CN106648237A - Graphene touch screen and preparation method thereof - Google Patents
Graphene touch screen and preparation method thereof Download PDFInfo
- Publication number
- CN106648237A CN106648237A CN201611199685.2A CN201611199685A CN106648237A CN 106648237 A CN106648237 A CN 106648237A CN 201611199685 A CN201611199685 A CN 201611199685A CN 106648237 A CN106648237 A CN 106648237A
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- Prior art keywords
- touch screen
- thin film
- graphene
- patterning
- surface catalysis
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The invention discloses a graphene touch screen and a preparation method thereof. The graphene touch screen comprises a touch screen body, wherein patterned surface catalytic self-limited films are arranged on two sides of the touch screen body, the patterns of the patterned surface catalytic self-limited films are as same as a sensor pattern to be manufactured and a wiring pattern thereof, and single-layer graphene is arranged on the surface of each of the patterned surface catalytic self-limited films. The preparation method of the graphene touch screen comprises the following steps: manufacturing the surface catalytic self-limited films on two sides of the touch screen body; etching the surface catalytic self-limited films to form the surface catalytic self-limited films as same as the sensor pattern to be manufactured and the wiring pattern thereof; and growing single-layer graphene on the surfaces of the patterned surface catalytic self-limited films. According to the graphene touch screen and the preparation method thereof disclosed by the invention, the transmittance is improved by single-layer graphene, the environmental pollution is avoided, and the manufacturing cost is low.
Description
Technical field
The invention belongs to consumer-elcetronics devices manufacturing technology field, more particularly to a kind of Graphene touch screen and its preparation
Method.
Background technology
Graphene is monolayer carbon atom, and thickness is 0.34nm, and transmitance is more than 97%, and carbon atom is according to SP2Orbital hybridization
Mode bonding, its carrier mobility is up to 2*105cm2/ (V*s), its electronics has the characteristic of ballistic transport, can reach
Micron order, is the best material of known conductivity, is also known strength highest material.Current touch screen is mostly used
ITO, nanometer silver or metal grill are Sensor, are difficult to realize more high permeability and oversize, it is difficult to meet consumer pair
In the higher and higher requirement of touch-control product.
Existing Graphene touch screen, typically using multi-layer graphene, the decline that the transmitance of multi-layer graphene can be rapidly, together
The method of Shi Chuantong needs that Graphene is transferred to above substrate, and substrate is corroded in such transfer process, causes to environment
Greatly pollution, and cost is high.
The content of the invention
To solve the above problems, the invention provides a kind of Graphene touch screen and preparation method thereof, using mono-layer graphite
Alkene improves transmitance, and will not be to environment, low manufacture cost.
A kind of Graphene touch screen that the present invention is provided, including touch screen body, the two-sided of the touch screen body has
There is the surface catalysis of patterning from thin film is limited, the surface catalysis of the patterning is from the pattern and biography to be produced for limiting thin film
Sensor pattern and its cabling pattern are identical, and the surface catalysis of the patterning is provided with mono-layer graphite from the surface for limiting thin film
Alkene.
Preferably, in above-mentioned Graphene touch screen, the surface catalysis of the patterning is Copper thin film from thin film is limited.
Preferably, in above-mentioned Graphene touch screen, the surface catalysis of the patterning is received from the thickness for limiting thin film for 6
Rice is to 1000 nanometers.
Preferably, in above-mentioned Graphene touch screen, the touch screen body is glass substrate.
A kind of manufacture method of Graphene touch screen that the present invention is provided, including:
Thin film is limited in the two-sided making surface catalysis of touch screen body certainly;
The surface catalysis is performed etching from thin film is limited, is formed and sensor patterns to be produced and its cabling pattern
The surface catalysis of identical patterning limits thin film certainly;
The superficial growth single-layer graphene of thin film is limited certainly in the surface catalysis of the patterning.
Preferably, in the manufacture method of above-mentioned Graphene touch screen,
The two-sided making surface catalysis in touch screen body limits thin film certainly:
In the two-sided magnetron sputtering plating of the touch screen body, Copper thin film is formed.
Preferably, in the manufacture method of above-mentioned Graphene touch screen,
The surface catalysis in the patterning limits the superficial growth single-layer graphene of thin film certainly:
Using powdered graphite as carbon source, room temperature is carried out from the surface for limiting thin film in the surface catalysis of the patterning normal
Pressure chemical vapor deposition, grows single-layer graphene.
Preferably, in the manufacture method of above-mentioned Graphene touch screen,
The surface catalysis in the patterning limits the superficial growth single-layer graphene of thin film certainly:
The surface chemistry vapor deposition growth single-layer graphene of thin film is limited certainly in the surface catalysis of the patterning, is continued
40 minutes to 100 minutes.
Above-mentioned Graphene touch screen provided by foregoing description, the present invention and preparation method thereof, due to the graphite
Alkene touch screen includes touch screen body, and the two-sided surface catalysis for being respectively provided with patterning of the touch screen body limits thin film certainly,
The surface catalysis of the patterning is identical with sensor patterns to be produced and its cabling pattern from the pattern for limiting thin film, described
The surface catalysis of patterning is provided with single-layer graphene from the surface for limiting Thinfilm pattern, therefore, it is possible to be carried using single-layer graphene
High permeability, and will not be to environment, low manufacture cost.
Description of the drawings
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this
Inventive embodiment, for those of ordinary skill in the art, on the premise of not paying creative work, can be with basis
The accompanying drawing of offer obtains other accompanying drawings.
The sectional view of the first Graphene touch screen that Fig. 1 is provided for the embodiment of the present application;
The top view of the first Graphene touch screen that Fig. 2 is provided for the embodiment of the present application;
The schematic diagram of the manufacture method of the first Graphene touch screen that Fig. 3 is provided for the embodiment of the present application.
Specific embodiment
The core concept of the present invention is to provide a kind of Graphene touch screen and preparation method thereof, is carried using single-layer graphene
High permeability, and will not be to environment, low manufacture cost.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than the embodiment of whole.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
As depicted in figs. 1 and 2, Fig. 1 is the embodiment of the present application to the first Graphene touch screen that the embodiment of the present application is provided
The sectional view of the first the Graphene touch screen for providing, the first Graphene touch screen that Fig. 2 is provided for the embodiment of the present application
Top view.The Graphene touch screen includes touch screen body 1, the two-sided surface for being respectively provided with patterning of the touch screen body 1
Catalysis from limiting thin film 2, the surface catalysis of the patterning from limit the pattern of thin film 2 and sensor patterns to be produced and its
Cabling pattern is identical, and the surface catalysis of the patterning is provided with single-layer graphene 3 from the surface for limiting thin film 2, needs explanation
, because with surface catalysis, from restriction effect, therefore the single-layer graphene for growing is when covering its surface, just no longer growth regulation
Two layer graphenes, the coverage rate highest of Graphene can reach 96%, can thus prepare stone two-sided with monolithic glass
The touch screen of black alkene, reduces the steps such as substrate etching, cleaning in Graphene transfer process, it is to avoid unfavorable shadow is caused to environment
Ring.
Above-mentioned the first Graphene touch screen provided by foregoing description, the embodiment of the present application, due to including tactile
Screen body is touched, the two-sided surface catalysis for being respectively provided with patterning of the touch screen body limits thin film, the table of the patterning certainly
Surface catalysis are identical with sensor patterns to be produced and its cabling pattern from the pattern for limiting thin film, and the surface of the patterning is urged
Change from the surface for limiting thin film and be provided with single-layer graphene, therefore, it is possible to improve transmitance using single-layer graphene, and will not be right
Environment, low manufacture cost.
Second Graphene touch screen that the embodiment of the present application is provided, is on the basis of above-mentioned the first Graphene touch screen
On, also including following technical characteristic:
The surface catalysis of the patterning is Copper thin film from thin film is limited.
It should be noted that the processing technology of this Copper thin film is more ripe, and the fusing point of copper is higher, with preferable table
Surface catalysis can be preferably here Copper thin film pattern from restriction effect, it is, of course, also possible to be realized together using other kinds of
The pattern of sample function, is not intended to limit herein.
The third Graphene touch screen that the embodiment of the present application is provided, is on the basis of above-mentioned second Graphene touch screen
On, also including following technical characteristic:
The surface catalysis of the patterning is 6 nanometers to 1000 nanometers from the thickness for limiting thin film.
It should be noted that the control to pattern thickness is realized by controlling sputtering power and time, in this thickness
In the range of Thinfilm pattern, both ensured its superficial growth single-layer graphene, be unlikely to again pattern it is too thick and increase production cost.
The 4th kind of Graphene touch screen that the embodiment of the present application is provided, be it is above-mentioned the first touch to the third Graphene
In screen on the basis of any one, also including following technical characteristic:
The touch screen body is glass substrate.
It should be noted that this glass substrate is easily obtained, and cost is relatively low, technical maturity, therefore is made herein
For touch screen body.
The manufacture method of the first Graphene touch screen that the embodiment of the present application is provided is as shown in figure 3, Fig. 3 is the application reality
The schematic diagram of the manufacture method of the first Graphene touch screen of example offer is provided.The method comprises the steps:
S1:Thin film is limited in the two-sided making surface catalysis of touch screen body certainly;
Specifically, can be thin in the two-sided plating last layer of touch screen body by two-sided upright magnetron sputtering film technique
Film.
S2:The surface catalysis is performed etching from thin film is limited, is formed and sensor patterns and its cabling to be produced
The surface catalysis of pattern identical patterning limits thin film certainly;
Specifically, this etching technics includes the step such as gluing, exposure, development, etching, respectively on the two sides of glass by copper
Thin film etches the sensor patterns of needs and cabling pattern, using the surface catalysis of this patterning from limiting thin film as follow-up
The substrate of growth single-layer graphene, using this surface catalysis from restriction effect, it is ensured that only grow single-layer graphene.
S3:The superficial growth single-layer graphene of thin film is limited certainly in the surface catalysis of the patterning.
Specifically, monolayer can be grown by way of two-sided upright normal temperature and pressure CVD or molecular beam epitaxy film forming
Graphene, directly just can bind FPC, and Cover Lens laminatings by the use of this single-layer graphene as cabling, so very big
Improve production efficiency, reduce production cost.
The manufacture method of second Graphene touch screen that the embodiment of the present application is provided, is touched in above-mentioned the first Graphene
On the basis of touching the manufacture method of screen, also including following technical characteristic:
The two-sided making surface catalysis in touch screen body limits thin film certainly:
In the two-sided magnetron sputtering plating of the touch screen body, Copper thin film is formed.
It should be noted that the processing technology of this Copper thin film is more ripe, and the fusing point of copper is higher, with preferable table
Surface catalysis can be preferably here Copper thin film from restriction effect, it is, of course, also possible to using other kinds of metal, such as platinum,
Silver or iridium etc., realize the pattern of said function, are not intended to limit herein.Touch screen body is vertically placed, at the same it is two-sided enter
Row magnetron sputtering plating, it becomes possible to improve work efficiency.
The manufacture method of the third Graphene touch screen that the embodiment of the present application is provided, is touched in above-mentioned second Graphene
On the basis of touching the manufacture method of screen, also including following technical characteristic:
The surface catalysis in the patterning limits the superficial growth single-layer graphene of thin film certainly:
Using powdered graphite as carbon source, low temperature is carried out from the surface for limiting thin film in the surface catalysis of the patterning normal
Pressure chemical vapor deposition, grows single-layer graphene.
It should be noted that this powdered graphite is easily obtained, and cost is relatively low, technical maturity, therefore selects stone herein
Powdered ink end grows single-layer graphene for raw material.
The embodiment of the present application provide the 4th kind of Graphene touch screen manufacture method, be it is above-mentioned the first to the third
In the manufacture method of Graphene touch screen on the basis of any one, also including following technical characteristic:
The surface catalysis in the patterning limits the superficial growth single-layer graphene of thin film certainly:
The surface chemistry vapor deposition growth single-layer graphene of thin film is limited certainly in the surface catalysis of the patterning, is continued
40 minutes to 100 minutes.
It should be noted that by control growth duration, the control of single-layer graphene thickness can be realized.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or using the present invention.
Various modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, the present invention
The embodiments shown herein is not intended to be limited to, and is to fit to and principles disclosed herein and features of novelty phase one
The most wide scope for causing.
Claims (8)
1. a kind of Graphene touch screen, it is characterised in that including touch screen body, the two-sided of the touch screen body is respectively provided with figure
, from thin film is limited, the surface catalysis of the patterning is from the pattern and sensor to be produced for limiting thin film for the surface catalysis of case
Pattern and its cabling pattern are identical, and the surface catalysis of the patterning is provided with single-layer graphene from the surface for limiting thin film.
2. Graphene touch screen according to claim 1, it is characterised in that the surface catalysis of the patterning is thin from limiting
Film is Copper thin film.
3. Graphene touch screen according to claim 2, it is characterised in that the surface catalysis of the patterning is thin from limiting
The thickness of film is 6 nanometers to 1000 nanometers.
4. the Graphene touch screen according to any one of claim 1-3, it is characterised in that the touch screen body is glass
Substrate.
5. a kind of manufacture method of Graphene touch screen, it is characterised in that include:
Thin film is limited in the two-sided making surface catalysis of touch screen body certainly;
The surface catalysis is performed etching from thin film is limited, is formed identical with sensor patterns to be produced and its cabling pattern
Patterning surface catalysis from limiting thin film;
The superficial growth single-layer graphene of thin film is limited certainly in the surface catalysis of the patterning.
6. the manufacture method of Graphene touch screen according to claim 5, it is characterised in that
The two-sided making surface catalysis in touch screen body limits thin film certainly:
In the two-sided magnetron sputtering plating of the touch screen body, Copper thin film is formed.
7. the manufacture method of Graphene touch screen according to claim 6, it is characterised in that
The surface catalysis in the patterning limits the superficial growth single-layer graphene of thin film certainly:
Using powdered graphite as carbon source, normal temperature and pressure is carried out from the surface for limiting thin film in the surface catalysis of the patterning
Vapour deposition is learned, single-layer graphene is grown.
8. the manufacture method of the Graphene touch screen according to any one of claim 5-7, it is characterised in that
The surface catalysis in the patterning limits the superficial growth single-layer graphene of thin film certainly:
The surface chemistry vapor deposition growth single-layer graphene of thin film is limited certainly in the surface catalysis of the patterning, continues 40 points
Clock was to 100 minutes.
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CN102708946A (en) * | 2012-05-09 | 2012-10-03 | 崔铮 | Double-sided graphical transparent conductive film and preparation method thereof |
CN203276222U (en) * | 2013-05-15 | 2013-11-06 | 南昌欧菲光科技有限公司 | Novel double-side flexible ITO conducting film structure |
CN104658642A (en) * | 2015-03-16 | 2015-05-27 | 广东迪奥应用材料科技有限公司 | Graphite film-like based transparent conducting glass and large-area continuous production method thereof |
CN105070352A (en) * | 2015-07-22 | 2015-11-18 | 西安交通大学 | Flexible super-flat transparent conductive film and preparing method thereof |
CN106055161A (en) * | 2016-06-29 | 2016-10-26 | 京东方科技集团股份有限公司 | Touch screen panel, preparation method thereof, and display device |
CN106201088A (en) * | 2016-07-13 | 2016-12-07 | 信利光电股份有限公司 | A kind of flexible base board and the manufacture method of touch screen |
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2016
- 2016-12-22 CN CN201611199685.2A patent/CN106648237A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102708946A (en) * | 2012-05-09 | 2012-10-03 | 崔铮 | Double-sided graphical transparent conductive film and preparation method thereof |
CN203276222U (en) * | 2013-05-15 | 2013-11-06 | 南昌欧菲光科技有限公司 | Novel double-side flexible ITO conducting film structure |
CN104658642A (en) * | 2015-03-16 | 2015-05-27 | 广东迪奥应用材料科技有限公司 | Graphite film-like based transparent conducting glass and large-area continuous production method thereof |
CN105070352A (en) * | 2015-07-22 | 2015-11-18 | 西安交通大学 | Flexible super-flat transparent conductive film and preparing method thereof |
CN106055161A (en) * | 2016-06-29 | 2016-10-26 | 京东方科技集团股份有限公司 | Touch screen panel, preparation method thereof, and display device |
CN106201088A (en) * | 2016-07-13 | 2016-12-07 | 信利光电股份有限公司 | A kind of flexible base board and the manufacture method of touch screen |
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