CN106646839B - Deep ultraviolet spectrum off-axis four-reflector optical imaging system - Google Patents
Deep ultraviolet spectrum off-axis four-reflector optical imaging system Download PDFInfo
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- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
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Abstract
The invention provides an off-axis four-reflector optical imaging system of a deep ultraviolet spectrum, which adopts four off-axis reflectors arranged off-axis, reflects a main optical axis of incident light of the imaging system for multiple times (namely folds light beams) through optical elements with special positions and specific models, outputs emergent light parallel to the main optical axis of the incident light of the imaging system, has compact structure and can be applied to narrow space.
Description
Technical Field
The invention relates to an optical imaging system, in particular to an off-axis four-reflector optical imaging system working in a deep ultraviolet spectrum. The system is used for collecting Thomson scattering spectrum signals generated by interaction of deep ultraviolet probe light and plasma in a laser nuclear fusion target field and acquiring various parameters of the plasma.
Background
Laser-plasma interaction is a very critical area of research in inertial confinement laser fusion (ICF) research. The plasma absorbs, scatters, focuses into filaments, transfers energy among beams and the like to the targeting laser, reduces the energy of the targeting laser, destroys the symmetry of fusion fuel compression, and increases the difficulty of compression by preheating the fuel with the super-thermal electrons. To the extent that plasma determines the success or failure of fusion, research on plasma has taken a crucial position in ICF.
However, the general contact measurement approach is not feasible for the high temperature, high density plasma generated in the target. Thomson scattering diagnosis has unique advantages as a non-contact measurement mode and becomes a necessary tool for measuring laser plasma parameters. The principle is as follows: the probe light is incident into the plasma area, the plasma generates secondary radiation to the incident probe light to form scattered waves, the information such as electron temperature, density and the like of the plasma can be obtained as long as the scattered wave spectrum is measured, and the fluctuation condition of the plasma can be reflected by the time-resolved spectrum.
The existing thomson scattering diagnostic systems mainly have two types: an X-ray Thomson scattering diagnostic system and a near ultraviolet/visible/near infrared Thomson diagnostic system.
The X-ray Thomson scattering diagnosis system is mainly applied to the field of magnetic confinement nuclear fusion with low focusing requirements due to difficulty in focusing, and is rarely applied to the field of laser fusion.
The existing near ultraviolet/visible/near infrared Thomson diagnostic system has two structural forms of transmission type and refraction and reflection type, and probe light adopts visible light (double frequency 526.5nm) or near ultraviolet light (quadruple frequency 263 nm); the biggest problem is that the signal light is weak, and the interference of stray light in the target chamber is strong. The target hitting fundamental frequency light (1053nm), the frequency doubling light and the frequency tripling light, as well as the Brillouin scattering light, the Raman scattering light and the like of the target hitting light, so that the stray light in the target chamber is extremely complex, the spectral distribution is very wide, and the range from ultraviolet to infrared is wide.
In order to solve the problem of low measurement signal-to-noise ratio caused by stray light interference of a target field, the wavelength of the probe light can be selected only in a deep ultraviolet region or a far infrared region. However, limited by critical electron density and absorption and refraction of plasma, the long wavelength is more difficult to pass through the region with higher electron density, and cannot meet the diagnosis requirement of the plasma region with critical density larger than the driving laser, so that only the deep ultraviolet band can be selected.
In deep ultraviolet thomson scattering diagnostics, a central issue is the design of the deep ultraviolet optical system. Deep ultraviolet optical systems are extremely difficult because of the extremely low transmittance of the optical materials. In addition, since deep ultraviolet attenuation is severely unable to be applied in atmospheric transmission, the deep ultraviolet imaging system must be integrated in a limited vacuum space together with an electronic measurement recording device, thereby resulting in a large compression of the space for placing the deep ultraviolet imaging system.
Disclosure of Invention
The invention aims to provide a folding type deep ultraviolet off-axis four-reflector optical imaging system to adapt to a narrow imaging space.
The technical solution of the invention is as follows:
the provided deep ultraviolet spectrum off-axis four-reflector optical imaging system defines the center of an object plane as a coordinate origin, and the right direction is a Z-axis positive direction and the upward direction is a Y-axis positive direction; it is characterized in that:
the imaging system comprises window glass, a first off-axis reflector, a second off-axis reflector, a third off-axis reflector and a fourth off-axis reflector;
defining a main optical axis of an incident beam of the imaging system as a first main optical axis, a main optical axis of a reflected beam of the first off-axis reflector as a second main optical axis, a main optical axis of a reflected beam of the second off-axis reflector as a third main optical axis, and a main optical axis of a reflected beam of the third off-axis reflector as a fourth main optical axis;
the window is a parallel glass window, is positioned on the main optical axis of the incident light of the imaging system and is vertical to the Z axis, and the distance from the front surface of the window to the origin of coordinates is 600 mm;
the off-axis reflector I is a spherical concave reflector, the radius of the spherical surface is 1114.18mm, and the aperture of the reflector body is phi 170 mm; a center of the off-axis mirror is positively offset from the primary optical axis by 261.80mm along the Y-axis and rotated 9.378 ° counterclockwise about the X-axis; the distance between the off-axis reflector I and the window is 692.08mm along the direction of the main optical axis I;
the off-axis reflector II is a spherical convex reflector, the radius of the spherical surface is 905.45mm, and the aperture of the reflector body is phi 80 mm; the center of the off-axis reflector II is deviated from the main optical axis by 253.85mm along the positive direction of the Y axis and rotates for 6.208 degrees anticlockwise around the X axis; the distance between the off-axis reflector II and the off-axis reflector I is 692.08mm along the direction of the main optical axis II;
the off-axis reflector III is a spherical convex reflector, the radius of the spherical surface is 1866.64mm, and the aperture of the reflector body is phi 65 mm; the three centers of the off-axis reflector are deviated from the main optical axis by 246.16mm along the positive direction of the Y axis and rotate by 13.12 degrees anticlockwise around the X axis; the distance between the off-axis reflector III and the off-axis reflector II is 471.47mm along the direction of the main optical axis III;
the off-axis reflector IV is a concave off-axis parabolic mirror, the curvature radius at the vertex of the parabolic mirror is 1326.64mm, and the caliber of the mirror body is phi 65 mm; the center of the off-axis reflector is negatively deviated from the main optical axis by 467.65mm along the Y axis and rotates anticlockwise by 30.95 degrees around the X axis; and the distance between the off-axis reflector IV and the off-axis reflector III is 507.80mm along the direction of the main optical axis IV.
Preferably, the window material is MgF2, with a diameter of 120mm and a thickness of 8.0 mm.
Compared with the prior art, the invention has the following advantages:
1. the invention adopts four off-axis reflectors arranged off-axis, reflects the main optical axis of the incident light of the imaging system for multiple times (namely folds the light beam) through optical elements with special positions and specific models, outputs the emergent light parallel to the main optical axis of the incident light of the imaging system, and can be applied to narrow space.
2. The invention adopts a penta-frequency-doubling (210.6nm) probe light off-axis four-mirror structure. The off-axis reflecting structure avoids the problem of shielding of the secondary mirror center of the Cassegrain coaxial system; the deep ultraviolet spectrum selection gets rid of the interference of stray light of the target chamber; the optical fiber laser has the advantages of high light receiving efficiency, compact structure, small transmission loss, good imaging quality and the like.
Drawings
FIG. 1 is a schematic view of the optical system of the present invention (in the case of off-axis mirror body);
FIG. 2 is a schematic view of the optical system of the present invention (after off-axis cutting of the mirror body);
in the figure: m1-off-axis mirror one; m2-off-axis mirror two; m3-off-axis mirror 3; m4-off-axis mirror four; w-window glass.
Detailed Description
The imaging optical system structure provided by the invention is shown in fig. 1 and 2, and is an off-axis four-mirror optical system, and the inside of the imaging optical system comprises 5 optical elements: 1 window glass W and 4 off-axis reflectors (M1-M4). The window glass material is MgF2, the M1-M3 are spherical mirrors, and the glass is used in an off-axis and inclined way; m4 is an off-axis parabolic mirror.
The main performance indexes of the system are as follows:
(a) working spectrum section: 150nm-220 nm;
(b) field range: plus or minus 3 mm;
(c) magnification: 2.24X;
(d) an object space NA: 0.06;
(e) object space resolution: 25 μm.
The following describes the detailed parameters of the imaging system in terms of 7 aspects, such as object plane, window, M1, M2, M3, M4, and image plane, respectively. The system coordinate system is a right-hand coordinate system: the center of the object plane is the coordinate origin, the right is the + Z axis, and the upward is the + Y axis.
For convenience of description, first, a main optical axis of an incident beam of the imaging system is defined as a first main optical axis, a main optical axis of a reflected beam of the first off-axis reflector is defined as a second main optical axis, a main optical axis of a reflected beam of the second off-axis reflector is defined as a third main optical axis, a main optical axis of a reflected beam of the third off-axis reflector is defined as a fourth main optical axis, and a main optical axis of a reflected beam of the fourth off-axis reflector is defined as a fifth main optical axis.
(1) Article surface
The center of the object plane is positioned at the origin of coordinates; the size of the field of view is phi 6.0 mm; signal spectral range: 150nm to 220 nm; an object space NA: 0.06.
(2) window W
The window is a parallel glass window made of MgF2, the diameter is phi 120mm, and the thickness is 8.0 mm; placed perpendicular to the + Z axis, the front surface is 600.0mm from the origin d 1.
(3) Mirror M1
M1 is a spherical concave reflector, the radius of the spherical surface is 1114.18mm, the Y-direction off-axis amount is +261.80mm, the rotation is-9.378 degrees (anticlockwise) around the X-axis, the distance (along the primary optical axis I) d2 between W and M1 is 692.08mm, and the caliber of the reflector body is phi 170 mm.
(4) Mirror M2
M2 is a spherical convex mirror, the radius of the spherical surface is 905.45mm, the Y-direction off-axis amount is +253.85mm, the mirror rotates by-6.208 degrees (anticlockwise) around the X axis, the distance (along the second main optical axis) d3 between M1 and M2 is 626.58mm, and the caliber of the mirror body is phi 80 mm.
(5) Mirror M3
M3 is a spherical convex mirror, the radius of the spherical surface is 1866.64mm, the Y-direction off-axis amount is +246.16mm, the mirror rotates by-13.12 degrees (anticlockwise) around the X-axis, the distance (along the main optical axis three) d4 between M2 and M3 is 471.47mm, and the caliber of the mirror body is phi 65 mm.
(6) Mirror M4
M4 is a concave off-axis parabolic mirror, the curvature radius at the vertex of the parabolic mirror is 1326.64mm, the Y-direction off-axis amount is-467.65 mm, the parabolic mirror rotates around the X-axis for-30.95 degrees (anticlockwise), the distance (four along the main optical axis) d5 between M3 and M4 is 507.80mm, and the caliber of the mirror body is phi 65 mm.
(7) Image plane
The designed 'emergent ray main optical axis' is parallel to the 'incident ray main optical axis', the image plane is vertical to the Z axis, the size of the image plane is phi 13.44mm, and the distance (five along the main optical axis) d7 from M4 is 800.04 mm.
Claims (2)
1. An off-axis four-reflector imaging system of a deep ultraviolet spectrum, which defines the center of an object plane as a coordinate origin, and is in a Z-axis forward direction towards the right and in a Y-axis forward direction upwards; the method is characterized in that:
the imaging system comprises a window, a first off-axis reflector, a second off-axis reflector, a third off-axis reflector and a fourth off-axis reflector;
defining a main optical axis of an incident beam of the imaging system as a first main optical axis, a main optical axis of a reflected beam of the first off-axis reflector as a second main optical axis, a main optical axis of a reflected beam of the second off-axis reflector as a third main optical axis, and a main optical axis of a reflected beam of the third off-axis reflector as a fourth main optical axis;
the window is a parallel glass window, is positioned on the main optical axis of the incident light of the imaging system and is vertical to the Z axis, and the distance from the front surface of the window to the origin of coordinates is 600 mm;
the off-axis reflector I is a spherical concave reflector, the radius of the spherical surface is 1114.18mm, and the aperture of the reflector body is phi 170 mm; a center of the off-axis mirror is positively offset from the primary optical axis by 261.80mm along the Y-axis and rotated 9.378 ° counterclockwise about the X-axis; the distance between the off-axis reflector I and the window is 692.08mm along the direction of the main optical axis I;
the off-axis reflector II is a spherical convex reflector, the radius of the spherical surface is 905.45mm, and the aperture of the reflector body is phi 80 mm; the center of the off-axis reflector II is deviated from the main optical axis by 253.85mm along the positive direction of the Y axis and rotates for 6.208 degrees anticlockwise around the X axis; the distance between the off-axis reflector II and the off-axis reflector I is 692.08mm along the direction of the main optical axis II;
the off-axis reflector III is a spherical convex reflector, the radius of the spherical surface is 1866.64mm, and the aperture of the reflector body is phi 65 mm; the three centers of the off-axis reflector are deviated from the main optical axis by 246.16mm along the positive direction of the Y axis and rotate by 13.12 degrees anticlockwise around the X axis; the distance between the off-axis reflector III and the off-axis reflector II is 471.47mm along the direction of the main optical axis III;
the off-axis reflector IV is a concave off-axis parabolic mirror, the curvature radius at the vertex of the parabolic mirror is 1326.64mm, and the caliber of the mirror body is phi 65 mm; the center of the off-axis reflector is negatively deviated from the main optical axis by 467.65mm along the Y axis and rotates anticlockwise by 30.95 degrees around the X axis; and the distance between the off-axis reflector IV and the off-axis reflector III is 507.80mm along the direction of the main optical axis IV.
2. The deep ultraviolet spectral off-axis four-mirror optical imaging system of claim 1, wherein: the window material is MgF2, the diameter is phi 120mm, and the thickness is 8.0 mm.
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| CN113056079A (en) * | 2021-03-29 | 2021-06-29 | 中国工程物理研究院激光聚变研究中心 | Double-angle deep ultraviolet Thomson scattering diagnosis system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1463372A (en) * | 2001-04-11 | 2003-12-24 | 松下电器产业株式会社 | Reflection optical device and imaging appts. comprising it, multi-wavelength imaging appts. and vehicle mounted monitor |
| CN102378935A (en) * | 2009-03-30 | 2012-03-14 | 卡尔蔡司Smt有限责任公司 | Imaging optics and projection exposure installation for microlithography with an imaging optics of this type |
| WO2016117118A1 (en) * | 2015-01-23 | 2016-07-28 | 国立大学法人九州大学 | Euv light generation system, euv light generation method, and thomson scattering measurement system |
| CN205581391U (en) * | 2016-03-16 | 2016-09-14 | 凯迈（洛阳）测控有限公司 | Long burnt infrared optical system of catadioptric off -axis |
| CN206515548U (en) * | 2017-01-24 | 2017-09-22 | 中国科学院西安光学精密机械研究所 | The anti-optical imaging system of deep ultraviolet spectral coverage off-axis four |
-
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- 2017-01-24 CN CN201710060183.XA patent/CN106646839B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1463372A (en) * | 2001-04-11 | 2003-12-24 | 松下电器产业株式会社 | Reflection optical device and imaging appts. comprising it, multi-wavelength imaging appts. and vehicle mounted monitor |
| CN102378935A (en) * | 2009-03-30 | 2012-03-14 | 卡尔蔡司Smt有限责任公司 | Imaging optics and projection exposure installation for microlithography with an imaging optics of this type |
| WO2016117118A1 (en) * | 2015-01-23 | 2016-07-28 | 国立大学法人九州大学 | Euv light generation system, euv light generation method, and thomson scattering measurement system |
| CN205581391U (en) * | 2016-03-16 | 2016-09-14 | 凯迈（洛阳）测控有限公司 | Long burnt infrared optical system of catadioptric off -axis |
| CN206515548U (en) * | 2017-01-24 | 2017-09-22 | 中国科学院西安光学精密机械研究所 | The anti-optical imaging system of deep ultraviolet spectral coverage off-axis four |
Non-Patent Citations (4)
| Title |
|---|
| "基于神光Ⅲ主机的背向散射光诊断技术";王峰;《中国激光》;20150930;第42卷(第9期);全文 * |
| "神光-Ⅲ主机近背向散射诊断光学系统设计";闫亚东;《光学精密工程》;20140630;第22卷(第6期);全文 * |
| "神光-Ⅲ汤姆孙散射诊断的集光系统设计";闫亚东;《光学学报》;20110630;第31卷(第6期);全文 * |
| "神光-Ⅲ汤姆逊散射诊断成像系统设计与研究";卢卫涛;《中国优秀博硕士学位论文全文数据库（硕士）工程科技Ⅱ辑》;20130615;全文 * |
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