CN106643477B - Palarization multiplexing phase modulation-type laser mixes two-dimentional interferometer and its measurement method certainly - Google Patents
Palarization multiplexing phase modulation-type laser mixes two-dimentional interferometer and its measurement method certainly Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
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Abstract
The invention discloses palarization multiplexing phase modulation-type laser from the two-dimentional interferometer of mixing and its measurement method, two-dimentional interferometer includes：Export the two-frequency laser of circularly polarized light, polarization splitting prism, it is placed on common Amici prism on o polarization state optical axises, electrooptical crystal modulator, ray density filter, object to be measured, it is placed on e polarization state light axial directions electrooptical crystal modulator, ray density filter, another object to be measured, and signal acquisition and phase calculation system, signal acquisition and phase calculation system obtain measured target phase and displacement according to the progress frequency analysis of the light intensity signal of acquisition and phase demodulating.Because the frequency of two electric light phase-modulations is completely different, it is it is possible to prevente effectively from aliasing；Since two polarised lights are linearly polarized light, laser speckle effect is small, and phase-shifting technique makes the resolution ratio of demodulation result reach Nano grade.
Description
Technical field
The present invention relates to a kind of two dimensions based on double-longitudinal-mode laser, optical interference, electrooptic effect and polarization multiplexing
Non-contact laser self-mixed interference instrument and its measurement method, belong to Application Optics, nonlinear electrooptical crystal, laser technique knot
Conjunction field.Suitable for optical metrology, pick up calibration, micro-nano observing and controlling, micromorphology scanning, it is particularly suitable in two-dimensional measurement to light
The high research of journey sensitivity requirement or engineering field.
Background technology
The accurate measurement method of optics two-dimension displacement has great research to anticipate in the micro-nano technologies such as photoetching, integrated circuit field
Pattern magnitude, microelectronics original paper play the role of critical in the positioning of printed circuit board in justice, such as mask；Same industry
Environment also has larger demand to independent Bi-objective or two-parameter synchronizing detection, for example the preserving jar of preservation dangerous material generally requires
Synchronous detection deformation and temperature, machine vibration is often two-dimensional, scanning micro-mirror in advanced MEMS (MEMS), super
The harmonic motion of the devices such as sound and vibration is also two-dimensional；In topography measurement, Workpiece structure detection flaw detection, two or more sensing points
Also application value is had more than single-point detection.Therefore research has Bi-objective while the non-contact optical of detection and high sensitivity is surveyed
Amount system is of great significance.
Existing optical detective technology is relied on reaches two-dimentional inspection by increasing the method for laser and detection channels quantity
Effect is surveyed, for example Laser Doppler Velocimeter is detected in different directions in two-dimensional measurement with two shift lasers respectively, at
This raising, operation is more complicated, and requires more signal acquisition process data；Double-frequency interference instrument often can not be individually complete for another example
At two-dimensional detection, it is necessary to constitute two-dimensional detection effect with two interferometers；When carrying out two-dimensional detection using single laser at present
Due to that can not eradicate crosstalk between optical signal, measurement accuracy and range etc. cannot be satisfied requirement.
To solve the problems, such as instrument cost, not only avoids increasing laser and acquire the quantity of signal, but also eliminate two dimension and survey
In amount the problem of light path crosstalk, the present invention combines existing palarization multiplexing and phase modulation technique, realizes no crosstalk, Dan Ji
Light device, the high performance-price ratio two dimension self-mixed interference instrument in forms data channel.
Invention content
Goal of the invention：The present invention is directed to announce a kind of to combine palarization multiplexing and the two-dimensional laser of phase-modulation and do from mix
Interferometer and its measurement method only utilize single laser tube and detector in the interferometer optics structure, utilize the original of palarization multiplexing
Reason generates the independent optical path without optical crosstalk, and Electro-optical Modulation effect and laser self-mixing effect produce in double-longitudinal-mode laser
Raw light-intensity variation, the harmonic amplitude by analyzing light intensity signal realize the real-time detection to two optical path object to be measured.
Technical solution：For achieving the above object, the present invention adopts the following technical scheme that：
Palarization multiplexing phase modulation-type laser mixes two-dimentional interferometer certainly, including：Export the double longitudinal mode laser of circularly polarized light
Circularly polarized light is decomposed into the polarization splitting prism of the linearly polarized light of two cross-polarization by device, be placed in the first light path
One electro-optic phase modulator, the first ray density filter and the first object to be measured, the second electric light being placed in the second light path
Phase-modulator, the second ray density filter and the second object to be measured, common point in the first light path or the second light path
Light prism, and for detecting the light intensity signal and the photodetection for exporting detected signal waveform that common Amici prism reflects
Device；The modulating frequency of first electro-optic phase modulator and the second electro-optic phase modulator is different；The photodetector with
Signal acquisition and phase calculation system electrical connection, the signal acquisition and phase calculation system are used for the light intensity signal according to acquisition
It carries out frequency analysis and phase demodulating obtains measured target phase, and then obtain displacement.
Further, the signal acquisition and phase calculation system include：Low-pass filtering amplifying circuit, with photodetector
It is connected, carries out signal filtering and amplification；Data collecting card realizes analog-to-digital conversion for acquiring the signal after filter and amplification；And
Computer module, for extract two light paths in collected light intensity signal first harmonic component and second harmonic divide
Amount realizes phase demodulating based on harmonic component.
Further, the computer module includes：Bandpass filter group unit, including four bandpass filters, respectively
Export the first harmonic component I of the first light patho1With second harmonic component Io2And second light path first harmonic component Ie1With
Second harmonic component Ie2；Divider, for according to formula Ao/e1(t)=Io/e1/cos(ωo/eAnd A t)o/e2(t)=Io/e2/
cos(2ωo/eT) amplitude curve of two kinds of harmonic components, wherein ω is calculatedo/eFor the phase shift angular frequency of two light paths, ωo
≠ωe；Arctangent unit, for according to formulaThe phase of two light paths is calculated；And
Displacement computing unit, for according to formulaTwo light paths are calculated
Measure displacement.
The palarization multiplexing phase modulation-type laser includes the following steps from the measurement method for mixing two-dimentional interferometer：
(1) stablize supply 5mA electric currents to double-longitudinal-mode laser, it is made to export visible red circularly polarized light, rotary laser
Pipe is so that two polarization states of output are located at both horizontally and vertically；
(2) polarization splitting prism is adjusted so that the middle layer of incident light and prism has 45 ° of angles, o light to wear in the horizontal direction
Cross the first electro-optic phase modulator that polarization state is all horizontal direction, the second electricity that e light passes through polarization state vertical in vertical direction
Light phase modulation；
(3) o light passes through the first optical filter to reach the first object to be measured, and laser tube is reflected back by former road；E light passes through the
Two optical filters reach the second object to be measured, along backtracking laser；Common Amici prism in o light paths or e light paths
Light intensity signal is refracted into photodetector；
(4) the light intensity signal input signal acquisition of photodetector output and phase calculation system are handled, filtered
Amplification, analog-to-digital conversion, harmonic amplitude extraction, arctangent cp cp operation and unpacking obtain measured object phase and displacement.
Advantageous effect：Circular polarization light source, polarization multiplexing are introduced phase modulation-type laser self-mixing interference by the present invention
In instrument, the self-mixed interference instrument of double optical paths is generated.Main technical characterstic is as follows：
Double-longitudinal-mode laser：Double-bus network optical frequency difference is about 40MHz, wavelength 632.8nm, exports milliwatt power.It should
Class laser linewidth is narrow, is influenced by temperature change low.He-Ne mixed gas is as laser working medium, by two exocoels
The light intensity variation that microwave section is generated after feedback light, in the response range of common photodetector, the photoelectric current of generation be easy into
Row analog-to-digital conversion and signal analysis.
Sinusoidal phase modulation technology：It is combined with linearly polarized light, the phase-modulation of generation has high efficiency, and broadband is unglazed
The characteristics of strong disturbance.Sine wave has very sharp frequency domain distribution, therefore is equivalent to and will believe from mixing after introducing phase-modulation
It number has carried out redistribution in frequency domain, has generated center frequency and adjacent spaces accurately adjustable harmonic component, and ripe filtering skill
Art combines, and harmonic component is easy to be extracted.
Laser self-mixing effect：The narrow linewidth of laser makes this system is less than the phase response that comparable optical is fed back partly to lead
Body class laser, appropriate decaying can eliminate the slant characteristic of striped.Laser self-mixing effect has with traditional two-beam interference
Similar phase sensitive degree, in a linear relationship from mixing striped and tested light path, the characteristic in wavelength the first day of the lunar month source ensure that the system has
There is nano-precision.
Polarization Optical multiplexing technology：In polarization optics, when the light beam of two orthogonal polarization states is propagated along same optical axis and circle
Polarised light is equivalent.Using polarization splitting prism, circularly polarized light and two crossed polarized lights can realized from mixed optical path it is reversible
Exchange, thus a circularly polarized light laser can have two independently polarize from mixed optical path, this is improved surveys from mixing
The destination number of amount, and crosstalk can not possibly be generated between feedback light.
Compared with prior art, the invention has the advantages that：
1) design light path is cross structure, and two optical paths are operated in orthogonal polarisation state, no optical crosstalk, not shape
At referring-to relation；Two optical paths can work at the same time or work independently.
2) the short-term wavelength uncertainty of two-frequency laser is better than 10e-6, is less than semiconductor laser to the susceptibility of temperature,
By DC driven (5mA), without extra pump and accurate temperature control system.
3) collected single-pass data is extracted the phase change on the roads o and the roads e by the method for frequency analysis.
4) the light feedback intensity that laser receives is necessary for weak feedback, and feedback light intensity is controlled by two optical filters,
So that the striped generated does not have apparent tilt phenomenon.
5) system allow two measured objects be subjected to displacement simultaneously, amplitude, phase, frequency can it is identical can not also
Together；Allow only that move another measured object static there are one measured object.Photoetching, micro-nano structure, microcircuit printing may be implemented
Etc. the industries two-dimentional precision positionings that need, can also be to two-dimension displacement in industrial environment, vibration, warped, deformation, surface profile
It measures.
Description of the drawings
Fig. 1 is the schematic device of the embodiment of the present invention；
In figure, 1- double-longitudinal-mode lasers；2- polarization splitting prisms；3- first phase modulators；4- second phase modulators；
The common Amici prisms of 5-；6- the first ray density filters；7- the second ray density filters；The first object to be measured of 8-；9-
Two object to be measured；10- photodetectors；11- low-pass filtering amplifying circuits；12- data collecting cards；13- computer modules.
Fig. 2 is the frequency domain character schematic diagram of the light intensity signal acquired in the embodiment of the present invention；
Fig. 3 is in the embodiment of the present invention from the harmonic wave demodulation method flow chart for mixing light intensity signal.
Specific implementation mode
With reference to specific embodiment, the present invention is furture elucidated, it should be understood that these embodiments are merely to illustrate the present invention
Rather than limit the scope of the invention, after having read the present invention, various equivalences of the those skilled in the art to the present invention
The modification of form falls within the application range as defined in the appended claims.
As shown in Figure 1, a kind of palarization multiplexing phase modulation-type laser disclosed by the embodiments of the present invention is interfered from two dimension is mixed
Instrument includes mainly double-longitudinal-mode laser 1, polarization splitting prism 2, first phase modulator 3, first phase modulator 4, common point
Light prism 5, the first ray density filter 6, the second ray density filter 7, the first object to be measured 8, the second object to be measured 9,
Photodetector 10, and the signal being made of low-pass filtering amplifying circuit 11, data collecting card 12 and computer module 13 are adopted
Collection and phase calculation system.Wherein：
Double-longitudinal-mode laser 1, typical atomic gas He-Ne lasers export double-bus network, circular polarization state light, and wavelength is
632.8nm, feedback-less output power are 5mW.
Polarization splitting prism 2 has fast axle, slow axis, and the line that incident circularly polarized light can be decomposed into two cross-polarizations is inclined
Shake light (o light and e light).
First electro-optic phase modulator 3 is located at the first light path (o light paths), encapsulates the lithium columbate crystal mixed with magnesia,
By additional low-frequency high-voltage (<Electric signal 0.25GHz) changes refractive index, to carrying out phase-modulation by the laser beam of crystal.
Second electro-optic phase modulator 4 is located at the second light path (e light paths), is the electric light with 3 same specification of phase-modulator
Phase-modulator is placed in the optical path with vertical direction, therefore its polarization state and the polarization state of phase-modulator 3 are entirely different.
Common Amici prism 5, is located at any light path, the light intensity signal in a light path is refracted to photodetector, uses
It is detected waveform in generating.
First ray density filter 6, it is seen that luminous intensity filter, the light intensity for controlling o light paths.
Second ray density filter 7 is the light intensity for controlling e light paths with 6 same specification device of filter.
First object to be measured 8, the axially vertical measured object with o light paths can be precision displacement platform, piezoelectric ceramics, swash
Shake device etc..
Second object to be measured 9, the axially vertical measured object with e light paths.
Photodetector 10, the broadband photodetector of silicon substrate, it is necessary to 632.8nm optical maser wavelengths are covered, it must in use
It must connect with adjustable resistance.
Low-pass filtering amplifying circuit 11, Pre-processing hardware circuit, filter cutoff frequency is adjustable, and has amplified signal amplitude
Function.
Data collecting card 12, NI series or same type data collecting card, differential mode collection voltages signal.
Computer module 13, computer are equipped with software environment and realize that solution is mutually shown with result.
In order to realize above-mentioned palarization multiplexing phase modulation-type laser from mix two-dimentional two pinpoint targets of interferometer pair or
The real-time measurement of two-dimension displacement/vibration, measurement method of the invention mainly include the following steps that：
1. stablizing supply 5mA electric currents to double-bus network gas laser 1, it is made to export visible red circularly polarized light, rotation
Laser tube makes two polarization states of output be located at both horizontally and vertically.
2. adjustment is placed on the polarization splitting prism 2 of laser leading portion so that the middle layer of incident light and prism has 45 ° of folders
Angle.It is all the electro-optic phase modulator 3 of horizontal direction that o light passes through polarization state in the horizontal direction；E light passes through polarization in vertical direction
The vertical electro-optic phase modulator 4 of state.
3.o light passes through optical filter 6 to reach object to be measured 8, and laser tube is reflected back by former road；E light passes through optically filtering
Device 7 reaches object to be measured 9, along backtracking laser.Common Amici prism 5 can be placed on either one or two of o or e light paths, will
Photodetector 10 is refracted to from mixed signal.
4. the photoelectricity that photodetector 10 exports flows through adjustable resistance and is converted to voltage, voltage signal is put by low-pass filtering
Big device 11 removes high-frequency noise, and the voltage of output completes analog-to-digital conversion by data collecting card 12, then is transmitted to by USB data line
Demodulate computer 13.Signal processing is completed under the software environment (Labview or Matlab) of computer 13, specially when
Two kinds of harmonic components are extracted in domain, and (classification of harmonic wave has the centre frequency of harmonic wave to determine that centre frequency is the roads o electric light phase-modulation
Integral multiple be o classes harmonic wave, equally, another kind of is the harmonic wave of e classes).With in rahmonic include single order and the second harmonic, because
This total of four harmonic wave needs to extract.When the phase shift depth that two modulation introduce is 1.22rad, measured object phase is by anyway
It cuts operation and unpacking restores.
Measurement basic principle based on frequency analysis and phase demodulating：The double-longitudinal-mode laser light intensity of self-mixing effect occurs
Model is：
Subscript o/e represents two light paths, Po/eIt is two longitudinal mode light intensity, letter e and F are the weight coefficient of two light intensity, Co
And CeIt is two equivalent reflectance factors, the intensity for describing reflected light, two light path cross-polarizations always, so mathematics is pitched
Multiply identically vanishing.After ray density filter is used in the present invention, two reflectance factors are much smaller than 1, therefore Co≈Ce< <
1, formula (1) is represented by：
Apply the driving voltage of different frequency same depth, activation to two electro-optic crystals by high-voltage alternating amplifying circuit
Electro-optic phase modulator introduces phase-modulation, and phase is phase-shifted in formula (3)：
Wherein αo/eIt indicates to be phase-modulated the depth that device introduces phase shift, phase shift angular frequency can be determined by phase shifting frequencies：ωo/e
=2 π fo/e.Light intensity signal all the way is only needed when demodulation, by taking the light intensity signal of the roads o as an example, light intensity is by table after Bessel function expansion
Show as follows：
Primary and secondary harmonic wave in formula (5) about the roads o phase can indicate as follows：
Primary and secondary harmonic wave in formula (5) about the roads e phase can indicate as follows：
For dynamic change is presented in formula (6a)-(7b) medium wave amplitude measurement, it is represented by：
For ensure two kinds of harmonic components in frequency domain without aliasing, therefore the angular frequency of two phase-modulations must difference ωo≠
ωeDimension, by the division arithmetic extraction amplitude curve (8a) and (8b) of formula (9)：
Phase is obtained by following relational expression：
When the modulation depth of two electric light phase-modulations is set as αo/eWhen=1.22rad, then about αo/eSingle order and two
Rank Bessel function is equal, i.e. J1(αo/e)=J2(αo/e), the coefficient of sinusoidal phase and cosine phase in this pattern (8a) and (8b)
It is equal to eliminate, corresponding two-dimension displacement curve is obtained by following relational expression after the Phase- un- wrapping solved：
Equally two-way phase and displacement curve can be obtained according to formula (5)-(11) to the roads e light intensity.
The frequency domain character from mixed signal of o light paths or the acquisition of e light paths is further illustrated with reference to Fig. 2：
1) it is the microwave segment signal of a multi resonant wave component after doing FFT transform from mixed signal.
As shown in the figure (two phase modulation frequencies are respectively 39KHz and 98KHz), 2) center of two kinds of harmonic waves and modulation frequency
Rate is consistent, and the adjacent spaces of harmonic wave of the same race are equal to modulating frequency.
3) spectrum width of two kinds of harmonic waves be equal to institute in the optical path measured object introducing laser Doppler frequencies.
4) necessary interval is kept between harmonic wave, therefore when each harmonic wave is extracted is not in aliasing.
Illustrate the signal processing unit and process flow of computer module of the present invention with reference to Fig. 3.Software section is main
Including bandpass filter group unit, including four bandpass filters, two kinds of harmonic component I of o light paths are exported respectivelyo1And Io2, with
And two kinds of harmonic component I of e light pathse1And Ie2；Divider, according to formula Ao/e1(t)=Io/e1/cos(ωo/eAnd A t)o/e2
(t)=Io/e2/cos(2ωo/eT) amplitude curve of two kinds of harmonic components is calculated；Arctangent unit, according to formulaThe phase of two light paths is calculated；Displacement computing unit, according to formulaThe measurement displacement of two light paths is calculated.
Process flow is under Labview environment：
1) configuration A/D cards acquire and store in a differential manner data, and parameter input data demodulates flow, and appropriate adjust is put
Big multiple.
2) cutoff frequency of four bandpass filters, which is arranged, to be ensured：1. four bandwidth do not repeat；2. centre frequency size
Respectively two phase modulation frequency fo/eWith double 2fo/e。
3)foAnd 2foCos (the ω of two filters output and generation at centeroAnd cos (2 ω t)oT) array is divided by, so
After be input to arctangent cp cp operation, another two filter does same operation.
4) by gained Phase- un- wrapping and plot and display.
Single light path is expected the displacement that can be measured or speed limit such as table 1：
1 palarization multiplexing phase modulation-type laser of table mixes the arbitrary single channel measurement range of two-dimentional interferometer certainly
Note:During two-dimensional measurement, two Measurement channels are simultaneously operable or work independently.
The present invention detects the displacement of two self-movement objects, palarization multiplexing production using single laser tube and single detector
The polarization state of raw light path is orthogonal, does not introduce optical crosstalk；Two longitudinal modes of double-bus network gas laser are from mixed process phase
The light intensity variation of interaction, single longitudinal mode is presented as that the cosine function of two phases is poor；Phase modulation technique only brings pure phase position
Variation does not bring additional light intensity to change；Since phase-modulation frequency difference makes the frequency domain distribution interval of two kinds of harmonic waves big, it is easy to carry
It takes；Data processing takes short, the precision height of acquisition；Synchronous detection two-dimension displacement/vibration can be widely applied to contactless light
Quarter machine/circuit printing processes precision positioning in real time.In comparison, two-dimentional accurate displacement in Scientific Engineering and industrial circle at present
The mode of measurement is to use at least two interferometer or two-frequency laser mostly, and system complex, cost is higher, and operates simultaneously inconvenience.
The present invention proposes to use palarization multiplexing phase modulating structure, by two modulates informations to be measured to different harmonic components, signal
Processing extracts phase information according to the distribution character of harmonic wave from harmonic amplitude, and relative accuracy is better than 10e-3, anti-speckle noise
Ability is strong.Meanwhile the present invention can flexibly select modulating frequency, therefore precision dynamic is adjustable in two optical paths, compared to single
Light path self-mixed interference instrument improves better flexibility, and application prospect is fine.
Claims (4)
1. palarization multiplexing phase modulation-type laser mixes two-dimentional interferometer certainly, which is characterized in that including：
Circularly polarized light is decomposed into the polarization point of the linearly polarized light of two cross-polarization by the double-longitudinal-mode laser for exporting circularly polarized light
It is to be measured to be placed sequentially in the first electro-optic phase modulator in the first light path, the first ray density filter and first for light prism
Target, the second electro-optic phase modulator, the second ray density filter and the second mesh to be measured being placed sequentially in the second light path
Mark, the second electricity between the first electro-optic phase modulator and the first ray density filter or in the second light path in the first light path
Common Amici prism between optical phase modulator and the second ray density filter, and for detecting common Amici prism folding
The light intensity signal of injection simultaneously exports the photodetector for being detected signal waveform；First electro-optic phase modulator and the second electricity
The modulating frequency of optical phase modulator is different；The photodetector is electrically connected with signal acquisition and phase calculation system, described
Signal acquisition and phase calculation system are used to carry out frequency analysis according to the light intensity signal of acquisition and phase demodulating obtains tested mesh
Phase is marked, and then obtains displacement.
2. palarization multiplexing phase modulation-type laser according to claim 1 mixes two-dimentional interferometer certainly, which is characterized in that institute
It states signal acquisition and phase calculation system includes：
Low-pass filtering amplifying circuit, is connected with photodetector, carries out signal filtering and amplification；
Data collecting card realizes analog-to-digital conversion for acquiring the signal after filter and amplification；
And computer module, for extract the first harmonic component of two light paths in collected light intensity signal and secondary
Harmonic component realizes phase demodulating based on harmonic component.
3. palarization multiplexing phase modulation-type laser according to claim 2 mixes two-dimentional interferometer certainly, which is characterized in that institute
Stating computer module includes：
Bandpass filter group unit, including four bandpass filters export the first harmonic component I of the first light path respectivelyo1With two
Order harmonic components Io2And second light path first harmonic component Ie1With second harmonic component Ie2；
Divider, for according to formulaWithBe calculated two kinds it is humorous
The amplitude curve of wave component, wherein ωo、ωeFor the phase shift angular frequency of two light paths, ωo≠ωe；
Arctangent unit, for according to formulaWithTwo light are calculated
The phase on road；
And displacement computing unit, for according to formulaWithThe measurement displacement of two light paths is calculated.
4. mixing the measurement of two-dimentional interferometer certainly according to claim 1-3 any one of them palarization multiplexing phase modulation-types laser
Method, which is characterized in that include the following steps：
(1) stablize supply 5mA electric currents to double-longitudinal-mode laser, it is made to export visible red circularly polarized light, rotary laser makes
Two polarization states that must be exported are located at both horizontally and vertically；
(2) polarization splitting prism is adjusted so that the middle layer of incident light and prism has 45 ° of angles, o light to pass through in the horizontal direction inclined
Polarization state is all the first electro-optic phase modulator of horizontal direction, the second electric light phase that e light passes through polarization state vertical in vertical direction
Position modulation；
(3) o light passes through the first ray density filter to reach the first object to be measured, and laser tube is reflected back by former road；E light passes through the
Two ray density filters reach the second object to be measured, along backtracking laser；Common light splitting in o light paths or e light paths
Light intensity signal is refracted to photodetector by prism；
(4) the light intensity signal input signal acquisition of photodetector output and phase calculation system are handled, filtered amplification,
Analog-to-digital conversion, harmonic amplitude extraction, arctangent cp cp operation and unpacking obtain the phase of the first object to be measured and the second object to be measured
And displacement.
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| CN108426528B (en) * | 2018-01-26 | 2019-12-13 | 沈阳师范大学 | laser speckle device and method for measuring out-of-plane and in-plane displacement of object |
| CN108692663B (en) * | 2018-04-11 | 2020-04-21 | 南京师范大学 | Phase modulation type orthogonal polarization laser feedback grating interferometer and measuring method thereof |
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| CN103528511A (en) * | 2013-10-18 | 2014-01-22 | 南京师范大学 | Sinusoidal phase modulation type laser self-mixing interferometer and measuring method thereof |
| CN104266584B (en) * | 2014-10-16 | 2017-03-29 | 北京理工大学 | For the feedback luminous intensity self-checking device of laser self-mixing interference system |
| CN106247947B (en) * | 2016-08-11 | 2018-10-12 | 哈尔滨工业大学 | A kind of thick/thin measuring system of two/three-dimensional grating of heterodyne system displacement |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111060190A (en) * | 2019-12-27 | 2020-04-24 | 中国科学院长春光学精密机械与物理研究所 | Generalized orthogonal demodulation self-mixing vibration measurement method and device |
| CN111060190B (en) * | 2019-12-27 | 2021-11-02 | 中国科学院长春光学精密机械与物理研究所 | Generalized orthogonal demodulation self-mixing vibration measurement method and device |
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