CN106630596B - Silicic acid salted hide glass, curved surface square hole microchannel plate and preparation method thereof - Google Patents
Silicic acid salted hide glass, curved surface square hole microchannel plate and preparation method thereof Download PDFInfo
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- CN106630596B CN106630596B CN201611248494.0A CN201611248494A CN106630596B CN 106630596 B CN106630596 B CN 106630596B CN 201611248494 A CN201611248494 A CN 201611248494A CN 106630596 B CN106630596 B CN 106630596B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/02—Re-forming glass sheets
- C03B23/023—Re-forming glass sheets by bending
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C13/00—Fibre or filament compositions
- C03C13/04—Fibre optics, e.g. core and clad fibre compositions
- C03C13/045—Silica-containing oxide glass compositions
- C03C13/046—Multicomponent glass compositions
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
- C03C3/087—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
- H01J43/246—Microchannel plates [MCP]
Abstract
The present invention relates to a kind of silicic acid salted hide glass, curved surface square hole microchannel plate and preparation method thereof, and silicic acid salted hide glass of the invention is made of each component of following molar percentage: SiO2, 60-80%;Bi2O3, 5-20%;Al2O3, 0.1-3.5%;Na2O, K2O and Cs2The total content of O is 0.1-10%;The total content of MgO, BaO and CaO are 3-15% altogether.Curved surface square hole microchannel plate of the invention is obtained by silicic acid salted hide glass preparation of the invention.Silicic acid salted hide glass preparation curved surface square hole microchannel plate through the invention improves the tensile strength of curved surface square hole microchannel plate, and tensile strength is greater than 65MPa;The thermal expansion coefficient of silicic acid salted hide glass of the invention is small, is 60 × 10 in 20 DEG C to 300 DEG C of thermal expansion coefficients to solve deformation and the damaging problem of small-bore curved surface square hole microchannel plate‑7‑90×10‑7/℃。
Description
Technical field
The present invention relates to a kind of curved surface square hole microchannel plates, micro- more particularly to a kind of silicic acid salted hide glass, curved surface square hole
Channel plate and preparation method thereof.
Background technique
Curved surface square hole microchannel plate (Micro-pore Optics, abbreviation MPO) is to utilize class lobster based on total reflection theory
The element that ocular structure is focused extreme ultraviolet and X-ray, since it is with excellent structural compactness, big visual field, high-resolution
And the advantages that light weight, there is extremely strong development potentiality and application space in extreme ultraviolet and X-ray field of optical detection.Mesh
Before, the method for preparing curved surface square hole microchannel plate is " high temperature fusion pressure hot bending " method, and the key for preparing MPO is glass used
Fiber forms fiber, the edge-cladding glass of additional periphery by the rectangular cladding glass pipe of acid-soluble core material glass stick housing, drawing
Fiber, three kinds of regularly arranged bunchys of glass fibre, forms planar square hole microchannel plate, thinly slices glass after high temperature fusion pressure
Glass, then through hot bending shape, the curved surface with certain radius of curvature is formed, core glass is removed by acid etching and forms porous structure.
Hot bending shape is the key link that square hole microchannel plate realizes focal imaging, and principle is to put plain film microchannel plate
It sets on the spherical mould of certain radius of curvature, being heated to certain temperature softens it and issue in die tip gravity
Raw Bending Deformation, to reach specific curvature, and guarantees that all channels axially all point to the centre of sphere.If cladding during hot bending
Glass tensile strength is inadequate, improper with the matched thermal expansion coefficient of core material, and it is excessive to will cause curved surface square hole microchannel plate internal stress,
The channel deformation and damaging problem for leading to curved surface square hole microchannel plate, to can not achieve well focussed.
Current curved surface square hole microchannel plate cladding glass reported in the literature uses the conventional microchannel plate of lll night vision, so
And since the former is extreme ultraviolet optical imaging element, the latter is electron multiplication device;It is a curved surface that the former, which requires microchannel plate,
The latter is plane;The former requires the resistance to temperature shock of microchannel plate, radiation resistance, mechanical resistant vibration performance to get well, and the latter is not special
It is required that.Therefore, often tensile strength is lower with microchannel plate cladding glass for lll night vision.Quartz glass as high-strength glass is anti-
Though tensile strength is high, have big difference with the thermal expansion coefficient of solvable core material glass, the internal stress during " high temperature fusion pressure hot bending "
It is excessive, the cladding glass of curved surface square hole microchannel plate can not be taken on.
Summary of the invention
It is a primary object of the present invention to provide a kind of novel silicate skin glass, curved surface square hole microchannel plate and its system
Preparation Method, the technical problem to be solved is that its tensile strength is improved, thus more suitable for practical.
The object of the invention to solve the technical problems adopts the following technical solutions to realize.It proposes according to the present invention
A kind of silicic acid salted hide glass, be made of each component of following molar percentage: SiO2, 60-80%;Bi2O3, 5-20%;
Al2O3, 0.1-3.5%;Na2O, K2O and Cs2The total content of O is 0.1-10%;The total content of MgO, BaO and CaO are 3- altogether
15%.
The object of the invention to solve the technical problems also can be used following technical measures and further realize.
Preferably, silicic acid salted hide glass above-mentioned, wherein the transition temperature (Tg) of the silicic acid salted hide glass is greater than etc.
In 500 DEG C, softening temperature (Tf) is more than or equal to 564 DEG C.
Preferably, silicic acid salted hide glass above-mentioned, wherein thermal expansion of the silicic acid salted hide glass at 20 DEG C to 300 DEG C
Coefficient is 60 × 10-7-90×10-7/℃。
Preferably, silicic acid salted hide glass above-mentioned, wherein silicic acid salted hide glass nothing between 500 DEG C -1000 DEG C
Crystallization.
Also the following technical solution is employed for the object of the invention to solve the technical problems to realize.It proposes according to the present invention
A kind of curved surface square hole microchannel plate, be entity bound edge curved surface square hole microchannel plate comprising skin glass of the present invention
And edge-cladding glass, the edge-cladding glass are the entity bound edge of curved surface square hole microchannel plate.
The object of the invention to solve the technical problems also can be used following technical measures and further realize.
Preferably, curved surface square hole microchannel plate above-mentioned, wherein the side length of the square hole of the curved surface square hole microchannel plate
Be 12-20 μm, square hole with a thickness of 0.64-1.06mm.
Preferably, curved surface square hole microchannel plate above-mentioned, wherein the external form of the curved surface square hole microchannel plate is a length of
40-50mm, width 40-50mm.
Also the following technical solution is employed for the object of the invention to solve the technical problems to realize.It proposes according to the present invention
A kind of curved surface square hole microchannel plate preparation method, comprising the following steps:
(1) by silicic acid, barium nitrate or barium carbonate sodium carbonate, potassium carbonate or potassium nitrate, basic magnesium carbonate, calcium carbonate, hydrogen-oxygen
Change aluminium, obtain mixed raw material, clarifying agent is added in mixed raw material, clarifies in 1300-1500 DEG C of high temperature melting, then exist
1200-1350 DEG C of drawing forms skin glass tube;Wherein the weight ratio of clarifying agent and mixed raw material is 0.1-0.8:0.92-0.99;
The group of the skin glass tube becomes (with molar percentage): SiO2, 60-80%;Bi2O3, 5-20%;Al2O3, 0.1-3.5%;
Na2O, K2O and Cs2The total content of O is 0.1-10%;The total content of MgO, BaO and CaO are 3-15% altogether;
(2) the skin glass tube is nested on curved surface Core Glass in MCP Produced by Solid stick, is drawn through monofilament, multifilament, multifilament
Regularly arranged, fusion pressure obtains blank section, and the blank section is passed through slice, chamfering, grinding and polishing, obtains blank flat;Its
In, the blank flat includes skin glass, core glass and edge-cladding glass;
(3) blank flat is hot-forming, hot bending plate is obtained, the hot bending plate is passed through into acid liquid corrosion, channel
Inner wall metal-coated membrane obtains the curved surface square hole microchannel plate of entity bound edge;Wherein, the curved surface square hole microchannel plate includes skin
Glass and edge-cladding glass, edge-cladding glass are the entity bound edge of curved surface square hole microchannel plate.
Preferably, the preparation method of curved surface square hole microchannel plate above-mentioned, wherein the curved surface square hole microchannel plate
The side length of square hole be 12-20 μm, square hole with a thickness of 0.64-1.06mm;The length of the external form of the curved surface square hole microchannel plate
For 40-50mm, width 40-50mm.
Preferably, the preparation method of curved surface square hole microchannel plate above-mentioned, wherein the clarifying agent is Sb2O3And/or
As2O3。
By above-mentioned technical proposal, silicic acid salted hide glass of the present invention, curved surface square hole microchannel plate and preparation method thereof are at least
It has the advantage that
(1) present invention improves the tensile strength of curved surface square hole microchannel plate, and tensile strength is greater than 65MPa;The present invention
Silicic acid salted hide glass thermal expansion coefficient it is small, to solve the deformation of small-bore curved surface square hole microchannel plate and breakage is asked
Topic is 60 × 10 in 20 DEG C to 300 DEG C of thermal expansion coefficients-7-90×10-7/℃。
(2) silicic acid salted hide glass of the invention can be prepared into small-bore, high-temperature molding microchannel plate.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And can be implemented in accordance with the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention and the accompanying drawings.
Detailed description of the invention
Fig. 1 curved surface square hole microchannel plate side structure schematic diagram of the present invention.
Fig. 2 is half positive structure schematic of blank in curved surface square hole microchannel plate preparation process of the present invention.
Fig. 3 is the front porous structure signal in curved surface square hole microchannel plate preparation process of the present invention after hot bending plate acid etching
Figure.
Specific embodiment
It is of the invention to reach the technical means and efficacy that predetermined goal of the invention is taken further to illustrate, below in conjunction with
Attached drawing and preferred embodiment, to silicic acid salted hide glass proposed according to the present invention, curved surface square hole microchannel plate and preparation method thereof
Its specific embodiment, feature and its effect, detailed description is as follows.In the following description, different " embodiment " or " implementation
What example " referred to is not necessarily the same embodiment.In addition, the special characteristic or feature in one or more embodiments can be by any suitable shapes
Formula combination.
A kind of silicic acid salted hide glass that one embodiment of the present of invention proposes, by each component structure of following molar percentage
At:
SiO2, 60-80%;
Bi2O3, 5-20%;
Al2O3, 0.1-3.5%;
Na2O, K2O and Cs2The total content of O is 0.1-10%;
The total content of MgO, BaO and CaO are 3-15% altogether.The group of the silicic acid salted hide glass of specific embodiment and comparative example
At as shown in table 1.
SiO2It is glass former oxide, is the basic framework of glass structure, is the main component of skin glass, mole
When percentage composition is more than 80%, a large amount of SiO is contained in glass2Planar structure is unfavorable for chemical durability of glass, also reduces
Glass viscosity improves coefficient of thermal expansion, is degrading the compatibility with curved surface square hole Core Glass in MCP Produced by Solid;Bi2O3It is glass
Network modifying oxide, be the fluxing agent of glass, suitable Bi be added in glass2O3The molding material of glass can be improved, change
The calorifics processing performance of kind glass, reduces glass high temperature melting viscosity, but its molar content is more than 20%, glass properties is not
Stablize, noted phase separation phenomena occurs;Na2O,K2O and Cs2O is the network modifying oxide of glass, and alkali metal ion is easy in vitreum
It is spread in mobile, the viscosity of glass high temperature melting can be reduced, glass is made to be easy to melt, be good fluxing agent, while can increase
The coefficient of thermal expansion added, reduces the chemical stability and mechanical strength of glass, and introduction volume should not be excessive;MgO, BaO and CaO are
The network modifying oxide of glass is all alkaline earth oxide, is conducive to the anti-crystallization ability for improving glass, and adjust glass
Material, improve the calorifics processing performance of glass, but the excessive glass properties that will lead to of additional amount is unstable, noted phase separation phenomena occurs;
Al2O3For glass structure modulability oxide, the height of content influences the thermal expansion coefficient and chemistry, thermal stability of glass,
But its content will increase glass refraction and dispersion when excessive.
The transition temperature (Tg) of the silicic acid salted hide glass of the embodiment of the present invention is more than or equal to 500 DEG C, and softening temperature (Tf) is big
In equal to 564 DEG C.
The silicic acid salted hide glass of the embodiment of the present invention is 60 × 10 in 20 DEG C to 300 DEG C of thermal expansion coefficient-7-90×10-7/℃。
The silicic acid salted hide glass of the embodiment of the present invention is between 500 DEG C -1000 DEG C without crystallization.
As shown in Figure 1, another embodiment of the invention proposes a kind of curved surface square hole microchannel plate, it is entity bound edge
Curved surface square hole microchannel plate comprising silicic acid salted hide glass 1 and edge-cladding glass 2, the bound edge described in the embodiment of the present invention
Glass is the entity bound edge of curved surface square hole microchannel plate.
The side length of the square hole of the curved surface square hole microchannel plate of the embodiment of the present invention be 12-20 μm, square hole with a thickness of 0.64-
1.06mm。
The a length of 40-50mm, width 40-50mm of the external form of the curved surface square hole microchannel plate of the embodiment of the present invention.
Another embodiment of the invention proposes a kind of preparation method of curved surface square hole microchannel plate, comprising the following steps:
(1) by silicic acid, barium nitrate or barium carbonate sodium carbonate, potassium carbonate or potassium nitrate, basic magnesium carbonate, calcium carbonate, hydrogen-oxygen
Change aluminium, obtain mixed raw material, clarifying agent is added in mixed raw material, clarifies in 1300-1500 DEG C of high temperature melting, then exist
1200-1350 DEG C of drawing forms skin glass tube, and the high temperature melting of specific embodiment, which is clarified and draws molding temperature, is shown in Table 3;Its
The weight ratio of middle clarifying agent and mixed raw material is 0.1-0.8:0.92-0.99;The group of the skin glass tube becomes (with moles hundred
Divide ratio): SiO2, 60-80%;Bi2O3, 5-20%;Al2O3, 0.1-3.5%;Na2O, K2O and Cs2The total content of O is 0.1-
10%;The total content of MgO, BaO and CaO are 3-15% altogether;Na2O,K2O and Cs2O is the network modifying oxide of glass, alkali gold
Belong to ion and be easily moved diffusion in vitreum, the viscosity of glass high temperature melting can be reduced, glass is made to be easy to melt, be good
Fluxing agent, while the coefficient of thermal expansion that will increase reduces the chemical stability and mechanical strength of glass, introduction volume should not mistake
It is more, according to the Na in matched curved surface square hole microchannel plate core material glass2O,K2O and Cs2O content is adjusted, and introduces
It is one such or a variety of, to reduce the core skin diffusion during fiber drawing and high temperature hot pressing;
(2) the skin glass tube is nested on curved surface Core Glass in MCP Produced by Solid stick, is drawn through monofilament, multifilament, multifilament
Regularly arranged, fusion pressure obtains blank section, and the blank section is passed through slice, chamfering, grinding and polishing, obtains blank flat;Such as figure
Shown in 2, wherein the blank flat includes skin glass 3, core glass 4 and edge-cladding glass 5;
(3) blank flat is hot-forming, hot bending plate is obtained, the hot bending plate is passed through into acid liquid corrosion, such as Fig. 3
Shown, hot bending plate has certain radius of curvature after acid liquid corrosion, and vias inner walls metal-coated membrane obtains the curved surface of entity bound edge
Square hole microchannel plate;As shown in Figure 1, wherein the curved surface square hole microchannel plate includes skin glass 1 and edge-cladding glass 2, bound edge
Glass is the entity bound edge of curved surface square hole microchannel plate.
The side of the square hole of curved surface square hole microchannel plate in the preparation method of curved surface square hole microchannel plate of the embodiment of the present invention
A length of 12-20 μm, square hole with a thickness of 0.64-1.06mm;A length of 40- of the external form of the curved surface square hole microchannel plate
50mm, width 40-50mm.The length and width of specific square hole and the overall dimensions of curved surface square hole microchannel plate are as shown in table 3.
Clarifying agent in the preparation method of curved surface square hole microchannel plate of the embodiment of the present invention is Sb2O3And/or As2O3。
1 silicic acid salted hide glass ingredient (molar percentage) of table
Embodiment 1 | Embodiment 2 | Embodiment 3 | Embodiment 4 | Comparative example 1 | Comparative example 2 | |
SiO2/ % | 78.5 | 60.0 | 70.0 | 67.0 | 65.0 | 85.0 |
Bi2O3/ % | 10.0 | 18.0 | 12.0 | 5.0 | 25.0 | 12.0 |
Al2O3/ % | 1.0 | 3.5 | 0.1 | 3.0 | 4.0 | 0 |
Na2O/% | 2.5 | 1.5 | 2.0 | 3.0 | 4.5 | 0 |
K2O/% | 0 | 2.5 | 3.0 | 4.0 | 1.5 | 2.5 |
Cs2O/% | 0 | 2.2 | 2.0 | 3.0 | 0 | 0 |
MgO/% | 7.0 | 6.8 | 3.0 | 0 | 0 | 0 |
BaO/% | 0 | 2.5 | 0.9 | 15.0 | 0 | 0.5 |
CaO/% | 1.0 | 3.0 | 7.0 | 0 | 0 | 0 |
The transition temperature (Tg) of the silicic acid salted hide glass of testing example 1-4 and comparative example 1-2, softening temperature (Tf),
20 DEG C to 300 DEG C of thermal expansion coefficient (α20-300℃(×10-7/ DEG C)) and the brilliant performance of anti-suction between 500-1000 DEG C, test
The results are shown in Table 2.
The performance test results of 2 silicic acid salted hide glass of table
As shown in Table 2, the performance of the silicic acid salted hide glass of embodiment 1-4 is substantially better than the silicic acid salted hide glass of comparative example
Performance.
The composition of the skin glass tube of embodiment 5 is identical as 1 silicic acid salted hide glass ingredient of embodiment, the skin glass of embodiment 6
The composition of pipe is identical as 2 silicic acid salted hide glass ingredient of embodiment, the composition and 3 silicate of embodiment of the skin glass tube of embodiment 7
Skin glass ingredient is identical, and the composition of the skin glass tube of embodiment 8 is identical as 4 silicic acid salted hide glass ingredient of embodiment, comparative example 3
The composition of skin glass tube is identical as 1 silicic acid salted hide glass ingredient of comparative example, the composition and comparative example 2 of the skin glass tube of comparative example 4
Silicic acid salted hide glass ingredient is identical.Embodiment 6-8 and comparative example 3-4 mixed raw material and the weight ratio of clarifying agent are shown in Table 4.Test is real
The tensile strength of the curved surface square hole microchannel plate of a 5-8 and comparative example 3,4 is applied, test result is shown in Table 4.
Table 3 prepares the parameter of the micro- square hole channel plate of curved surface
Mixed raw material and clarifying agent weight percent and tensile strength when table 4 prepares curved surface square hole microchannel plate
The tensile strength of curved surface square hole microchannel plate of the invention is greater than 65MPa as shown in Table 4, and tensile strength is obviously big
In the tensile strength of the micro- square hole channel plate of comparative example curved surface.
The above described is only a preferred embodiment of the present invention, be not intended to limit the present invention in any form, according to
According to technical spirit any simple modification, equivalent change and modification to the above embodiments of the invention, this hair is still fallen within
In the range of bright technical solution.
Claims (9)
1. a kind of silicic acid salted hide glass, it is characterised in that: be made of each component of following molar percentage:
SiO2, 60-80%;
Bi2O3, 5-20%;
Al2O3, 0.1-3.5%;
Na2O, K2O and Cs2The total content of O is 0.1-10%;
The total content of MgO, BaO and CaO are 3-15% altogether;
The silicic acid salted hide glass is 60 × 10 in 20 DEG C to 300 DEG C of thermal expansion coefficient-7-90×10-7/℃。
2. silicic acid salted hide glass according to claim 1, which is characterized in that the transition temperature of the silicic acid salted hide glass
(Tg) it is more than or equal to 500 DEG C, softening temperature (Tf) is more than or equal to 564 DEG C.
3. silicic acid salted hide glass according to claim 1, which is characterized in that the silicic acid salted hide glass 500 DEG C-
Without crystallization between 1000 DEG C.
4. a kind of curved surface square hole microchannel plate, it is characterised in that: be the curved surface square hole microchannel plate of entity bound edge comprising right
It is required that the described in any item silicic acid salted hide glass of 1-3 and edge-cladding glass, the edge-cladding glass is curved surface square hole microchannel plate
Entity bound edge.
5. curved surface square hole microchannel plate according to claim 4, which is characterized in that the curved surface square hole microchannel plate
The side length of square hole be 12-20 μm, square hole with a thickness of 0.64-1.06mm.
6. curved surface square hole microchannel plate according to claim 4, which is characterized in that the curved surface square hole microchannel plate
A length of 40-50mm of external form, width 40-50mm.
7. a kind of preparation method of curved surface square hole microchannel plate, which comprises the following steps:
(1) by silicic acid, barium nitrate or barium carbonate sodium carbonate, potassium carbonate or potassium nitrate, basic magnesium carbonate, calcium carbonate, aluminium hydroxide,
Mixed raw material is obtained, clarifying agent is added in mixed raw material, is clarified in 1300-1500 DEG C of high temperature melting, then in 1200-1350
DEG C draw molding skin glass tube;Wherein the weight ratio of clarifying agent and mixed raw material is 0.1-0.8:0.92-0.99;The skin glass
The group of glass pipe becomes (with molar percentage): SiO2, 60-80%;Bi2O3, 5-20%;Al2O3, 0.1-3.5%;Na2O, K2O and
Cs2The total content of O is 0.1-10%;The total content of MgO, BaO and CaO are 3-15% altogether;
(2) the skin glass tube is nested on curved surface square hole Core Glass in MCP Produced by Solid stick, is drawn through monofilament, multifilament, multifilament
Regularly arranged, fusion pressure obtains blank section, and the blank section is passed through slice, chamfering, grinding and polishing, obtains blank flat;Its
In, the blank flat includes skin glass, core glass and edge-cladding glass;
(3) blank flat is hot-forming, hot bending plate is obtained, the hot bending plate is passed through into acid liquid corrosion, vias inner walls
Metal-coated membrane obtains the curved surface square hole microchannel plate of entity bound edge;Wherein, the curved surface square hole microchannel plate includes skin glass
And edge-cladding glass, edge-cladding glass are the entity bound edge of curved surface square hole microchannel plate.
8. the preparation method of curved surface square hole microchannel plate according to claim 7, which is characterized in that the curved surface square hole
The side length of the square hole of microchannel plate be 12-20 μm, square hole with a thickness of 0.64-1.06mm;The curved surface square hole microchannel plate
External form a length of 40-50mm, width 40-50mm.
9. the preparation method of curved surface square hole microchannel plate according to claim 7, which is characterized in that the clarifying agent is
Sb2O3And/or As2O3。
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CN108922646B (en) * | 2018-07-02 | 2020-01-17 | 中国建筑材料科学研究总院有限公司 | Collimator and preparation method |
CN110981192B (en) * | 2019-12-11 | 2022-02-18 | 中国建筑材料科学研究总院有限公司 | Microchannel plate cladding glass with high-stability temperature resistance characteristic for low temperature and preparation method and application thereof |
CN111063471A (en) * | 2019-12-13 | 2020-04-24 | 北方夜视技术股份有限公司 | Angel type lobster eye X-ray focusing optical device and preparation and detection method thereof |
CN111960666A (en) * | 2020-07-23 | 2020-11-20 | 北方夜视技术股份有限公司 | Lobster eye optical device leather glass and preparation method thereof |
EP4222125A1 (en) * | 2020-09-30 | 2023-08-09 | Corning Incorporated | Lead free glass composition for microchannel plate fabrication |
CN112979160A (en) * | 2021-03-03 | 2021-06-18 | 中国建筑材料科学研究总院有限公司 | Ion bombardment-resistant glass composition, microchannel plate cladding glass, microchannel plate and preparation method |
CN113912287B (en) * | 2021-10-14 | 2022-10-04 | 中国科学院西安光学精密机械研究所 | Lead-free MCP micropore array substrate cladding glass and preparation method thereof |
CN113912286B (en) * | 2021-10-14 | 2022-10-04 | 中国科学院西安光学精密机械研究所 | Barium silicate borate glass and preparation method thereof |
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EP1138641A1 (en) * | 2000-03-30 | 2001-10-04 | Schott Glas | Lead-free bismuth silicate glasses and their uses |
CN100338722C (en) * | 2004-12-14 | 2007-09-19 | 中国科学院西安光学精密机械研究所 | Spherical microchannel board and production thereof |
CN105349962A (en) * | 2015-11-20 | 2016-02-24 | 浙江大学 | Method and product for improving microchannel plate soft X-ray-extreme ultraviolet ray imaging performance |
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