CN106594288A - Molecule pull type vacuum dynamic sealing structure and ultra high-speed vacuum rotating equipment - Google Patents
Molecule pull type vacuum dynamic sealing structure and ultra high-speed vacuum rotating equipment Download PDFInfo
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- CN106594288A CN106594288A CN201611226615.1A CN201611226615A CN106594288A CN 106594288 A CN106594288 A CN 106594288A CN 201611226615 A CN201611226615 A CN 201611226615A CN 106594288 A CN106594288 A CN 106594288A
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/44—Free-space packings
- F16J15/447—Labyrinth packings
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
The invention discloses a molecule pull type vacuum dynamic sealing structure and ultra high-speed vacuum rotating equipment. The molecule pull type vacuum dynamic sealing structure is used for dynamic sealing between a rotor and a vacuum chamber. A sealing clearance is formed between the sealing surface of the rotor and the sealing surface of the vacuum chamber. A guide groove is formed in the sealing surface of the vacuum chamber. An outlet of the guide groove communicates with an exhaust cavity. The rotor rotating in high speed transmits momentum to gas molecules, and the gas molecules in the guide groove are pulled into the exhaust cavity to be exhausted. According to the molecule pull type vacuum dynamic sealing structure and the ultra high-speed vacuum rotating equipment, vacuum dynamic sealing of the large-diameter vacuum chamber under the ultra high-speed rotating condition is achieved through the pulling effect of the rigid body surface of which the linear speed reaches the molecule thermal motion speed on the gas molecules; and by means of the structure, the air pressure at the two ends of the device can be changed from 10<5> Pa to 10<-7> Pa during ultra high-speed rotating of the large-diameter rotor.
Description
Technical field
The present invention relates to a kind of molecular drag type vacuum dynamic seal structure and ultrahigh speed vacuum rotating equipment, at a high speed
During with ultrahigh speed rotating operation, keep certain vacuum between fixing equipment and the rotary system of motion, realize at a high speed and
Super High-speed rotating equipment system high vacuum dynamic sealing；The invention further relates to be revolved using the ultrahigh speed vacuum of the vacuum dynamic seal structure
Turn equipment.
Background technology
As many large-scale devices in the fields such as the development of science and technology, industry, medical science, scientific research all refer to high speed and ultrahigh speed
The problem in vacuum room is transferred the motion under rotation, that is, needs vacuum dynamic seal to complete close between vacuum chamber and external environment condition
Envelope, prevents gas leakage from entering in vacuum room, the open and close of such as vacuum valve, the feeding of vacuum metallurgy equipment, draws ingot, pours
Note, the rotation of work piece holder for vacuum coating machine, extraordinary accelerator target system etc..
Wherein, accelerate type deuterium tritium fusion neutron source that the fusion reaction of deuterium tritium occurs using high current deuterium ion beam bombardment tritium target to produce
Raw 14MeV high energy Fusion Neutrons, can be applicable to the research fields such as neutronics, nuclear medicine, radiation protection and Application of Nuclear Technology, be
The indispensable large scientific facilities that advanced nuclear energy is studied with Application of Nuclear Technology.
For the strong deuterium tritium fusion neutron source of superelevation stream, the bombardment of intense pulsed ion beam can be in the end tritium containment system of neutron source
Substantial amounts of heat is deposited on target piece, the moment heat flow density of target spot reaches as high as hundreds of kilowatts.Such as target piece can not be carried out effectively
Cooling radiating, can causing target piece temperature drastically to raise, in millisecond can by target piece burn through, cause neutron source to damage and
The major accident that tritium discharges in a large number.
For the radiating of target piece, at present both at home and abroad high current neutron source, generally using rotation target system at a high speed, is rotated using high speed
The annulus radiating to rotating will be converted into target spot radiating, and combine high-efficiency heat radiation structure.At present, high current neutron source tritium containment system
The linear velocity of piece of hitting may be up to more than hundreds of meters per second.
To ensure the current transmission fraction of deuterium ion beam, beam transfer pipeline needs holding 10-4～10-6The vacuum ring of Pa
Border, and in high speed rotation target system, there is leakage face between the tritium target of rotation and the accelerator of fixation.Therefore, revolve in high speed
Needing to be reached using vacuum dynamic seal structure between the tritium target for turning and the accelerator of fixation prevents extraneous gas from entering vacuum chamber
Indoor purpose.
Both at home and abroad the vacuum dynamic seal technology that can be applicable to rotation at a high speed of open report has magnet fluid sealing, dry gas seals
Deng, but these technologies have the shortcomings that using rotating speed cannot continue improve, service life is short, need regularly replace part.For
Neutron yield is 1014-1016The strong deuterium tritium fusion neutron source of superelevation stream of n/s, rotary part linear velocity reach hundreds of meters per second with
On, put forward higher requirement to vacuum dynamic seal.So far, there is no and can be applicable to linear velocity and be up to hundreds of meters per second superelevation
The ripe vacuum dynamic seal structure of fast rotating environment.
The content of the invention
It is an object of the invention to provide a kind of molecular drag type vacuum dynamic seal structure, for equipment in high speed and superelevation
During fast rotating operation, certain vacuum is kept between fixing equipment and the rotary system of motion.
The present invention also aims to provide a kind of ultrahigh speed vacuum rotation of use molecular drag type vacuum dynamic seal structure
Turn equipment.
For this purpose, one aspect of the present invention provides a kind of molecular drag type vacuum dynamic seal structure, for rotor and vacuum chamber
The sealing surface of room dynamic sealing therebetween, the sealing surface of the rotor and the vacuum chamber is formed therebetween between sealing
Gap, the sealing surface of the vacuum chamber is provided with guide channel, and the outlet of the guide channel is connected with discharge chamber, wherein, revolve at a high speed
Momentum is passed to gas molecule by the rotor for turning, and the gas molecule is towed to the discharge chamber in the guide channel
In.
Further, above-mentioned sealing surface and on the sealing surface formed guide channel be made up of independent seal.
According to a further aspect in the invention, there is provided a kind of ultrahigh speed vacuum rotating equipment, rotor and vacuum chamber are included in
The Multi-level sealing structure that room is arranged therebetween, it is characterised in that at least primary seal structure in the Multi-level sealing structure
It is according to molecular drag type vacuum dynamic seal structure described above.
Further, above-mentioned ultrahigh speed vacuum rotating equipment is that deuterium tritium fusion neutron source rotates target system.
Further, above-mentioned Multi-level sealing structure includes one-level movable sealing structure, two grades of movable sealing structures, three-level dynamic sealings
Structure, level Four movable sealing structure and stop seal, wherein, two grades of movable sealing structures, three-level movable sealing structure and level Four
Movable sealing structure is molecular drag type vacuum dynamic seal structure.
Further, above-mentioned one-level movable sealing structure is self-friction forming seal structure, is included in before start operation and turns
Using the sealing block of interference fit between son, through the rotating operation of a period of time, by the sealing block and the sealing surface of rotor
Phase mutual friction, forms the primary seal gap of micron dimension.
Further, above-mentioned one-level movable sealing structure also includes the one-level exhaust connected with the primary seal gap exit
Chamber, to discharge the gas that the primary seal gap is leaked.
Further, above-mentioned stop seal is close selected from magnet fluid sealing, mechanical seal, labyrinth seal, helixseal, dry gas
One or more combination in envelope or packing seal.
Further, the interior sealing that above-mentioned rotor includes external seal plate and arranges relative to the external seal plate parallel interval
Plate, wherein, the external diameter of the inner sealing plate is less than the inside and outside of the external diameter of the external seal plate, the external seal plate and inner sealing plate
Side surface is sealing surface.
Further, vacuum chamber described in above-mentioned vacuum chamber includes the part sealing surface with the inner side of the external seal plate
The exhaust suspended wall being respectively cooperating with the sealing surface in the outside of inner sealing plate and part sealing surface with the inner side of external seal plate and
The exhaust cavity wall that the sealing surface of the inner side of inner sealing plate is respectively cooperating with, the vacuum chamber is additionally included in the one-level fixing shell
The one-level discharge chamber of upper formation, the secondary exhaust chamber being arranged concentrically on the inside of exhaust cavity wall, three-level discharge chamber and level Four row
Air cavity.
The invention has the beneficial effects as follows：The vacuum dynamic seal in high-speed rotating equipment, rotating part are capable of achieving using the invention
Part linear velocity can reach 400m/s, and using speed the traction of the rotor surface to gas molecule of molecular thermalmotion speed is reached
Effect so that gas molecule along particular path move, in entry deterrence vacuum chamber, be capable of achieving rotatory vacuum indoor and outdoor air pressure from
105Pa to 10-7The leap of Pa.The composite can be widely applied to all kinds of ultrahigh speed vacuum rotating equipment such as deuterium tritium fusion neutron sources
In rotation target system, play a significant role.
In addition to objects, features and advantages described above, the present invention also has other objects, features and advantages.
Below with reference to figure, the present invention is further detailed explanation.
Description of the drawings
The Figure of description for constituting the part of the application is used for providing a further understanding of the present invention, and the present invention's shows
Meaning property embodiment and its illustrated for explaining the present invention, does not constitute inappropriate limitation of the present invention.In the accompanying drawings：
Fig. 1 is that the many-level molecule trailed model vacuum moving suitable for Super High-speed rotating equipment according to an embodiment of the invention is close
The schematic diagram of seal structure, illustrated therein is a part；And
Fig. 2 is a kind of many-level molecule trailed model vacuum dynamic seal structure suitable for Super High-speed rotating equipment shown in Fig. 1
Another part schematic diagram.
Description of reference numerals
01st, rotor；02nd, one-level movable sealing structure；
03rd, two grades of movable sealing structures；04th, three-level movable sealing structure；
05th, level Four movable sealing structure；21st, sealing block；
22nd, one-level fixing shell；23rd, primary seal gap；
24th, one-level bleeding point；25th, one-level discharge chamber；
31st, deuterostrophies seal；32nd, secondary seal gap；
33rd, secondary exhaust chamber；34th, two grades of bleeding points；
41st, three-level seal clearance；42nd, three-level spiral seals；
43rd, three-level bleeding point；44th, three-level discharge chamber；
51st, level Four bleeding point；52nd, level Four discharge chamber；
53rd, level Four seal clearance；54th, level Four spiral seals；
06th, fixed shell；07th, vacuum chamber；
08th, transmission device；09th, stop seal；
11st, external seal plate；12nd, inner sealing plate；
71st, it is vented cavity wall；72nd, it is vented suspended wall.
Specific embodiment
It should be noted that in the case where not conflicting, the feature in embodiment and embodiment in the application can phase
Mutually combination.Below with reference to the accompanying drawings and in conjunction with the embodiments describing the present invention in detail.
The principle of molecular drag type vacuum dynamic seal structure of the present invention is：When vacuum cavity rotates at a high speed, outside rotor
It is carved with the speed of the close heat motion of gas molecules of linear velocity of edge, with the stator of rotor intervals minimal clearance parallel arrangement and has
Momentum is passed to the helicla flute of one fixed width depth ratio, the rotor for rotating at a high speed the gas molecule between stator and rotor, gas
During body molecule is drawn along helicla flute to discharge chamber in helicla flute, and then taken away by external vavuum pump.The movable sealing structure
Highest can be applicable to the vacuum dynamic seal occasion that linear velocity reaches 400m/s.
Fig. 1 to Fig. 2 shows some embodiments of the invention.
As depicted in figs. 1 and 2, the many-level molecule trailed model vacuum dynamic seal suitable for Super High-speed rotating equipment of the invention
Structure, ties for rotor 01 and vacuum chamber 07 dynamic sealing therebetween, including 02, two grades of dynamic sealings of one-level movable sealing structure
Structure 03, three-level movable sealing structure 04, level Four movable sealing structure 05 and stop seal 09, wherein, the rotor 01 for rotating at a high speed is most
Big linear velocity reaches the velocity magnitude of molecular thermalmotion, in two grades, three-level and level Four movable sealing structure, per one-level sealing structure
A spiral seals 31,42,54 are respectively provided with, previous stage is revealed gas and entered in next stage movable sealing structure, rotates at a high speed
Momentum is passed to gas molecule by rotor, and gas molecule is drawn along helicla flute at different levels in the helicla flute of spiral seals
In discharge chamber, by external vavuum pump from gas is taken away, so as to keep sealing structure pressure differentials at different levels, under realizing High Pressure Difference
Vacuum sealing, and coordinate stop seal 09 to realize part non-athletic or the vacuum sealing in acceleration, moderating process.
Preferably, the primary seal gap 23 in one-level movable sealing structure 02 belongs to self-friction shaping, close before start operation
Interference fit is adopted between envelope block 21 and rotor 01, through the rotating operation of a period of time, by the phase of sealing block 21 and rotor 01
Mutual friction, being formed cannot pass through the primary seal gap 23 of the micron dimension that assembling is completed, the minimum primary seal gap of spacing
23 prevent most gas to pass through.
Above-mentioned helicla flute can be replaced by the guide channel of other similar effects.
The present invention reaches draw of the rigid body surface of molecular thermalmotion speed to gas molecule using linear velocity, realizes
To the vacuum dynamic seal of major diameter vacuum chamber under ultrahigh speed rotating condition.Using the structure, it is possible to achieve large-diameter rotor superelevation
During speed rotation, the air pressure at device two ends is from 105Pa to 10-7The leap of Pa.
Each part or composition of ultrahigh speed vacuum rotating equipment of the invention are described below.
First, rotor
In one embodiment, power transmission shaft is threaded connection with rotor 01 and is fixed together, by the biography fixed with power transmission shaft
Dynamic device 08 is driven, and rotor driven 01 rotates at a high speed.
The inner sealing plate 12 that the rotor includes external seal plate 11 and arranges relative to the parallel interval of external seal plate 11, wherein,
Less than the external diameter of external seal plate 11, the interior outer surface of external seal plate 11 and inner sealing plate 12 is close the external diameter of inner sealing plate 12
Front cover.
2nd, vacuum chamber
In one embodiment, vacuum chamber 07 is surrounded with fixed shell 06 by rotor 01 and formed, and is kept in vacuum chamber 07
10-7The vacuum of Pa.
The vacuum chamber 07 includes the one-level fixing shell 22 and outer close coordinated with the sealing surface in the outside of external seal plate 11
Exhaust suspended wall 71 that the sealing surface in the outside of the part sealing surface and inner sealing plate of the inner side of shrouding 11 is respectively cooperating with and with it is outer
The exhaust cavity wall 72 that the sealing surface of the part sealing surface of the inner side of sealing plate 11 and the inner side of inner sealing plate 12 is respectively cooperating with, vacuum
Chamber is additionally included in the one-level discharge chamber 25 formed in one-level fixing shell 22, two grades be arranged concentrically in fixed shell 06 row
Air cavity 33, three-level discharge chamber 44 and level Four discharge chamber 52 (being located at the inner side of exhaust cavity wall 72).
3rd, one-level movable sealing structure
Primary seal gap 23 belongs to self-friction shaping, and one-level movable sealing structure 02 is by sealing block 21, one-level fixing shell
22nd, rotor 01, primary seal gap 23, one-level discharge chamber 25, one-level bleeding point 24 are constituted, sealing block 21 and one-level fixing shell
22 are fixed together using welding manner, before start operation, interference fit are adopted between sealing block 21 and rotor 01, when one section
Between rotating operation, by the phase mutual friction of sealing block 21 and rotor 01, being formed cannot pass through the micron dimension that assembling be completed
Primary seal gap 23, the minimum primary seal gap 23 of spacing prevents most gas to enter two grades of movable sealing structures
03。
4th, two grades of movable sealing structures
By after the one-level movable sealing structure 02 that self-friction is molded, revealing gas is entered in two grades of movable sealing structures 03 two
In level seal clearance 32, the speed of the close heat motion of gas molecules of linear velocity of rotor 01 is fixed in one-level fixing shell 22
Deuterostrophies seal 31 on be carved with the helicla flute of certain ratio width depth, at a high speed momentum is passed to gas by the rotor 01 of rotation
Body molecule, during gas molecule is drawn along helicla flute to secondary exhaust chamber 33 in the helicla flute of deuterostrophies seal 31,
By external vavuum pump most of gas is taken away from two grades of bleeding points 34.
5th, three-level movable sealing structure
The three-level seal clearance 41 that residual gas Jing after two grades of movable sealing structures 03 is entered in three-level movable sealing structure 04
Interior, the speed of the close heat motion of gas molecules of linear velocity of rotor 01 is carved with certain ratio width depth in three-level spiral seals 42
Momentum is passed to gas molecule by the helicla flute of degree, the rotor 01 for rotating at a high speed, in the helicla flute of three-level spiral seals 42
In drawing along helicla flute to three-level discharge chamber 44, by external vavuum pump most of gas is taken out from three-level bleeding point 43
Walk.
6th, level Four movable sealing structure
Residual gas Jing after three-level movable sealing structure 04 is gone successively between the level Four sealing in level Four movable sealing structure 05
Gap 53, the speed of the close heat motion of gas molecules of linear velocity of rotor 01, is carved with certain ratio width in level Four spiral seals 54
Momentum is passed to gas molecule by the helicla flute of depth, the rotor 01 for rotating at a high speed, is drawn in level Four spiral seals 54
In along helicla flute to level Four discharge chamber 52, by external vavuum pump gas is taken away from level Four bleeding point 51, residue can be revealed
Slip into the gas of vacuum chamber 07 reaches 10-10Pa·m3/ s so that vacuum chamber 07 is in accelerator vacuum system
10 can be obtained under operation-7The vacuum of Pa magnitudes, meets beam transfer requirement.
7th, stop seal
Stop seal 09 can be that magnet fluid sealing, mechanical seal, labyrinth seal, helixseal, dry gas seals, filler are close
One or more combination in envelope is realized, for rotor 01 in static or acceleration, moderating process, because speed is not up to molecule heat
Movement velocity, when can not play completely the draw of molecule, dynamic sealing of the stop seal in the case of relatively low linear velocity is made
With can ensure that gas will not enter vacuum chamber 07 in.
In the present invention, rotor rotates at a high speed under the driving of transmission device, and linear velocity can reach more than 400m/s, is turning
The towed vacuum dynamic seal structure of many-level molecule has been used between sub and fixed chamber, extraneous gas air inlet vacuum has been prevented
Within the chamber, obtains vacuum chamber inside and is better than 10-7The vacuum of Pa.
The towed vacuum dynamic seal structure of many-level molecule has multistage：One-level movable sealing structure is close using self-friction shaping
Envelope gap is carried out before sealing start operation, and actionless sealing block (including but not limited to block tin) is matched somebody with somebody and between rotor using interference
Close, through the rotating operation of a period of time, by the phase mutual friction of sealing block and rotor, being formed cannot pass through to assemble complete micro-
Rice magnitude seal clearance, the minimum primary seal gap of spacing prevents most gas to enter rear class movable sealing structure.It is surplus
Remaining leakage gas is entered in rear class movable sealing structure, wherein the speed of the close heat motion of gas molecules of rotor maximum linear velocity,
The helicla flute with a fixed width depth ratio is carved with fixed spiral seals, at a high speed the rotor of rotation passes to momentum
Gas molecule, during gas molecule is drawn along helicla flute to discharge chamber in the helicla flute of spiral seals, by external true
Empty pump takes away most of gas from bleeding point, and by the progressive seal tissue gas of level vacuum chamber is entered, and residue can let out
The slip revealed into the gas of vacuum chamber reaches 10-10Pa·m3/ s, obtains vacuum chamber inside and is better than 10-7Pa's is true
Reciprocal of duty cycle.
The preferred embodiments of the present invention are the foregoing is only, the present invention is not limited to, for the skill of this area
For art personnel, the present invention can have various modifications and variations.It is all within the spirit and principles in the present invention, made any repair
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (10)
1. a kind of molecular drag type vacuum dynamic seal structure, for rotor (06) and vacuum chamber (07) therebetween dynamic close
Envelope, it is characterised in that the sealing surface of the rotor (06) and the sealing surface of the vacuum chamber (07) form therebetween sealing
Gap, the sealing surface of the vacuum chamber (07) is provided with guide channel, and the outlet of the guide channel is connected with discharge chamber, wherein,
At a high speed momentum is passed to gas molecule by the rotor (06) of rotation, and the gas molecule is towed in the guide channel
In the discharge chamber (33).
2. a kind of molecular drag type vacuum dynamic seal structure according to claim 1, it is characterised in that the sealing surface and
The guide channel formed on the sealing surface is made up of independent seal (32).
3. a kind of ultrahigh speed vacuum rotating equipment, is included in the multistage dense that rotor (06) and vacuum chamber (07) are arranged therebetween
Seal structure, it is characterised in that at least primary seal structure in the Multi-level sealing structure is according to claim 1 or 2
Molecular drag type vacuum dynamic seal structure.
4. ultrahigh speed vacuum rotating equipment according to claim 3, it is characterised in that the ultrahigh speed vacuum rotating equipment
Target system is rotated for deuterium tritium fusion neutron source.
5. the ultrahigh speed vacuum rotating equipment according to claim 3 or 4, it is characterised in that the Multi-level sealing structure bag
Include one-level movable sealing structure (02), two grades of movable sealing structures (03), three-level movable sealing structure (04), level Four movable sealing structures
(05) and stop seal (09), wherein, two grades of movable sealing structures (03), three-level movable sealing structure (04) and level Four are moved
Sealing structure (05) is molecular drag type vacuum dynamic seal structure.
6. ultrahigh speed vacuum rotating equipment according to claim 5, it is characterised in that the one-level movable sealing structure (02)
For self-friction forming seal structure, it is included in before start operation and between rotor (01) using the sealing block (21) of interference fit, Jing
Rotating operation after a while, by the sealing block (21) and the sealing surface phase mutual friction of rotor (01), forms micron amount
The primary seal gap (23) of level.
7. ultrahigh speed vacuum rotating equipment according to claim 6, it is characterised in that the one-level movable sealing structure is also wrapped
The one-level discharge chamber (25) with primary seal gap (23) outlet is included, to discharge primary seal gap (23) institute
The gas of leakage.
8. ultrahigh speed vacuum rotating equipment according to claim 5, it is characterised in that the stop seal (09) is selected from magnetic
One or more combination in Fluid Sealing, mechanical seal, labyrinth seal, helixseal, dry gas seals or packing seal.
9. ultrahigh speed vacuum rotating equipment according to claim 4, it is characterised in that the rotor (06) is including external seal
Plate (11) and the inner sealing plate (12) arranged relative to external seal plate (11) parallel interval, wherein, the inner sealing plate
(12) external diameter is less than the interior outside table of the external diameter of the external seal plate (11), the external seal plate (12) and inner sealing plate (11)
Face is sealing surface.
10. ultrahigh speed vacuum rotating equipment according to claim 9, it is characterised in that
The vacuum chamber (07) includes and the part sealing surface and the inner sealing plate (12) on the inside of the external seal plate (11)
The exhaust suspended wall (72) that is respectively cooperating with of sealing surface in outside and with the external seal plate (11) on the inside of part sealing surface and institute
The exhaust cavity wall (71) that the sealing surface on the inside of inner sealing plate (12) is respectively cooperating with is stated,
The vacuum chamber (07) be additionally included on the one-level fixing shell (22) formed one-level discharge chamber (25), positioned at institute
State the secondary exhaust chamber (33) being arranged concentrically, three-level discharge chamber (44) and the level Four discharge chamber (52) being vented on the inside of cavity wall (71).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611226615.1A CN106594288B (en) | 2016-12-27 | 2016-12-27 | A kind of molecular drag type vacuum dynamic seal structure and ultrahigh speed vacuum rotating equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611226615.1A CN106594288B (en) | 2016-12-27 | 2016-12-27 | A kind of molecular drag type vacuum dynamic seal structure and ultrahigh speed vacuum rotating equipment |
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| CN106594288A true CN106594288A (en) | 2017-04-26 |
| CN106594288B CN106594288B (en) | 2017-10-13 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108121080A (en) * | 2018-01-31 | 2018-06-05 | 安徽省东超科技有限公司 | A kind of body three-dimensional display apparatus and its control method based on reciprocating image scanning |
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| CN2391058Y (en) * | 1999-06-04 | 2000-08-09 | 北京航空航天大学 | Combined sealing device |
| CN103603954A (en) * | 2013-11-04 | 2014-02-26 | 北京卫星环境工程研究所 | Dynamical sealing system with heavy caliber in vacuum and low temperature environment |
| US20150078893A1 (en) * | 2013-09-19 | 2015-03-19 | MTU Aero Engines AG | Seal arrangement for a turbomachine and process for the production thereof |
| US20150211639A1 (en) * | 2014-01-29 | 2015-07-30 | A.W. Chesterton Company | Non-contacting labyrinth seal assembly |
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2016
- 2016-12-27 CN CN201611226615.1A patent/CN106594288B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2391058Y (en) * | 1999-06-04 | 2000-08-09 | 北京航空航天大学 | Combined sealing device |
| US20150078893A1 (en) * | 2013-09-19 | 2015-03-19 | MTU Aero Engines AG | Seal arrangement for a turbomachine and process for the production thereof |
| CN103603954A (en) * | 2013-11-04 | 2014-02-26 | 北京卫星环境工程研究所 | Dynamical sealing system with heavy caliber in vacuum and low temperature environment |
| US20150211639A1 (en) * | 2014-01-29 | 2015-07-30 | A.W. Chesterton Company | Non-contacting labyrinth seal assembly |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108121080A (en) * | 2018-01-31 | 2018-06-05 | 安徽省东超科技有限公司 | A kind of body three-dimensional display apparatus and its control method based on reciprocating image scanning |
| CN108121080B (en) * | 2018-01-31 | 2024-04-16 | 安徽省东超科技有限公司 | Body three-dimensional display device based on reciprocating image scanning and control method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106594288B (en) | 2017-10-13 |
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