knot when determining galvanometer motor 1 When beam position, first is sent to application controller 4 and feeds back subsignal in place, wherein first feeds back subsignal for notifying in place Application controller 4 controls laser 2 and stops transmitting laser.

Continuous scanning end position judging submodule 5203 can accurately determine that galvanometer motor 1 is inclined according to inner loop control signal The time of continuous scanning end position is gone to, is controlled at this point, feeding back subsignal sending submodule 5204 in place by first to application Device 4 processed sends first and feeds back subsignal in place, can be according to exactly determined from motor deflection END instruction is issued to galvanometer electricity The time of the deflection of machine 1 in place timely and accurately controls the time that laser 2 stops transmitting laser, and then improves vibration mirror scanning system The scanning speed of system.

According to background technique: galvanometer scanning system is durings laser marking etc., if jumping to mesh from original position point Cursor position point starts to carry out stroke sculpting operation, then the motor deflection command that application controller 4 issues in the process is rank Jump signal；The process, which exists, jumps delay, i.e. galvanometer motor 1 is since original position point, using control when jumping to source location Device 4 processed, which is begun to send out, has delay between the motor deflection command of continuous signal form.In the prior art due to being difficult to determine vibration Mirror motor 1 jumps to the time of source location, therefore the mode for generalling use the extension predetermined time controls application controller 4 and opens The time for sending the motor deflection command of continuous signal form is originated, it reduce the scan efficiencies of galvanometer scanning system.

To solve the above-mentioned problems, the problem of improving the scan efficiency of galvanometer scanning system, as a kind of optional implementation Example, galvanometer scanning system needs jump to source location from original position point and are scanned, the electricity that application controller 4 issues at this time Machine deflection command is step signal, and motor deflection command includes motor deflection initial order.As shown in figure 8, embodiment illustrated in fig. 5 Judgment module 52 in place provided, further includes:

Continuous scanning initial position judging submodule 5205, for whether judging galvanometer motor 1 according to inner loop control signal Deflect into the specified continuous scanning initial position of motor deflection initial order.

It is step signal form that motor, which deflects initial order, for notifying electric machine controller 3 controls galvanometer motor 1 to start partially Turn, and motor deflection initial order specifies the continuous scanning initial position in need jumped to.In application controller 4 to electricity After machine driver 3 sends motor deflection initial order, reflection can be acquired in real time since galvanometer motor deflects into level detecting apparatus 5 The inner loop control signal of the current operating conditions of galvanometer motor 1, therefore continuous scanning initial position judging submodule 5205 can Accurately determine that galvanometer motor 1 deflects into the time of continuous scanning initial position from original position point according to the inner loop control signal, from And further increase the scanning speed of galvanometer scanning system.

Second feeds back subsignal sending submodule 5206 in place, for if it is determined that galvanometer motor 1 deflects into continuous scanning When beginning position, second is sent to application controller 4 and feeds back subsignal in place, wherein second feeds back subsignal for notifying in place Application controller 4 starts the motor deflection command that continuous signal form is sent to motor driver 3.

Subsignal sending submodule 5206 is fed back in place by second deflects into continuous scanning initial position in galvanometer motor 1 When sent to application controller 4 and second feed back subsignal in place, target position can be deflected into according to the galvanometer motor 1 accurately detected The time set a little feeds back subsignal to the transmission of application controller 4 second in place, to timely and accurately control application controller 4 At the beginning of the motor deflection command for sending continuous signal form to motor driver 3, and then improve galvanometer scanning system Scan efficiency.

In addition, according to background technique: if motor deflection command is continuous signal, galvanometer scanning system is in continuous scanning Exist in the process and start to write delay, i.e., begins to send out the motor deflection command of continuous signal form, electric to galvanometer from application controller 4 Laser 2 starts to emit existing delay between laser after the current yaw angle degree of machine 1 changes.However, due to existing skill It is difficult to determine the time that variation takes place in the current yaw angle degree of galvanometer motor 1 in art, therefore the prior art generallys use and prolongs The mode of long predetermined time, it reduce the scanning speeds of galvanometer scanning system.

To solve the above-mentioned problems to improve the scanning speed of galvanometer scanning system, as shown in figure 9, as one preferred Embodiment, the motor deflection command that galvanometer scanning system is issued in continuously engraving stroke is continuous signal, the motor deflection To level detecting apparatus 5 further include:

Deflection angle changes judgment module 53, which changes 51 electricity of judgment module 53 and signal condition sampling module Connection, for judging whether the current yaw angle degree of the galvanometer motor 1 changes according to inner loop control signal.Such as: root Whether it is greater than or waits according to the change rate of 1 deflection angle of galvanometer motor of the motor angle sampled signal reflection in inner loop control signal In default change rate threshold value, judge whether the current yaw angle degree of galvanometer motor 1 changes.

When motor deflection command is continuous signal, since application controller 4 issues motor deflection command to galvanometer motor 1 Laser 2, which starts to emit, after deflection has delay between laser.Start to send continuously to motor driver 3 in application controller 4 After the motor deflection command of signal form, signal condition sampling module 51 is capable of the inner loop control of motor in real time driver 3 Signal, since the inner loop control signal is able to reflect the current operating conditions of galvanometer motor 1, deflection angle variation judges mould Block 53 can accurately determine that the time of variation takes place in the current yaw angle degree of galvanometer motor 1 according to the inner loop control signal.

Deflection feedback signal sending module 54, if the current yaw angle degree for galvanometer motor 1 changes, Xiang Yingyong Controller 4 sends deflection feedback signal.

The application controller 4 is also used to open control signal to the transmission of laser 2 according to deflection feedback signal, wherein This is opened control signal and starts to emit laser for controlling laser 2.

By sending deflection feedback signal to application controller 4 when the current yaw angle degree of galvanometer motor 1 changes, It can be opened according to what is accurately detected from the deflection angle of the motor deflection command to the galvanometer motor 1 that begin to send out continuous signal form Begin the time changed, accurately and in time notifies application controller 4 to open control signal to the transmission of laser 2, and then can contract Since the short waiting delay for emitting laser beginning to send out motor deflection command to laser, improve the scanning of galvanometer scanning system Speed.

Embodiment as one preferred, Figure 10 are the motor during a kind of laser marking provided by the embodiments of the present application The instruction amplitude of deflection command and the time variation diagram of motor deflection angle.In conjunction with shown in Fig. 5 and Figure 10, in laser marking process In, the work characteristics of galvanometer scanning system is that the motor deflection command that application controller 4 is sent to motor driver 3 is continuous letter Combination number with step signal；Wherein, continuous signal carves stroke for controlling galvanometer motor 1, and step signal is used for Control galvanometer motor 1 is jumped between stroke.During continuous scanning, application controller 4 controls laser 2 and exports It when laser and is not to wait for the deflection of galvanometer motor 1 in place, but keeps the continuous output pulse width of laser 2 shorter and the higher pulse of frequency Laser, therefore be cauterized surface mark point in object and can form continuous etching trace as motor rotates, and then realize to font And the High speed sculpture of the shapes such as pattern.It is originated assuming that any moment in 0-T0 of galvanometer motor 1 has been rotated by the first stroke Position, the process at each moment is as follows in Figure 10:

0-T0: galvanometer motor 1 has turned to the first stroke initial position, and application controller 4 is sent to motor driver 3 to be connected The motor deflection command of continuous signal form, galvanometer motor deflect into the inner ring control of 5 motor in real time driver 3 of level detecting apparatus Signal processed, at this point, 1 zero deflection of galvanometer motor, and laser 2 does not have output laser pulse.

T0: motor driver 3 controls galvanometer motor 1 and starts continuous deflection, and galvanometer motor deflects into level detecting apparatus 5 and determines Variation takes place in the current yaw angle degree of galvanometer motor, sends deflection feedback signal, application controller 4 to application controller 3 Start to control the output high-frequency laser pluses of laser 2.

T0-T1: the continuous continuous deflection of galvanometer motor 1, while laser 2 sends high-frequency laser pluses, carries out the first stroke Engraving.

T1: the motor that application controller 4 starts to send the first stroke to motor driver 3 deflects END instruction, and motor drives Dynamic device 3 controls galvanometer motor 1 and stops deflection.

T1-T2: deflecting into the time of continuous scanning end position from sending motor deflection END instruction to galvanometer motor 1, Galvanometer motor 1 is waited to rotate in place, at this time since motor deflection END instruction is that continuous signal has delay, laser 2 There is still a need for output high-frequency laser pluses, it otherwise will appear disconnected phenomenon, and galvanometer motor deflects into level detecting apparatus 5 and connects in real time It receives and detects inner loop control signal.

T2: galvanometer motor deflects into level detecting apparatus 5 and determines that galvanometer motor 1 has deflected into continuous scanning end position, First is sent to application controller 4 and feeds back subsignal in place, and application controller 4 closes laser 2；And application controller 4 is opened The motor for beginning to send step signal form to motor driver 3 deflects initial order, so that galvanometer motor 1 jumps to the second stroke Initial position.

T2-T3: galvanometer motor 1 carries out the time of skip operation, and motor driver 3 controls galvanometer motor 1 to the second stroke Initial position gradually deflect, laser 2 is in close state at this time, galvanometer motor deflect into level detecting apparatus 5 in real time acquire Inner loop control signal.

T3: galvanometer motor deflects into level detecting apparatus 5 and determines that galvanometer motor 1 has deflected into second according to inner loop control signal The initial position of stroke, at this time galvanometer motor deflect into level detecting apparatus 5 to application controller 4 send second in place feedback son letter Number, the motor that notice application controller 4 starts to send the second stroke to motor driver 3 deflects initial order, motor deflection Initial order is continuous signal form.

T3-T4: since the motor deflection initial order that galvanometer motor 1 responds the second stroke has lag, time period is The time deflected since motor driver 3 issues motor deflection initial order to galvanometer motor 1, time period laser 2 is still It so remains off, otherwise appearing in the second stroke section start will appear laser energy accumulative effect；And galvanometer motor Level detecting apparatus 5 is deflected into obtain in real time and detect inner loop control signal.

T4: galvanometer motor deflects into level detecting apparatus 5 and determines that variation takes place in the current yaw angle degree of galvanometer motor 1, And deflection feedback signal is sent to application controller 4, application controller 4 emits according to the deflection feedback signal to laser 2 Control signal is opened, laser 2 starts to emit laser the second stroke engraving of progress.

The engraving time of T4-T5: the second stroke, application controller 4 controls 1 continuous deflection of galvanometer motor in time period, Laser 2 continuously exports high-frequency laser pluses, carries out the engraving of the second stroke；It is real-time that galvanometer motor deflects into level detecting apparatus 5 Receive and detect the inner loop control signal of the transmission of motor driver 3.

T5: application controller 4 deflects END instruction to the motor that motor driver 3 sends the second stroke, and galvanometer motor is inclined It goes to 5 real-time reception of level detecting apparatus and detects the inner loop control signal of the transmission of motor driver 3.

T5-T6: since motor deflection END instruction is continuous signal, time period is to issue from application controller 4 Motor deflects the time of END instruction in place to the deflection of galvanometer motor 1；There is still a need for output high frequencies to swash in this period for laser 2 Otherwise light pulse will appear disconnected phenomenon；And in this period, galvanometer motor deflects into 5 real-time reception of level detecting apparatus and examines The inner loop control signal that measured motor driver 3 is sent.

T6: galvanometer motor deflects into level detecting apparatus 5 and determines that galvanometer motor 1 has deflected into the end of scan position of the second stroke It sets, and galvanometer motor deflects into level detecting apparatus 5 and feeds back subsignal, application control in place to the transmission of application controller 4 first Device 4 closes laser 2, and the second stroke engraving terminates.

In addition, galvanometer motor 1 need to deflect in place, and application controller 4 can just control laser 2 in lattice scanning mode Start to emit laser.In lattice scanning mode, the motor deflection command that application controller 4 is sent to motor driver 3 is step Signal, and as shown in figure 11, galvanometer motor 1 to the response of the motor deflection command of the step signal form be divided into transient response and Two stages of steady-state response.The curve for such as instructing B is galvanometer motor 1 from moment to the time opened between laser moment B that sends instructions To the transient response time of instruction B；The response of B is instructed to enter the steady-state response stage when 1 pair of galvanometer motor, i.e., when laser is opened in arrival After carving B, laser 2 could export laser.Specifically, when a new motor deflection command signal occurs, position ring control Module 31 is to θ_refWith motor angle feedback signal theta_rotatorError theta_errIt is calculated, obtains the reference of current loop control module Signal I_ref；Current loop control module is according to the output I of coil current sampling module_coilWith I_refError I_errIt is calculated, is obtained To driving signal u_con, then pass through power amplifier module for u_conIt amplifies, generates driving signal u_out, driving galvanometer motor 1 into Horizontal deflection, this process belong to the transient response of electric system.As the time increases, by the effect of closed-loop control, motor turns The error of dynamic angle and command signal gradually decreases and tends to 0, and electric current loop error signal I_errAlso tend to 0, system progresses into In place to steady-state response stage, i.e. motor deflection.

In the prior art because being difficult to accurately determine that system enters the time in steady-state response stage, therefore frequently with described in background Longest stablize delay pattern, extend some time after can control laser unlatching, reduce system in lattice scanning mistake The scanning speed of journey.In order to solve this problem, as shown in figure 11, the galvanometer electricity of galvanometer scanning system provided by the embodiments of the present application Machine deflects into level detecting apparatus, comprising the following steps: firstly, application controller 4 calculate anchor point coordinate position, generate and to The output of motor driver 3 includes the motor deflection command of the anchor point coordinate position.Then, motor driver 3 is according to the motor Deflection command generates inner loop control signal, and the deflection of galvanometer motor 1 is controlled by way of closed-loop control.Galvanometer motor deflects in place 5 real-time reception of the detection device inner loop control signal simultaneously judges whether galvanometer scanning system reaches according to the inner loop control signal Stable state；When determining that galvanometer scanning system reaches stable state, galvanometer motor deflects into level detecting apparatus 5 and sends to application controller 4 Feedback signal in place；Application controller 4, which receives this laser 2 is immediately controlled after feedback signal in place, to be started to emit laser.Swash Light device 2 emits laser to etch the anchor point, and application controller 4 controls laser 2 again after Laser emission predetermined hold-time Stop transmitting laser.At this point, application controller 4 calculates the coordinate position of new anchor point again, above-mentioned steps are repeated, until All anchor point etchings finish.

During lattice scanning, galvanometer motor deflects into the inner ring of 5 real-time detection motor driver 3 of level detecting apparatus Signal is controlled, such as position loop error signal θ_err；It can accurately determine whether galvanometer motor 1 reaches stable state.And in galvanometer electricity When machine 1 reaches stable state, above-mentioned galvanometer motor, which deflects into level detecting apparatus 5, to send feedback letter in place to application controller in time Number, so that application controller 4 controls laser 2 and starts to emit laser.As shown in figure 11, the motor deflection command pair of different amplitudes The time that the galvanometer motor 1 answered reaches stable state is different；The time that the response instruction of galvanometer motor 1 A reaches stable state is longer than response instruction B Reach the time of stable state.Equally, galvanometer motor deflect into level detecting apparatus 5 sent when galvanometer motor 1 reaches stable state it is anti-in place The time of feedback signal is not also identical, is later than hair as galvanometer motor deflects into level detecting apparatus 5 and sends time of feedback signal A in place It is sent to the time of feedback signal B.In the embodiment of the present application, in place feedback signal can real-time tracking inner loop control signal, energy The enough accurate time for determining galvanometer motor 1 and reaching stable state；When galvanometer motor 1 reaches stable state, galvanometer motor deflection detects in place Device 5 is immediately transmitted to a feedback signal, to open laser 2 in time, compared to the electricity described in background using amplitude maximum The corresponding galvanometer motor of machine deflection command reaches scheme of the steady state time as the laser start-stop time, the galvanometer electricity in the application Machine deflect into level detecting apparatus 5 can control in time laser 2 start emit laser, to improve the efficiency of vibration mirror scanning.

Conceived based on same application, the embodiment of the invention also provides the deflections of galvanometer motor in galvanometer scanning system in place The embodiment of detection method, since the corresponding device of the method is galvanometer electricity in galvanometer scanning system in the embodiment of the present invention Machine deflects into level detecting apparatus, and the principle that this method solves the problems, such as is similar to device, because the implementation of the method may refer to The implementation of device, overlaps will not be repeated.

Please refer to attached drawing 12, Figure 12 is galvanometer in the first galvanometer scanning system shown in one exemplary embodiment of the application The flow diagram of the detection method of motor deflection in place, as shown in figure 12, the detection method of galvanometer motor deflection in place are used In galvanometer scanning system shown in fig. 5, the galvanometer motor deflect into position detecting method the following steps are included:

S110: after application controller sends motor deflection command to motor driver, galvanometer motor deflection detects in place The inner loop control signal of device motor in real time driver, wherein motor deflection command is for controlling motor driver driving Galvanometer motor deflects predetermined angle, and inner loop control signal reflects the current operating conditions of galvanometer motor.

S120: galvanometer motor deflects into level detecting apparatus and judges whether galvanometer motor deflects into according to inner loop control signal Position thens follow the steps S130 if galvanometer motor deflection is in place；If galvanometer motor is non deflected in place, sent to application controller Not feedback signal in place, or any signal is not sent, return to step former step S110.

Wherein, inner loop control signal can characterize the angle of deviation between the current yaw angle degree of galvanometer motor and predetermined angle Degree；Step S120: galvanometer motor deflects into level detecting apparatus and judges whether galvanometer motor deflects in place according to inner loop control signal, It is preset partially the following steps are included: whether the absolute value that galvanometer motor deflects into level detecting apparatus judgment bias angle is less than or equal to Poor angle threshold；If the absolute value of misalignment angle is less than or equal to predetermined deviation angle threshold, following steps S130 is executed: vibration Mirror motor deflects into level detecting apparatus and determines galvanometer motor deflection in place, sends feedback signal in place to application controller；If vibration Mirror motor is non deflected in place, then sends not feedback signal in place to application controller, or do not send any signal.

S130: galvanometer motor deflects into level detecting apparatus and sends feedback signal in place to application controller, wherein anti-in place Feedback signal is used for the deflection of application controller notice galvanometer motor in place.

S140: application controller sends switch control signal to laser according to feedback signal in place, to control laser Start or stop transmitting laser.

The detection method of galvanometer motor deflection in place, can adopt in real time in galvanometer scanning system provided by the embodiments of the present application The inner loop control signal for collecting motor driver, since the signal is able to reflect the operating status of galvanometer motor, interior according to this Ring control signal can accurate judgement galvanometer motor whether deflect in place, when determine galvanometer motor deflection in place when, application control Device sends switch control signal to laser according to feedback signal in place, so that controlling laser starts or stops reflection laser. The technical solution of the application, the deflection arrival time of galvanometer motor can be accurately detected by inner loop control signal, and then is passed through What this was accurately detected sends the waiting delay of motor deflection command in place to galvanometer motor deflection slave application controller, shortens application Controller control laser starts or stops the time of transmitting laser, improves the scanning speed of galvanometer scanning system.

In addition, according to background technique: if motor deflection command is continuous signal, galvanometer scanning system is in continuous scanning Exist in the process and start to write delay, i.e., begins to send out the motor deflection command of continuous signal form, electric to galvanometer from application controller Laser starts to emit existing delay between laser after the current yaw angle degree of machine changes.However, due to being difficult to determine The time of variation takes place in the current yaw angle degree of galvanometer motor, therefore the prior art generallys use the side for extending the predetermined time Formula, it reduce the scanning speeds of galvanometer scanning system.

To solve the above problems, improving the scanning speed of galvanometer scanning system, embodiment as one preferred, such as Figure 13 Shown, motor deflection command is continuous signal, and galvanometer motor provided in this embodiment deflects into position detecting method, in addition to Figure 12 institute Outside each step shown, in former step S110: galvanometer motor deflects into the inner ring of level detecting apparatus motor in real time driver After control signal, further includes:

S210: galvanometer motor deflects into the current yaw angle that level detecting apparatus judges galvanometer motor according to inner loop control signal Whether degree changes；If the current yaw angle degree of galvanometer motor changes, S220 is thened follow the steps；If it is not, then Xiang Yingyong Controller sends non deflected feedback signal, or does not send, and returns and executes former step S110.

S220: galvanometer motor deflects into level detecting apparatus and sends deflection feedback signal to application controller.

S230: application controller opens control signal to laser transmission according to the deflection feedback signal, wherein It opens control signal and starts to emit laser for controlling the laser.

By sending deflection feedback signal, energy to application controller when the current yaw angle degree of galvanometer motor changes It is enough according to accurately detect since begin to send out the motor deflection command of continuous signal form to galvanometer motor deflection angle The time of variation, notice application controller opens control signal to laser transmission accurately and in time, so can shorten from It begins to send out motor deflection command to laser to start to emit the waiting delay of laser, improves the scanning speed of galvanometer scanning system Degree.

In addition, according to background technique: if motor deflection command is continuous signal, galvanometer scanning system is in continuous scanning There is lift pen delay in the process, i.e., at the end of this continuous scanning, due to that can not determine the time of galvanometer motor deflection in place, because This issues motor from application controller and deflects END instruction to there are waiting delays between laser stopping transmitting laser.Existing skill The time of galvanometer motor deflection in place is determined due to being difficult in art, is generallyd use the fixed mode for extending the predetermined time and is controlled Laser stops transmitting laser, and such mode reduces the scan efficiency of galvanometer scanning system.

To solve the above-mentioned problems, the problem of improving the scan efficiency of galvanometer scanning system, as a kind of optional implementation Example, motor deflection command are continuous signal, and motor deflection command includes motor deflection END instruction；As shown in figure 14, original image 12 Step S120: galvanometer motor in illustrated embodiment deflects into level detecting apparatus and judges that galvanometer motor is according to inner loop control signal It is no to deflect in place, including following sub-step:

S310: galvanometer motor deflects into level detecting apparatus and judges whether galvanometer motor deflects into electricity according to inner loop control signal Machine deflects the specified continuous scanning end position of END instruction；Determine that galvanometer motor is inclined when galvanometer motor deflects into level detecting apparatus When going to continuous scanning end position, step S320 is executed；If it is determined that galvanometer motor is non deflected to arrive continuous scanning end position, then Galvanometer motor deflects into level detecting apparatus and does not feed back subsignal in place to application controller transmission first, or does not send signal, It returns and executes former step S110.

S320: galvanometer motor deflects into level detecting apparatus and feeds back subsignal in place to application controller transmission first, wherein First feeds back subsignal for notifying application controller control laser to stop transmitting laser in place.

After the sub-step S310 and sub-step S320 for having executed above-mentioned former step S120, in embodiment illustrated in fig. 14, Application controller receive first in place feed back subsignal after also need to be implemented following step S330.

S330: application controller feeds back subsignal in place and send to laser according to first stops control signal.

By can accurately determine that galvanometer motor deflects into the time of continuous scanning end position according to inner loop control signal, At this point, subsignal is fed back in place by sending first to application controller, it can be according to exactly determined from sending motor deflection END instruction to galvanometer motor deflects the time for the time in place timely and accurately controlling laser stopping transmitting laser, in turn Improve the scanning speed of galvanometer scanning system.

According to background technique: galvanometer scanning system is durings laser marking etc., if jumping to mesh from original position point Cursor position point starts to carry out stroke sculpting operation, then the motor deflection command that application controller issues in the process is step Signal；The process, which exists, jumps delay, i.e., galvanometer motor is since original position point, application controller when jumping to source location Begin to send out between the motor deflection command of continuous signal form that there are waiting delays.In the prior art due to being difficult to determine galvanometer Motor jumps to the time of source location, therefore the mode for generalling use the extension predetermined time controls application controller and starts to send out The time of the motor deflection command of continuous signal form is sent, it reduce the scan efficiencies of galvanometer scanning system.

To solve the above-mentioned problems, the problem of improving the scan efficiency of galvanometer scanning system, as a kind of optional implementation Example, motor deflection command are step signal, and motor deflection command includes motor deflection initial order；As shown in figure 15, Tu12Suo Show that the step S120: galvanometer motor in embodiment deflects into level detecting apparatus and judges that galvanometer motor is according to inner loop control signal number No deflection in place, specifically includes following sub-step:

S410: galvanometer motor deflects into level detecting apparatus and judges whether galvanometer motor deflects into electricity according to inner loop control signal Machine deflects the specified continuous scanning initial position of initial order；Determine that galvanometer motor is inclined when galvanometer motor deflects into level detecting apparatus When going to continuous scanning initial position, step S420 is executed；When galvanometer motor it is non deflected to continuous scanning initial position when, then to Application controller sends second and does not feed back subsignal in place, or does not send any signal, returns and executes former step S110.

S420: galvanometer motor deflects into level detecting apparatus and feeds back subsignal in place to application controller transmission second, wherein Second feeds back subsignal for notifying that it is inclined to the motor of motor driver transmission continuous signal form that application controller starts in place Turn instruction.

In addition, implementing shown in Figure 15 after the sub-step S410 and sub-step S420 for having executed above-mentioned former step S120 Example in, application controller receive second in place feed back subsignal after also need to be implemented following step S430.

S430: application controller feeds back subsignal according to second in place and sends motor deflection command to motor driver.

By sending second to application controller and feeding back son in place when galvanometer motor deflects into continuous scanning initial position Signal can deflect into the time of source location according to the galvanometer motor accurately detected, send second to application controller and arrive Position feedback subsignal, so that timely and accurately control application controller sends the motor of continuous signal form to motor driver At the beginning of deflection command, and then improve the scan efficiency of galvanometer scanning system.

By the description of above embodiments, it is apparent to those skilled in the art that the application can be by soft Part adds the mode of required general hardware platform to realize, naturally it is also possible to which by hardware, but in many cases, the former is more preferably Embodiment.Based on this understanding, the portion that the technical solution of the application substantially in other words contributes to the prior art Dividing can be embodied in the form of software products, and be stored in a storage medium, including some instructions are used so that one Platform smart machine executes all or part of the steps of each embodiment the method for the application.And storage medium above-mentioned includes: Read-only memory (ROM), random access memory (RAM), magnetic or disk etc. are various to can store data and program code Medium.

All the embodiments in this specification are described in a progressive manner, same and similar portion between each embodiment Dividing may refer to each other, and each embodiment focuses on the differences from other embodiments.Dress described above It sets and system embodiment is only schematical, wherein the module as illustrated by the separation member can be or can not also It is to be physically separated, the component shown as module may or may not be physical module.It can be according to actual It needs that some or all of the modules therein is selected to achieve the purpose of the solution of this embodiment.Those of ordinary skill in the art are not In the case where making the creative labor, it can understand and implement.

It should be noted that, in this document, the relational terms of such as " first " and " second " or the like are used merely to one A entity or operation with another entity or operate distinguish, without necessarily requiring or implying these entities or operation it Between there are any this actual relationship or backwards.Moreover, the terms "include", "comprise" or its any other variant are intended to Cover non-exclusive inclusion, so that the process, method, mechanism or the equipment that include a series of elements not only include those Element, but also including other elements that are not explicitly listed, or further include for this process, method, mechanism or setting Standby intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that There is also other identical elements in the process, method, mechanism or equipment for including the element.

The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be said that Specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs, exist Under the premise of not departing from present inventive concept, a number of simple deductions or replacements can also be made, all shall be regarded as belonging to of the invention Protection scope.

Claims

1. the detection method of galvanometer motor deflection in place in a kind of galvanometer scanning system, which is characterized in that the vibration mirror scanning system System deflects into level detecting apparatus, galvanometer motor and laser including application controller, motor driver, galvanometer motor；The inspection Survey method includes:

After application controller sends motor deflection command to motor driver, galvanometer motor deflects into level detecting apparatus and adopts in real time Collect the inner loop control signal of motor driver, wherein the motor deflection command is for controlling the motor driver driving vibration Mirror motor deflects predetermined angle, and the inner loop control signal reflects the current operating conditions of the galvanometer motor；

The galvanometer motor deflects into level detecting apparatus and judges whether the galvanometer motor deflects according to the inner loop control signal In place, if the galvanometer motor deflects in place, the galvanometer motor deflects into level detecting apparatus and sends out to the application controller It is sent to a feedback signal, wherein the feedback signal in place is used to notify the galvanometer motor to deflect to the application controller In place；

The application controller sends switch control signal to laser according to the feedback signal in place, to control the laser Device starts or stops transmitting laser；

The inner loop control signal characterizes the angle of deviation between the current yaw angle degree of the galvanometer motor and the predetermined angle Degree；The galvanometer motor deflects into level detecting apparatus and judges whether the galvanometer motor deflects into according to the inner loop control signal Position, comprising:

The galvanometer motor deflects into level detecting apparatus, and to judge whether the absolute value of the misalignment angle is less than or equal to default inclined Poor angle threshold；

If the absolute value of the misalignment angle is less than or equal to the predetermined deviation angle threshold, the galvanometer motor is deflected into Level detecting apparatus determines the galvanometer motor deflection in place, and Xiang Suoshu application controller sends feedback signal in place；Wherein, described Method further include:

The galvanometer motor deflects into level detecting apparatus and judges the current inclined of the galvanometer motor according to the inner loop control signal Whether gyration changes；

If the current yaw angle degree of the galvanometer motor changes, the galvanometer motor deflects into level detecting apparatus to described Application controller sends deflection feedback signal；

The application controller opens control signal to laser transmission according to the deflection feedback signal, wherein described It opens control signal and starts to emit laser for controlling the laser.

2. the detection method of galvanometer motor deflection as described in claim 1 in place, which is characterized in that the motor deflection command For continuous signal, the motor deflection command includes motor deflection END instruction；The galvanometer motor deflects into level detecting apparatus Judge whether the galvanometer motor deflects in place according to the inner loop control signal, comprising:

The galvanometer motor deflects into level detecting apparatus and judges whether the galvanometer motor deflects according to the inner loop control signal The continuous scanning end position specified to motor deflection END instruction；

Determine that the galvanometer motor deflects into the continuous scanning end position when the galvanometer motor deflects into level detecting apparatus When, the galvanometer motor deflects into level detecting apparatus and feeds back subsignal in place to application controller transmission first, wherein institute It states first and feeds back subsignal in place for notifying the application controller controls the laser to stop transmitting laser.

3. the detection method of galvanometer motor deflection as claimed in claim 2 in place, which is characterized in that the motor deflection command For step signal, the motor deflection command includes motor deflection initial order；The galvanometer motor deflects into level detecting apparatus Judge whether the galvanometer motor deflects in place according to the inner loop control signal number, comprising:

The galvanometer motor deflects into level detecting apparatus and judges whether the galvanometer motor deflects according to the inner loop control signal The continuous scanning initial position specified to motor deflection initial order；

Determine that the galvanometer motor deflects into the continuous scanning initial position when the galvanometer motor deflects into level detecting apparatus When, the galvanometer motor deflects into level detecting apparatus and feeds back subsignal in place to application controller transmission second, wherein institute It states second and feeds back subsignal in place for notifying the application controller to start to send continuous signal shape to the motor driver The motor deflection command of formula.

4. galvanometer motor deflects into level detecting apparatus in a kind of galvanometer scanning system, which is characterized in that the galvanometer scanning system Including application controller, motor driver, galvanometer motor and laser, the galvanometer motor deflects into level detecting apparatus and includes:

Signal condition sampling module, for being acquired after application controller sends motor deflection command to motor driver in real time The inner loop control signal of motor driver, wherein the motor deflection command is for controlling the motor driver driving galvanometer Motor deflects predetermined angle, and the inner loop control signal reflects the current operating conditions of the galvanometer motor；

Judgment module in place, for judging whether the galvanometer motor deflects in place according to the inner loop control signal, if described Galvanometer motor deflects in place, then sends feedback signal in place to the application controller, wherein the feedback signal in place is used for The galvanometer motor deflection is notified in place to the application controller；

The application controller is also used to send switch control signal to laser according to the feedback signal in place, with control The laser starts or stops transmitting laser；

The inner loop control signal characterizes the angle of deviation between the current yaw angle degree of the galvanometer motor and the predetermined angle Degree；The judgment module in place, comprising:

Misalignment angle judging submodule, for judging whether the absolute value of the misalignment angle is less than or equal to predetermined deviation angle Threshold value；

Feedback signal sending submodule in place, if the absolute value for the misalignment angle is less than or equal to the predetermined deviation angle When spending threshold value, the galvanometer motor deflection is determined in place, Xiang Suoshu application controller sends feedback signal in place；Wherein, described Device further include:

Deflection angle changes judgment module, for judging the current yaw angle of the galvanometer motor according to the inner loop control signal Whether degree changes；

Deflection feedback signal sending module is answered if the current yaw angle degree for the galvanometer motor changes to described Deflection feedback signal is sent with controller；

The application controller is also used to open control signal to laser transmission according to the deflection feedback signal, In, it is described open control signal for control the laser start emit laser.

5. galvanometer motor as claimed in claim 4 deflects into level detecting apparatus, which is characterized in that the motor deflection command is Continuous signal, the motor deflection command include motor deflection END instruction；The judgment module in place, comprising:

Continuous scanning end position judging submodule, for judging whether the galvanometer motor is inclined according to the inner loop control signal Go to the specified continuous scanning end position of the motor deflection END instruction；

First feeds back subsignal sending submodule in place, for terminating when the determining galvanometer motor deflects into the continuous scanning When position, Xiang Suoshu application controller sends first and feeds back subsignal in place, wherein described first feeds back subsignal in place is used for The application controller is notified to control the laser and stop transmitting laser.

6. galvanometer motor as claimed in claim 5 deflects into level detecting apparatus, which is characterized in that the motor deflection command is Step signal, the motor deflection command include motor deflection initial order；The judgment module in place, comprising:

Continuous scanning initial position judging submodule, for judging whether the galvanometer motor is inclined according to the inner loop control signal Go to the specified continuous scanning initial position of the motor deflection initial order；

Second feeds back subsignal sending submodule in place, for if it is determined that the galvanometer motor deflects into the continuous scanning starting When position, Xiang Suoshu application controller sends second and feeds back subsignal in place, wherein described second feeds back subsignal in place is used for The application controller is notified to start the motor deflection command for sending continuous signal form to the motor driver.