CN106662687A - Wire grid polarizer with dual absorptive regions - Google Patents
Wire grid polarizer with dual absorptive regions Download PDFInfo
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- CN106662687A CN106662687A CN201580034067.XA CN201580034067A CN106662687A CN 106662687 A CN106662687 A CN 106662687A CN 201580034067 A CN201580034067 A CN 201580034067A CN 106662687 A CN106662687 A CN 106662687A
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- light
- wire
- nanometers
- grid polarizer
- polarizer
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133528—Polarisers
- G02F1/133536—Reflective polarizers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/149—Beam splitting or combining systems operating by reflection only using crossed beamsplitting surfaces, e.g. cross-dichroic cubes or X-cubes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/005—Projectors using an electronic spatial light modulator but not peculiar thereto
- G03B21/006—Projectors using an electronic spatial light modulator but not peculiar thereto using LCD's
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133528—Polarisers
- G02F1/133548—Wire-grid polarisers
Abstract
The invention relates to a selectively-absorptive wire grid polarizer. The selectively-absorptive wire grid polarizer (10) comprises an array of parallel, elongated rods (14) disposed over a surface of a transparent substrate (11) with gaps (15) between adjacent rods, each of the rods including a reflective wire (13) sandwiched between two absorptive ribs (12a, 12b). A method of making this wire grid polarizer is also provided. A use of this wire grid polarizer in an image projection system (40) is also provided.
Description
Technical field
The application is usually directed to selective absorbing formula wire-grid polarizer and image projection system's (for example, computer projection
Instrument).
Background technology
What is figure 5 illustrates is a kind of image projection system 50, including:(1) it is clipped in or is arranged on light source 41 and liquid crystal
Show the wire-grid polarizer (light incident side (incoming) wire-grid polarizer) 56 between device (LCD) 42;And (2) are clipped in or are arranged on
Another wire-grid polarizer (analyzer (analyzer) wire-grid polarizer) 55 between X- cubes 43 and LCD 42.Wire grid polarization
The array that device 55 can have parallel, the long and narrow strip 54 being arranged on the surface of transparent substrates 11 with 56.Strip 54
In each can include reflected ray (wire) 13 and absorption rib 12.
Light 44 from light source 41 can be polarized at light incident side wire-grid polarizer 56.Light incident side wire-grid polarizer 56 can
To be substantially transmitted through a kind of polarization (for example, p- polarised lights) of light 57 and substantially inverted polarized (for example, the s- of reflected light 57
Polarised light).Image (for example, the weight being projected may be negatively affected from the reflected light 57 of light incident side wire-grid polarizer 56
Shadow).However, because absorption rib 12 is arranged between LCD 42 and reflected ray 13, therefore the light reflected by LCD 42
47 may be absorbed by light incident side wire-grid polarizer 56.
Some in light 44 can pass through LCD 42 and can further be polarized at analyzer wire-grid polarizer 55.
Analyzer wire-grid polarizer 55 can be substantially transmitted through a kind of polarization (for example, p- polarised lights) and substantially absorb inverted polarized
(for example, s- polarised lights).Because absorption rib 12 is arranged between LCD 42 and reflected ray 13, thus inverted polarized or
S- polarised lights can be absorbed with analyzed device wire-grid polarizer 55.Then light 44 can reach X- cubes 43, in X- cubes 43
In, the light from different directions can be combined and is projected.Some reached in the light of X- cubes 43 can be reflected
To in system-reflect towards analyzer wire-grid polarizer 55.Reflected light 48 from X- cubes 43 may adversely shadow
The image (for example, ghost image) that sound is projected.
X- cubes are sometimes referred to as X- cube prisms or crossed dichroic prism.X- cubes are normally used for calculating
In machine projecting apparatus, for the light of different colours to be combined into into the single image to be projected.Typically, X- cubes are by four tools
The right-angle prism for having dichroic coating is made, and four prisms are bonded together to form cube.
The content of the invention
Have recognized that so be favourable:Elimination, minimum remove the light for not only reflecting from LCD but also from incident side line
The light and the light from the reflection of X- cubes of grid polarizer reflection.The present invention relates to can be used to absorb from LCD, from X-
Cube and/or from light incident side wire-grid polarizer reflected light wire-grid polarizer various embodiments.The present invention is also related to
And make the various methods of such wire-grid polarizer and be directed to use with the image throwing being modified of such wire-grid polarizer
Shadow system.
In one embodiment, selective absorbing formula wire-grid polarizer can include the battle array of parallel, long and narrow bar (rod)
Row, the array is arranged on the surface of transparent substrates and has between adjacent bar gap, each in the bar
Including the reflected ray being clipped between two absorption ribs.
In one embodiment, making the method for selective absorbing formula wire-grid polarizer can include:
1. on the surface of transparent substrates deposit absorbent material layer (ground floor);
2. on the surface of the ground floor depositing reflective material layer (second layer);
3. on the surface of the second layer deposit absorbent material layer (third layer);And
4. three layers are etched to form bar spaced apart, and the bar can:
A. it is substantially transmitted through a kind of polarization of light;And
B. the inverted polarized that the either direction from two rightabouts incides the light of the polarizer is substantially absorbed.
In one embodiment, image projection system can include being arranged between light source and liquid crystal display (LCD)
Light incident side wire-grid polarizer.The light incident side wire-grid polarizer can include the array of parallel, long and narrow bar, the array quilt
It is arranged on the surface of transparent substrates and has between adjacent bar gap.Each in the bar can have be clipped in
Reflected ray between two absorption ribs.The light incident side wire-grid polarizer can be arranged on reception from the light source
Light position, and can be substantially transmitted through the light from the light source a kind of polarization and substantially absorb from
The inverted polarized of the light of the light source.The light incident side wire-grid polarizer can be arranged on reception from the LCD's
The position of reflected light and can substantially absorb the reflected light from the LCD.
Description of the drawings
Fig. 1 is inclined according to the wiregrating including the line 13 being sandwiched between two absorption ribs 12 of the embodiment of the present invention
Shake the schematic section side view of device 10;
Fig. 2 is inclined according to the wiregrating including the line 13 being sandwiched between two absorption ribs 12 of the embodiment of the present invention
Shake the perspective schematic view of device 10;
Fig. 3 a-c illustrate the step in the method for making wire-grid polarizer according to embodiments of the present invention;
Fig. 4 is the image projection system according to the embodiment of the present invention;
Fig. 5 is the image projection system according to prior art.
Specific embodiment
Definition
Many materials used in optical texture absorb same amount of light, reflect same amount of light and pass through some amount
Light.First, four definition below are intend to distinguish between the material or knot of main absorption, key reflections formula or main through mode
Structure.
1. as used in this, " absorption " expression of term is substantially absorbed in the light in the wavelength of concern.
A. material be whether " absorbefacient " be for the other materials used in polarizer.Thus, absorb
Formula structure will absorb and be significantly more than reflective or through mode structure.
B. whether material is " absorbefacient " wavelength for depending on concern.Material may be absorption in a kind of wave-length coverage
Property, but be not absorbefacient in other wave-length coverages.
C. in one aspect, absorption structure can absorb more than 40% and reflect less than 60% in the wavelength of concern
Light (assume the absorption structure for optical thick film-i.e., more than skin depth thickness).
D. absorption rib can be used for a kind of polarization of selective absorbing light.
2. as used in this, " reflective " expression of term is substantially reflected in the light in the wavelength of concern.
A. material be whether " reflexive " be for the other materials used in polarizer.Thus, reflect
Formula structure will reflect and be significantly more than absorption or through mode structure.
B. whether material is " reflexive " wavelength for depending on concern.Material may be reflection in a kind of wave-length coverage
Property, but be not reflexive in other wave-length coverages.Some wave-length coverages can effectively utilize highly reflective material.
Other wave-length coverages, are especially wherein easier the relatively low wavelength of generating material deterioration, and the selection of material may be more limited
System, and optical designers may need acceptance to have the material of the reflectivity lower than expection.
C. in one aspect, reflective structure can reflect greater than 80% and absorb less than 20% in the wavelength of concern
Light (hypothesis reflective structure is optical thick film-i.e., more than skin depth thickness).
D. generally metal is used as into reflective material.
E. reflective line can be used to separate a kind of inverted polarized of polarization with light of light.
3. as used in this, term " through mode " represents the light being substantially transmitted through in the wavelength of concern.
A. material be whether " permeability " be for the other materials used in polarizer.Thus, pass through
Formula structure will transmit through significantly more than absorption or reflective structure.
B. whether material is the wavelength of " permeability " depending on concern.Material may be transmission in a kind of wave-length coverage
Property, but be not permeability in other wave-length coverages.
C. in one aspect, through mode structure can be passed through more than 90% and absorbed less than 10% in the wavelength of concern
Light.
4., as used in these definition, term " material " refers to the integral material of ad hoc structure.Therefore, " inhale
Receipts formula " structure by being substantially absorbefacient material and make as overall, even if material potentially include some it is reflexive or
The composition of permeability.Thus, for example, so that substantially light absorbing rib is by made by the absorbent material of q.s
Absorption rib, even if the rib potentially includes some is embedded in therein reflexive or permeability material.
5. as used in this, term " light " may represent the x- rays of electromagnetic spectrum, ultraviolet, visible ray and/
Or infrared ray or the light in other regions or electromagnetic radiation.
6. as used in this, term " being sandwiched in " represent one (central term) be placed in other two (external entries) it
Between, but central term not necessarily contacts external entries.
7. as used in this, term " substantially absorbing " is not offered as absorbing all of reflected light, but absorbs big
So that there is significant improvement in image projection system in the reflected light of amount.
Describe in detail
Wire grid polarizer structures
As shown in Fig. 1-2, selective absorbing formula wire-grid polarizer 10 is illustrated to include parallel, long and narrow bar
14 array, the array is arranged on the surface of transparent substrates 11 and has between adjacent bar 14 gap 15.Bar 14
In each can include being clipped in reflected ray 13 between two absorption ribs 12.Gap 15 can be from bottom rib
The bottom of 12b (that is, closest to the rib 12 of substrate) extends to top rib near the bottom of bottom rib 12b
The top of 12a (that is, farthest away from the rib 12 of substrate).Gap 15 can be filled with air or filled with other materials, such as
Such as glass or other dielectric materials.
Rib 12 can be included to being expected any material that optical wavelength range is fully absorbing property.In one aspect, rib
Shape thing 12 can include germanium, silicon, titanium, tungsten, carbon and/or tantalum.In one aspect, rib 12 can comprising mass percent be to
Lack 80% germanium, at least 80% silicon, at least 80% tungsten, at least 80% carbon, at least 80% titanium or at least 80% tantalum.
Line 13 can be metal-it is, wiring 13 can be made by metal (generally pure metal or metal alloy)
Into.In one aspect, line 13 can include aluminium, chromium, silver and/or gold.In one aspect, line 13 can be comprising mass percent
At least 80% aluminium, at least 80% chromium, at least 80% silver or at least 80% gold.
At least one of rib 12 can be with abutment line 13.It is alternatively possible to will such as be used to improve the property of polarizer
The other materials of other thin-film materials of energy are arranged between the one or both in rib 12 and line 13.Bottom rib
12b can adjoin substrate 11, or the other materials of such as film can be arranged between bottom rib 12b and substrate.
Other materials are there may be or not existed on the top of the top surface of top rib 12a.
Designed according to overall wire-grid polarizer, line 13 and rib 12 there can be various thickness.In one embodiment,
Line 13 can have thickness between 140-220 nanometers, and rib 12 each can have between 10-30 nanometers
Thickness.Bar 14 can have the pitch (pitch) of the half-wavelength less than incident light.In one embodiment, bar 14 has
Pitch between 40-160 nanometers.
According to the embodiment disclosed herein make wire-grid polarizer in 450 nanometers to 700 nanometers of optical wavelength range,
One kind of light from the both sides (because absorption rib 12 clips line 13, be both sides) of the polarizer can be absorbed partially
Shake at least the 80% of (for example, s- polarised lights) and at least 80% of the inverted polarized (for example, p- polarised lights) through light.Another
In one embodiment, rib 12 can absorb more than 40% and reflect less than 60% in 450 nanometers to 700 nanometers of wavelength model
A kind of polarization (for example, s- polarised lights) of the light in enclosing.In one embodiment, line 13 can reflect greater than 80% and absorb little
In a kind of polarization of 20% light in 450 nanometers to 700 nanometers of wave-length coverage.
Manufacture method
Hereinafter make selective absorbing formula wire-grid polarizer method, the polarizer such as include said structure and
One in above-described embodiment of Performance Characteristics.The method can include below step, and it can enter in the order of presentation
OK:
1. on the surface of transparent substrates 11 deposit absorbent material layer (ground floor) 31.See Fig. 3 a.
2. on the surface of ground floor depositing reflective material layer (second layer) 32.See Fig. 3 b.
3. on the surface of the second layer deposit absorbent material layer (third layer) 33.See Fig. 3 c.
4. three layer 31-33 are etched to form bar 14 spaced apart, and bar 14 can:
A. it is substantially transmitted through a kind of polarization of light;And
B. substantially absorb from two rightabout d1And d2In either direction be incident to polarizer light it is mutually reverse-biased
Shake.See Fig. 1-2.Two rightabout d1And d2Can be perpendicular to the surface of substrate.
Image projection system
What is figure 4 illustrates is image projection system 40, including:(1) light source 41 and liquid crystal display (LCD) are arranged on
Wire-grid polarizer (light incident side wire-grid polarizer) 46 between 42;And (2) are arranged between X- cubes 43 and LCD 42
Another wire-grid polarizer (analyzer wire-grid polarizer) 45.LCD 42 can be arranged between wire-grid polarizer 45 and 46.
Light incident side wire-grid polarizer 46 and analyzer wire-grid polarizer 45 can have the wire-grid polarizer 10 of embodiment as above
Structure and Performance Characteristics.
Light incident side wire-grid polarizer 46 can be arranged on the position for receiving the light 44 from light source 41.Light incident side wiregrating is inclined
The device 46 that shakes can be substantially transmitted through a kind of polarization (for example, p- polarised lights) of the light 44 from light source 41 and substantially absorb
From the inverted polarized (for example, s- polarised lights) of the light 44 of light source 41.Light incident side wire-grid polarizer 46 can be arranged on reception to be come
From the position of the reflected light 47 of LCD 42.Light incident side wire-grid polarizer 46 can substantially absorb the reflected light from LCD 42
47。
Analyzer wire-grid polarizer 45 can be arranged on the position for receiving the light 49 from LCD 42.Analyzer wiregrating is inclined
The device 45 that shakes can be substantially transmitted through a kind of polarization (for example, p- polarised lights) of the light 49 from LCD and substantially absorb from
The inverted polarized (for example, s- polarised lights) of the light 49 of LCD.Analyzer wire-grid polarizer 45 can be arranged on into reception to stand from X-
The position of the reflected light 48 of cube 43.Analyzer wire-grid polarizer 46 can substantially absorb the reflected light from X- cubes 43
48。
Generally, the line of polarizer 45 and 46 is towards LCD 42, but as shown in fig. 6, its center line is towards light source 41 and/or X-
Cubical opposed configuration is also within the scope of the invention.
Accompanying drawing herein is not in proportion.Substrate 11 on thickness typically close to millimeter, but the allusion quotation on thickness of bar 14
Type ground is much smaller than millimeter, at least for the polarization of visible ray.Therefore, in order to illustrate the various elements of polarizer, accompanying drawing be not by
Ratio.In addition, typical wire-grid polarizer has many lines of the line more than 13 than illustrating, but in order to be clearly shown that knot
Structure, is only shown in the drawings some lines 13 or bar 14.
Claims (20)
1. a kind of image projection system, including:
A. the light incident side wire-grid polarizer being arranged between light source and liquid crystal display (LCD);
B. the light incident side wire-grid polarizer includes the array of parallel, long and narrow bar, and the array is arranged on transparent substrates
There is gap, each in the bar includes being clipped between two absorption ribs on surface and between adjacent bar
Reflected ray;
C. the light incident side wire-grid polarizer is arranged on the position for receiving the light from the light source, and can be substantially saturating
A kind of polarization for crossing the light from the light source and the inverted polarized for substantially absorbing the light from the light source;
And
D. the light incident side wire-grid polarizer be arranged on receive from the LCD reflected light position and can be substantially
Absorb the reflected light from the LCD.
2. image projection system according to claim 1, further includes:
A. analyzer wire-grid polarizer:
I. including the array of parallel, long and narrow bar, the array is arranged on the surface of transparent substrates and in adjacent bar
Between there is gap, each in the bar includes being clipped in reflected ray between two absorption ribs;And
Ii. it is arranged on the side contrary with the light incident side wire-grid polarizer of the LCD;And
B.X- cubes, it is arranged on the side contrary with the LCD of the analyzer wire-grid polarizer.
3. image projection system according to claim 1, wherein, in 450 nanometers to 700 nanometers of optical wavelength range,
The polarizer can:
A. absorb light from the both sides of the polarizer a kind of polarization at least 80%;And
B. through light inverted polarized at least 80%.
4. image projection system according to claim 1, wherein:
A. the rib can absorb more than 40% and reflect less than 60% in 450 nanometers to 700 nanometers of the wavelength
In the range of light a kind of polarization;
B. the line can reflect greater than 80% and absorb the wave-length coverage less than 20% at 450 nanometers to 700 nanometers
A kind of polarization of interior light.
5. image projection system according to claim 1, wherein, the rib is at least 80% comprising mass percent
Silicon, at least 80% titanium or at least 80% tantalum.
6. image projection system according to claim 1, wherein, at least one of rib neighbour described in each
Connect the line.
7. a kind of selective absorbing formula wire-grid polarizer, it includes the array of parallel, long and narrow bar, and the array is arranged on
There is gap, each in the bar includes being clipped in two absorption ribs on the surface of bright substrate and between adjacent bar
Reflected ray between shape thing.
8. wire-grid polarizer according to claim 7, wherein, in 450 nanometers to 700 nanometers of optical wavelength range, institute
Stating polarizer can:
A. absorb light from the both sides of the polarizer a kind of polarization at least 80%;And
B. through light inverted polarized at least 80%.
9. wire-grid polarizer according to claim 7, wherein:
A. the rib can absorb more than 40% and reflect less than 60% in 450 nanometers to 700 nanometers of the wavelength
In the range of light a kind of polarization;
B. the line can reflect greater than 80% and absorb the wave-length coverage less than 20% at 450 nanometers to 700 nanometers
A kind of polarization of interior light.
10. wire-grid polarizer according to claim 7, wherein, the bar is formed by etching to form the ribbed
Thing and the line.
11. wire-grid polarizers according to claim 7, wherein, the rib includes silicon, titanium, tantalum or combinations thereof.
12. wire-grid polarizers according to claim 7, wherein, the rib is at least 80% comprising mass percent
Silicon, at least 80% titanium or at least 80% tantalum.
13. wire-grid polarizers according to claim 7, wherein the line is metal.
14. wire-grid polarizers according to claim 7, wherein, at least one of rib neighbour described in each
Connect the line.
15. wire-grid polarizers according to claim 7, wherein, two ribs are in the contrary of the line in each
Both sides adjoin the line.
A kind of 16. methods for making selective absorbing formula wire-grid polarizer, methods described includes:
A. on the surface of transparent substrates deposit absorbent material layer (ground floor);
B. on the surface of the ground floor depositing reflective material layer (second layer);
C. on the surface of the second layer deposit absorbent material layer (third layer);And
D. three layers are etched to form bar spaced apart, the bar can:
I. it is substantially transmitted through a kind of polarization of light;And
Ii. the inverted polarized that the either direction from two rightabouts incides the light of the polarizer is substantially absorbed.
17. methods according to claim 16, wherein, it is described inclined in 450 nanometers to 700 nanometers of optical wavelength range
Shaking device can:
A. absorb light from the both sides of the polarizer a kind of polarization at least 80%;And
B. through light inverted polarized at least 80%.
18. methods according to claim 16, wherein:
A. the rib can absorb more than 40% and reflect less than 60% in 450 nanometers to 700 nanometers of the wavelength
In the range of light a kind of polarization;
B. the line can reflect greater than 80% and absorb the wave-length coverage less than 20% at 450 nanometers to 700 nanometers
A kind of polarization of interior light.
19. methods according to claim 16, wherein, at least one of rib described in each is adjacent described
Line.
20. methods according to claim 16, wherein, two ribs are adjacent in the two opposite sides of the line in each
Connect the line.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462016955P | 2014-06-25 | 2014-06-25 | |
US62/016,955 | 2014-06-25 | ||
PCT/US2015/034464 WO2015199948A1 (en) | 2014-06-25 | 2015-06-05 | Wire grid polarizer with dual absorptive regions |
Publications (1)
Publication Number | Publication Date |
---|---|
CN106662687A true CN106662687A (en) | 2017-05-10 |
Family
ID=57588811
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201580034067.XA Pending CN106662687A (en) | 2014-06-25 | 2015-06-05 | Wire grid polarizer with dual absorptive regions |
Country Status (2)
Country | Link |
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EP (1) | EP3120172A4 (en) |
CN (1) | CN106662687A (en) |
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CN107167863A (en) * | 2017-07-07 | 2017-09-15 | 深圳市华星光电技术有限公司 | The preparation method of nanometer wiregrating polaroid |
US10353239B2 (en) | 2017-07-07 | 2019-07-16 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Method of manufacturing nanowire grid polarizer |
CN111090176A (en) * | 2020-01-08 | 2020-05-01 | 上海交通大学 | Metal grating polarization beam splitter with asymmetric reflection |
CN112305657A (en) * | 2019-07-29 | 2021-02-02 | 莫克斯泰克公司 | Polarizer with composite material |
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CN101055329A (en) * | 2006-04-13 | 2007-10-17 | E.I.内穆尔杜邦公司 | Wire-grid polarizers, methods of fabrication thereof and their use in transmissive displays |
CN101329497A (en) * | 2007-06-22 | 2008-12-24 | 三洋电机株式会社 | Liquid crystal projector |
JP2012103468A (en) * | 2010-11-10 | 2012-05-31 | Asahi Kasei Corp | Optical element and projection type liquid crystal display device |
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EP3120172A4 (en) | 2017-11-22 |
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