CN106676467B - A kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge - Google Patents
A kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge Download PDFInfo
- Publication number
- CN106676467B CN106676467B CN201611022536.9A CN201611022536A CN106676467B CN 106676467 B CN106676467 B CN 106676467B CN 201611022536 A CN201611022536 A CN 201611022536A CN 106676467 B CN106676467 B CN 106676467B
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- China
- Prior art keywords
- fixed
- plated film
- film case
- gear
- door
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
Abstract
The invention discloses a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge, including plated film case, automatic door mechanism, auto-door driving mechanism and feeding-discharging mechanism, the front openings of the plated film case, the open side of plated film case is equipped with automatic door mechanism, auto-door driving mechanism is mounted on the right side of plated film case, feeding-discharging mechanism is fixed on the front top of plated film case, is connected between auto-door driving mechanism and automatic door mechanism by rack-and-pinion.Coating machine plate can be promoted or be pulled out plated film case automatically by it, and easily close membrane cassette of vacuum evaporation open side.
Description
Technical field:
The present invention relates to field of photoelectric technology, and in particular to the plated film case of plated film is carried out to substrate.
Background technique:
Generally known, the plated film of substrate (e.g., coated glass, reflecting glass) is completed in vacuum cavity.In this way, operator
Member need to open vacuum cavity, and substrate to be coated is put into；It is completed in substrate film coating, operator opens vacuum cavity again, will
Substrate takes out.
Summary of the invention:
The purpose of the present invention is overcoming the deficiencies of the prior art and provide a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge,
Substrate is more easily put into membrane cassette of vacuum evaporation by it, and easily closes membrane cassette of vacuum evaporation open side.
The solution to the technical problem of the present invention is as follows:
A kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge, including plated film case, automatic door mechanism, auto-door driving mechanism and
Feeding-discharging mechanism, the front openings of the plated film case, the open side of plated film case are equipped with automatic door mechanism, auto-door driving mechanism
It is mounted on the right side of plated film case, feeding-discharging mechanism is fixed on the front top of plated film case, auto-door driving mechanism and automatic door
It is connected between structure by rack-and-pinion；
The automatic door mechanism includes draw runner and door-plate, and the door-plate is hinged on the front end of draw runner, and draw runner sleeve is in plated film
On the right side wall of case；
The auto-door driving mechanism includes gear wheel, the fixed rack gear of the interior hollow section of gear wheel, gear ring and biography
Moving gear engagement, transmission gear are fixed on one end of connecting shaft, and the other end of connecting shaft is fixed with the second driving wheel and is hinged on
On the adjutage of driving mechanism bracket, the second driving wheel is engaged with driving gear, and the lower end of gear is driven to fill equipped with elastic guide
It sets, the cylindrical projection of the upper end of gear is driven to be socketed in the through-hole of adjutage, driving handle passes through through-hole, and to be fixed on cylinder convex
On rising；The transmission arm of driving handle is socketed on the through slot of driving mechanism bracket, and driving mechanism bracket is fixed on the right side of plated film case
Side, the front end of the gear wheel are engaged with driving lever gear, and driving lever is fixed in driving lever gear, and driving lever gear is hinged on plated film case
On right side wall；The gear wheel is hinged on the right side wall of plated film case, and the tooth section of draw runner is engaged with gear wheel；
The feeding-discharging mechanism includes electromagnet, and electromagnet is fixed on the rear end of push arm, and the upper end of push arm is fixedly connected on
The front end of sliding block, the rear end of sliding block are hinged with one end of the first transmission item, and the other end of the first transmission article has the by pin connection
The other end of two transmission items, the second transmission item is fixed on the output shaft of motor, and motor is fixed on electric machine support, the sliding block
It is socketed on slider guide seat, slides electric machine support and slider guide seat is fixed on the top of plated film case.
The upper bottom surface of the door-plate is fixed with the first guide rail, and sideways, outwardly extending nose bar is fixed on the outside of the front end of door-plate,
It is fixed with positioning support item on rear side of the rear end of door-plate, the slider guide seat is parallel with the first guide rail.
The bottom plate of the plated film case is equipped with the second guide rail, and the lower end of the right side wall of plated film case forms draw runner slideway, plates
Flexible clamp piece, first guide rail and the second guide rail tandem array are fixed on front side of the upper end of film case.
The front end of the draw runner forms hinge hole, and guide upright post is fixed on the right side of draw runner, and the nose bar is hinged on
It connects in hole, in draw runner slideway, the length of guide upright post is less than the length of draw runner and is located at draw runner the guide upright post sleeve
Second half section.
The resilient guiding device includes that guide rod, a pair of of thrust bearing and spring, a pair of of thrust bearing are socketed in guiding
On bar, spring is fixedly connected between a pair of of thrust bearing, spring is socketed on the guide bar, and the left end of the thrust bearing of left end is pressed
It leans against on plated film case, the right end of the thrust bearing of right end is pressed against on driving gear, and guide rod is fixed on plated film case.
The both ends of the through slot respectively form to the right a fixed groove, and the transmission arm can be socketed in fixed groove；
The second thrust bearing is socketed in the cylindrical projection, the left end of the second thrust bearing is pressed against on driving gear,
The gap a in the gap formed between the right side and adjutage of the second thrust bearing is less than the transverse tooth thickness of driving gear.
It is fixed with trapezoidal guide pad on the left of the sliding block, trapezoid-shaped openings through slot is formed on the slider guide seat, ladder
Shape guide pad is socketed in trapezoid-shaped openings through slot.
The distance between the rotation center of the output shaft of the motor and the top surface of plated film case are greater than the length of the second transmission item
Degree.
Compared with prior art, coating machine plate can be promoted or be pulled out plated film case automatically by it, and easily by Vacuum Deposition
Film box opening side seal closes.
Detailed description of the invention:
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the cross-sectional view of auto-door driving mechanism of the invention；
Fig. 3 is the structural schematic diagram of draw runner of the invention.
Specific embodiment:
Embodiment: a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge, including plated film case 1, automatic door mechanism 2, automatically-controlled door
Driving mechanism 3 and feeding-discharging mechanism 4, the front openings of the plated film case 1, the open side of plated film case 1 are equipped with automatic door mechanism
2, auto-door driving mechanism 3 is mounted on the right side of plated film case 1, and feeding-discharging mechanism 4 is fixed on the front top of plated film case 1, automatically
It is connected between door drive mechanism 3 and automatic door mechanism 2 by rack-and-pinion；
The automatic door mechanism 2 includes draw runner 21 and door-plate 22, and the door-plate 22 is hinged on the front end of draw runner 21, draw runner 21
Sleeve is on the right side wall of plated film case 1；
The auto-door driving mechanism 3 includes gear wheel 31, the fixed rack gear 32 of the interior hollow section of gear wheel 31, tooth
Circle 32 is engaged with transmission gear 33, and transmission gear 33 is fixed on one end of connecting shaft 34, and the other end of connecting shaft 34 is fixed with the
Two driving wheels 35 are simultaneously hinged on the adjutage 391 of driving mechanism bracket 39, and the second driving wheel 35 is engaged with driving gear 36, are driven
The lower end of moving gear 36 is equipped with resilient guiding device 37, and the cylindrical projection 361 of the upper end of gear 36 is driven to be socketed in adjutage 391
Through-hole 3911 in, driving handle 38 pass through through-hole 3911 be fixed in cylindrical projection 361；The transmission arm 381 of driving handle 38
It is socketed on the through slot 392 of driving mechanism bracket 39, driving mechanism bracket 39 is fixed on the right side of plated film case 1, the gear wheel
31 front end is engaged with driving lever gear 40, and driving lever 401 is fixed in driving lever gear 40, and driving lever gear 40 is hinged on plated film case 1
On right side wall；The gear wheel 31 is hinged on the right side wall of plated film case 1, and the tooth section 211 of draw runner 21 is engaged with gear wheel 31；
The feeding-discharging mechanism 4 includes electromagnet 41, and electromagnet 41 is fixed on the rear end of push arm 42, and the upper end of push arm 42 is solid
Surely it is connected to the front end of sliding block 43, the rear end of sliding block 43 is hinged with one end of the first transmission item 44, and first is driven the another of item 44
There is the second transmission item 45 at end by pin connection, and the other end of the second transmission item 45 is fixed on the output shaft of motor 46, motor 46
It is fixed on electric machine support 47, the sliding block 43 is socketed on slider guide seat 48, sliding electric machine support 47 and slider guide seat 48
It is fixed on the top of plated film case 1.
Furthermore, the upper bottom surface of the door-plate 22 is fixed with the first guide rail 221, and the outside of the front end of door-plate 22 is solid
Surely have a sideways, outwardly extending nose bar 222, be fixed with positioning support item 223 on rear side of the rear end of door-plate 22, the slider guide seat 48 with
First guide rail 221 is parallel.
Furthermore, the bottom plate of the plated film case 1 is equipped with the second guide rail 101, the lower end of the right side wall of plated film case 1
Draw runner slideway 102 is formed, flexible clamp piece 103, first guide rail 221 and second are fixed on front side of the upper end of plated film case 1
101 tandem array of guide rail.
Furthermore, the front end of the draw runner 21 forms hinge hole 212, and it is vertical that the right side of draw runner 21 is fixed with guiding
Column 213, the nose bar 222 are hinged in hinge hole 212, and for 213 sleeve of guide upright post in draw runner slideway 102, guiding is vertical
The length of column 213 is less than the length of draw runner 21 and is located at the second half section of draw runner 21.
Furthermore, the resilient guiding device 37 includes guide rod 371, a pair of of thrust bearing 372 and spring
373, a pair of of thrust bearing 372 is socketed on guide rod 371, is fixedly connected with spring 373, bullet between a pair of of thrust bearing 372
Spring 373 is socketed on guide rod 371, and the left end of the thrust bearing 372 of left end is pressed against on plated film case 1, the thrust bearing of right end
372 right end is pressed against on driving gear 36, and guide rod 371 is fixed on plated film case 1.
Furthermore, the both ends of the through slot 392 respectively form to the right a fixed groove 3921, the transmission arm
381 can be socketed in fixed groove 3921；
The second thrust bearing is socketed in the cylindrical projection 361, the left end of the second thrust bearing is pressed against driving gear
On 36, the gap a in the gap formed between the right side and adjutage 391 of the second thrust bearing is less than the tooth of driving gear 36
It is thick.
Furthermore, the left side of the sliding block 43 is fixed with trapezoidal guide pad, forms on the slider guide seat 48
There is trapezoid-shaped openings through slot, trapezoidal guide pad 431 is socketed in trapezoid-shaped openings through slot.
Furthermore, the distance between top surface of the rotation center of the output shaft of the motor 46 and plated film case 1 is big
In the length of the second transmission item 45.
Working principle: the automatic door mechanism 2 of 1 front side of plated film case is opened, and door-plate 22 lies low in the front side of plated film case 1, positioning
Support bar 223 is pressed against on rack gear, is aligned 22 upper bottom surface of door-plate with the bottom surface of plated film case 1；Substrate to be coated is put into
After one guide rail 221, feeding-discharging mechanism 4 is opened, and substrate is pushed by the metal framework that the energization of electromagnet 41 is sucked outside substrate, push arm 42
Plated film case 1, after substrate is completely into plated film case 1, electromagnet 41 powers off push arm 42 and resets, and auto-door driving mechanism 3 is opened；It will
Driving handle 38 is pressed to plated film case side, and the fixed groove 3921 that transmission arm 381 exits one end turns along through slot 392 to the other end
The dynamic fixed groove 3921 into the other end, driving lever 401 lift positioning support item 223, in driving gear 36, the second driving cog
It takes turns under the linkage effect of 35, connecting shaft 34, transmission gear 33, gear ring 32, gear wheel 31 and draw runner 21, door-plate 22 is upwards and backwards
It promotes, flexible clamp piece 103 blocks door-plate 22 and is allowed to be bonded with plated film case, and substrate starts plated film；After the completion of plated film, automatically-controlled door driving
Automatic door mechanism 2 is opened in the reversion of mechanism 3, and after door-plate 22 is concordant with the bottom plate of plated film case 1, feeding-discharging mechanism 4 is again turned on,
The propulsion of push arm 42 is sucked substrate and pulls it.
Finally, the above embodiments are only used to illustrate the present invention, and not limitation of the present invention, related technical field
Those of ordinary skill can also make a variety of changes and modification without departing from the spirit and scope of the present invention, therefore
All equivalent technical solutions also belong to scope of the invention, and scope of patent protection of the invention should be defined by the claims.
Claims (8)
1. a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge, including plated film case (1), automatic door mechanism (2), automatically-controlled door driving machine
Structure (3) and feeding-discharging mechanism (4), it is characterised in that: the front openings of the plated film case (1), the open side installation of plated film case (1)
Have automatic door mechanism (2), auto-door driving mechanism (3) is mounted on the right side of plated film case (1), and feeding-discharging mechanism (4) is fixed on plating
The front end of film case (1) is pushed up, and is connect between auto-door driving mechanism (3) and automatic door mechanism (2) by rack-and-pinion；
The automatic door mechanism (2) includes draw runner (21) and door-plate (22), and the door-plate (22) is hinged on the front end of draw runner (21),
Draw runner (21) sleeve is on the right side wall of plated film case (1)；
The auto-door driving mechanism (3) includes gear wheel (31), the fixed rack gear of the interior hollow section of gear wheel (31)
(32), gear ring (32) is engaged with transmission gear (33), and transmission gear (33) is fixed on one end of connecting shaft (34), connecting shaft (34)
The other end be fixed with the second driving wheel (35) and be hinged on the adjutage (391) of driving mechanism bracket (39), second transmission
Wheel (35) is engaged with driving gear (36), and the lower end of driving gear (36) is equipped with resilient guiding device (37), is driven gear (36)
The cylindrical projection (361) of upper end be socketed in the through-holes (3911) of adjutage (391), driving handle (38) passes through through-hole
(3911) it is fixed on cylindrical projection (361)；The transmission arm (381) of driving handle (38) is socketed in driving mechanism bracket (39)
On through slot (392), driving mechanism bracket (39) is fixed on the right side of plated film case (1), and the front end of the gear wheel (31) is engaged with
Driving lever gear (40) is fixed with driving lever (401) in driving lever gear (40), and driving lever gear (40) is hinged on the right side of plated film case (1)
On wall；The gear wheel (31) is hinged on the right side wall of plated film case (1), the tooth section (211) of draw runner (21) and gear wheel (31)
Engagement；
The feeding-discharging mechanism (4) includes electromagnet (41), and electromagnet (41) is fixed on the rear end of push arm (42), push arm (42)
Upper end is fixedly connected on the front end of sliding block (43), and the rear end of sliding block (43) is hinged with one end of the first transmission item (44), and first passes
The other end of dynamic item (44) has the second transmission item (45) by pin connection, and the other end of the second transmission item (45) is fixed on motor
(46) on output shaft, motor (46) is fixed on electric machine support (47), and the sliding block (43) is socketed in slider guide seat (48)
On, sliding electric machine support (47) and slider guide seat (48) are fixed on the top of plated film case (1).
2. a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge according to claim 1, it is characterised in that: the door-plate
(22) upper bottom surface is fixed with the first guide rail (221), is fixed with sideways, outwardly extending nose bar on the outside of the front end of door-plate (22)
(222), it is fixed with positioning support item (223) on rear side of the rear end of door-plate (22), the slider guide seat (48) and the first guide rail
(221) parallel.
3. a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge according to claim 2, it is characterised in that: the plated film case
(1) bottom plate is equipped with the second guide rail (101), and the lower end of the right side wall of plated film case (1) forms draw runner slideway (102), plated film
It is fixed on front side of the upper end of case (1) flexible clamp piece (103), first guide rail (221) and the second guide rail (101) head and the tail are held in the mouth
It connects.
4. a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge according to claim 2, it is characterised in that: the draw runner
(21) front end forms hinge hole (212), is fixed on the right side of draw runner (21) guide upright post (213), nose bar (222) hinge
It connects in hinge hole (212), guide upright post (213) sleeve is in draw runner slideway (102), the length of guide upright post (213)
Length less than draw runner (21) and the second half section positioned at draw runner (21).
5. a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge according to claim 1, it is characterised in that: the elastic conducting
It include guide rod (371), a pair of of thrust bearing (372) and spring (373), a pair of of thrust bearing (372) socket to device (37)
On guide rod (371), it is fixedly connected with spring (373) between a pair of of thrust bearing (372), spring (373) is socketed in guiding
On bar (371), the left end of the thrust bearing (372) of left end is pressed against on plated film case (1), the right side of the thrust bearing (372) of right end
Side pressure leans against in driving gear (36), and guide rod (371) is fixed on plated film case (1).
6. a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge according to claim 1, it is characterised in that: the through slot
(392) both ends respectively form to the right a fixed groove (3921), and the transmission arm (381) can be socketed in fixed groove
(3921) in；
It is socketed with the second thrust bearing on the cylindrical projection (361), the left end of the second thrust bearing is pressed against driving gear
(36) on, the gap a in the gap formed between the right side of the second thrust bearing and adjutage (391) is less than driving gear (36)
Transverse tooth thickness.
7. a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge according to claim 1, it is characterised in that: the sliding block
(43) it is fixed with trapezoidal guide pad on the left of, forms trapezoid-shaped openings through slot, trapezoidal guide pad on the slider guide seat (48)
(431) it is socketed in trapezoid-shaped openings through slot.
8. a kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge according to claim 1, it is characterised in that: the motor
(46) the distance between the rotation center of output shaft and the top surface of plated film case (1) are greater than the length of the second transmission item (45).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611022536.9A CN106676467B (en) | 2016-11-15 | 2016-11-15 | A kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611022536.9A CN106676467B (en) | 2016-11-15 | 2016-11-15 | A kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106676467A CN106676467A (en) | 2017-05-17 |
| CN106676467B true CN106676467B (en) | 2018-12-18 |
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ID=58866439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611022536.9A Active CN106676467B (en) | 2016-11-15 | 2016-11-15 | A kind of membrane cassette of vacuum evaporation equipment of automatic feed/discharge |
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| CN (1) | CN106676467B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108315706A (en) * | 2018-04-02 | 2018-07-24 | 上海应用技术大学 | A kind of vacuum coater carrying out PVD coatings to cutter |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102206806A (en) * | 2010-03-31 | 2011-10-05 | 甘国工 | Flat solar heat absorption coated plate production method and vertical coating apparatus |
| CN202151734U (en) * | 2011-06-24 | 2012-02-29 | 奥科精机（深圳）有限公司 | Continuous feeding full-automatic tapping device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4621333B2 (en) * | 2000-06-01 | 2011-01-26 | ホーチキ株式会社 | Thin film formation method |
-
2016
- 2016-11-15 CN CN201611022536.9A patent/CN106676467B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102206806A (en) * | 2010-03-31 | 2011-10-05 | 甘国工 | Flat solar heat absorption coated plate production method and vertical coating apparatus |
| CN202151734U (en) * | 2011-06-24 | 2012-02-29 | 奥科精机（深圳）有限公司 | Continuous feeding full-automatic tapping device |
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| Publication number | Publication date |
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| CN106676467A (en) | 2017-05-17 |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20181101 Address after: 214000 HWU Tai Road, HWU Tai Industrial Park, Binhu District, Wuxi, Jiangsu Applicant after: JIANGSU TELI LIANG COATING TECHNOLOGY CO.,LTD. Address before: 523000 room 436, Qian Qian building, 27 Guangming Road, Dongcheng District, Dongguan, Guangdong Applicant before: DONGGUAN QINZHI INDUSTRIAL DESIGN Co.,Ltd. |
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Address after: 214000 HWU Tai Road, HWU Tai Industrial Park, Binhu District, Wuxi, Jiangsu Patentee after: Jiangsu Teliliang New Material Technology Co.,Ltd. Address before: 214000 HWU Tai Road, HWU Tai Industrial Park, Binhu District, Wuxi, Jiangsu Patentee before: JIANGSU TELI LIANG COATING TECHNOLOGY CO.,LTD. |
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| CP01 | Change in the name or title of a patent holder |