CN106501960B - A kind of spatial filter and its fixing means for filtering aperture - Google Patents
A kind of spatial filter and its fixing means for filtering aperture Download PDFInfo
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- CN106501960B CN106501960B CN201610895113.1A CN201610895113A CN106501960B CN 106501960 B CN106501960 B CN 106501960B CN 201610895113 A CN201610895113 A CN 201610895113A CN 106501960 B CN106501960 B CN 106501960B
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- glass tube
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- filtering aperture
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- filtering
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- 238000001914 filtration Methods 0.000 title claims abstract description 93
- 239000011521 glass Substances 0.000 claims abstract description 96
- 238000003466 welding Methods 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 7
- 230000005540 biological transmission Effects 0.000 claims abstract description 5
- 239000011148 porous material Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 17
- 239000000919 ceramic Substances 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical group [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 230000029087 digestion Effects 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 9
- 230000009172 bursting Effects 0.000 abstract description 5
- 229910010293 ceramic material Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
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- 230000003993 interaction Effects 0.000 description 1
- 230000009022 nonlinear effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Filtering Materials (AREA)
- Glass Compositions (AREA)
Abstract
The invention discloses a kind of spatial filter and its fixing means of filtering aperture, wherein, the spatial filter includes: glass tube with vacuum, and is separately positioned on the entrance lens and exit lens at the glass tube with vacuum both ends, and the filtering aperture in the glass tube with vacuum is arranged in；The filtering aperture is disc-shaped, and its thickness is gradually reduced from edge to center, and the pore structure for light transmission is located at the center location of the filtering aperture；The present invention uses the filtering aperture of new structural design, reduces filtering aperture thickness, and improve filter effect reduces Pinhole closure simultaneously；Filtering aperture edge designs for groove type, convenient for the welding of glass tube with vacuum；And in the fixed filtering aperture of processing, the filtering aperture of which kind of material no matter is used, can effectively avoid bursting phenomenon.
Description
Technical field
The present invention relates to laser equipment technical field, particularly relates to a kind of spatial filter and its filter the fixation side of aperture
Method.
Background technique
In high power laser system, the nonlinear effect of optical element be cannot be ignored.In addition, high power laser system
In have a large amount of optical element, due to element surface and inside impaired loci, stain and inhomogeneities and optical path in ash
Dirt and inhomogeneities etc. all can make light beam inevitably by spatial modulation.Modulate the high frequency so that in spatial frequency spectrum
Energy enhancing, causes the light distribution of near-field beam to change.When superlaser is propagated in the medium, Small-scale Self-focusing is to cause
The main reason for dielectric breakdown, beam quality decline and laser energy lose.Simultaneously because the energy of part high spatial frequencies
Increase very fast, light spot energy diverging when eventually leading to light beam focusing.
How effectively to inhibit the faster high spatial frequencies of non-linear growth, is that laser protects optics in the operating condition
Element improves one of beam Propagation quality and the critical issue of reduction energy loss.
A filtering aperture of traditional spatial filter by a pair of of positive lens and on the confocal point of lens forms.Space
First lens of filter are condenser lens, can be with since the more high corresponding defocus spot center of frequency is remoter on focal plane
The high frequency components in spatial frequency spectrum are intercepted by the filtering aperture placed on focal plane, then thoroughly using second
Mirror collimates the space filtering for being achieved that light beam, improves beam quality, homogenizes output beam.In addition to filtering, space filter
Wave device also has other several functions, mainly includes Image relaying function and bore matching feature.So-called Image relaying is exactly will input
Light beam be imaged step by step undistortedly and be transferred to output face always backward, by shortening the effective propagation path of light beam, reduction is spread out
Effect is penetrated to improve beam quality.In summary, the high frequency components in light beam are filtered out using spatial filter, it can be effective
Small-scale Self-focusing phenomenon is controlled, the load capacity of laser and the quality of output beam is improved, has been high power laser system
In indispensable key device.
In the implementation of the present invention, inventor has found: in existing spatial filter, filtering small structure is one
Planar structure with circular hole, i.e., so-called grommet-type filter hole.The aperture thickness of planar structure is larger, can not accurately be in focus
Position is filtered, and influences filter effect.Meanwhile as laser power is increasing, the optical power born on aperture is filtered
Density is also increasing, and when being more than certain threshold value, light laser and the interaction of material will lead to the ionization of material, and erupt
Plasma causes plug-hole.In addition, in process, when by filtering aperture and fixed glass-vacuum tube, if using metal material
The filtering aperture of matter, metal is different from the thermal expansion coefficient of glass, the fixed filtering aperture by the way of directly fused glass tube
When, if welding gap is too small to cause bursting for glass tube.Since metal material is oxidizable, expands with heat and contract with cold, Yi Yinfa plasma
Body causes the reasons such as plug-hole, therefore is contemplated that the filtering aperture using ceramic material, and the fusing point of ceramic material compares quartz glass
The fusing point of pipe is low, if the mode of fixed aperture is still directly fused glass tube, changing suddenly for temperature can cause ceramic small hole
It bursts.
Summary of the invention
In view of this, it is an object of the invention to propose a kind of spatial filter, filter effect is high, facilitates processing, is not easy
There is plug-hole phenomenon, and can prevent from bursting in fixed filtering aperture.
Based on a kind of above-mentioned purpose spatial filter provided by the invention, comprising: glass tube with vacuum, and be separately positioned on
The filtering aperture in the glass tube with vacuum is arranged in the entrance lens and exit lens at the glass tube with vacuum both ends；It is described
Filtering aperture is disc-shaped, and its thickness is gradually reduced from edge to center, and it is small that the pore structure for light transmission is located at the filtering
The center location in hole.
In some embodiments, it is provided in the circumferential outer edge of the filtering aperture for molten with the glass tube with vacuum
Connect fixed groove.
In some embodiments, the entrance lens and exit lens are positive lens.
In some embodiments, the length of the glass tube with vacuum is equal to the focal length of the entrance lens and exit lens
The sum of.
In some embodiments, entrance lens and exit lens are two-sided is coated with anti-reflection film.
In some embodiments, the vacuum degree of glass tube with vacuum is at least 10-5Pa。
In some embodiments, the material of the filtering aperture is molybdenum or ceramics.
In some embodiments, the entrance lens and exit lens are the two-sided diaphragm for posting high transmittance film.
On the other hand, the filtering aperture that the present invention also provides a kind of as described in above-mentioned any one in spatial filter
Fixing means, comprising:
Filtering aperture is placed in the default fixed point in glass tube with vacuum；
Glass tube is auxiliarily fixed by two to be put into it by the both ends of the glass tube with vacuum respectively, and will be described two auxiliary
Fixed glass tube is helped to promote to the filtering aperture, until described two glass tubes that are auxiliarily fixed are by the both ends of the filtering aperture
It is held out against；
Using welding process, glass tube with vacuum described in high-temperature digestion corresponds to described two glass tubes that are auxiliarily fixed far from institute
The position of filtering aperture one end is stated, and after cooling fixes the filtering aperture.
In some embodiments, the two of of length no more than vacuum glass length of tube that glass tube is auxiliarily fixed
1/10th；The bore that glass tube is auxiliarily fixed is 0.99 times of the glass tube with vacuum internal orifice dimension.
From the above it can be seen that the fixing means of spatial filter provided by the invention and its filtering aperture, described
Spatial filter uses the filtering aperture of new structural design, reduces filtering aperture thickness, improves filter effect while reducing stifled
The effect of holes；Filtering aperture edge designs for groove type, convenient for the welding of glass tube with vacuum；And in the fixed filtering aperture of processing,
The filtering aperture which kind of material no matter used, can effectively avoid bursting phenomenon.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the spatial filter structural schematic diagram of the embodiment of the present invention；
Fig. 2 is the schematic diagram of the section structure that aperture is filtered in the spatial filter of the embodiment of the present invention；
Fig. 3 is the filtering aperture fixing means flow chart of the embodiment of the present invention；
Fig. 4 is the Product Status schematic diagram in the filtering aperture fixing means of the embodiment of the present invention.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.
The embodiment of the invention provides a kind of spatial filters.With reference to Fig. 1 and Fig. 2, wherein Fig. 1 is the embodiment of the present invention
Spatial filter structural schematic diagram, Fig. 2 be the embodiment of the present invention spatial filter in filter aperture cross-section structure signal
Figure.
The spatial filter includes: glass tube with vacuum 1, and is separately positioned on entering for 1 both ends of glass tube with vacuum
Lens 2 and exit lens 3 are penetrated, the filtering aperture 4 in the glass tube with vacuum is set.The filtering aperture 4 is disc-shaped, and
Its thickness is gradually reduced from edge to center, and the pore structure 401 for light transmission is located at the center location of the filtering aperture 4.
Glass tube with vacuum 1 is the main part of spatial filter, and entrance lens 2, exit lens 3 and filtering aperture 4 are all provided with
It sets in glass tube with vacuum 1.In use, being vacuum state inside glass tube with vacuum 1, according to the system being applied to vacuum degree
It is required that different, the vacuum degree of glass tube with vacuum 1 is also different, under normal circumstances, it is desirable that the vacuum degree of glass tube with vacuum 1 should be at least
It is 10-5Pa。
Entrance lens 2 and exit lens 3 are separately positioned on the both ends of glass tube with vacuum 1.In the present embodiment, entrance lens 2
It is positive lens (i.e. plano-convex lens) with exit lens 3；Wherein, the focal length of entrance lens 2 is denoted as f_1, the focal length of exit lens 3
It is denoted as f_2, then correspondingly, the length L of glass tube with vacuum 1 is equal to the sum of entrance lens 2 and the focal length of exit lens 3, i.e. L=f_
1+f_2；Obviously, under aforementioned set-up mode, the back focal plane position of entrance lens 2 is overlapped with the front focal plane position of exit lens 3.
Further, entrance lens 2 and exit lens 3 are also two-sided is coated with anti-reflection film, for enhancing translucent effect.
It filters aperture 4 to be arranged in glass tube with vacuum 1, specific location in the back focal plane position of entrance lens 2 and goes out
It penetrates at the position of front focal plane position coincidence of lens 3.The shape for filtering aperture 4 is disc-shaped, and its thickness is from edge to center
It is gradually reduced, i.e. the 4 edge thickness intermediate thin of filtering aperture of disc-shaped, refering to what is shown in Fig. 2, filtering aperture 4 cuts open from the point of view of section
Face shape is similar to " funnel-form " that two tapers are constituted；And in the link position of two tapers, the i.e. center of circle position of filtering aperture 4
Set the pore structure 401 that setting is used for light transmission.The material for filtering aperture 4 can be metal molybdenum or ceramics；It is filtered when using molybdenum production
When wave aperture 4, filtering aperture 4 is not easy to be oxidized in use, can reduce Pinhole closure；It is filtered when using ceramic making
When aperture 4, then there is no aoxidizing, it is able to extend the working life of filtering aperture 4, improves filter effect.Using this
When the structure of the above-mentioned filtering aperture 4 of embodiment, it can reduce filtering 4 thickness of aperture under the premise of guaranteeing to stablize fixed, mention
High filter effect reduces Pinhole closure simultaneously.
In some other embodiments, with reference to Fig. 1 and Fig. 2, filter be provided in the circumferential outer edge of aperture 4 for it is true
The fixed groove 402 of empty 1 welding of glass tube.Groove 402 is the annular groove of the circumferential outer edge distribution along filtering aperture 4.Pass through
Filter 4 circumferential outer edge of aperture above-mentioned groove 402 design, can be used directly fused glass tube with vacuum 1 mode be filtered it is small
The fixation in hole, while the design of groove 402 of annular ensure that fixed stability.Specifically, in the fixed filtering aperture 4 of processing
When, by the position of the coincidence corresponding with the groove 402 on filtering aperture 4 of welding glass tube with vacuum 1, make the shape of glass tube with vacuum 1
Shape is matched with 402 shape of groove, realizes the fixation of filtering aperture 4.In addition, according to needs are specifically applied, in the fixed filter of processing
During wave aperture 4, in addition to the side at the position of the coincidence corresponding with the groove 402 on filtering aperture 4 of welding whole glass tube with vacuum 1
Except formula, fusion point at equidistant three can also be chosen, only the welding point at described three along the circumferential outer edge of filtering aperture 4
Place is set, welding glass tube with vacuum 1 realizes that the high efficiency of filtering aperture 4 is fixed.
In some other embodiments, the entrance lens 2 and exit lens 3 are the two-sided window for posting high transmittance film
Piece.The above-mentioned design of the present embodiment can reduce the length of vacuum tube, reduce the manufacture difficulty of spatial filter；Correspondingly,
In use, needing to be arranged outside glass tube with vacuum 1 using two panels positive lens, and the position of two panels positive lens should be adjusted, protected
Card filtering aperture 4 is located at the position that the back focal plane position of entrance lens 2 is overlapped with the front focal plane position of exit lens 3.
On the other hand, the filtering in spatial filter that the embodiment of the invention also provides a kind of as described in above-described embodiment
The fixing means of aperture.
In the prior art, the filtering aperture of metal material is in welding, not due to the thermal expansion coefficient of metal and glass
Together, by the way of directly fused glass tube with vacuum when fixed filtering aperture, if welding gap is too small to cause the fried of glass tube
It splits；And when using the filtering aperture of ceramic material, the fusing point of ceramic material is lower than the fusing point of quartz glass tube, according to welding
The mode of the fixed filtering aperture of glass tube with vacuum, changing suddenly for temperature can cause to filter bursting for aperture.To solve above-mentioned skill
Art problem proposes the fixing means of the filtering aperture in the spatial filter of the present embodiment.
With reference to Fig. 3 and Fig. 4, wherein Fig. 3 is the filtering aperture fixing means flow chart of the embodiment of the present invention, and Fig. 4 is this hair
Product Status schematic diagram in the filtering aperture fixing means of bright embodiment.
It the described method comprises the following steps:
Filtering aperture is placed in the default fixed point in glass tube with vacuum by step 301.
In this step, it gets out glass tube with vacuum first, the internal orifice dimension of glass tube with vacuum 1 is D, length L.It then will filter
Wave aperture 4 is placed in the default fixed point in glass tube with vacuum 1.
Step 302 is auxiliarily fixed glass tube for two and is put into it by the both ends of the glass tube with vacuum respectively, and by institute
It states two glass tube is auxiliarily fixed and promoted to the filtering aperture, that glass tube is auxiliarily fixed is small by the filtering until described two
The both ends in hole are held out against.
It in this step, selects two and glass tube 5 is auxiliarily fixed, the length that glass tube 5 is auxiliarily fixed is l, bore d.For
Optical path will not be blocked in glass tube with vacuum 1 by ensuring to be auxiliarily fixed glass tube 5, while guarantee have between glass tube with vacuum 1
Certain gap can complete welding, and the design standard of glass tube 5 is auxiliarily fixed are as follows: the length that glass tube 5 is auxiliarily fixed does not surpass
Cross 1st/20th of the vacuum glass length of tube, i.e. l < 1/20L；The bore that glass tube is auxiliarily fixed is the vacuum
0.99 times of glass tube internal orifice dimension, i.e. d=0.99D.
Glass tube 5 is auxiliarily fixed by two to be put into it by the both ends of glass tube with vacuum 1 respectively, and two are auxiliarily fixed
Glass tube 5 is promoted to filtering aperture 4, until two are auxiliarily fixed glass tube 5 and are held out against by the both ends of filtering aperture 4, is realized
Filter the fixation of 4 position of aperture.
Step 303, using welding process, glass tube with vacuum described in high-temperature digestion, which corresponds to, described two is auxiliarily fixed glass
Position of the pipe far from described filtering aperture one end, and after cooling fix the filtering aperture.
In this step, on the basis of determining filtering 4 position of aperture by abovementioned steps, welding process, high temperature melting are used
Solution glass tube with vacuum 1 corresponds to two and position of the glass tube 5 far from filtering 4 one end of aperture, the melting reference by location is auxiliarily fixed
The position for being labeled as A in Fig. 4.After cooling, glass tube 5 is auxiliarily fixed to be connected and fixed between glass tube with vacuum 1, thus into
The fixation of the realization filtering aperture 4 of one step.
As it can be seen that the fixing means of the filtering aperture of the present embodiment, not directly fused glass tube with vacuum are consolidated with filtering aperture
Positioning is set, i.e., by the way of indirect fixed filtering aperture, can solve aforementioned glass tube in the prior art and ceramic material
Filtering aperture bursts problem.
It should be understood by those ordinary skilled in the art that: the discussion of any of the above embodiment is exemplary only, not
It is intended to imply that the scope of the present disclosure (including claim) is limited to these examples；Under thinking of the invention, above embodiments
Or can also be combined between the technical characteristic in different embodiments, step can be realized with random order, and be existed such as
Many other variations of the upper different aspect of the invention, for simplicity, they are not provided in details.
The embodiment of the present invention be intended to cover fall into all such replacements within the broad range of appended claims,
Modifications and variations.Therefore, all within the spirits and principles of the present invention, any omission, modification, equivalent replacement, the improvement made
Deng should all be included in the protection scope of the present invention.
Claims (9)
1. a kind of fixing means of the filtering aperture in spatial filter, which is characterized in that the spatial filter includes: vacuum
Glass tube, and the entrance lens and exit lens at the glass tube with vacuum both ends are separately positioned on, it is arranged in the vacuum glass
Filtering aperture in glass pipe；The filtering aperture is disc-shaped, and its thickness is gradually reduced from edge to center, for light transmission
Pore structure is located at the center location of the filtering aperture；
The described method includes:
Filtering aperture is placed in the default fixed point in glass tube with vacuum；
Glass tube is auxiliarily fixed by two to be put into it by the both ends of the glass tube with vacuum respectively, and described two auxiliary are solid
Determine glass tube to promote to the filtering aperture, until it is described two be auxiliarily fixed glass tube by it is described filtering aperture both ends by its
It holds out against；
Using welding process, glass tube with vacuum described in high-temperature digestion corresponds to described two glass tubes that are auxiliarily fixed far from the filter
The position of wave aperture one end, and after cooling fix the filtering aperture.
2. the method according to claim 1, wherein it is described filtering aperture circumferential outer edge on be provided with for
The fixed groove of the glass tube with vacuum welding.
3. the method according to claim 1, wherein the entrance lens and exit lens are positive lens.
4. according to the method described in claim 3, it is characterized in that, the length of the glass tube with vacuum is equal to the entrance lens
The sum of with the focal length of exit lens.
5. the method according to claim 1, wherein the entrance lens and exit lens it is two-sided be coated with it is anti-reflection
Film.
6. the method according to claim 1, wherein the vacuum degree of glass tube with vacuum is at least 10-5Pa。
7. the method according to claim 1, wherein the material of the filtering aperture is molybdenum or ceramics.
8. the method according to claim 1, wherein the entrance lens and exit lens are two-sided to post height
The diaphragm of permeable membrane.
9. the method according to claim 1, wherein described be auxiliarily fixed the of length no more than described true of glass tube
/ 20th of empty glass length of tube；The bore that glass tube is auxiliarily fixed is the 0.99 of the glass tube with vacuum internal orifice dimension
Times.
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| CN201610895113.1A CN106501960B (en) | 2016-10-13 | 2016-10-13 | A kind of spatial filter and its fixing means for filtering aperture |
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| CN113514915B (en) * | 2021-06-18 | 2022-06-14 | 山东大学 | Vacuum filtering module for high-power laser and manufacturing method and application thereof |
| CN114389135A (en) * | 2021-12-09 | 2022-04-22 | 中国电子科技集团公司第五十三研究所 | Three-stage amplification laser solid-state amplifier system |
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