CN106646746A - Fine processing method for end face of optical fiber - Google Patents
Fine processing method for end face of optical fiber Download PDFInfo
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- CN106646746A CN106646746A CN201510733370.0A CN201510733370A CN106646746A CN 106646746 A CN106646746 A CN 106646746A CN 201510733370 A CN201510733370 A CN 201510733370A CN 106646746 A CN106646746 A CN 106646746A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/25—Preparing the ends of light guides for coupling, e.g. cutting
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Abstract
The invention relates to a fine processing method for the end face of an optical fiber. The characteristics lie in that the fine processing method comprises the following steps: step one, an optical fiber cutting operating region is arranged in a vacuum chamber (1), the top part inside the vacuum chamber (1) is provided with a high-resolution zoom CCD (2), the inner wall of the vacuum chamber (1) is provided with a focusing high-energy ion gun (3) and a monitor (9), and the first focusing high-energy ion gun (3) is connected with the monitor (9); the inner wall of the other side of the vacuum chamber (1) is provided with a second focusing high-energy ion gun (4), and the second focusing high-energy ion gun (4) is connected with the monitor (9); a fine movement platform (8) is installed on the inner wall, where the focusing high-energy ion gun (3) is installed, of the vacuum chamber (1) below the position of the monitor (9), and a fine optical fiber fixture (7) is installed on the fine movement platform (8); the fine movement platform (8) is connected with the monitor; and the high-resolution zoom CCD (2) is connected with the monitor (9).
Description
Technical field
The present invention is a kind of fiber end face fine processing method, belongs to laser technology field, especially belongs to optical fiber and swashs
Optical fiber processing method in light technology.
Technical background
Optical fiber laser has the advantages such as good beam quality, high conversion efficiency, integrated level height in industry, military affairs neck
Domain has a wide range of applications.Modern industry is processed needs the power output of optical fiber laser with military tactical weapon
Reach more than multikilowatt or even myriawatt magnitude, also height is proposed to the physical property and handling process of optical fiber itself
Require, such as high temperature resistant, high damage threshold, end face processing is smooth indefectible, is processed into arbitrarily angled etc..Especially
In the pumping system of end, fiber end face should be as the input of pump light, again as the output of resonator for it
End, needs to bear the two-way pressure of pump light and oscillating laser, and end face slightly cut, flaw, pollutant exist
Optical fiber can be burnt during multikilowatt above power transmission.
With the progress of Fiber laser technology, the species of optical fiber family is also being continuously increased, and novel optical fiber is constantly asked
Generation, such as photonic crystal fiber, microstructured optical fibers, multi-core fiber, triangular-cored optical fiber, plastic optical fiber, many bags
Layer optical fiber etc., but the mode for processing end caps at present is also limited to mechanical lapping and special cutter
Cutting.During mechanical lapping, multiple tracks grinding technics is needed, pouncing paper particle is descending progressively to be ground, technique
It is considerably complicated, and easily leave tiny cut in end face.For microstructured optical fibers or photonic crystal fiber,
Abrasive grains can be left in air band gap during mechanical lapping thereon, in optical fiber use, is connected if any high power
During the high pulse laser of continuous light or peak power, fiber end face hot focus can be caused, optical fiber can be caused when serious
Facet damage or even optical fiber burn.The tiny cut that mechanical milling tech is easily stayed in fiber end face, it is unfavorable
In the use of optical fiber.Mechanical lapping can introduce stress, easily cause the lattice inside fiber optic materials and form deformation
Layer.For different optical fiber needs to arrange different parameters, such as pulling force size, knife when being cut using cutter
Head stepping number of times, cutting angle etc., road junction cut channel is easily left when polygon optical fiber is cut, and cuts photon
The air band gap fragmentation in the middle of it is easily caused during crystal optical fibre.When multikilowatt or more power are transmitted, this
A little flaws can cause fiber end face to produce focus, and end face can be damaged during excessive temperature differentials, and optical fiber can be burnt when serious.
For this purpose, the present invention discloses a kind of fiber end face fine processing method, using the argon ion of material surface process
Thinning mode processes fiber end face, while overcoming the defect that mechanical lapping and cutter cutting are present.
The content of the invention
The invention aims to solve science and engineering at problem present in technical background and current fiber end face
A kind of technological deficiency present in skill, there is provided fiber end face fine processing method.
A kind of fiber end face fine processing method, it is characterised in that including following several steps：
Step one：Fiber cut operating space is arranged in a vacuum chamber 1, on the top in vacuum chamber 1
High-resolution zoom CCD2 is installed, focused high-energy ion gun 3 and monitoring are installed on the inwall of vacuum chamber 1
Device 9, the first focused high-energy ion gun 3 is connected with watch-dog 9；Install on the opposite side inwall of vacuum chamber 1
There is the second focused high-energy ion gun 4, the second focused high-energy ion gun 4 is connected with watch-dog 9；In vacuum chamber
It is provided with 1 inwall on the inwall of focused high-energy ion gun 3, in the lower section of the position of watch-dog 9, installs one
Individual fine movement platform 8, is provided with a fine fiber clamp 7 above fine movement platform 8；Fine movement
Platform 8 is connected with watch-dog 9；High-resolution zoom CCD2 is connected with watch-dog 9；
Step 2：The coat of the end face of optical fiber 01 of required process is peelled off into one section, is placed in vacuum chamber 1
Fine fiber clamp 7 on, the optical fiber at remaining end is placed on the bottom of vacuum chamber 1, places closing vacuum
Room 1, and open the vacuum environment that vavuum pump realizes vacuum chamber 1；
Step 3：Fine movement platform 8 is adjusted by watch-dog 9, the regulation includes the fiber end face of required process
Angle of inclination, fiber end face roughness thinning position of different sizes and required is different, by required process
Alignd with the muzzle of focused high-energy ion gun 3 and focusing low energy ion gun 4 by lifting thinning position；It is logical
The inclination of adjustment fine movement platform 8 is crossed come the angle of process needed for reaching, is learnt according to the stroke of stepper motor
The inclined angle of the institute of fine movement platform 8, and angle of inclination size has display in watch-dog 9；
Step 4：CCD2 is operated by watch-dog 9, adjusted the height of CCD, focal position, put
Big multiplying power so that the image of fiber end face can be clearly indicated in watch-dog 9；
Step 5：The vacuum for treating vacuum chamber 1 reaches 10-6During Pa, vavuum pump does not stop, now can be by prison
Control device 9 starting focused high-energy ion gun 3 or focus on low energy ion gun 4, while according to the long and slender footpath of light it is different come
The rate of translation of adjustment fine movement platform 8, makes the surface 10 of the optical fiber 01 that need to be processed in focused high-energy ion
Rifle 3 or focusing low energy ion gun 4 are moved under, and the surface 10 for making the optical fiber 01 that need to be processed is rubbed, etc.
The whole end face of optical fiber all through focused high-energy ion gun 3 or focus on low energy ion gun 4 muzzle horizontal level when,
Represent that whole thinning process terminates；Now the atomic layer of whole fiber end face all uniformly impacts by argon ion,
Until the roughness of surface 10 of fiber end face is less than 0.5nm, ultraphotic slip level is reached；
Step 6：At the end for the treatment of direct sample-covering, the data verification end face processing result gathered by CCD2；
If flaw, step 5 is proceeded to；If indefectible, the work of stopping vavuum pump, then after a period of time
Vacuum chamber 1 is opened after slowly destroying Deng the vacuum environment in vacuum chamber 1 and takes out optical fiber.
The rate of translation of thin sports platform 8 is controlled in 10-10000um/h in its step 5.
The kinematic accuracy of the fine movement platform 8 described in step 3 in 20nm, under normal circumstances
The optical fiber in 5-3000um fibres footpath can all ensure high precision manipulation.
From in terms of technical scheme, the invention has the beneficial effects as follows：
1st, can simultaneously overcome the defect of traditional mechanical lapping and cutter cutting process fiber end face, not deposit
In cut, surface deflections, cutting knife, unstressed introducing.
2nd, surface smoothness processes all high, close super-smooth surface than traditional mechanical lapping and cutter.
3rd, once success, without the need for loaded down with trivial details processing step.
4th, can with fine processing any materials, arbitrarily fibre footpath, the fiber end face of arbitrary structures.
Description of the drawings
Fig. 1. apparatus of the present invention structural representation.
Wherein, 01 is optical fiber, and 1 is vacuum chamber, and 2 is high-resolution zoom CCD, 3 be the first focused high-energy from
Sub- rifle, 4 is the second focused high-energy ion gun, and 5 go coating layer segment, 6 containing for optical fiber for optical fiber 01
Coating layer segment, 7 is fine fiber clamp, and 8 is fine movement platform, and 9 is watch-dog, and 10 is optical fiber 01
Surface.
Specific embodiment
A kind of fiber end face fine processing method, it is characterised in that including following several steps：
Step one：Fiber cut operating space is arranged in a vacuum chamber 1, on the top in vacuum chamber 1
High-resolution zoom CCD2 is installed, focused high-energy ion gun 3 and monitoring are installed on the inwall of vacuum chamber 1
Device 9, the first focused high-energy ion gun 3 is connected with watch-dog 9；Install on the opposite side inwall of vacuum chamber 1
There is the second focused high-energy ion gun 4, the second focused high-energy ion gun 4 is connected with watch-dog 9；In vacuum chamber
It is provided with 1 inwall on the inwall of focused high-energy ion gun 3, in the lower section of the position of watch-dog 9, installs one
Individual fine movement platform 8, is provided with a fine fiber clamp 7 above fine movement platform 8；Fine movement
Platform 8 is connected with watch-dog 9；High-resolution zoom CCD2 is connected with watch-dog 9；
Step 2：The coat of the end face of optical fiber 01 of required process is peelled off into one section, is placed in vacuum chamber 1
Fine fiber clamp 7 on, the optical fiber at remaining end is placed on the bottom of vacuum chamber 1, places closing vacuum
Room 1, and open the vacuum environment that vavuum pump realizes vacuum chamber 1；
Step 3：Fine movement platform 8 is adjusted by watch-dog 9, the regulation includes the fiber end face of required process
Angle of inclination, fiber end face roughness thinning position of different sizes and required is different, by required process
Alignd with the muzzle of focused high-energy ion gun 3 and focusing low energy ion gun 4 by lifting thinning position；It is logical
The inclination of adjustment fine movement platform 8 is crossed come the angle of process needed for reaching, is learnt according to the stroke of stepper motor
The inclined angle of the institute of fine movement platform 8, and angle of inclination size has display in watch-dog 9；
Step 4：CCD2 is operated by watch-dog 9, adjusted the height of CCD, focal position, put
Big multiplying power so that the image of fiber end face can be clearly indicated in watch-dog 9；
Step 5：The vacuum for treating vacuum chamber 1 reaches 10-6During Pa, vavuum pump does not stop, now can be by prison
Control device 9 starting focused high-energy ion gun 3 or focus on low energy ion gun 4, while according to the long and slender footpath of light it is different come
The rate of translation of adjustment fine movement platform 8, makes the surface 10 of the optical fiber 01 that need to be processed in focused high-energy ion
Rifle 3 or focusing low energy ion gun 4 are moved under, and the surface 10 for making the optical fiber 01 that need to be processed is rubbed, etc.
The whole end face of optical fiber all through focused high-energy ion gun 3 or focus on low energy ion gun 4 muzzle horizontal level when,
Represent that whole thinning process terminates；Now the atomic layer of whole fiber end face all uniformly impacts by argon ion,
Until the roughness of surface 10 of fiber end face is less than 0.5nm, ultraphotic slip level is reached；
Step 6：At the end for the treatment of direct sample-covering, the data verification end face processing result gathered by CCD2；
If flaw, step 5 is proceeded to；If indefectible, the work of stopping vavuum pump, then after a period of time
Vacuum chamber 1 is opened after slowly destroying Deng the vacuum environment in vacuum chamber 1 and takes out optical fiber.
The rate of translation of thin sports platform 8 is controlled in 10-10000um/h in its step 5.
The kinematic accuracy of the fine movement platform 8 described in step 3 in 20nm, for 5-3000um under normal circumstances
The optical fiber in fine footpath can all ensure high precision manipulation.
The present invention discloses a kind of fiber end face fine processing method, and its structural representation is as shown in figure 1, the process
The processing meanss of method include：
One vacuum chamber 1, is the basic guarantor of whole fiber end face fine processing for processing the space of fiber end face
Card, vacuum is better than 10 in vacuum chamber 1-6Pa, for ensure argon ion not with gas molecule collision dissipation energy,
Simultaneously when direct sample-covering works, vavuum pump is in running order, takes argon ion away and is fallen by argon ion impact
Fiber optic materials particle.
One high-resolution zoom CCD2, it is connected in the internal upper part of vacuum chamber 1 with watch-dog 9, for monitoring light
Fine end face processing implements image, and can adjust its position and multiplication factor using watch-dog 9, according to reality
The fiber end face size on border and focus condition, its multiplication factor is that optically focused is carried before 50-1000X, and camera lens
Lamp, can be projected light on fiber end face with real-time adjustment position, it is ensured that authentic and valid can see optical fiber
End view drawing picture.Watch-dog 9 can preserve pictorial information, can be by untreated and fiber end face situation that is having processed
Contrasted, it is also possible to which the flaw to occurring in processing procedure carries out adjustment in time and corrects, but ordinary circumstance
Under be not in flaw because argon ion impact fall fiber end face on particle be atom and molecule aspect, and
And ion gun is at the uniform velocity to impact, it is substantially not present in thinning process and flaw occurs.
One focused high-energy ion gun 3, the side in vacuum chamber 1 is connected with watch-dog 9, its output ion beam
Stream energy scope is 2-20keV, uses high-purity argon source of the gas, purity of argon to be more than 99.999%, and it is used for
Quick thinning fiber end face, its ion beam energy and beam diameter can be adjusted by watch-dog 9,
The independent operation of watch-dog 9 can be passed through.Generally in the beam energy of 20keV, to 3000um fibres footpath
The thinning speed of silica fibre can reach 1000um/h, being surface-treated speed can be because the material of optical fiber be tied
Structure and surface condition and change, beam diameter can also be controlled in nm magnitudes, so at the uniform velocity impacting thinning complete light
The smoothness of fine end face even can reach super-smooth surface in nm magnitudes during process.
One focuses on low energy ion gun 4, and the opposite side in vacuum chamber 1 is connected with watch-dog 9, its output ion
Beam energy scope is 0.01-2keV, uses high-purity argon source of the gas, purity of argon to be more than 99.999%, its
For thinning fiber end face at a slow speed, the smoothness for processing end face is better than the process of focused high-energy ion gun 4
Effect, but processing speed is slower than focused high-energy ion gun 4, and the thinning time also will extend accordingly,
The fiber end face of process can guarantee that and reach ultraphotic slip level.
One optical fiber 01, is placed in vacuum chamber 1, as direct sample-covering sample fiber to be processed, poly-
At 90 ° of angular positions of burnt energetic ion rifle 3 and focusing low energy ion gun 4, it contains end face 10, goes to apply
Coating portion 5 and the layer segment 6 containing coating, the optical fiber can be any materials, arbitrarily existing fine footpath, and arbitrarily
Structure, because the quartz specimen maximum that direct sample-covering is processed can reach the inside magnitude, this point is to locating Ricoh
It is enough for fine end face.
One fine fiber clamp 7, on fine movement platform 8, is connected, for solid with coating layer segment 6 is contained
Determine optical fiber, the size of fixture is adjustable, the optical fiber in arbitrarily fibre footpath can be fixed.Current general fibre footpath scope
0.1-3000μm。
One fine movement platform 8, thereon comprising fine fiber clamp 7, is connected with watch-dog 9, and effect is control
Slant optical fiber, horizontal rotation and translation, the precision of its motion can control below 20nm.
One watch-dog 9, with high-resolution zoom CCD2, focused high-energy ion gun 3, focuses on low energy ion gun 4,
Fine movement platform 8 is connected, for showing the operation control of real-time image information that CC2 gathered and CCD2
System, control focused high-energy ion gun 3 and focusing low energy ion gun 4.
The present invention operating procedure be：
The coat of the end face of optical fiber 01 of required process is peelled off into one section, the fine light being placed in vacuum chamber 1
On fine fixture 7, the optical fiber at remaining end is placed on the bottom of vacuum chamber 1, places closing vacuum chamber 1, and opens
Open the vacuum environment that vavuum pump realizes vacuum chamber 1.
Fine movement platform 8 is adjusted by watch-dog 9, the regulation includes the fiber end face angle of inclination of required process,
Fiber end face roughness thinning position of different sizes and required is different, and the thinning position of required process is led to
Cross and lift to be alignd with the muzzle of focused high-energy ion gun 3 and focusing low energy ion gun 4.It is fine by adjustment
The angle inclined to process needed for reaching of sports platform 8, because its kinematic accuracy is in 20nm, for usual feelings
The optical fiber in 5-3000um fibres footpath can all ensure high precision manipulation under condition, can be learnt according to the stroke of stepper motor
The inclined angle of the institute of fine movement platform 8, and angle of inclination size has display in watch-dog 9.
By the operation module for adjusting the CCD2 of watch-dog 9, height, focal position, the amplification of CCD are adjusted
Multiplying power so that the image of fiber end face can be clearly indicated in watch-dog 9.
The vacuum for treating vacuum chamber 1 reaches 10-6During Pa, vavuum pump does not stop, now can by watch-dog 9 come
Start focused high-energy ion gun 3 or focus on low energy ion gun 4, while adjusting fine according to the long and slender footpath difference of light
The rate of translation of sports platform 8, its speed can be controlled in 10-10000um/h, wait optical fiber whole end face all Jing
During the muzzle horizontal level of over-focusing energetic ion rifle 3 or focusing low energy ion gun 4, represent whole thinned
Journey terminates.The atomic layer of whole fiber end face all uniformly impacts by argon ion, and the surface of fiber end face is thick
Rugosity is less than 0.5nm, reaches ultraphotic slip level.
At the end for the treatment of direct sample-covering, the data verification end face processing result gathered by CCD2.If flawless
Defect, waits the vacuum environment in vacuum chamber 1 to open vacuum after slowly destroying after stopping vavuum pump one end time
Take out optical fiber in room 1.
Particular embodiments described above, has carried out entering one to the purpose of the present invention, technical scheme and beneficial effect
Step is described in detail, should be understood that the specific embodiment that the foregoing is only of the invention, and without
In limit the present invention, all any modifications within the spirit and principles in the present invention, made, equivalent,
Improve etc., should be included within the scope of the present invention.Additionally, above-mentioned determine each element and method
Justice is not limited in various concrete structures, shape or the mode mentioned in embodiment, ordinary skill people
Member can simply be changed or be replaced to it, for example：By the end face of simple application of the present invention to a branch of optical fiber
Process, and the fiber end face in super large fibre footpath is processed.
A kind of fiber end face fine processing method of disclosure of the invention, by direct sample-covering technique optical fiber end is processed
Face.The defect of traditional grinding technics and cutting technique can be solved, the light of arbitrarily fibre footpath and structure can be processed
Fibre, and improve fiber end face fine processing level so that fiber end face reaches ultraphotic slip level, or even can see
To the real structure pattern of fiber end face, this method can process any materials, arbitrarily arbitrary structures, fibre footpath
Fiber end face, and can be processed into arbitrarily angled.
The present invention discloses a kind of fiber end face fine processing method, it is characterised in that using the side of direct sample-covering
Method processes fiber end face, can process any materials, arbitrarily fibre footpath, the optical fiber of arbitrary structures, it is also possible to will
Fiber end face is processed into arbitrarily angled, and ensures that fiber end face ultra-smooth is lossless indefectible, beauty defects etc.
Level is zero.
Structural representation that fiber end face fine processing method of the present invention is adopted as shown in figure 1, including：
One vacuum chamber 1；
One high-resolution zoom CCD2, it is connected in the internal upper part of vacuum chamber 1 with watch-dog 9；
One focused high-energy ion gun 3, the side in vacuum chamber 1 is connected with watch-dog 9；
One focuses on low energy ion gun 4, and the opposite side in vacuum chamber 1 is connected with watch-dog 9；
One optical fiber 01, is placed in vacuum chamber 1, in focused high-energy ion gun 3 and focusing low energy ion gun 4
At 90 ° of angular positions, it contains end face 10, goes to coat layer segment 5 and the layer segment 6 containing coating；
One fine fiber clamp 7, is connected with coating layer segment 6 is contained；
One fine movement platform 8, thereon comprising fine fiber clamp 7, is connected with watch-dog 9；
One watch-dog 9, with high-resolution zoom CCD2, focused high-energy ion gun 3, focuses on low energy ion gun 4, essence
Thin sports platform 8 is connected.
Described vacuum chamber 1, pressure is less than 10 in its vacuum-6Pa。
Described high-resolution CCD is used to monitor the real-time image information of fiber end face process, and multiplication factor is
50-1000X。
Described focused high-energy ion gun 3, its output ion beam current energy range is 2-20keV, is used
It is high-purity argon source of the gas, purity of argon is more than 99.999%.
Described focusing low energy ion gun 4, its output ion beam current energy range is 0.01-2keV, is made
It is high-purity argon source of the gas, purity of argon is more than 99.999%..
Described optical fiber 01 is any type optical fiber, and fine footpath scope is 0.1-3000 μm, and material type can be with
For plastics, quartz, quartz doping etc., optical fiber structure can be micro-structural, polygon, circle etc..
Described fine fiber clamp 7 on fine movement platform 8, for fixing optical fiber 01, in optical fiber 01
The layer segment 6 containing coating connect, any optical fiber of the existing fiber that can be fixed, existing fiber fibre footpath scope one
As be 0.1-3000 μm.
Described fine movement platform 8, is to control slant optical fiber, horizontal rotation and translation, the essence of its motion
Degree can control 20nm and more low dimensional.
Described watch-dog 9, itself and high-resolution zoom CCD2, focused high-energy ion gun 3 focuses on low energy ion
Rifle 4, fine movement platform 8 is connected.Its effect is the collection fiber end face 10 for monitoring high-resolution zoom CCD2
Image information, control focused high-energy ion gun 3, control focuses on low energy ion gun 4, control fine movement platform 8.
Using the direct sample-covering PROCESS FOR TREATMENT fiber end face of material surface process.Overcome simultaneously mechanical lapping and
Defect in the presence of cutter cutting technique, and different materials, different fibre footpath, different structure can be processed
Optical fiber, compatibility is good and can effectively improve fiber end face process fineness and roughness, and fiber end face can reach
To ultraphotic slip level.Direct sample-covering is the material atom that fiber end face is impacted using argon gas ion, using height
The material atom of fiber end face is fallen in the argon ion impact of energy, because argon gas is inert gas, will not be with optical fiber material
Atom in material is combined and generates new compound.And impact the fiber optic materials atom for falling and argon ion can be true
Empty pump is discharged, and can keep processing procedure high level of cleanliness.
Direct sample-covering technique and mechanical lapping ratio, fiber end face can be in trickle minute surface, not have cut, turn round
Song deforms, and the phenomenon such as uneven, the particle that there will not be grinding is embedded into fiber end face, especially at place
During Ricoh's photonic crystal fiber, the embedded removal effect of particle is particularly evident.Optical fiber end is polished using direct sample-covering
Face can see Kikuchi lines, and the Kikuchi style of fiber end face is complete.Direct sample-covering can see fiber optic materials
Real structure, can be used for surface sweeping Electronic Speculum SEM monitoring fiber end face surface topography.
In order to realize the purpose of the present invention, technical solution of the present invention structure is as shown in figure 1, structure includes：
One vacuum chamber 1, vacuum is better than 10-6Pa, for ensure argon ion not with gas molecule collision dissipation energy.
One high-resolution zoom CCD2, it is connected in the internal upper part of vacuum chamber 1 with watch-dog 9, for monitoring light
Fine end face processing implements image, and can adjust its position and multiplication factor using watch-dog 9, according to reality
The fiber end face size on border and focus condition, its multiplication factor is that optically focused is carried before 50-1000X, and camera lens
Lamp, can be projected light on fiber end face with real-time adjustment position, it is ensured that authentic and valid can see optical fiber
End view drawing picture.
One focused high-energy ion gun 3, the side in vacuum chamber 1 is connected with watch-dog 9, its output ion beam
Stream energy scope is 2-20keV, uses high-purity argon source of the gas, purity of argon to be more than 99.999%, and it is used for
Quick thinning fiber end face, its ion beam energy and beam diameter can be adjusted by watch-dog 9,
The independent operation of watch-dog 9 can be passed through.
One focuses on low energy ion gun 4, and the opposite side in vacuum chamber 1 is connected with watch-dog 9, its output ion
Beam energy scope is 0.01-2keV, uses high-purity argon source of the gas, purity of argon to be more than 99.999%, its
For thinning fiber end face at a slow speed, the smoothness for processing end face is better than the process of focused high-energy ion gun 4
Effect.
One optical fiber 01, is placed in vacuum chamber 1, as direct sample-covering sample fiber to be processed, poly-
At 90 ° of angular positions of burnt energetic ion rifle 3 and focusing low energy ion gun 4, it contains end face 10, goes to apply
Coating portion 5 and the layer segment 6 containing coating, the optical fiber can be any materials, arbitrarily existing fine footpath, and arbitrarily
Structure.
One fine fiber clamp 7, on fine movement platform 8, is connected with coating layer segment (6) is contained, and uses
In fixed optical fiber, the size of fixture is adjustable, can fix existing any fine footpath optical fiber.At present general light is long and slender
Footpath scope 0.1-3000 μm.
One fine movement platform 8, thereon comprising fine fiber clamp 7, is connected with watch-dog (9), and effect is
Control slant optical fiber, horizontal rotation and translation, the precision of its motion can control below 20nm.
One watch-dog 9, with high-resolution zoom CCD2, focused high-energy ion gun 3, focuses on low energy ion gun 4,
Fine movement platform 8 is connected, for showing the operation control of real-time image information that CC2 gathered and CCD2
System, control focused high-energy ion gun 3 and focusing low energy ion gun 4.
Fiber end face fine processing step is operated by watch-dog 9, complete artificial control operation in vacuum chamber 1,
Optical fiber is processed without the need for staff operation, the process fiber end face method can improve yield rate and uniformity.
Claims (3)
1. a kind of fiber end face fine processing method, it is characterised in that including following several steps：
Step one：Fiber cut operating space is arranged in a vacuum chamber (1), in vacuum chamber (1)
Top on high-resolution zoom CCD (2) is installed, be provided with the inwall of vacuum chamber (1) focused high-energy from
Sub- rifle (3) and watch-dog (9), the first focused high-energy ion gun (3) is connected with watch-dog (9)；
Second focused high-energy ion gun (4), the second focused high-energy are installed on the opposite side inwall of vacuum chamber (1)
Ion gun (4) is connected with watch-dog (9)；Focused high-energy is installed on the inwall in vacuum chamber (1)
On ion gun (3) inwall, in the lower section of watch-dog (9) position, a fine movement platform (8) is installed,
One fine fiber clamp (7) is installed above fine movement platform (8)；Fine movement platform (8) with
Watch-dog (9) connects；High-resolution zoom CCD (2) is connected with watch-dog (9)；
Step 2：The coat of optical fiber (01) end face of required process is peelled off into one section, vacuum chamber is placed on
(1) on the fine fiber clamp (7) in, the optical fiber at remaining end is placed on the bottom of vacuum chamber (1),
Closing vacuum chamber (1) is placed, and opens the vacuum environment that vavuum pump realizes vacuum chamber (1)；
Step 3：Fine movement platform (8) is adjusted by watch-dog (9), the regulation includes required process
Fiber end face angle of inclination, fiber end face roughness thinning position of different sizes and required is different, by institute
The thinning position that need to be processed by lift come with focused high-energy ion gun (3) and focus on low energy ion gun (4)
Muzzle alignment；The angle processed needed for reaching by adjusting the inclination of fine movement platform (8), according to
The stroke of stepper motor learns the inclined angle of fine movement platform (8) institute, and angle of inclination size is in prison
There is display in control device (9)；
Step 4：CCD2 is operated by watch-dog (9), adjust the height of CCD, focal position,
Enlargement ratio so that the image of fiber end face can be clearly indicated in watch-dog 9) in；
Step 5：The vacuum for treating vacuum chamber (1) reaches 10-6During Pa, vavuum pump does not stop, and now can lead to
Cross watch-dog (9) to start focused high-energy ion gun (3) or focus on low energy ion gun (4), while basis
The long and slender footpath difference of light adjusting the rate of translation of fine movement platform (8), the optical fiber (01) for making to process
Surface (10) is moved under in focused high-energy ion gun (3) or focusing low energy ion gun (4), makes to need place
The surface 10 of the optical fiber (01) of reason) rubbed, wait the whole end face of optical fiber all through focused high-energy ion gun (3)
Or when focusing on the muzzle horizontal level of low energy ion gun (4), represent that whole thinning process terminates；It is now whole
The atomic layer of individual fiber end face all uniformly impacts by argon ion, until the surface (10) of fiber end face it is thick
Rugosity is less than 0.5nm, reaches ultraphotic slip level；
Step 6：At the end for the treatment of direct sample-covering, the data verification end face processing result gathered by CCD2；
If flaw, step 5 is proceeded to；If indefectible, the work of stopping vavuum pump, then after a period of time
Vacuum chamber 1 is opened after slowly destroying Deng the vacuum environment in vacuum chamber (1)) take out optical fiber.
2. a kind of fiber end face fine processing method according to claim 1, it is characterised in that its step
The rate of translation of thin sports platform (8) is controlled in 10-10000um/h in rapid five.
3. a kind of fiber end face fine processing method according to claim 1 and 2, it is characterised in that
The kinematic accuracy of the fine movement platform (8) described in step 3 in 20nm, for 5-3000um under normal circumstances
The optical fiber in fine footpath can all ensure high precision manipulation.
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| CN106990491A (en) * | 2017-05-25 | 2017-07-28 | 中国兵器装备研究院 | A kind of quartzy end cap processing unit (plant) |
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| JP2002277364A (en) * | 2001-03-19 | 2002-09-25 | Seiko Epson Corp | Method of working thin sample piece, and method of preparing thin sample piece |
| CN1380441A (en) * | 2002-02-08 | 2002-11-20 | 北京科技大学 | Method for preparing film by means of cold-cathode sputtering process and its equipment |
| CN1974125A (en) * | 2006-12-28 | 2007-06-06 | 北京交通大学 | High precision polishing method and device for arc discharge fiber cross section |
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