CN106486594A - Piezoelectric Self-Sensing Actuator and its filtering method of electric jamming - Google Patents

Piezoelectric Self-Sensing Actuator and its filtering method of electric jamming Download PDF

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CN106486594A
CN106486594A CN201610891068.2A CN201610891068A CN106486594A CN 106486594 A CN106486594 A CN 106486594A CN 201610891068 A CN201610891068 A CN 201610891068A CN 106486594 A CN106486594 A CN 106486594A
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piezoelectric
voltage
piezoelectric ceramics
sensor
electric
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CN106486594B (en
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单小彪
梁云雷
谢涛
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Harbin Institute of Technology
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

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  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

Piezoelectric Self-Sensing Actuator and its filtering method of electric jamming, belong to technical field of filtering.The present invention be in order to solve will be integrated to a piece of or several piezoelectric functions after to use simultaneously as executor and sensor, there is electric jamming in Sensor section.Multi-disc executor's piezoelectric ceramics of Piezoelectric Self-Sensing Actuator using mechanically series connection, electrically parallel connection by the way of constitute piezoelectric stack, a piece of insulating barrier is respectively provided with this piezoelectric stack upper and lower surface, sensor piezoelectric ceramics is arranged on the insulating barrier of piezoelectric stack upper surface；Filtering method is：Gather the output charge of sensor piezoelectric ceramics using charge amplifier, the charge signal of collection is converted to voltage signal output by charge amplifier；Using computer acquisition driving voltage；Obtain the output voltage true value that sensor piezoelectric ceramics obtains when outer loading force acts on again after treatment.The present invention is used for the filtering of Piezoelectric Self-Sensing Actuator electric jamming.

Description

Piezoelectric Self-Sensing Actuator and its filtering method of electric jamming
Technical field
The present invention relates to the filtering method of Piezoelectric Self-Sensing Actuator and its electric jamming, belong to technical field of filtering.
Background technology
Many applications need the function of having detection simultaneously, control and execute, and realize these functions generally needs simultaneously Want executor and sensor.Executor produces displacement or power, completes desired control action；Sensor measures the thing such as displacement or power Reason amount, is all necessary for perform function in a closed loop system and sensing function, and if using separate execution If device and sensor cooperation, not only control program is more complicated, need bigger installation, assembly space, also not simultaneously Beneficial to system to miniaturization, integrated direction development.Piezoelectric is a class material with piezoelectric effect, and it can divide substantially For：Piezoquartz, piezoelectric ceramics, piezoelectric semiconductor and high-molecular organic material.Piezoelectric effect can be divided into direct piezoelectric effect and Piezoelectric can be made piezoelectric transducer using direct piezoelectric effect by two kinds of inverse piezoelectric effect, permissible using inverse piezoelectric effect Piezoelectric is made piezo actuator.According to the mode of structure assembly, by using the piezoelectric of direct piezoelectric effect and profit Integrated with the piezoelectric of inverse piezoelectric effect, make a module in structure, thus can make a device simultaneously There is the function of executor and sensor, this device can be referred to as the Piezoelectric Self-Sensing Actuator based on structure assembly.
So far, realize piezo actuator and the research of sensor integration integration mainly adopts the integrated side of function Case, will certain a piece of or a few piezoelectric use simultaneously as executor and sensor, such words executor's part Control the signal of telecommunication and Sensor section sensitive electrical signal can be coupled, this research key technology is how to realize two kinds of electricity The separation decoupling of signal, existing filtering method has bridge circuit method, state observer method, time division multiplex method and space division multiplexing Method, but every kind of filtering method suffers from application limitation, wherein bridge circuit method because piezoelectric capacitance is with border condition variation, Bridge circuit is led to be not easy adjustment；State observer method too relies on model accuracy, needs and standard from sensing results Could use after transducer calibration；The control circuit of time division multiplex method is complicated, and due to execution time and sensing time point There is error from necessarily leading to transducing signal；Spatial division multiplexing usage drive electrode and sensitive electrode divide difficulty, and can limit mould The overall dimensions of type.In addition, when the integrated scheme of function does not all account for multi-disc piezoelectric cooperation, they are mutual Between electric jamming, lead to it poor compared with the occasion suitability that multi-disc piezoelectric works simultaneously in needs.
Content of the invention
The invention aims to solve will be integrated to a piece of or several piezoelectric functions after simultaneously as executor and biography Using, there is electric jamming in Sensor section to sensor, there is provided a kind of Piezoelectric Self-Sensing Actuator and its electric field are done The filtering method disturbed.
A kind of Piezoelectric Self-Sensing Actuator of the present invention, it include three insulating barriers, multi-disc executor's piezoelectric ceramics and Sensor piezoelectric ceramics,
Multi-disc executor's piezoelectric ceramics using mechanically series connection, electrically parallel connection by the way of constitute piezoelectric stack, this piezoelectricity Stack and a piece of insulating barrier is respectively provided with upper and lower surface, sensor piezoelectric ceramics is arranged on the exhausted of piezoelectric stack upper surface In edge layer, the upper surface of sensor piezoelectric ceramics arranges a piece of insulating barrier.
A kind of filtering method of Piezoelectric Self-Sensing Actuator electric jamming, this filtering method is applied to above-mentioned piezoelectricity from perception Executor,
Driving voltage U is applied to described piezoelectric stackPT (), simultaneously to applying external applied load above sensor piezoelectric ceramics Power F；
Described filtering method is：Gather the output charge of sensor piezoelectric ceramics, charge amplifier using charge amplifier The charge signal of collection is converted to voltage signal output；Using computer acquisition driving voltage UP(t)；
Computer is by driving voltage UPT () carries out Fourier expansion, form different amplitudes, the sine voltage of frequency is folded Plus, calculate sensor piezoelectric ceramics respectively and be subject to external applied load power F=0, each sine voltage is separately as the drive of piezoelectric stack During galvanic electricity pressure, the error voltage that sensor piezoelectric ceramics produces, all error voltages are superimposed and obtain driving voltage UP(t) conduct During the driving voltage of piezoelectric stack, the total error voltage that sensor piezoelectric ceramics produces；The voltage that charge amplifier is exported is believed Number deduct described total error voltage, obtain the output voltage true value that sensor piezoelectric ceramics obtains when outer loading force F act on, reality The now filtering to Piezoelectric Self-Sensing Actuator electric jamming.
Advantages of the present invention：The present invention is by the way of structure assembly by piezo actuator and sensor integration to one Rise, to be used as executor and sensor using different piezoelectric patches, in structure they to be made a module, due to holding Row device and sensor are made up of independent piezoelectric patches respectively, are not in thus that executor's part controls the signal of telecommunication and sensor The situation of part sensitive electrical signal coupling.And the shape of the electric jamming that sensor portion branch is produced by executor's part Condition, the present invention proposes a kind of filtering method, to filter in Piezoelectric Self-Sensing Actuator transducing signal because electric interfering field brings Impact.By emulation and experimental verification, this kind of filtering method can eliminate more than 95% suffered by sensor piezoelectric ceramics Electric jamming, greatly improve the precision of transducing signal.
The filtering method of the present invention can improve Piezoelectric Self-Sensing Actuator transducing signal precision；It achieves executor and holds Row and sensing function integrated it is easy to modularity, be conducive to developing to MEMS direction；Described executor's save space, be easy to pacify Dress and assembling, eliminate standalone sensor and its supporting power supply, display system, economy is more preferable；The present invention in ultraprecise plus Work, fused fiber splice, Aerospace Satellite communication, biomedical engineering, micromechanics clamping, Active Vibration Control etc. need high accuracy, micro- Displacement drive, but the high-tech area that bulk is restricted has more preferable application prospect.
Brief description
Fig. 1 is the structural representation of Piezoelectric Self-Sensing Actuator of the present invention；
Fig. 2 is the polarization mode schematic diagram of Piezoelectric Self-Sensing Actuator；
Fig. 3 is the drive voltage signal schematic diagram that Piezoelectric Self-Sensing Actuator is applied；
Any drive voltage signal of Fig. 4 continuation schematic diagram when carrying out Fourier transformation；In figure UpFor driving voltage, T is the time；
Fig. 5 is the filtering method principle schematic of Piezoelectric Self-Sensing Actuator electric jamming；In figure 1 is that piezoelectricity is held from perception Row device, 6 is driving power supply；
Fig. 6 is in technical solution of the present invention, filters when multi-disc executor's piezoelectric ceramics is powered by the way of electrically in series Wave method principle schematic.
Specific embodiment
Specific embodiment one：With reference to Fig. 1 and Fig. 2, present embodiment, piezoelectricity self-induction described in present embodiment are described Know executor, it includes three insulating barriers 2, multi-disc executor's piezoelectric ceramics 3 and sensor piezoelectric ceramics 4,
Multi-disc executor's piezoelectric ceramics 3 using mechanically series connection, electrically parallel connection by the way of constitute piezoelectric stack, this piezoelectricity Stack and a piece of insulating barrier 2 is respectively provided with upper and lower surface, sensor piezoelectric ceramics 4 is arranged on piezoelectric stack upper surface On insulating barrier 2, the upper surface of sensor piezoelectric ceramics 4 arranges a piece of insulating barrier 2.
In present embodiment, executor's piezoelectric ceramics 3 and sensor piezoelectric ceramics 4 are based on structure assembly, three insulating barriers 2 Executor's piezoelectric ceramics 3, sensor piezoelectric ceramics 4 and surrounding are separated.
Specific embodiment two：With reference to Fig. 1 to Fig. 6, present embodiment is described, piezoelectricity self-induction described in present embodiment Know the filtering method of executor's electric jamming, this filtering method is applied to above-mentioned Piezoelectric Self-Sensing Actuator,
Driving voltage U is applied to described piezoelectric stackPT (), simultaneously to applying external applied load above sensor piezoelectric ceramics 4 Power F；
Described filtering method is：Gather the output charge of sensor piezoelectric ceramics 4 using charge amplifier 5, electric charge amplifies The charge signal of collection is converted to voltage signal output by device 5；Driving voltage U is gathered using computer 7P(t)；
Computer 7 is by driving voltage UPT () carries out Fourier expansion, form different amplitudes, the sine voltage of frequency is folded Plus, calculate sensor piezoelectric ceramics 4 respectively and be subject to external applied load power F=0, each sine voltage is separately as the drive of piezoelectric stack During galvanic electricity pressure, the error voltage that sensor piezoelectric ceramics 4 produces, all error voltages are superimposed and obtain driving voltage UPT () is made For piezoelectric stack driving voltage when, sensor piezoelectric ceramics 4 produce total error voltage；The electricity that charge amplifier 5 is exported Pressure signal deducts described total error voltage, and the output voltage that acquisition sensor piezoelectric ceramics 4 obtains when outer loading force F acts on is true Value, realizes the filtering to Piezoelectric Self-Sensing Actuator electric jamming.
Sensor piezoelectric ceramics 4 is in outer loading force F and driving voltage UPUnder the collective effect of t electric jamming that () produces, The electric charge producing is QF+QC, QFFor the lower electric charge producing of external applied load power F effect, QCThe electric charge producing for electric jamming；Now electricity The voltage signal U of lotus amplifier 5 outputfT () is：
C in formulafElectric capacity for charge amplifier 5；WhereinProduce under electric jamming for sensor piezoelectric ceramics 4 Total error voltage.
The driving voltage U to collection for the computer 7PT () carries out backward extension, obtain periodicity odd function U'P(t), wherein t =(0, when a), U'P(t)=UPT (), a is the boundary value of finite interval；To U'PT () carries out Fourier expansion, obtain UP(t) Expression formula：
In formula, b is Fourier coefficient, function fundamental frequency omega0=2 π/T, T are function cycle；
Choose UPT the sine voltage constituent of the expression formula medium and low frequency of (), obtains U2(t)：
In formula, β is sine voltage default frequency boundary value in low-frequency range；
Assume sine voltage constituent sin (the n ω of low frequency0T), n=1, during 2,3 ... β, charge amplifier 5 defeated Going out voltage is UnT (), then in driving voltage UPIn the presence of (t), the total error voltage U that sensor piezoelectric ceramics 4 obtainsC(t)：
Then under the effect of outer loading force F, the output voltage true value of generation is U to sensor piezoelectric ceramics 4f(t)-UC(t).
Draw through theory analysis, emulation and experiment, when drive voltage signal amplitude one timing, due to electricity in transducing signal The error that field interference brings quickly reduces with the increase of drive voltage signal frequency；When drive voltage signal frequency is certain When, the error brought due to electric jamming in transducing signal is linear with drive voltage signal amplitude.The present invention as Theoretical basiss, to driving voltage UPT () carries out Fourier expansion after, the radio-frequency component in Fourier expansion formula can be ignored, Only need to record in advance unit amplitude, in the range of certain frequency, that is, during sine voltage effect in low-frequency range, electric charge amplifies Device output voltage error it is possible to push away arbitrarily driving voltage effect when charge amplifier output voltage error, that is, the present invention is not Need to obtain infinite number of data in advance, tool has significant practical applications.
After present invention impact of the filtering method elimination electric jamming based on Fourier transformation in employing, by data operation External applied load signal F suffered by Piezoelectric Self-Sensing Actuator and output displacement Z can also be obtained, realize from perceptive function.
When piezoelectric ceramics uses as executor, it is under First Boundary Condition；When piezoelectric ceramics is as sensing When device uses, it is under third boundary condition.In the present invention, Piezoelectric Self-Sensing Actuator is operated in d33Under pattern, i.e. T3≠ 0, Tn=0 (n ≠ 3)；E3≠ 0, Ej=0 (j ≠ 3), then executor's part piezoelectric equations can be reduced to：
D in formula33Piezoelectric ceramics piezoelectric constant, subscript 33 represents Z-direction；
Dielectric constant when stress is constant, subscript 33 represents Z-direction；
D3Dielectric displacement, subscript 3 represents Z-direction；
T3Stress, subscript 3 represents Z-direction；
E3Electric field intensity, subscript 3 represents Z-direction；
S3Piezoelectric ceramics strains, and subscript 3 represents Z-direction；
Piezoelectric ceramics elastic compliant coefficient during electric field constant, subscript 33 represents Z-direction.
Sensor section piezoelectric equations can be reduced to：
In formulaFor dielectric displacement constant when elastic compliant coefficient, subscript 33 represent Z-direction.
Because displacement is exported by executor's part, now Piezoelectric Self-Sensing Actuator is under First Boundary Condition；Pressure Power is detected by Sensor section, and now Piezoelectric Self-Sensing Actuator is under third boundary condition, then piezoelectricity side in the present invention Journey is expressed as follows：
The form that in above formula, each variable can be expressed as：
D3=(QF+QC)/S,
E3=Up/ h,
T3=F/S,
S3=Z/m h；
Q in formulaFIt is the electric charge being produced due to pressure external load function Sensor section piezoelectric ceramics surface.
QCIt is the electric charge being produced due to electric jamming acting sensor part piezoelectric ceramics surface.
Piezoelectric stack is in the presence of driving power supply along longitudinal output power and displacement；Do not apply on sensor piezoelectric ceramics 4 Driving voltage UPT (), when there being external load function, due to direct piezoelectric effect, its surface can produce charge QF；When pressing to executor When electroceramics 3 applies driving voltage, electric jamming can be produced to sensor piezoelectric ceramics 4, in the presence of this electric jamming, pass Sensor piezoelectric ceramics 4 can produce charge QCIf, so directly calculate piezoelectricity with the voltage of charge amplifier 5 output holding from perception External applied load suffered by row device is inaccurate it is necessary to eliminate the impact to sensor piezoelectric ceramics for the electric jamming using filtering method. The present invention proposes filtering method based on Fourier transformation, and a certain periodic function can be expressed as by necessarily shaking by Fourier transformation Width, phase place, combination, the trigonometric function expansion of Fourier space and the Fourier coefficient of the substantially sinusoidal or cosine signal of frequency As follows：
For only in finite interval, for example (0, a) on function f (x) that is defined, the method for continuation can be adopted so as to Become certain periodic function g (x), (0, a) go up g (x) ≡ f (x), then Fourier expansion is made to g (x), its sum of series Interval (0, a) on represent f (x).If f (x) is that value on interval endpoint has restriction on border, that is, meet certain border Condition, generally determines and how to carry out continuation, such as, when f (0)=0, answer continuation to be strange periodic function, work as f'(0)=0 When, answer continuation to be even periodic function, and a drive voltage signal necessarily signal from the beginning of 0, in finite interval, also It is that say can be by after the periodic signal of drive voltage signal continuation Cheng Qi, a in such Fourier coefficiento、anBe 0 that is to say, that Can adopt the method for Fourier transformation that any drive voltage signal is expressed as the sine voltage signal of different amplitudes, frequency Superposition, and for frequency identical sinusoidal drive voltage signal, be in line between electric jamming and drive voltage signal amplitude Sexual intercourse, simultaneously because sensor piezoelectric ceramics is capacitive element, when being affected by electric jamming, embody is a charge and discharge The process of electricity, when driving voltage frequency becomes big, electric jamming change frequency also can become big so that sensor piezoelectric ceramics discharge and recharge Process does not catch up with the change of electric jamming, its by electric jamming affected rising with drive voltage signal frequency and drastically under Fall, so only need to consider that the relatively low constituent of Fourier expansion formula medium frequency is just permissible.As long as so recording unit width in advance Value, when the sine voltage in the range of certain frequency acts on, the output voltage error of charge amplifier 5 is it is possible to obtain arbitrarily Charge amplifier 5 output voltage error during driving voltage effect.Then deduct this error in charge amplifier 5 output voltage, The impact to Sensor section piezoelectric ceramics for the electric jamming that thus eliminating the need is it is achieved that filter action.
Obtaining U2T, after (), the data according to recording in advance and store can learn each sine voltage independent role When, charge amplifier 5 output voltage error, charge amplifier output voltage error superposition when each sine voltage is acted on, Driving voltage U just can be drawnPDuring (t) effect, charge amplifier output voltage error.This kind of filtering method records piezoelectricity first Self perception executor pressure external applied load F=0, driving voltage are amplitude 1V, and frequency is 0- β w0During the sine voltage of Hz, The output voltage of charge amplifier, the error that this voltage brings for electric jamming.In Uf(t)-UCElectricity is not comprised in the result of (t) The impact that field interference brings, has reached the purpose of filtering.Because this kind of filtering method is with Fourier transformation as theoretical basiss, therefore claim It is the filtering method based on Fourier transformation.
As shown in figure 5, after adopting based on the filtering method of Fourier transformation, computer can obtainSimultaneously drive Voltage UPT () is to understand or measurable, then the expression-form of Piezoelectric Self-Sensing Actuator piezoelectric equations and each parameter is carried out Computing can obtain external applied load F suffered by Piezoelectric Self-Sensing Actuator and output displacement Z is as follows：
Piezoelectric ceramics free dielectric isolation rate coefficient, subscript 33 represents Z-direction；
g33Piezoelectric ceramics piezoelectric voltage constant, subscript 33 represents Z-direction；
The number of plies of m executor's piezoelectric ceramics；
H executor makes the thickness of piezoelectric ceramics；
The upper strata of S executor's piezoelectric ceramics or underlying surfaces area.
In above formula, d33、g33、M, h, S are determined by piezoceramic material itself, when piezoceramic material determines When, they also determine accordingly, the external applied load signal F that the present invention finally can be represented in a computer in the form of voltage, And output displacement signal Z is it is achieved that from perceptive function, the collection of signal, Fourier transformation, the computing of data all can utilize Software in computer completes.
In Fig. 6, multi-disc executor's piezoelectric ceramics 3 to be powered by the way of electrical series, and this kind of mode driving voltage is more Greatly, other analyses are identical when being powered using electrical parallel with the piezoelectric ceramics using as executor.

Claims (4)

1. a kind of Piezoelectric Self-Sensing Actuator is it is characterised in that it includes three insulating barriers (2), multi-disc executor's piezoelectric ceramics (3) and sensor piezoelectric ceramics (4),
Multi-disc executor's piezoelectric ceramics (3) using mechanically series connection, electrically parallel connection by the way of constitute piezoelectric stack, this piezo stack A piece of insulating barrier (2) is respectively provided with heap upper and lower surface, sensor piezoelectric ceramics (4) is arranged on piezoelectric stack upper surface Insulating barrier (2) on, the upper surface of sensor piezoelectric ceramics (4) arranges a piece of insulating barrier (2).
2. a kind of filtering method of Piezoelectric Self-Sensing Actuator electric jamming, this filtering method is applied to pressure described in claim 1 Electric self perception executor it is characterised in that
Driving voltage U is applied to described piezoelectric stackPT (), simultaneously to applying external applied load power above sensor piezoelectric ceramics (4) F；
Described filtering method is：Gather the output charge of sensor piezoelectric ceramics (4) using charge amplifier (5), electric charge amplifies The charge signal of collection is converted to voltage signal output by device (5)；Driving voltage U is gathered using computer (7)P(t)；
Computer (7) is by driving voltage UPT () carries out Fourier expansion, form the sine voltage superposition of different amplitudes, frequency, Calculate sensor piezoelectric ceramics (4) respectively and be subject to external applied load power F=0, each sine voltage is separately as the drive of piezoelectric stack During galvanic electricity pressure, the error voltage that sensor piezoelectric ceramics (4) produces, all error voltages are superimposed and obtain driving voltage UP(t) As piezoelectric stack driving voltage when, the total error voltage that sensor piezoelectric ceramics (4) produces；Will be defeated for charge amplifier (5) The voltage signal going out deducts described total error voltage, and it is defeated that acquisition sensor piezoelectric ceramics (4) obtains when outer loading force F acts on Go out voltage true value, realize the filtering to Piezoelectric Self-Sensing Actuator electric jamming.
3. the filtering method of Piezoelectric Self-Sensing Actuator electric jamming according to claim 2 is it is characterised in that sensor Piezoelectric ceramics (4) is in outer loading force F and driving voltage UPUnder the collective effect of t electric jamming that () produces, the electric charge of generation is QF +QC, QFFor the lower electric charge producing of external applied load power F effect, QCThe electric charge producing for electric jamming；Now charge amplifier (5) output Voltage signal UfT () is：
U f ( t ) = - Q F + Q C C f ,
C in formulafElectric capacity for charge amplifier (5)；WhereinProduce under electric jamming for sensor piezoelectric ceramics (4) Total error voltage.
4. the filtering method of Piezoelectric Self-Sensing Actuator electric jamming according to claim 3 is it is characterised in that computer (7) the driving voltage U to collectionPT () carries out backward extension, obtain periodicity odd function U'P(t), wherein t=(0, when a), U'P (t)=UPT (), a is the boundary value of finite interval；To U'PT () carries out Fourier expansion, obtain UPThe expression formula of (t)：
U P ( t ) = Σ n = 1 ∞ b n s i n ( nω 0 t ) ,
B in formulanFor Fourier coefficient, function fundamental frequency omega0=2 π/T, T are function cycle；
Choose UPT the sine voltage constituent of the expression formula medium and low frequency of (), obtains U2(t)：
U 2 ( t ) = Σ n = 1 β b n s i n ( nω 0 t ) ≈ U P ( t ) ,
In formula, β is sine voltage default frequency boundary value in low-frequency range；
Assume sine voltage constituent sin (the n ω of low frequency0T), n=1, during 2,3 ... β, the output electricity of charge amplifier (5) Press as UnT (), then in driving voltage UPIn the presence of (t), the total error voltage U that sensor piezoelectric ceramics (4) obtainsC(t)：
U C ( t ) = Σ n = 1 β b n U n ( t ) , n = ( 1 , 2 , 3 ... , β ) ,
Then under the effect of outer loading force F, the output voltage true value of generation is U to sensor piezoelectric ceramics (4)f(t)-UC(t).
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CN107834892A (en) * 2017-09-27 2018-03-23 哈尔滨工业大学 A kind of piezoelectric stack sensing actuator of resonant mode sensing
CN110715017A (en) * 2019-08-01 2020-01-21 江苏联能电子技术有限公司 Piezoelectric actuator

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CN1659719A (en) * 2002-06-07 2005-08-24 Pi陶瓷技术及元件有限公司 Method for the production of a monolithic multilayer actuator, monolithic multilayer actuator made of a piezoceramics or electrostrictive material, and external electrical contact for a monolithic mul
CN101097165A (en) * 2007-02-09 2008-01-02 大连理工大学 Time division multiplexing decoupling method for realizing self perception executor and control system
JP2010103315A (en) * 2008-10-23 2010-05-06 Denso Corp Piezoelectric actuator and fuel injection valve using the same

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Publication number Priority date Publication date Assignee Title
CN1659719A (en) * 2002-06-07 2005-08-24 Pi陶瓷技术及元件有限公司 Method for the production of a monolithic multilayer actuator, monolithic multilayer actuator made of a piezoceramics or electrostrictive material, and external electrical contact for a monolithic mul
CN1570544A (en) * 2004-04-29 2005-01-26 大连理工大学 Space division multiplexing decoupling method for realizing piezoelectric self-sensing actuator
CN101097165A (en) * 2007-02-09 2008-01-02 大连理工大学 Time division multiplexing decoupling method for realizing self perception executor and control system
JP2010103315A (en) * 2008-10-23 2010-05-06 Denso Corp Piezoelectric actuator and fuel injection valve using the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107834892A (en) * 2017-09-27 2018-03-23 哈尔滨工业大学 A kind of piezoelectric stack sensing actuator of resonant mode sensing
CN107834892B (en) * 2017-09-27 2019-08-06 哈尔滨工业大学 A kind of piezoelectric stack sensing actuator of resonant mode sensing
CN110715017A (en) * 2019-08-01 2020-01-21 江苏联能电子技术有限公司 Piezoelectric actuator

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