CN106641274B - The self-tightening sealing valve of vacuum-pumping - Google Patents
The self-tightening sealing valve of vacuum-pumping Download PDFInfo
- Publication number
- CN106641274B CN106641274B CN201610923054.4A CN201610923054A CN106641274B CN 106641274 B CN106641274 B CN 106641274B CN 201610923054 A CN201610923054 A CN 201610923054A CN 106641274 B CN106641274 B CN 106641274B
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- Prior art keywords
- flange
- sealing
- vacuum
- bearing
- shaft coupling
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
- F16K1/32—Details
- F16K1/34—Cutting-off parts, e.g. valve members, seats
- F16K1/36—Valve members
- F16K1/38—Valve members of conical shape
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Valves (AREA)
Abstract
The present invention discloses a kind of self-tightening sealing valve of vacuum-pumping, has sealing flange, bearing flange, the first sealing ring, four-way connection, the second sealing ring, connecting rod, the linear shaft coupling of vacuum of threaded hole including center；One end of the connecting rod is connected by the threaded hole with the sealing flange, and the other end is connected with one end of the linear shaft coupling of the vacuum；One end of the four-way connection is equipped with the first connecting flange, and the bearing flange is connected by the first connecting flange with four-way connection, and second sealing ring is arranged between the bearing flange and the first connecting flange；The sealing flange and the pairing of bearing flange bumps, adjust the linear shaft coupling of the vacuum, connecting rod are made to drive the sealing flange close to or far from the bearing flange.The present invention significantly reduces the size of valve, facilitates the miniaturization of equipment, the specific demand of applicable difference occasion.
Description
Technical field
The present invention relates to vacuum equipment and bearing device, control unit in gas delivery system, specially one kind can be taken out
The self-tightening sealing valve of vacuum is suitable for high-purity gas and injects occasion.
Background technique
Vacuum valve is essential gas control components in vacuum system, it is desirable that has higher air-tightness, does not pollute
Working media, and it is small as far as possible to the resistance of air-flow；High pressure valve then requires that specified operating pressure can be born, and avoids
Various forms of leakages.Some occasions needs, which first vacuumize container or pipeline, then injects high-purity gas, this just needs valve
Have the function of vacuum sealing and high pressure sealing simultaneously.
There is the existing vacuum sealing of more seriation to have the valve of high pressure sealing function again currently on the market, these
Although valve size is smaller but conductance also very little, to also very big, the Huo Zheliu that vacuumizes the larger weight of very unfavorable or conductance
It leads big light-weight but high pressure cannot be born.Some require harsh occasion that can not just use existing valve.
In the double beta decaying particle detectors of no neutrino, working media is extremely expensive, purity requirement 0.999995,
Operating pressure 1Mpa.So the requirement to valve is good seal, leak rate is lower than 1E-4PaL/s；With larger conductance with to the greatest extent
The possible influence for eliminating air to working media purity；It is able to bear the operating pressure of 1MPa.Detector puts background simultaneously
The requirement of penetrating property is extremely harsh, and general valve material such as stainless steel, nickel-base alloy cannot make since radioactivity is higher
With, the oxygen-free copper for preferably selecting radioactivity extremely low, and the intensity of oxygen-free copper is smaller.
Summary of the invention
In order to solve above-mentioned prior art problem, the present invention proposes that a kind of conductance is big, rated operating pressure is high, structure is tight
The self-tightening sealing valve to gather can be vacuumized by this valve, and most of valve parts can be removed after vacuumizing.
Technical solution of the invention is as follows:
A kind of self-tightening sealing valve of vacuum-pumping has the sealing flange of threaded hole, bearing flange, the including center
One sealing ring, four-way connection, the second sealing ring, connecting rod, the linear shaft coupling of vacuum；
One end of the connecting rod is connected by the threaded hole with the sealing flange, the other end and the vacuum line
Property shaft coupling one end be connected；
One end of the four-way connection is equipped with the first connecting flange, and the bearing flange passes through the first connecting flange and four
Pass joint is connected, and second sealing ring is arranged between the bearing flange and the first connecting flange；
The sealing flange and the pairing of bearing flange bumps, the sealing surface of two flanges is parallel to each other, first sealing ring
It is placed in the seal groove of sealing flange；
The linear shaft coupling of the vacuum is adjusted, connecting rod is made to drive the sealing flange close to or far from the pressure-bearing method
It is blue.
Other three end of the four-way connection is respectively equipped with the second connecting flange, third connecting flange and the 4th connection method
It is blue.
The material of sealing flange and bearing flange can or other admissible structural materials consistent with Work container, it is close
The seal groove of envelope flange or bearing flange needs to be capable of fixing sealing ring, such as dovetail groove profile seal groove, makes to avoid in valve
It is surprisingly fallen off with sealing ring in the process.
The four-way connection, the second sealing ring, connecting rod, the linear shaft coupling of vacuum are dismountable.
The principle of the present invention is as follows:
Described bearing flange one end and Work container is tightly connected, and can guarantee under the design pressure of Work container
Sealing performance is also possible to a part of pressure resistant vessel, and the sealing flange and bearing flange bumps are matched, when compressing
It can be automatically aligned to, the sealing performance of two kinds of operating conditions of design pressure and vacuum is obtained together with the sealing ring.
When vacuumizing, the straight line vacuum shaft coupling sealing flange and pressure-bearing method described by connecting rod driving
Orchid separation when Work container reaches defined vacuum degree, adjusts straight line shaft coupling and drives as gas passage when vacuumizing
Sealing flange is close to bearing flange and compresses, and so that sealing ring is generated deformation and obtains initial sealing ability.Work is injected in Work container
After making medium, sealing flange and bearing flange further towards and further compresses seal, the pressure that sealing flange is subject to it is big
It is partially transferred to bearing flange and sealing ring will not be crushed, and sealing flange does not need additional force structure, to simplify
Design.Design, the manufacturing tolerance of sealing flange and bearing flange need strict control, to guarantee assembly precision, to obtain
Reliable sealing performance simultaneously protects sealing ring.
Compared with prior art, the beneficial effects of the present invention are: significantly reducing the size of valve, facilitate equipment
Miniaturization；The range of choice of material therefor is extensive, and the specific demand of different occasions can be used.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the self-tightening sealing valve of vacuum-pumping of the present invention；
Fig. 2 is working principle diagram of the self-tightening sealing valve of vacuum-pumping of the present invention when vacuumizing；
Fig. 3 is the partial resolution figure of the self-tightening sealing valve of vacuum-pumping of the present invention；
Fig. 4 is the working state schematic representation of the self-tightening sealing valve of vacuum-pumping of the present invention.
Specific embodiment
The embodiment of the present invention is described in detail below in conjunction with attached drawing, but the present invention can be defined by the claims
Implement with covering multitude of different ways.
It is please the structural schematic diagram of the self-tightening sealing valve of vacuum-pumping of the present invention referring initially to Fig. 1, Fig. 1, as shown,
Including sealing flange 1, bearing flange 2, the first sealing ring 3, four-way connection 5, four ends be connected separately with the first connecting flange 4,
First flange 4 is fixed to pressure-bearing by the second connecting flange 6, third connecting flange 9 and the 4th connecting flange 11, the second screw 13
Flange 2 is equipped with the second sealing ring 7 between bearing flange 2 and flange 4, there is threaded hole at 1 center of sealing flange, with connecting rod 8
Be threadedly coupled, the connecting rod on the linear shaft coupling 10 of vacuum is connect by the first screw 12 with connecting rod 8, in sealing flange 1 and
When bearing flange is in air-tight state, the first screw 12 can be tightened or be dismantled by 6 centre bore of the second connecting flange, vacuum
Linear shaft coupling 10 can drive sealing flange 1,8 side-to-side movement of connecting rod, and third connecting flange 9 is controlled to a vacuum pump, and second connects
Acting flange 6 by blind plate sealing or can connect vacuum meter when vacuumizing.
After 2 internal unit of bearing flange installs and carries out other preparations, by Fig. 1 union piece and pipeline,
The linear shaft coupling 10 of vacuum is adjusted to the left, then sealing flange 1 and the first sealing ring 3 far from bearing flange 2 until maximum distance,
It is communicated on bearing flange 2 and operating pressure vessel space at this time, valve system has larger conductance, conducive to vacuumizing, such as institute
Shown in Fig. 2.
Through after a period of time vacuumize operation and defined vacuum degree after, close vacuum pump, vacuum linearly joins
Axis device 10 is adjusted to the right, drives sealing flange 1 close to bearing flange 2, until compressing the first sealing ring 3, is restored to shown in Fig. 1
State.Wherein the first sealing ring 3 is mounted in the swallow-tail form seal groove of sealing flange 1, and sealing flange 1 is close to bearing flange 2
Coaxial, sealing surface is parallel.Valve obtains preliminary sealing at this time, a small amount of gas is then injected into bearing flange 2, together
When keep a close eye on vacuum meter reading, if vacuum meter without significant change, shows that valve obtains sealability.Then slowly to
Gas is injected in bearing flange 2, while adjusting the linear shaft coupling 10 of vacuum to the right repeatedly, it is ensured that sealing flange 1 is close to pressure-bearing method
Orchid 2 compresses the first sealing ring 3, until reaching rated pressure in container.
So far, the equipment connecting with the second connecting flange 6, third connecting flange 9 or component can be dismantled, then is removed
First screw 12, the second screw 13 can remove four-way connection 5, the second sealing ring 7, the linear shaft coupling 10 of vacuum, such as institute
Fig. 3 shows, finally carefully removes connecting rod 8, if institute Fig. 4 shows, can start follow-up work.
Present invention may apply to different high-purity gas, and the scope of application is big, and structure is simple, oil-free pollution-free.For corruption
Corrosion gas, sealing flange, bearing flange, the first sealing ring need to select corrosion resistant material.
It should be noted last that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting, although ginseng
It is described the invention in detail according to preferred embodiment, those skilled in the art should understand that, it can be to invention
Technical solution is modified or replaced equivalently, and without departing from the spirit and scope of the technical solution of the present invention, should all be covered
In scope of the presently claimed invention.
Claims (4)
1. a kind of self-tightening sealing valve of vacuum-pumping, which is characterized in that including center have threaded hole sealing flange (1),
Bearing flange (2), the first sealing ring (3), four-way connection (5), the second sealing ring (7), connecting rod (8), the linear shaft coupling of vacuum
(10)；
One end of the connecting rod (8) is connected by the threaded hole with the sealing flange (1), the other end and the vacuum line
Property shaft coupling (10) one end be connected；The connecting rod (8) and the linear shaft coupling of vacuum (10) are removable by the first screw (12)
The connection unloaded, first screw (12) are exposed to institute when the sealing flange (1) and bearing flange (2) are in sealing state
The central hole of the second connecting flange (6) is stated, at this time by the centre bore of the second connecting flange (6) by first screw (12)
Dismounting is to dismantle or connect connecting rod (8) and the linear shaft coupling of vacuum (10)；
One end of the four-way connection (5) is equipped with the first connecting flange (4), and the bearing flange (2) passes through the first connecting flange
(4) it is connected with four-way connection (5), second sealing ring (7) is arranged in the bearing flange (2) and the first connecting flange (4)
Between；
The sealing flange (1) and bearing flange (2) are in separable frustum contact surface, and meet Xiang Suoshu in sealing flange (1)
Seal groove, the sealing flange (1) and the concave-convex pairing of bearing flange (2), two flanges are set on the axial end face of bearing flange (2)
Sealing surface it is parallel to each other, first sealing ring (3) is placed in the seal groove of sealing flange (1)；
The linear shaft coupling of the vacuum (10) is adjusted, makes connecting rod (8) that the sealing flange (1) to be driven to hold close to or far from described
Pressure flange (2).
2. the self-tightening sealing valve of vacuum-pumping according to claim 1, which is characterized in that the four-way connection (5)
Other three end is respectively equipped with the second connecting flange (6), third connecting flange (9) and the 4th connecting flange (11), and described second connects
Acting flange (6) and the third connecting flange (9) it is orthogonal be relatively arranged on first connecting flange (4) and the 4th connection method
The two sides of blue (11) connection axis.
3. the self-tightening sealing valve of vacuum-pumping according to claim 1 or 2, which is characterized in that first sealing ring
(3) it is placed in the dove-tail form seal groove of sealing flange (1) sealing surface.
4. the self-tightening sealing valve of vacuum-pumping according to claim 1 or 2, which is characterized in that the four-way connection
(5), the second sealing ring (7), connecting rod (8), the linear shaft coupling of vacuum (10) are dismountable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610923054.4A CN106641274B (en) | 2016-10-29 | 2016-10-29 | The self-tightening sealing valve of vacuum-pumping |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610923054.4A CN106641274B (en) | 2016-10-29 | 2016-10-29 | The self-tightening sealing valve of vacuum-pumping |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106641274A CN106641274A (en) | 2017-05-10 |
| CN106641274B true CN106641274B (en) | 2019-09-20 |
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ID=58856983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610923054.4A Active CN106641274B (en) | 2016-10-29 | 2016-10-29 | The self-tightening sealing valve of vacuum-pumping |
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| Country | Link |
|---|---|
| CN (1) | CN106641274B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1029361A (en) * | 1963-08-30 | 1966-05-11 | Commissariat Energie Atomique | Fluid tight closure device for a vacuum circuit conduit |
| DE4023845C1 (en) * | 1990-07-27 | 1992-04-02 | Vat Holding Ag, Haag, Ch | Shut-off valve for semiconductor producinvacuum equipment - has valve disc pressed against valve seal by actuator and seal between disc and seat |
| CN2132894Y (en) * | 1992-06-20 | 1993-05-12 | 辽宁省能源研究所 | Self-boosting pressure regulating relve |
| CN201137701Y (en) * | 2007-09-24 | 2008-10-22 | 新乡特种风机厂 | Vacuum pumping valve and its electric radiator |
| CN201297398Y (en) * | 2008-10-09 | 2009-08-26 | 中国航空工业第六一八研究所 | Hydraulic gate valve conical surface sealing structure |
| CN201680060U (en) * | 2010-03-10 | 2010-12-22 | 中国科学院等离子体物理研究所 | Separating type evacuation valve |
| CN202852169U (en) * | 2012-08-14 | 2013-04-03 | 山东鑫昊特种装备股份有限公司 | Vacuum pumping valve capable of detecting vacuum degree conveniently |
| CN204437700U (en) * | 2015-01-26 | 2015-07-01 | 江苏华天能源装备有限公司 | A kind of vacuumizing of vacuum insulation deep cooling pressurized container draws valve |
| CN204692613U (en) * | 2015-05-20 | 2015-10-07 | 上海皮尔博格有色零部件有限公司 | Vacuum pumping valve |
| CN206175672U (en) * | 2016-10-29 | 2017-05-17 | 上海交通大学 | But self tightening sealing valve of evacuation |
-
2016
- 2016-10-29 CN CN201610923054.4A patent/CN106641274B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1029361A (en) * | 1963-08-30 | 1966-05-11 | Commissariat Energie Atomique | Fluid tight closure device for a vacuum circuit conduit |
| DE4023845C1 (en) * | 1990-07-27 | 1992-04-02 | Vat Holding Ag, Haag, Ch | Shut-off valve for semiconductor producinvacuum equipment - has valve disc pressed against valve seal by actuator and seal between disc and seat |
| CN2132894Y (en) * | 1992-06-20 | 1993-05-12 | 辽宁省能源研究所 | Self-boosting pressure regulating relve |
| CN201137701Y (en) * | 2007-09-24 | 2008-10-22 | 新乡特种风机厂 | Vacuum pumping valve and its electric radiator |
| CN201297398Y (en) * | 2008-10-09 | 2009-08-26 | 中国航空工业第六一八研究所 | Hydraulic gate valve conical surface sealing structure |
| CN201680060U (en) * | 2010-03-10 | 2010-12-22 | 中国科学院等离子体物理研究所 | Separating type evacuation valve |
| CN202852169U (en) * | 2012-08-14 | 2013-04-03 | 山东鑫昊特种装备股份有限公司 | Vacuum pumping valve capable of detecting vacuum degree conveniently |
| CN204437700U (en) * | 2015-01-26 | 2015-07-01 | 江苏华天能源装备有限公司 | A kind of vacuumizing of vacuum insulation deep cooling pressurized container draws valve |
| CN204692613U (en) * | 2015-05-20 | 2015-10-07 | 上海皮尔博格有色零部件有限公司 | Vacuum pumping valve |
| CN206175672U (en) * | 2016-10-29 | 2017-05-17 | 上海交通大学 | But self tightening sealing valve of evacuation |
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| Publication number | Publication date |
|---|---|
| CN106641274A (en) | 2017-05-10 |
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