CN106595952A - Dynamic force sensor sensitivity calibration method and device - Google Patents
Dynamic force sensor sensitivity calibration method and device Download PDFInfo
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- CN106595952A CN106595952A CN201611232108.9A CN201611232108A CN106595952A CN 106595952 A CN106595952 A CN 106595952A CN 201611232108 A CN201611232108 A CN 201611232108A CN 106595952 A CN106595952 A CN 106595952A
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- force snesor
- sensitivity
- calibrated
- standard
- acceleration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
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- General Physics & Mathematics (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The invention discloses a dynamic force sensor sensitivity calibration method and device. The method comprises steps that silicone grease is filled between a calibration force sensor and a standard acceleration sensor fixing surface; M mass blocks are respectively arranged on a standard acceleration sensor for measurement, and the M is not smaller than 2, a vibrator is driven to generate vibration, output voltage signals of a standard acceleration gauge and a to-be-calibrated force sensor and acceleration detected by the standard acceleration gauge are acquired, and sensitivity of the to-be-calibrated force sensor is calculated according to the acquired signals. According to the method and the device, a fixing method of the to-be-calibrated force sensor and the standard acceleration sensor is realized, a specific dynamic calibration precision expression of the force sensor is acquired through derivation, no-suspension mounting requirement is proposed for the standard mass blocks, operation difficulty is reduced, and measurement precision and reliability are easily guaranteed.
Description
Technical field
The invention belongs to the demarcation field of force snesor, more particularly, to a kind of force snesor sensitivity dynamic calibration
Method and caliberating device.
Background technology
Piezoelectric accelerometer and force snesor are two kinds of sensors the most frequently used in vibration test.Sensor production producer
The sensitivity number and its frequency characteristic figure of accelerometer are always provided.But from unlike accelerometer:Producer generally only carries
Linearity figure (static demarcating) and Sensitirity va1ue for force snesor in its range ability, does not provide its frequency characteristic data.
Due to the impact of use environment, Rig up error, overload and transport and the improper change that can cause force snesor characteristic is stored, made
The sensibility in practice of sensor produces difference with its nominal value.In kinetic measurement, the measure error of power sensing typically accelerates
The several times of degree meter, are to ensure certainty of measurement, and it is necessary to carry out dynamic calibration to force snesor.
Extremely rare about the documents and materials of force snesor dynamic calibration, in vibration test, force snesor works in one
Fixed frequency band range.Therefore, user must be known by the frequency characteristic of force snesor, and the static demarcating result that producer provides cannot
Meet the needs of kinetic measurement.
At present in vibration signal field tests, most commonly accelerometer is demarcated, and the dynamic calibration of force snesor is more
It is rare.This is because, the absolute magnitude of acceleration can be by laser vibration measurer or acceleration of gravity more accurately and conveniently
Measure, and the absolute magnitude direct access of power is then very difficult.So dynamic force sensor caliberating is mostly to measure acceleration
Based on recycle Newton's second law indirectly to carry out.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of force snesor sensitivity dynamic mark
Determine method and apparatus, the absolute value for thus solving power directly obtains very difficult technical problem.
For achieving the above object, according to one aspect of the present invention, there is provided a kind of force snesor sensitivity dynamic calibration
Method, it is characterised in that the scaling method comprises the steps：
Force snesor to be calibrated and standard acceler are fixed together；
Silicone grease is filled between the force snesor and the standard acceler stationary plane of the demarcation；
It is respectively provided with M mass on the standard acceler to be measured as follows, wherein M is more than or equal to
2：
Vibrator is driven to produce vibration, the acquisition system collection standard accelerometer and the force snesor to be calibrated
The acceleration that output voltage signal, the normal acceleration are measured, using the output voltage signal, the acceleration and phase
Answer the sensitivity of force snesor to be calibrated described in the Mass Calculation of mass.
Further, when M is equal to 2, the computing formula of the sensitivity is：
Wherein, the voltage of the force snesor output to be calibrated when u1 and u2 are respectively tested twice, a1 and a2 is two
The acceleration of standard accelerometer output during secondary test, m1 and m2 is the quality of two pieces of masses.
Further, when M is more than 2, the calculating of sensitivity several times is carried out, obtains data through least square fitting institute
The straight slope of acquisition is the sensitivity demarcated.
Further, the system that the sensitivity refers to the force snesor to be calibrated and the adapter used by it in engineering
Sensitivity.
Further, the mass is placed directly on vibrator after being connected with the standard acceler.
The invention also discloses a kind of force snesor sensitivity dynamic calibration apparatus, it is characterised in that the device is mainly wrapped
Include：
The force snesor to be calibrated being fixedly connected and standard acceler；Silicone grease layer is filled between stationary plane；
Acquisition system, for receiving the data of the force snesor to be calibrated and the standard acceler；
Digital vibration experiment, for receiving the data that acquisition system is gathered, and provides vibratory drive source.
Further, the thickness of the silicone grease layer is：0.05mm.
Further, the material of the silicone grease layer is specially paraffin.
Further, the force snesor to be calibrated and the standard acceler all include suitable mode transfer block.
Further, the acquisition system includes following part：
The data acquisition system being all connected with the suitable mode transfer block of the force snesor to be calibrated and the standard acceler
System；
The data collecting system is connected with vibration controller, and after the vibration controller power amplifier is also associated with；
The power amplifier is connected with the digital vibration experiment.
In general, by the contemplated above technical scheme of the present invention compared with prior art, can obtain down and show
Beneficial effect：
(1) according to the invention thinking of the present invention, the present invention proposes a kind of easy force sensor dynamic calibration device,
In the device, the fixing means of force snesor to be calibrated and standard acceler is realized, in calibration process generally
May be selected to hang and without two kinds of mounting means are hung, hung and point horizontal and vertical two ways again is installed.When horizontally suspending, use
Mass is hung level by long fine rule, digital vibration experiment exciting in the horizontal direction；During vertical hanging, using soft rubber
Leather rope has hung mass, digital vibration experiment vertically exciting.Through a large number of experiments show that:There is suspension to install
Uniformity it is very poor, test accuracy is relatively low.It main reason is that:(1) suspended mass fine rule rope can be such that mass produces partially
Turn, to the centering of digital vibration experiment extreme difficulties are caused；(2) when demarcating, fine rule rope is inevitably to mass
Motion produce constraint, and fine rule rope can follow mass that acutely vibration occurs, and leverage measuring accuracy；(3) while protecting
Hold mass consistent with digital vibration experiment moving-coil central axial direction, need high-precision special positioner.
During without hanging installation, mass directly bears against on digital vibration experiment after being connected with sensor, it is not necessary to hang fine rule,
External interference is eliminated, by a level meter, so that it may realize the uniformity installed more conveniently.Therefore take and installed without suspension
Mode.)
(2) on the premise of said apparatus are produced, it is deduced based on the force snesor dynamic calibration precision of said apparatus
Expression, it is proposed that standard quality block is carried out without hang install requirement, reduce operation difficulty, and uniformity
It is good, it is easy to ensure certainty of measurement and reliability；
In a word, the scaling method realized according to the present invention and device, realize the work of force snesor sensitivity dynamic calibration
Cheng Yingyong.
Description of the drawings
Fig. 1 is the structural representation of the caliberating device realized according to the present invention；
Fig. 2 is the engineering attachment structure schematic diagram of the caliberating device realized according to the present invention；
Fig. 3 is the Sensitivity comparison curve map of the scaling method realized according to the present invention.
In all of the figs, identical reference be used for represent identical element or structure, wherein：
Specific embodiment
In order that the objects, technical solutions and advantages of the present invention become more apparent, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only to explain the present invention, and
It is not used in the restriction present invention.As long as additionally, technical characteristic involved in invention described below each embodiment
Not constituting conflict each other just can be mutually combined.
Its step is：Force snesor to be calibrated and standard acceler are fixed together, band installing hole
Sensor directly turn round in the installation of sensor production manufacturer's recommended and refuse lower screw on the standard acceler,
A thin layer silicone grease is put between mounting surface, gap is filled up, to increase installation hardness, then installation quality block again, by shaking during demarcation
Dynamic generator sends sinusoidal signal and drives vibrator to produce vibration, gathers standard accelerometer by acquisition system and power to be calibrated is passed
The output voltage signal of sensor, according to acceleration and quality, calculates corresponding power, so as to obtain the sensitivity of force snesor.
The main technical principle being related to of the force snesor sensitivity dynamic calibrating method realized according to the present invention is as follows：
In this scaling method, what is be calibrated is force snesor, and its connection and mass between can regard rigidity as, its sense
The power being subject to can be obtained according to Newton's second law:F=ma, wherein m are standard quality block and other additional mass summations, and a is
The acceleration that standard accelerometer is measured.If force snesor is output as voltage u, sensitivity is x, then
U=xF
To recognize additional mass, using the different standard quality of two pieces of quality, tested twice, can according to above-mentioned discussing
Know,
Wherein, the voltage of force snesor output, standard when a1 and a2 is to test twice when u1 and u2 are respectively tested twice
The acceleration of accelerometer output, m1 and m2 is known standard quality, and △ m are unknown additional mass, thus can be obtained：
Preferably, more than Jing analyses, can comprehensively draw force snesor sensitivity to be calibrated:
Embodiment 1：
The present invention proposes a kind of engineer applied method of force snesor sensitivity dynamic calibration, and its step is：To wait to mark
Fixed force snesor is fixed together with standard acceler, and the sensor with installing hole is directly in sensor production
The installation of manufacturer's recommended is turned round and refuses lower screw on standard acceler, and a thin layer silicone grease is put between mounting surface,
Gap is filled up, to increase installation hardness, then installation quality block again, sends sinusoidal signal and drive during demarcation by vibration machine
Vibrator produces vibration, and by acquisition system the output voltage signal of standard accelerometer and force snesor to be calibrated is gathered, according to
Acceleration and quality, calculate corresponding power, so as to obtain the sensitivity of force snesor.
The acquisition of normal acceleration signal is that this method is successfully crucial.This method is using by the production of standard PCB company
The accelerometer of model 357B03, model 481A01 signal are suitable to adjust device and connection cable composition simple calibrating system.It is whole
The LF-response of individual calibration system is determined by the charge and discharge electrical time constant of standard accelerometer 357B03, at low frequency end 0.5Hz
The calibrated error of system is less than 5%.
The method is realized mainly by Engineering Control vibration controller (German M+P Vibcontrol), digital vibration examination
Test equipment (U.S. UD 24.5KN), standard accelerometer (PCB 357B03), data collecting system (German M+P SOA) and two
Individual standard quality block and circular are completed.Sinusoidal signal driving number is produced by Engineering Control vibration controller when realizing
Word formula vibration rig produces vibration, and by acquisition system the output voltage of standard accelerometer and force snesor to be calibrated is gathered
Signal, according to acceleration and quality, calculates corresponding power, so as to obtain the sensitivity of force snesor.The acceleration for wherein measuring
It is the core reference amount for realizing system calibrating.
In actual enforcement, first force snesor to be calibrated and standard acceler are fixedly connected on into one
Rise, because back-to-back collimation technique requires that the accekeration that each sensor is detected is identical, so the power that need to be demarcated
Sensor is properly attached in normative reference be necessary, the force snesor with installing hole in this way, then directly in sensor production
The installation of manufacturer's recommended is turned round and refused down, is arranged on standard acceler with screw, and two mounting surfaces all should polish, and
It is smooth, flat, a thin layer silicone grease is put between mounting surface, gap is filled up, to increase installation hardness, then matter is installed again
Gauge block, and cable is fixed, vibration controller end is connected to, the motion of cable is reduced, prevent substantial amounts of motion or pressure from passing
In being sent to system, this is particular importance.Typically connect the typical calibration installation drawing of following Fig. 2.Wherein further, thin layer
Silicon grease material is the adhesive of Loctite companies 454, and fill process is to grasp smoothness and filling thickness, and such as fineness is as far as possible
0.00016mm, filling thickness is no more than 0.05mm
In actual enforcement, unknown additional mass is constantly present.Cause the factor of additional mass complex, because
This, it is necessary to recognized using following methods, could really obtain acting on the power on force snesor.
Recognize that unknown additional mass method is：What is be calibrated is force snesor, and its connection and mass between can be seen
Into rigidity, the power that it is experienced can be obtained according to Newton's second law:
F=ma
Wherein m is standard quality block and other additional mass summations, the acceleration that a is measured for standard accelerometer.If power
Sensor is output as voltage u, and sensitivity is x, then
U=xF
To recognize additional mass, using the different standard quality of two pieces of quality, tested twice, can according to above-mentioned discussing
Know,
Wherein, the voltage of force snesor output, standard when a1 and a2 is to test twice when u1 and u2 are respectively tested twice
The acceleration of accelerometer output, m1 and m2 is known standard quality, and △ m are unknown additional mass.Thus can obtain：
And then force snesor sensitivity to be calibrated can be obtained:
In order to verify the validity of this method, using an import force snesor newly bought as object is demarcated, the power is sensed
Device normal sensibility is 0.2308mV/N.Two standard quality block quality are respectively 1kg and 1.5kg, are given birth to using UD companies of the U.S.
The digital vibration experiment of SA30-S452 types of product, its maximum thrust is 24.5KN.
Using without installation is hung, by level meter, directly bear against on vibrator after mass is connected with sensor.To this
Force snesor carry out under 100Hz 10 points that dynamic force amplitude is 10～100N determine frequency marking determine, repeat test three times.Demarcate knot
Fruit is as shown in table 1.
Straight slope obtained by data Jing least square fitting obtained by calibrating is force snesor to be calibrated at this
Sensitivity under frequency.Three demarcation obtain sensitivity of the force snesor to be calibrated under 100Hz and are respectively 0.2305,
0.2310,0.2309.With reference to the sensitivity (0.2308mV/N) dispatched from the factory, the precision of three measurements is respectively less than 1%.Under 100Hz
The dynamic sensitivity curve for obtaining the force snesor is demarcated for three times as shown in figure 3, for the data drafting figure of three calibration results.From
The result of three demarcation can be seen that the calibration system has higher stated accuracy and repeatability.
As it will be easily appreciated by one skilled in the art that the foregoing is only presently preferred embodiments of the present invention, not to
The present invention, all any modification, equivalent and improvement made within the spirit and principles in the present invention etc. are limited, all should be included
Within protection scope of the present invention.
Claims (10)
1. a kind of force snesor sensitivity dynamic calibrating method, it is characterised in that the scaling method comprises the steps：
Force snesor to be calibrated and standard acceler are fixed together；
Silicone grease is filled between the force snesor and the standard acceler stationary plane of the demarcation；
It is respectively provided with M mass on the standard acceler to be measured as follows, wherein M is more than or equal to 2：
Vibrator is driven to produce vibration, acquisition system gathers the output of the standard accelerometer and the force snesor to be calibrated
The acceleration that voltage signal, the normal acceleration are measured, using the output voltage signal, the acceleration and corresponding matter
The sensitivity of force snesor to be calibrated described in the Mass Calculation of gauge block.
2. force snesor sensitivity dynamic calibrating method as claimed in claim 1, it is characterised in that described when M is equal to 2
The computing formula of sensitivity is：
Wherein, the voltage of the force snesor output to be calibrated when u1 and u2 are respectively tested twice, a1 and a2 is to try twice
The acceleration of standard accelerometer output when testing, m1 and m2 is the quality of two pieces of masses.
3. force snesor sensitivity dynamic calibrating method as claimed in claim 2, it is characterised in that when M is more than 2, carry out
The calculating of sensitivity several times, obtains data and is the sensitivity demarcated through the straight slope that least square fitting is obtained.
4. the force snesor sensitivity dynamic calibrating method as described in any one in claim 1-3, it is characterised in that described
Sensitivity refers to the system sensitivity of the force snesor to be calibrated and the adapter used by it in engineering.
5. force snesor sensitivity dynamic calibrating method as described in claim 4, it is characterised in that the mass and institute
State after standard acceler is connected and be placed directly on vibrator.
6. a kind of force snesor sensitivity dynamic calibration apparatus, it is characterised in that the device mainly includes：
The force snesor to be calibrated being fixedly connected and standard acceler；Silicone grease layer is filled between stationary plane；
Acquisition system, for receiving the data of the force snesor to be calibrated and the standard acceler；
Digital vibration experiment, for receiving the data that acquisition system is gathered, and provides vibratory drive source.
7. force snesor sensitivity dynamic calibration apparatus as claimed in claim 6, it is characterised in that the thickness of the silicone grease layer
Specially 0.05mm.
8. force snesor sensitivity dynamic calibration apparatus as claimed in claims 6 or 7, it is characterised in that the silicone grease layer
Material is specially paraffin.
9. force snesor sensitivity dynamic calibration apparatus as claimed in claim 8, it is characterised in that the power sensing to be calibrated
Device and the standard acceler all include suitable mode transfer block.
10. force snesor sensitivity dynamic calibration apparatus as claimed in claim 9, it is characterised in that the acquisition system bag
Include following part：
The data collecting system being all connected with the suitable mode transfer block of the force snesor to be calibrated and the standard acceler；
The data collecting system is connected with vibration controller, and after the vibration controller power amplifier is also associated with；
The power amplifier is connected with the digital vibration experiment.
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| CN201611232108.9A CN106595952A (en) | 2016-12-28 | 2016-12-28 | Dynamic force sensor sensitivity calibration method and device |
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| CN201611232108.9A CN106595952A (en) | 2016-12-28 | 2016-12-28 | Dynamic force sensor sensitivity calibration method and device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109238561A (en) * | 2018-09-14 | 2019-01-18 | 上海市计量测试技术研究院 | A kind of measurement method of force snesor dynamic sensitivity |
| CN111208318A (en) * | 2020-01-14 | 2020-05-29 | 西人马（厦门）科技有限公司 | Acceleration sensor verification system and method |
| CN112882119A (en) * | 2020-12-09 | 2021-06-01 | 四川航天计量测试研究所 | Micro mass measuring device and method in microgravity environment |
| CN114966888A (en) * | 2022-05-24 | 2022-08-30 | 中国矿业大学 | Method and device for detecting mine earthquake sensor for mine microseismic monitoring system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109238561A (en) * | 2018-09-14 | 2019-01-18 | 上海市计量测试技术研究院 | A kind of measurement method of force snesor dynamic sensitivity |
| CN109238561B (en) * | 2018-09-14 | 2020-05-19 | 上海市计量测试技术研究院 | Method for measuring dynamic sensitivity of force sensor |
| CN111208318A (en) * | 2020-01-14 | 2020-05-29 | 西人马（厦门）科技有限公司 | Acceleration sensor verification system and method |
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| CN114966888A (en) * | 2022-05-24 | 2022-08-30 | 中国矿业大学 | Method and device for detecting mine earthquake sensor for mine microseismic monitoring system |
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