CN106644076A - Phase-shift interference spectrum imaging system and method - Google Patents
Phase-shift interference spectrum imaging system and method Download PDFInfo
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- CN106644076A CN106644076A CN201611082188.4A CN201611082188A CN106644076A CN 106644076 A CN106644076 A CN 106644076A CN 201611082188 A CN201611082188 A CN 201611082188A CN 106644076 A CN106644076 A CN 106644076A
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- 230000010363 phase shift Effects 0.000 title claims abstract description 49
- 238000003384 imaging method Methods 0.000 title claims abstract description 33
- 238000001228 spectrum Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 4
- 238000010008 shearing Methods 0.000 claims abstract description 9
- 238000009738 saturating Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 15
- 238000001514 detection method Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention provides a phase-shift interference spectrum imaging system and method, and the system comprises a pre-posed telescopic system, a phase-shift lateral shearing interferometer, a Fourier imaging objective lens, and a photoelectric detector. The phase-shift lateral shearing interferometer is located on an optical path of the pre-posed telescopic system, and the Fourier imaging objective lens is located on an output path of the phase-shift lateral shearing interferometer. The photoelectric detector is located on an image plane of the Fourier imaging objective lens. A to-be-detected target wavefront is collimated by the pre-posed telescopic system, and then enters the phase-shift lateral shearing interferometer, so a series of interference patterns are generated. The Fourier imaging objective lens enables the interference patterns to be focused on a target plane of the photoelectric detector, and the photoelectric detector records the interference patterns. The system can work in a staring state, is suitable for the remote sensing detection of stationary orbit satellites, does not need a large-size and high-precision pre-posed scanning reflector, will not causes disturbance to a satellite platform, and will not occupy the resources of the satellite platform.
Description
Technical field
The present invention relates to a kind of phase shift interference spectrum imaging system and imaging method.
Background technology
Interference spectrum imaging technique has very important using value in terms of remote sensing of the earth, based on the big of equal inclination interference
Bore lateral shear interferometer has high detection sensitivity when interference spectrum imaging is applied to, and is easily achieved big view field imaging
Technical characterstic, be very suitable for pushing away for Near Earth Orbit Satellites platform the characteristics of its interference pattern and sweep mode of operation, but when this work
Operation mode cannot just realize push-scanning image in geostationary orbit, need to increase the high-precision preposition scanning reflection of large scale
Mirror, in addition to disturbing influence is brought to satellite platform, also needs to take substantial amounts of satellite platform resource.
The content of the invention
For above-mentioned application demand, the present invention propose a kind of phase shift interference spectrum imaging system based on position scanning phase and
Imaging method, can work, it is adaptable to the remote sensing of satellite under the state of staring.
The technical scheme is that:
Phase shift interference spectrum imaging system, it is characterized in that:Including preposition telescopic system, phase shift lateral shear
Interferometer, Fourier's image-forming objective lens and photodetector;The phase shift lateral shear interferometer is located at preposition telescopic system
On output light path, Fourier's image-forming objective lens are located on the output light path of phase shift lateral shear interferometer, and photodetector is located at
In the image planes of Fourier's image-forming objective lens;Target wavefront to be measured premenstrual putting enter phase shift lateral shearing interference after telescopic system collimation
Instrument, produces a series of interference pattern, and Fourier's image-forming objective lens focus on the interference pattern on photodetector target surface, by photoelectricity
Detector records the interference pattern.
Above-mentioned phase shift lateral shear interferometer includes the first corner cube mirror, the second corner cube mirror, beam splitter, phase shift
Device and compensator;The phase shifter and the first corner cube mirror set gradually along the reflected light path of the beam splitter;The compensation
Device and the second corner cube mirror set gradually along the transmitted light path of the beam splitter.
Above-mentioned phase shift lateral shear interferometer include the first right-angle prism, the second right-angle prism, beam splitter, phase shifter and
Compensator;The phase shifter and the first right-angle prism set gradually along the reflected light path of the beam splitter;The compensator and
Two right-angle prisms set gradually along the transmitted light path of the beam splitter.
Above-mentioned phase shifter is made up of a pair of angle of wedge plates, and the hypotenuse of the two angle of wedge plates fits, i.e., two angle of wedge plates it is anti-
To staggered relatively.
Above-mentioned beam splitter is lens type beam splitter.
The method being imaged to target wavefront using above-mentioned imaging system, it is characterized in that:Comprise the following steps:
1) target wavefront is collected and is collimated;
2) the target wavefront after collimating is incident to phase shift lateral shear interferometer, produces two relevant lateral shear ripples
Before;
3) the interference pattern focal imaging is formed into the scene image with interference pattern modulation using Fourier's image-forming objective lens;
4) using photodetector acquisition step 3) in imaging;
5) adjusting phase shift lateral shear interferometer makes the interference pattern move in the image planes of Fourier's image-forming objective lens;
6) using photodetectors register phase shifter each step phase shift corresponding to interference pattern, so as to obtain target wavefront
Corresponding interference graphic sequence;
7) spatial distribution of target wavefront is obtained by data processing and inverse Fourier transform.
It is an advantage of the invention that:
The present invention can work under the state of staring, it is adaptable to the remote sensing of satellite, in geostationary orbit
When can realize under the state of staring wide visual field high light spectrum image-forming, without the need for increasing the high-precision preposition scanning reflection mirror of large scale, no
Disturbing influence can be brought to satellite platform, satellite platform resource will not be taken.The imaging system of the present invention has high flux and many
The advantage of passage, detectivity is high, it is easy to accomplish the spectrographic detection of high time resolution, is advantageously implemented the dynamic of regional area
State spectrum observation.
Description of the drawings
Fig. 1 is the structural representation of a specific embodiment of the invention;
Fig. 2 a and Fig. 2 b are the operation principle schematic diagrams of phase shifter of the present invention;
Principle of interference schematic diagram when Fig. 3 is phase shifter zero-bit;
Fig. 4 is principle of interference schematic diagram after phase shifter phase shift;
In figure, the preposition telescopic systems of 1-, 2- phase shift lateral shear interferometers, 21- beam splitters, 22- phase shifters, 23- is mended
Repay device, the corner cube mirrors of 24- first, the corner cube mirrors of 25- second, 3- Fourier's image-forming objective lens, 4- photodetectors.
Specific embodiment
As shown in figure 1, phase shift interference spectrum imaging system provided by the present invention is by preposition telescopic system 1, phase shift
Lateral shear interferometer 2, Fourier's image-forming objective lens 3 and photodetector 4 are constituted.
Phase shift lateral shear interferometer 2 is that the present invention realizes the core that spectral remote sensing is detected, and it is reflected by the first right angle
Mirror 24, the second corner cube mirror 25, beam splitter 21, phase shifter 22 and compensator 23 are constituted, wherein, the right angle of phase shifter 22 and first
Speculum 24 is successively set on the reflected light path of beam splitter 21;The corner cube mirror 25 of compensator 23 and second is successively set on point
On the transmitted light path of beam device 21.Here two corner cube mirrors can be substituted by right-angle prism;Beam splitter can be two pieces parallel flat
Plate, or lens type beam splitter.Wedge of the phase shifter 22 by two pieces of angles of wedge for α is constituted in opposite directions, when one of wedge edge
When inclined-plane is moved, the thickness of phase shifter 22 can produce change.
The premenstrual telescopic system 1 of putting of distant object wavefront collects collimation into phase shift lateral shear interferometer 2, incident
Fourier's image-forming objective lens are entered after the shifted formula lateral shear interferometer 2 of target wavefront, the target surface of photodetector 4 is focused on and is formed
Object scene image with interference modulations.
Phase shift lateral shear interferometer 2 produces vertical element in image planes (i.e. the target surface place plane of photodetector 4)
The interference pattern of line, when phase shifter 22 occurs phase shift, the interference pattern produces movement in image planes, and photodetector 4 is recorded often
Interference pattern produced by one step phase shift, so as to obtain the corresponding interference graphic sequence of target wavefront, eventually passes and rearranges interference
Figure and inverse Fourier transform are obtained the spatial distribution of target wavefront.
Below in conjunction with the accompanying drawings the concrete operating principle of 1~accompanying drawing, 4 couples of present invention is described in detail.
Two-way is formed Jing after lateral shear interferometer 2 from incident wavefront W of object point and shears W1 and W2 before the coherent wave opened,
Specially:
Incident wavefront W Jing beam splitters 21 are divided into two-way:All the way light is after the speculum 24 of phase shifter 22 and first, then reflects
Beam splitter 21 is returned to, from the transmission of beam splitter 21 wavefront W1 is formed;Another road light after the speculum 25 of compensator 23 and second, instead
Beam splitter 21 is emitted back towards, from the transmission of beam splitter 21 wavefront W2 is formed.
The light vibration E of wavefront W1 and wavefront W2 at image planes can be expressed as:
A in above formula1、a2The respectively amplitude of two-beam ripple, L1、L2Light path respectively at two-beam ripple to picture point, ω t
For the Temporal Phase factor,For space phase factor.
The conjunction vibration E of the light of wavefront W1 and wavefront W2 at image planes can be expressed as
E=E1+E2 (3)
What photodetector 4 was received is the strength information of interference pattern, therefore, oscillation intensity I of two light waves at picture point can
It is expressed as:
WhereinΔ L=L1-L2
By formula (4) as can be seen that the interference pattern Strength Changes of object point depend on position difference κ (Δ L), Ye Jiqu in image planes
Certainly in the optical path difference of two light wavesHere s is interferometer shearing quantity shown in Fig. 1, and fftl is Fourier's imaging
The focal length of object lens, DpFor photodetector Pixel-space, i is detector pixel position,N is detector pixel
Number.
The effect of phase shifter 22 is the additional light path Δ L ' for producing two shearing corrugateds, is that formula (4) introducing one is attached
Plus phase placeTo realize the position scanning phase of interference pattern.As shown in Figure 2 a and 2 b, when one piece of wedge of phase shifter 22
When plate is moved along the inclined-plane of another piece of wedge, the thickness of phase shifter can produce change, so that phase shifter this light path
Wavefront W1 produces additional optical distance Δ L ';The corresponding additional light path Δ L ' of jth step phase shift is represented by
Δ L '=2 (j. δ d) are (n-1) (5)
In formula (5) n for phase shifter material refractive index, d be phase shifter zero-bit when thickness (thickness during original state
Degree), δ d often walk phase-shifter amounts of thickness variation for wedge,And meet:
For maximum shear amount S achieved by phase shift lateral shear interferometer 2 should meet Nyqui st sampling thheorems:
υ in formulamThe highest frequency of the spectrum of target is detected by spectrum imaging system.
Maximum optical path difference Δ L achieved by lateral shear interferometermDepending on the pixel number of detector target surface:
N is the pixel number of photodetector camera in formula (8).Therefore the maximum operating range of phase shifter is ± Δ Lm。
Then phase-shift type interferes interference spectrum imaged interference figure intensity to be expressed as:
Fig. 3 and Fig. 4 further illustrates the know-why of phase shift interference imaging of the present invention.
In figure 3, when phase shifter 22 is in zero-bit, two wavefront W of object point on optical axisO1And WO2With equal light path, its
Optical path difference Δ L is zero, and now the size of the optical path difference of light extra-axial object point P points is by formulaIt is determined that, y is outside axle in formula
The imaging image height of object point P points, S is the maximum shear amount of lateral shear interferometer.
In the diagram, after phase shifter 22 produces phase shift, the optical path difference Δ L of object point is the generation of phase shifter 22 on optical axis
Additional light path Δ L ';For light extra-axial object point P, when the additional light path Δ L ' that phase shifter 22 is produced is equal to lateral shearing interference
Instrument in the optical path difference Δ L of P points, the two-beam W that light extra-axial object point P sendsP1And WP2Equivalent optical path, optical path difference is zero, represent
The object point from optical axis is moved to light extra-axial object point for the position of zero optical path difference, and during whole phase shift, photodetector 4 is recorded
A series of phase-shift interference is gathered, to obtain the interference graphic sequence that object scene carries out needed for spectrum recovering.
For the present invention, the first speculum or the second speculum can also be used as phase shifter, any one piece of speculum
Move along optical axis produce can additional light path to realize the position scanning phase of interference pattern, its principle is same as above.
Claims (6)
1. phase shift interference spectrum imaging system, it is characterised in that:Including preposition telescopic system, phase shift lateral shearing interference
Instrument, Fourier's image-forming objective lens and photodetector;The phase shift lateral shear interferometer is located at the output of preposition telescopic system
In light path, Fourier's image-forming objective lens are located on the output light path of phase shift lateral shear interferometer, and photodetector is located in Fu
In the image planes of leaf image-forming objective lens.
2. phase shift interference spectrum imaging system according to claim 1, it is characterised in that:The phase shift lateral shear
Interferometer includes the first corner cube mirror, the second corner cube mirror, beam splitter, phase shifter and compensator;The phase shifter and
One corner cube mirror sets gradually along the reflected light path of the beam splitter;The compensator and the second corner cube mirror are along described point
The transmitted light path of beam device sets gradually.
3. phase shift interference spectrum imaging system according to claim 1, it is characterised in that:The phase shift lateral shear
Interferometer includes the first right-angle prism, the second right-angle prism, beam splitter, phase shifter and compensator;The phase shifter and first straight
Angle prism sets gradually along the reflected light path of the beam splitter;The compensator and the second right-angle prism are along the saturating of the beam splitter
Penetrate light path to set gradually.
4. the phase shift interference spectrum imaging system according to Claims 2 or 3, it is characterised in that:The phase shifter is by one
Angle of wedge plate is constituted, the hypotenuse of the two angle of wedge plates fits.
5. the phase shift interference spectrum imaging system according to Claims 2 or 3, it is characterised in that:The beam splitter is rib
Mirror beam splitter.
6. method target wavefront being imaged using the imaging system described in claim 1, it is characterised in that:Including following
Step:
1) target wavefront is collected and is collimated;
2) the target wavefront after collimating is incident to phase shift lateral shear interferometer, produces two relevant lateral shear wavefront;
3) the interference pattern focal imaging is formed into the scene image with interference pattern modulation using Fourier's image-forming objective lens;
4) using photodetector acquisition step 3) in imaging;
5) adjusting phase shift lateral shear interferometer makes the interference pattern move in the image planes of Fourier's image-forming objective lens;
6) using photodetectors register phase shifter each step phase shift corresponding to interference pattern, so as to obtain target wavefront correspondence
Interference graphic sequence;
7) spatial distribution of target wavefront is obtained by data processing and inverse Fourier transform.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107356541A (en) * | 2017-07-21 | 2017-11-17 | 安徽庆宇光电科技有限公司 | Soot gas monitor optical scanning system |
CN109709785A (en) * | 2019-01-24 | 2019-05-03 | 中国科学院长春光学精密机械与物理研究所 | A kind of holography telescopic system and telescope |
CN110196105A (en) * | 2019-05-09 | 2019-09-03 | 南京理工大学紫金学院 | Collimation wavefront measuring method based on retroeflector shear interference |
CN117490847A (en) * | 2024-01-02 | 2024-02-02 | 中国海洋大学 | High-flux high-resolution static Fourier transform spectrum measurement method |
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CN206281571U (en) * | 2016-11-30 | 2017-06-27 | 中国科学院西安光学精密机械研究所 | Phase shift interference spectrum imaging system |
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CN101226343A (en) * | 2008-01-29 | 2008-07-23 | 芯硕半导体(中国)有限公司 | Method for improving photolithography exposure energy homogeneity using grey level compensation |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN107356541A (en) * | 2017-07-21 | 2017-11-17 | 安徽庆宇光电科技有限公司 | Soot gas monitor optical scanning system |
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CN110196105A (en) * | 2019-05-09 | 2019-09-03 | 南京理工大学紫金学院 | Collimation wavefront measuring method based on retroeflector shear interference |
CN110196105B (en) * | 2019-05-09 | 2021-04-02 | 南京理工大学紫金学院 | Collimating wavefront measuring method based on shear interference of retroreflector |
CN117490847A (en) * | 2024-01-02 | 2024-02-02 | 中国海洋大学 | High-flux high-resolution static Fourier transform spectrum measurement method |
CN117490847B (en) * | 2024-01-02 | 2024-05-03 | 中国海洋大学 | High-flux high-resolution static Fourier transform spectrum measurement method |
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